CN103868471B - 三维形状测量装置及其控制方法 - Google Patents

三维形状测量装置及其控制方法 Download PDF

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Publication number
CN103868471B
CN103868471B CN201310674771.4A CN201310674771A CN103868471B CN 103868471 B CN103868471 B CN 103868471B CN 201310674771 A CN201310674771 A CN 201310674771A CN 103868471 B CN103868471 B CN 103868471B
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CN
China
Prior art keywords
pattern
image
light
unit
image capture
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Expired - Fee Related
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CN201310674771.4A
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English (en)
Chinese (zh)
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CN103868471A (zh
Inventor
露木智美
安藤利典
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Canon Inc
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Canon Inc
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Publication of CN103868471A publication Critical patent/CN103868471A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2531—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings, projected with variable angle of incidence on the object, and one detection device
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70—Circuitry for compensating brightness variation in the scene
    • H04N23/73—Circuitry for compensating brightness variation in the scene by influencing the exposure time

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201310674771.4A 2012-12-12 2013-12-11 三维形状测量装置及其控制方法 Expired - Fee Related CN103868471B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012271775A JP6161276B2 (ja) 2012-12-12 2012-12-12 測定装置、測定方法、及びプログラム
JP2012-271775 2012-12-12

Publications (2)

Publication Number Publication Date
CN103868471A CN103868471A (zh) 2014-06-18
CN103868471B true CN103868471B (zh) 2018-07-03

Family

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CN201310674771.4A Expired - Fee Related CN103868471B (zh) 2012-12-12 2013-12-11 三维形状测量装置及其控制方法

Country Status (4)

Country Link
US (2) US10066934B2 (enExample)
EP (1) EP2743636A1 (enExample)
JP (1) JP6161276B2 (enExample)
CN (1) CN103868471B (enExample)

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US10032279B2 (en) 2015-02-23 2018-07-24 Canon Kabushiki Kaisha Information processing apparatus, information processing method, and storage medium
JP2016194607A (ja) * 2015-03-31 2016-11-17 キヤノン株式会社 保持装置、投影装置、計測装置及び保持方法
JP2017003469A (ja) * 2015-06-11 2017-01-05 キヤノン株式会社 三次元計測装置、三次元計測装置の制御方法及びプログラム
KR101842141B1 (ko) * 2016-05-13 2018-03-26 (주)칼리온 3차원 스캐닝 장치 및 방법
CN108616727A (zh) * 2016-12-23 2018-10-02 光宝电子(广州)有限公司 基于结构光的曝光控制方法及曝光控制装置
JP6658625B2 (ja) * 2017-03-08 2020-03-04 オムロン株式会社 ３次元形状計測装置及び３次元形状計測方法
WO2019135069A1 (en) * 2018-01-02 2019-07-11 King's College London Method and system for localisation microscopy
DE112018008035T5 (de) * 2018-09-27 2021-06-24 Yamaha Hatsudoki Kabushiki Kaisha Dreidimensionale Messvorrichtung
US11255785B2 (en) * 2019-03-14 2022-02-22 Applied Materials, Inc. Identifying fiducial markers in fluorescence microscope images
WO2020186029A1 (en) 2019-03-14 2020-09-17 Applied Materials, Inc. Identifying fiducial markers in microscope images
WO2023190056A1 (ja) * 2022-03-30 2023-10-05 パナソニックＩｐマネジメント株式会社 視差情報生成装置及び視差情報生成方法
CN116817743A (zh) * 2023-04-25 2023-09-29 思看科技(杭州)股份有限公司 用于跟踪测量系统的跟踪方法、跟踪系统和跟踪装置

Citations (1)

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JP5986357B2 (ja) 2011-07-08 2016-09-06 キヤノン株式会社 三次元計測装置、三次元計測装置の制御方法、およびプログラム
JP5918984B2 (ja) 2011-12-06 2016-05-18 キヤノン株式会社 情報処理装置、情報処理装置の制御方法、およびプログラム
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US6503195B1 (en) * 1999-05-24 2003-01-07 University Of North Carolina At Chapel Hill Methods and systems for real-time structured light depth extraction and endoscope using real-time structured light depth extraction

Also Published As

Publication number Publication date
US10066934B2 (en) 2018-09-04
CN103868471A (zh) 2014-06-18
JP6161276B2 (ja) 2017-07-12
US20140160243A1 (en) 2014-06-12
EP2743636A1 (en) 2014-06-18
US20180335298A1 (en) 2018-11-22
JP2014115264A (ja) 2014-06-26

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