CN103841741B - Atmospheric pressure plasma generator based on dielectric barrier discharge - Google Patents
Atmospheric pressure plasma generator based on dielectric barrier discharge Download PDFInfo
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- CN103841741B CN103841741B CN201410090979.6A CN201410090979A CN103841741B CN 103841741 B CN103841741 B CN 103841741B CN 201410090979 A CN201410090979 A CN 201410090979A CN 103841741 B CN103841741 B CN 103841741B
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Abstract
A kind of atmospheric pressure plasma generator based on dielectric barrier discharge, its main discharge unit includes upper and lower plate electrode (1), the air gap formed between plating media barrier layer (4) and flat board dielectric barrier.Plate electrode (1) is positioned at the two ends up and down of plasma producing apparatus, and two pieces of plating media barrier layers (4) are positioned between upper and lower plate electrode (1), are closely affixed with upper and lower plate electrode (1) respectively.Being supported by insulation support body (5) between two pieces of plating media barrier layers (4), the inter-air space between two pieces of plating media barrier layers (4) is main discharge region, and assistant discharge unit is positioned in main discharge region.Assistant discharge unit includes 4～12 coaxial electrodes (3), and coaxial electrode (3) is the coaxial configuration of insulating barrier parcel copper core.Coaxial electrode (3) parallel equidistant it is arranged between upper and lower two pieces of plating media barrier layers (4), coaxial electrode (3) and two plating media barrier layer (4) close proximity.
Description
Technical field
The present invention relates to a kind of based on dielectric barrier discharge, and the atmos low-temperature plasma improving plasma generation efficiency is sent out
Generating apparatus.
Background technology
In recent years, low temperature plasma is at the process of waste gas waste water, biomedical, macromolecule material surface modification and igniting combustion supporting etc.
Domain requirement is extensive.Gas discharge is one of effective means producing plasma, and common gas discharge form mainly has aura
Electric discharge, corona discharge and dielectric barrier discharge etc..Wherein dielectric barrier discharge is a kind of gas having dielectric to insert discharge space
Body discharge type, the discharge channel running through two electrodes is stopped by the dielectric in air gap, thus produce in the channel large area,
The low temperature plasma of high-energy-density.Owing to air pressure conditions is required relatively low by it, it is possible to produce big under room temperature atmospheric pressure
Area, the low temperature nonequilibrium plasma of high-energy-density, and without vacuum equipment, be subject to since late 1980s
The extensive concern of research worker both at home and abroad.It is the key parameter in application that dielectric barrier discharge produces plasma efficiency, improves low
The generation efficiency of isothermal plasma has directly impact to reality application.Typically, there is relatively higher ion generation efficiency
Dielectric barrier discharge can improve the physical-chemical reaction efficiency of actual application plasma.Although laboratory research can be passed through
Some means improve the physical-chemical reaction efficiency of plasma, but these methods are less mainly for area in laboratory research
Dielectric barrier discharge structure.Therefore, improve effective machining area, increase plasma generation efficiency and have the most wide undoubtedly
Application prospect.Additionally, dielectric barrier discharge generator can generate heat in actual applications, consume partial power to a certain extent
Energy, the energy decreasing the dielectric barrier discharge for producing low temperature plasma supplies, and also can reduce plasma and produce effect
Rate.Therefore, it is necessary to the design of optimized medium barrier discharge plasma generator, improve plasma generation efficiency.
The main method being currently used for improving discharge plasma generation efficiency includes: use air-flow (such as patent CN201830541U
" combination type dielectric barrier discharge plasma reaction unit ", by plasma generator, gas distributing system and high pressure system
The mode of system combination, improves the integrated horizontal of device), auxiliary ionization (as patent CN201752624U " a kind of magnetic field is strong
Change dielectric barrier discharge plasma and work in coordination with air processor ", utilize induction coil to dielectric barrier discharge plasma region
Interior charged particles, improves Cement Composite Treated by Plasma energy utilization efficiency), preionization is (such as " being situated between of patent CN102448239A
Matter barrier discharge enhanced low-temperature temperature plasma brush generation device " use set between air inlet port and the position of main discharge electrode
Put the plate electrode that working gas is carried out preionization, reduce firing potential, reduce energy loss thus extend master
Sparking electrode and the service life of current-limiting resistance).
In a word, the most effectively improving plasma generation efficiency in unit volume, reducing cost is that actual application must solve
One problem.Although current patent increases on plasma generation efficiency, but its generating means is complicated, it is impossible to protecting
Card generating means improves the generation efficiency of plasma the most simultaneously.
Summary of the invention
It is an object of the invention to overcome prior art to produce plasma efficiency relatively low, electrode heating consumes lacking of more voltage power
Point, proposes a kind of plasma producing apparatus based on dielectric barrier discharge.Compared to other atmospheric pressure plasma generator,
The present invention has simple in construction, with low cost, it is not necessary to vacuum system just can produce the features such as atmos low-temperature plasma,
And owing to have employed combined type discharging electrode structure, effectively increase the generation efficiency of plasma in unit volume.Additionally,
Owing to general dielectric barrier discharge unit is frequently with Flat electrode structure, it is little to there is region of discharge in these electrodes, and electrode generates heat
Seriously, the shortcomings such as capacity usage ratio is relatively low, when producing large area discharge according to multi-group power, to the requirement controlled between power supply
Height is the highest.The present invention can strengthen the preionization of reactor air gap, improves strength of discharge, reduces electrode heating, improves energy
Utilization rate, can be applicable to ozonator, offal treatment etc..
Plasma producing apparatus of the present invention includes main discharge unit and assistant discharge unit.
Described main discharge unit includes upper and lower plate electrode, between two pieces of plating media barrier layers and plating media barrier layer
The air gap formed.Two pieces of plating media barrier layers fit tightly with plate electrode respectively.Described plate electrode is positioned at plasma
The two ends up and down of generating means, two pieces of plating media barrier layers are between upper and lower plate electrode, respectively with upper and lower flat board electricity
The most closely it is affixed.By dielectric support between two pieces of plating media barrier layers, form air gap.Between two pieces of plating media barrier layers
The inter-air space forms main discharge region, and air gap distance is advisable can produce stable dielectric barrier discharge, the scope of air gap distance
It is 3～8mm.
Described assistant discharge unit is positioned in main discharge region, and assistant discharge unit includes 4～12 coaxial electrodes, this electrode
Using the coaxial configuration of insulating barrier parcel copper core, the diameter of coaxial electrode is equal with main discharge unit size of gaps, and coaxial electrode is put down
Row is arranged equally spaced between upper and lower two pieces of plating media barrier layers, and coaxial electrode and two plating media barrier layers are closely affixed.
Main discharge unit and assistant discharge unit are respectively adopted the driving power supply of two platform independent and power, and wherein one drives the defeated of power supply
Ru Duanyu city is electrically connected, and this drives two outfans plate electrode with main discharge unit respectively of power supply to be connected.Another drives
The input of power supply is electrically connected with city, and this drives two outfans of power supply to draw some offsets, wherein an outfan respectively
Drawing branch to be connected with the copper core of the coaxial electrode of the 1st, 3,5 odd number root such as grade in assistant discharge unit, branch drawn by another outfan
It is connected with the copper core of the coaxial electrode of the 2,4,6th position such as even number such as grade in assistant discharge unit.The driving power supply used can be distinguished
For high-voltage ac power or high-voltage pulse power source.
Additionally, in order to avoid plate electrode heating is serious, damage plating media barrier material, the plate electrode of main discharge unit
Edge is provided with water circulation conduit, and water circulation conduit is connected with the edge of plate electrode, is used for being passed through recirculated cooling water.Water circulation is led
Pipe is provided with two exits, and the two exit input with water delivery side of pump and water tank respectively is connected.The output of water tank
End is connected with the input of water pump.Collectively form hydrologic cycle cooling system, dispel the heat for plate electrode.
The upper lower plate electrode of described main discharge unit selects metal material, can be copper, aluminum or rustless steel etc..Plate electrode is
Square, the length of side is 50mm, and thickness is 0.5mm.Plating media barrier layer uses insulant, such as lucite, ring
Oxygen, silicone rubber or politef etc., be similarly square, and the length of side is 54mm, and plating media barrier layer thickness is 1mm.
Between upper and lower plating media barrier layer, air gap is 5mm.The material of main discharge unit both sides insulation support body can be epoxy,
Politef, pottery, lucite or nylon etc..Coaxial electrode in the assistant discharge unit copper of a diameter of 1mm is led
Line is made, and copper conductor outer wrapping thickness is the insulating barrier of 2mm, and the material of insulating barrier can be selected for epoxy, silicone rubber or polytetrafluoro
Ethylene dielectric.Adjacent auxiliary electrode center distance determines according to auxiliary electrode quantity, the spacing of two adjacent copper core electrodes
Minimum 4mm, the quantity of auxiliary electrode can be arranged in 4～12 as required, it is proposed that is set to 6 during use, by putting down
Plate electrode center equal proportion is to arranged on both sides.It is blown into air at electrode unencapsulated side air compressor, increases gas
Mobility, improve the uniformity of plasma and avoid because plasma produces the spark discharge that inequality causes.Master when suggestion uses
Discharge cell uses high-voltage ac power to drive, and assistant discharge unit uses the pulse power to drive.Drive the polarity of power supply, amplitude
And frequency-adjustable, it is simple to choose suitable discharge parameter, obtain producing the optimal conditions of plasma.
Compared with existing plasma producing apparatus, present invention have the advantage that
(1) plasma generation efficiency is high.Owing to using bipolar electrode structure, main discharge unit (plate dielectric barrier discharge)
Electric discharge all can be produced with assistant discharge unit (coaxial type dielectric barrier discharge).Assistant discharge unit preionization main discharge unit
Air gap, makes the plasma concentration between discharging gap increase, and plasma is blown out by recycling air compressor, it is thus achieved that put uniformly
Electricity.Circulation continuously, the efficiency that plasma produces is greatly improved.
(2) hydrologic cycle cooling system is taken, beneficially the heat radiation of main discharge unit middle plateform electrode；Use air compressor
Blowout, the beneficially heat radiation of assistant discharge unit.Two parts heat radiation reduces the energy of consumption of electrode, adds discharge cell
Service life.
Accompanying drawing explanation
Fig. 1 is the structural representation of apparatus of the present invention；
Fig. 2 is the 3-D view of apparatus of the present invention；
Wherein, 1 plate electrode, 2 plating media barrier layers, 3 coaxial electrodes, 4 coaxial dielectric barrier layers, 5 insulation support bodies,
6 main discharge unit drive power supply, 7 assistant discharge units to drive power supply, 8 water circulation conduits, 9 water pumps, 10 water tanks, and 11 is empty
Air compressor.
Detailed description of the invention
Assembly of the invention structural representation as it is shown in figure 1, the 3-D view of correspondence as shown in Figure 2.The present invention hinders based on medium
The plasma producing apparatus of gear electric discharge includes main discharge unit and assistant discharge unit.
Described main discharge unit includes 1, two pieces of plating media barrier layers 4 of upper and lower plate electrode and plating media barrier layer
Between formed air gap.Two pieces of plating media barrier layers 4 fit tightly with upper and lower two plate electrodes 1 respectively.Described is flat
Plate electrode 1 is positioned at the two ends up and down of plasma producing apparatus, and two pieces of plating media barrier layers 4 are positioned at upper and lower plate electrode 1
Between, closely it is affixed with upper and lower plate electrode 1 respectively.Supported by insulation support body 5 between two pieces of plating media barrier layers,
Form air gap.Between two pieces of plating media barrier layers 4, the inter-air space forms main discharge region.
Described assistant discharge unit is positioned in main discharge region.Assistant discharge unit includes 4～12 coaxial electrodes 3, this electricity
Pole uses the coaxial configuration of insulating barrier parcel copper core, and the diameter of coaxial electrode 3 is equal with the size of gaps of main discharge unit, coaxially
Being arranged in electrode 3 parallel equidistant between upper and lower two pieces of plating media barrier layers 4, coaxial electrode 3 and two plating media stop
Layer 4 is closely affixed.Coaxial electrode 3 is wrapped with coaxial dielectric barrier layer 2, coaxial dielectric barrier layer 2 and the resistance of two plating media
Barrier 4 is closely affixed.
Main discharge unit drives two outfans of power supply 6 to connect plate electrode and lower plate electrode respectively, is used for applying main driving
Pulse voltage.Assistant discharge unit drives two outfans of power supply 7 to draw some offsets respectively, and wherein an outfan draws
Going out branch to be connected with the copper core of the coaxial electrode 3 of the 1st, 3,5 odd number in assistant discharge unit, another outfan draws branch with auxiliary
The copper core of the coaxial electrode 3 of the 2,4,6th even number position in discharge cell is helped to be connected.Upper flat plate electrode and lower plate electrode surrounding
Edge is respectively and fixedly provided with the water circulation conduit 8 for heat radiation, and the exit 12 of water circulation conduit 8 is connected with the input of water pump 9,
The outfan of water pump 9 is connected with the water inlet of water tank 10, exit 13 phase of the outlet of water tank 10 and water circulation conduit 8
Even, water cycle cooling system is integrally formed.Air compressor 11 gas outlet connects main discharge unit side, is used for being blown into air,
Auxiliary produces homogeneous plasma, prevents spark discharge from producing.
Discharge air-gap between two pieces of plating media barrier layers 4 is 5mm, and the quantity of coaxial electrode 3 is 4～12, accesses same
It is corresponding with the outfan driving power supply that the quantity of axial electrode should be even number, the minimum 4mm of center distance between adjacent electrode.
Main discharge unit drives power supply 6 to power to plate electrode 1, and assistant discharge unit drives power supply 7 to power to coaxial electrode 3, and
The two poles of the earth of voltage are arranged respectively on adjacent coaxial electrode, cross-distribution, such as first coaxial electrode and the high-field electrode of power supply
Connected then second coaxial electrode is connected with the negative electrode of power supply, and the 3rd coaxial electrode is connected with the high-field electrode of power supply with this type of
Push away.It is vertical that the direction that gas is passed through produces direction of an electric field with main discharge, utilizes air compressor 11 to blow from the side of discharging gap
Enter, when main discharge unit drives power supply 6 and assistant discharge unit to drive power supply 7 to supply with coaxial electrode 3 to plate electrode 1 respectively
During electricity, the gas of whole discharge space will be ionized, and produces a large amount of plasma.Now air compressor 11 is by generation
Plasma blows out from opposite side, and the gas flow rate of air compressor, the driving polarity of power supply, amplitude and frequency can regulate.
Plate electrode 1 plays a major role, and undertakes high voltage.Coaxial electrode helps out.When electric discharge, plate electrode 1 can generate heat,
Carried watering cycle by water pump 9 to water circulation conduit 8 to cool down through water tank 10, dispel the heat for plate electrode 1, it is ensured that electrode can long time
Between use.
The work process of the present invention is as follows: determines the quantity of coaxial electrode before operation and combines plasma producing apparatus.Run
Time, first turn on water circulating pump 9, it is ensured that water circulation conduit 8 normal operation.Then air compressor 11 is opened, it is ensured that flat board
2 air gaps of dielectric barrier have air-flow to pass through.Then starting assistant discharge unit and drive power supply 6, regulating power source voltage is to auxiliary
Discharge plasma produces, and finally starts main discharge unit and drives power supply 7, generation etc. in regulating power source voltage to main discharge region
Gas ions.
The plasma producing apparatus based on dielectric barrier discharge that the present invention provides can be used for producing atmos low-temperature expeditiously
Plasma.This invention can be widely applied to the mechanism such as scientific research and enterprise, and the atmos low-temperature plasma of generation can be used for ozone
Generator and offal treatment.
Claims (3)
1. an atmospheric pressure plasma generator based on dielectric barrier discharge, it is characterised in that described plasma
Generating means includes main discharge unit and assistant discharge unit；Described main discharge unit include upper and lower plate electrode (1), two
Block plating media barrier layer (4), and the air gap formed between plating media barrier layer；Described plate electrode (1) is positioned at
The two ends up and down of described plasma producing apparatus, two pieces of plating media barrier layers (4) lay respectively at upper and lower plate electrode (1)
Between, closely it is affixed with upper and lower plate electrode (1) respectively；By insulation support body between two pieces of plating media barrier layers (4)
(5) support, form air gap between two pieces of plating media barrier layers (4), between described two pieces of plating media barrier layers (4)
The inter-air space formed main discharge region；Described assistant discharge unit is positioned in main discharge region；Assistant discharge unit includes
4～12 coaxial electrodes (3), coaxial electrode (3) uses the coaxial configuration of insulating barrier parcel copper core；Coaxial electrode (3) is put down
Row is arranged equally spaced between upper and lower two pieces of plating media barrier layers (4), coaxial electrode (3) and two plating media barrier layers
(4) close proximity；
The edge of upper and lower plate electrode (1) surrounding is respectively and fixedly provided with the water circulation conduit (8) for heat radiation, water circulation conduit (8)
Exit A (12) be connected with the input of water pump (9), the outfan of water pump (9) is connected with the water inlet of water tank (10),
The outlet of water tank (10) is connected with the exit B (13) of water circulation conduit (8), forms water cycle cooling system；
The material of the upper and lower plate electrode (1) of described main discharge unit uses copper, aluminum or rustless steel, two pieces of plating media resistances
The material of barrier (4) uses lucite, epoxy, silicone rubber or politef, and described upper and lower plate electrode (1) is
Square, the length of side is 50mm, and thickness is 0.5mm, and described two pieces of plating media barrier layers (4) are also square, limit
A length of 54mm, thickness is 1mm；Between two pieces of plating media barrier layers (4), air gap is 5mm；Described insulation support body (5)
Material be epoxy, politef, pottery, lucite or nylon；Described coaxial electrode (3) uses a diameter of 1mm
Copper conductor make, described copper conductor outer wrapping thickness is the insulating barrier of 2mm, the material selection epoxy of described insulating barrier, silicon
Rubber or teflon insulation medium；The minimum 4mm of spacing of two adjacent coaxial electrodes (3)；
Main discharge unit uses high-voltage ac power to drive, and assistant discharge unit uses the pulse power to drive；
The gas outlet of air compressor (11) connects main discharge unit side.
Atmospheric pressure plasma generator based on dielectric barrier discharge the most according to claim 1, it is characterised in that
The diameter of described coaxial electrode (3) is equal with the size of gaps of main discharge unit, and coaxial electrode (3) is wrapped with coaxial Jie
Matter barrier layer.
Atmospheric pressure plasma generator based on dielectric barrier discharge the most according to claim 1, it is characterised in that
Main discharge unit drives two outfans of power supply (6) to connect plate electrode and lower plate electrode respectively, is used for applying main driving
Pulse voltage；Assistant discharge unit drives two outfans of power supply (7) to draw some offsets, wherein an output respectively
End is drawn branch and is connected with the copper core of the coaxial electrode (3) of the 1st, 3,5 odd number in assistant discharge unit, and another outfan is drawn
Branch is connected with the copper core of the coaxial electrode (3) of the 2,4,6th even number position in assistant discharge unit.
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| CN104066264B (en) * | 2014-06-18 | 2017-01-25 | 大连理工大学 | Direct-current self-excited pulse large-area high-air-pressure creepage discharge generation device |
| CN104202897B (en) * | 2014-09-02 | 2017-01-11 | 中国工程物理研究院流体物理研究所 | DBD (Dielectric Barrier Discharge) low temperature plasma generating device and polymer film surface treatment method |
| JP2016225025A (en) * | 2015-05-27 | 2016-12-28 | シャープ株式会社 | Plasma generation element |
| CN105153441B (en) * | 2015-09-11 | 2017-09-12 | 中国科学院电工研究所 | It is a kind of to accelerate the method that epoxide resin material surface charge dissipates |
| CN106793435A (en) * | 2016-11-30 | 2017-05-31 | 沙利斌 | A kind of arc discharge plasma generating device for industrial waste gas treatment |
| CN108260269A (en) * | 2017-12-25 | 2018-07-06 | 罗璐 | Low temperature plasma generating device and gas handling system |
| CN107979907B (en) * | 2017-12-26 | 2024-04-05 | 中国科学院西安光学精密机械研究所 | Atmospheric pressure dielectric barrier discharge enhanced DC alternating electrode low-temperature plasma jet array |
| CN108303390A (en) * | 2018-01-19 | 2018-07-20 | 河海大学常州校区 | Volume dielectric barrier discharge oxide generates and formaldehyde removing device |
| CN108408843B (en) * | 2018-03-14 | 2021-06-01 | 大连民族大学 | Plasma activated water generating device |
| CN109345927A (en) * | 2018-11-23 | 2019-02-15 | 北京理工大学 | A kind of device for realizing gas discharge homogenization using extra electric field |
| CN112543543A (en) * | 2019-09-20 | 2021-03-23 | 中国石油化工股份有限公司 | Plasma discharge device |
| CN112738967B (en) * | 2020-12-28 | 2023-10-20 | 苏州爱特维电子科技有限公司 | Large-area dielectric barrier plasma discharge electrode plate combination |
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| JPH10114505A (en) * | 1996-10-09 | 1998-05-06 | Meidensha Corp | Ozonizer |
| CN1075676C (en) * | 1996-12-16 | 2001-11-28 | 戴建国 | HF-assisted LF medium blocking-discharge method and equipment |
| EP1073091A3 (en) * | 1999-07-27 | 2004-10-06 | Matsushita Electric Works, Ltd. | Electrode for plasma generation, plasma treatment apparatus using the electrode, and plasma treatment with the apparatus |
| US7615931B2 (en) * | 2005-05-02 | 2009-11-10 | International Technology Center | Pulsed dielectric barrier discharge |
| US8172547B2 (en) * | 2008-01-31 | 2012-05-08 | The Boeing Company | Dielectric barrier discharge pump apparatus and method |
| CN101835339B (en) * | 2010-05-20 | 2012-05-23 | 大连理工大学 | Panel electrode radio-frequency capacitance coupling argon-oxygen/argon-nitrogen plasma generator under constant pressure |
| CN102036460B (en) * | 2010-12-10 | 2013-01-02 | 西安交通大学 | Tabulate plasma generating device |
| CN102448239B (en) * | 2012-01-10 | 2013-06-05 | 中国科学院西安光学精密机械研究所 | Dielectric barrier discharge enhanced-type low-temperature plasma brush generation device |
| CN103533733B (en) * | 2013-10-17 | 2016-06-08 | 中国科学院西安光学精密机械研究所 | The magnetic-field-enhanced low-temperature plasma brush generator of normal atmosphere |
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