CN103822971A - Resolution detecting and calibrating method for ultrasonic microscope - Google Patents
Resolution detecting and calibrating method for ultrasonic microscope Download PDFInfo
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- CN103822971A CN103822971A CN201410079667.5A CN201410079667A CN103822971A CN 103822971 A CN103822971 A CN 103822971A CN 201410079667 A CN201410079667 A CN 201410079667A CN 103822971 A CN103822971 A CN 103822971A
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Abstract
The invention belongs to the technical field of ultrasonic non-destructive detection, and relates to a resolution detecting and calibrating method for an ultrasonic microscope, which can be used for verifying transverse defect detection capability and longitudinal defect detection capability of an ultrasonic detection system, and enable the detection to be more accurate through calibrating a detection result of the ultrasonic microscope. The method comprises the following steps: etching a series of micron-size holes in the upper surface of an optical sheet glass through the laser micro-nano technology, wherein the dimension of the least micron-size hole that can be identified by ultrasonic micro imaging is the transverse detecting resolution; realizing transverse calibration by calculating a pixel compensation value through ultrasonic microscopic measurement for the longitudinal section of a standard gauge block; designing a glass wedge block sample and measuring the thickness with an acoustic time method, wherein the thickness of the thinnest water layer measured is the longitudinal detecting resolution; realizing longitudinal calibration by obtaining a linear fitting equation through analyzing a measured value and a theoretical calculating value. The method is simple to operate, is easy to realize, solves the problem of objective evaluation on ultrasonic defect detection capability, and enables the detection result of the ultrasonic microscope to be more reliable.
Description
One, technical field
The invention belongs to Ultrasonic Detection field, relate to a kind of resolution test and calibration steps of ultrasonic microscope, be applicable to ultrasonic micro-and Ultrasonic C-Scan detection.
Two, background technology
Ultrasonic microscope is a kind of novel nondestructive detecting instrument, it utilizes high frequency concentration ultrasonic to carry out Non-Destructive Testing to object, can carry out high precision, highly sensitive detection to interior of articles and sub-surface structure, the micron that observable exists within the scope of from top layer to tens of mm depths is to hundred micro-meter scale structures, ultrasonic micro-detection has the features such as high sensitivity, high resolving power and image be directly perceived, has been widely used at present the fields such as electronics industry, medical science, material science.
Choosing of high frequency focused transducer has very important impact to ultrasonic micro-detection effect, its main performance index has centre frequency, focal length, burnt district beam width etc., for ultrasonic microscan imaging, burnt district beam width is less, the image scanning is more clear, and transverse resolution is higher.In general, frequency is higher, and burnt district beam width is narrower, and laterally imaging precision is higher, therefore, in the time of ultrasonic micro-detection, generally wishes that the frequency of transducer used is more high better.But in the time that the frequency of transducer improves, the decay meeting of the sound intensity increases rapidly, its penetration capacity can sharply decline, and general frequency is higher, and its signal to noise ratio (S/N ratio) is poorer, echoed signal is often buried in noise signal, and the image of scanning on the contrary can be because the increase of noise thickens.Simultaneously concerning ultrasonic scanning microscopic examination, axial resolution is also the important indicator that needs are considered, for obtaining higher axial resolution, require the duration of pulse short, therefore ultrasonic micro measurement system often adopts burst pulse, and transducer used is generally wide-band transducer, and system is set to high frequency, high damping mode.
The detection resolving power of ultrasonic microscope is an important indicator describing its detection performance, international also fewer about the research of ultrasonic micro-detection resolving power.By carrying out patent consulting at all places database, Chinese utility model patent CN201120393472.X provides a kind of layer target for testing vertical solution for ophthalmology, for testing the along track resolution of ophthalmology ultrasonic device, but it needs the micron order metal forming of a series of different-thickness, comparatively difficulty of sample preparation.Therefore people wish by a kind of simple method of testing, the detection performance of ultrasonic microscope to be assessed.
Three, summary of the invention
The object of this invention is to provide test and calibration steps that a kind of ultrasonic microscope detects resolving power, for verifying the horizontal and vertical Flaw detectability of ultrasonic microscope, by respective alignment method, ultrasonic microscope testing result is calibrated simultaneously, solve the objective evaluation problem of Flaw detectability in Ultrasonic Detection process, made the testing result of ultrasonic microscope more accurate.
The present invention utilize laser micro/nano process technology in optical glass sheet upper surface etching a series of micron order apertures, use high frequency focused transducer, by corresponding acquisition parameter and scanning parameter are set, it is carried out to ultrasonic micro-scanning imaging, the size of the minimum micropore that can distinguish is the horizontal detection resolving power of system.Design voussoir test unit simultaneously, while utilizing sound, method is measured the water layer thickness between two voussoirs, the one-tenth-value thickness 1/10 of the thinnest water layer that can measure is longitudinal detection resolving power of system, and contrasts with the water layer thickness numerical value that theory is calculated, thereby determines the degree of accuracy of Ultrasonic Detection.For the cross measure characteristic calibration of ultrasonic microscope, can carry out ultrasonic micrometering realization by the standard gauge block longitudinal section to different-thickness.Adopt time difference method to measure standard water layer thickness for longitudinal measurement characteristics calibration, measured value and the theoretical water layer thickness that calculates are analyzed, try to achieve linear fit equation and calibrate.The method is simple to operate, is easy to realize, and flexibility and reliability, can be widely used in various ultrasonic scan imaging detection devices.
Four, accompanying drawing explanation
Fig. 1 ultrasonic scanning microscopic system figure
Fig. 2 micron order aperture sample schematic diagram
Fig. 3 micron order aperture ultrasonic scan image
Fig. 4 lateral dimension calibration schematic diagram
Fig. 5 glass voussoir sample schematic diagram
Fig. 6 voussoir detects A and sweeps signal graph
Fig. 7 glass voussoir B sweeps figure
Five, embodiment
Below the specific embodiment of the present invention is elaborated:
1. as shown in Figure 1, when the work of ultrasonic scanning microscope, computing machine trigger pulse receiving/transmitting device produces pumping signal, and excitation piezoelectric chip produces high-frequency ultrasonic.Sound wave to tested specimen surface or inside, is produced reflection at sample interface or the inner discontinuous place of sound characteristics by sound lens focusing.Reflection wave is received and is converted to electric signal by piezoelectric chip.Echoed signal is delivered to data collecting card through amplitude limit, amplifying circuit after amplifying, and transfers digital signal to, then carries out digital processing.Meanwhile, computer control machinery scanning platform carries out x-y surface level two-dimensional scan control to sound wave lens and sample, thereby can provide two-dimentional ultrasonoscopy, and shows on computers the ultrasonoscopy of sample.
2. as shown in Figure 2, utilize laser micro/nano technology to process a series of micron order apertures, for avoiding randomness, processed 3 groups of parallel apertures herein, the degree of depth is respectively 50 μ m, 80 μ m and 110 μ m left and right, and the diameter of respectively organizing aperture is about 120 μ m, 100 μ m, 80 μ m, 60 μ m and 40 μ m.Add man-hour, lasing beam diameter used is 5 μ m, allows laser beam constantly around aperture center, move, to process required pore size, therefore the actual aperture profile obtaining not is the circle of complete standard, after aperture processes, has carved around individual square frame, so that identification orifice region.
3. pair micropore sample carries out ultrasonic scan imaging, native system transducer highest frequency is 100MHz, therefore use Panametrics V3394 transducer, the gain of pulse transmitting-receiving instrument is 26dB, the sampling rate of A/D card is set to 1GHz, voltage range 0.5V(-0.25V-0.25V), Scan pitch is 10 μ m, the upper surface of glass is placed in the burnt zone position of transducer, adopts water as couplant.For obtaining higher sharpness, adopt frequency domain imaging mode to carry out scanning imaging to glass sheet surface, follow the tracks of gate and data position of strobe and be all placed on upper surface echo position.
4. the horizontal detection resolving power of system can be estimated by Sparrow's criterion in theory, can calculate by following formula:
wherein
d is the diameter of transducer unit, z
0it is focal length; λ
0wave length of sound corresponding to transducer centre frequency.To be used 100MHz high frequency focused transducers V3394 as example in this test, its nominal center frequency is 100MHz, and piezoelectricity unit diameter is 6mm, and focal length is 25mm, and utilizing above formula can calculate its theoretical transverse resolution is 44.48 μ m.
5. as shown in Figure 3, while adopting 100MHz probe, the aperture of 120 μ m, 100 μ m, 80 μ m, 60 μ m and 40 μ m diameters all can distinguish, and considers the frequency decay of high frequency ultrasound in water, the aperture profile imaging effect Relative Fuzzy of 60 μ m and 40 μ m.Reality when system that hence one can see that is used 100MHz probe laterally detects resolving power and can reach 40 μ m, and this and the calculated results are substantially identical.
6. as shown in Figure 4, the standard ceramic gauge block knot of various combination is pasted to benchmark gauge block and place, make two gauge block lower surfaces be close to benchmark gauge block by grinding, make combined gauges upper surface on same datum line.Because gauge block 1 is different with gauge block 2 thickness, measure the distance of gauge block 1 upper surface with respect to gauge block 2 upper surfaces, set it as thick section difference, each pixel in ultrasonoscopy is corresponding with the each sampled point in scanning, is multiplied by Scan pitch is measured value by the distance between measurement pixel.
7. lateral dimension is mainly measured based on image border, and in ultrasonoscopy, the accuracy of Edge Feature Points will be subject to the impact of transducer focus characteristics, relevant with the diameter of burnt post, and the measuring error of lateral dimension is mainly caused by measurement error.If L
ifor standard value, D
irepresent to measure pixel value, δ represents pixel equivalent,
represent edge pixel offset.By L
i=(D
i+ 2 λ
i) × δ is known: λ
i=(L
i/ δ-D
i)/2 are L by measuring series of standards value
istandard gauge block, obtaining measuring measurement value is D
i, substitution above formula calculates corresponding pixel compensation amount λ
i, system edges pixel compensation value
calibration value
8. as shown in Figure 5, glass voussoir sample is made up of two optical glass sheets and a minipad, and a side of two blocks of glass overlaps mutually, and opposite side pads up with minipad, thereby forms a wedge angle.This device is put among tank, the hollow space of key has been full of water, high-frequency transducer is placed in directly over voussoir, beam axis vertical incidence is (because the angle of wedge is very little, therefore can be approximated to be vertical incidence), make transducer substantially focus on the upper surface of glass sheet below, drive ultrasonic transducer by mechanical scanning device, the A that observes A, B, C, tetra-positions of D sweeps signal.
9. in pair voussoir sample, form water layer thickness quantize detect, the main sound time difference that still adopts this layer of upper and lower interface and the product of the velocity of sound calculate, i.e. d=(t
2-t
1) c/2, wherein t
1and t
2be respectively the acoustic beam time of return at this upper and lower interface of detection layers, c is the velocity of sound in this layer of medium.Known when the velocity of sound in medium, and layer is when thicker, can determine t by ultrasonic reflection echoed signal
1and t
2, just can calculate layer thickness.But in fact, in the time measuring thickness of thin layer, the echoed signal obtaining often can not be separated intuitively, two echoes have produced overlapping, be difficult to determine the time of arrival of two echoes, therefore two underlapped along track resolutions that the water layer thickness of corresponding measurement point is ultrasonic testing system before of echoed signals.
10. because the water layer in optical glass sheet and the angle of wedge is thinner, the upper surface of the lower surface of top glass sheet and below glass sheet may produce round trip echoes.Consider that its ultrasonic signal of 100MHz transducer can not penetrate optical glass sheet, therefore use the PVDF point focusing probe that nominal center frequency is 75MHz while test, sample frequency is 500MHz.When incidence point position is when near key outside (near pads placement), the thickness of water layer is relatively large, and the upper and lower surface echo of this position water layer can be from time domain separately; In the time that incidence point is mobile to key inner side (away from pads placement), because water layer thickness reduces gradually, the echo on the upper and lower surface of water layer can move closer in time domain, and finally superimposed together, and cannot directly distinguish.
11. as shown in Figure 6, for A, B, C point position, due to echo 2 and echo 3 in time domain along underlapped, can directly obtain the sound time difference Δ t of these two echoes from oscillogram, thereby can directly calculate these and put corresponding water layer thickness d, wherein Δ t can accurately obtain its numerical value by the surveyors' staff of digital oscilloscope.Because D point water layer thickness is less, the echoed signal of upper and lower surface overlaps, thereby causes in time domain, distinguishing simultaneously.The theoretical water layer thickness of A, B, C, tetra-positions of D can pass through d simultaneously
0=L
i× tan θ (L
ifor an i is apart from the distance on angle of wedge top) calculate, and L
inumerical value can carry out reading measurement by scanning axle grating scale, and tan θ=h/L(L, h numerical value are given value).The measured value that during by the theoretical value of water layer thickness and Ultrasonic Detection sound, method obtains is analyzed, thereby determines the degree of accuracy of ultrasonic measurement.
12. as shown in Figure 7, glass voussoir sample is carried out scanning and gathers all-wave data recording carrying out B and sweeping imaging, when sweeping imaging, reads B on cursor indicating positions the A total number certificate of each point on horizontal section, sweep the signal strength expression color value of different time on signal with A, just can complete B and sweep horizontal section imaging, the profile image that obtains voussoir sample is analyzed.
13. measured value and the theoretical values that time difference method is calculated are analyzed, and are caused time interval Δ t by the generation of the known error of measuring principle mainly due to time interval Δ t error
ierror compensation be
,
d
iwith Δ t
ibetween meet linear relationship, establishing fitting a straight line equation is d
i=d
i(Δ t
i)=a* Δ t
i+ b, calculates according to least square method:
Calibration value is d
cal=a* Δ t
i+ b.
Claims (10)
1. ultrasonic microscope resolution test and a calibration steps, is characterized in that: the detection resolving power of ultrasonic microscope comprises transverse resolution and along track resolution.Utilize laser micro/nano process technology in optical glass sheet upper surface etching a series of micron order apertures, it is carried out to ultrasonic micro-scanning imaging, the minimum pore size that can distinguish is the transverse resolution of system.For the cross measure characteristic calibration of ultrasonic microscope, carry out ultrasonic micrometering calculating pixel offset by the standard gauge block longitudinal section to different-thickness and realize.Design glass voussoir sample, while utilizing sound, method is measured the water layer thickness between two voussoirs simultaneously, and the one-tenth-value thickness 1/10 of thin water layer that can measure is the along track resolution of system.Adopt wedge method to measure standard water layer thickness for longitudinal measurement characteristics calibration, measured value and the theoretical water layer thickness that calculates are analyzed, try to achieve linear fit equation and calibrate.
2. ultrasonic scanning microscope according to claim 1 laterally detects resolving power, it is characterized in that: transverse resolution refer to beam axis vertical plane on, distance between two immediate, distinct differentiable picture points can distinguishing, can estimate by Sparrow's criterion in theory, can calculate by following formula:
wherein
d is the diameter of transducer unit, z
0it is focal length; λ
0wave length of sound corresponding to transducer centre frequency.
3. the laser micro/nano technology of utilizing according to claim 1 is processed a series of micron order apertures, it is characterized in that: for avoiding randomness, processed 3 groups of parallel apertures herein, the degree of depth is respectively 50
μm, 80
μm and 110
μm left and right, the diameter of respectively organizing aperture is about 120 μ m, 100 μ m, 80 μ m, 60 μ m and 40 μ m.Add man-hour, lasing beam diameter used is 5 μ m, allows laser beam constantly around aperture center, move, and to process required pore size, therefore the actual aperture profile obtaining not is the circle of complete standard.
4. according to claim 1 micropore sample is carried out to ultrasonic micro-scanning imaging, it is characterized in that: use 100MHz high-frequency transducer, the sampling rate of A/D card is set to 1GHz, Scan pitch is 10 μ m, the upper surface of glass is placed in the burnt zone position of transducer, adopts water as couplant.For obtaining higher sharpness, by frequency domain imaging mode, glass sheet surface is carried out to scanning imaging, to follow the tracks of gate and data position of strobe and be all placed on upper surface echo position, the minimum pore size that can distinguish in ultrasonoscopy is the transverse resolution of system.
5. cross measure characteristic calibration according to claim 1, it is characterized in that: be used in combination by the standard gauge block to different-thickness, adopt C scanning mode to carry out thick section scanning imaging, utilize ultrasonoscopy to measure the difference at combination test block thickness interface, the standard value of measured value and test block is compared, calculating pixel offset, completes the calibration of lateral dimension.
6. ultrasonic scanning microscope according to claim 1 longitudinally detects resolving power, it is characterized in that: along track resolution refers to the minor increment that can identify on beam axis, relevant with the effective bandwidth of ultrasonic pulse, and its theoretical value can be formulated as D
axial=ct/2, in formula, c is ultrasonic velocity; T is the mistiming that ultrasound wave is propagated between minor increment.
7. glass voussoir sample according to claim 1, is characterized in that: this sample is made up of two optical glass sheets and a minipad, and a side of two blocks of glass overlaps mutually, and opposite side pads up with minipad, thereby forms a wedge angle.This sample is put among tank, the hollow space of key has been full of water, high-frequency transducer is placed in directly over voussoir, beam axis vertical incidence is (because the angle of wedge is very little, therefore can be approximated to be vertical incidence), order probe focuses on the upper surface of glass sheet below substantially, and the A that then observes diverse location sweeps signal.
According to claim 1 while utilizing sound method measure the water layer thickness between two voussoirs, it is characterized in that: in the time that move on the top of the observation station in voussoir from remote location toward the angle of wedge, because the water layer thickness in key angle reduces gradually, upper surface echo and the lower surface echo of water layer can overlap gradually.Before two echoes are underlapped, can in oscillogram time domain, obtain the mistiming Δ t of two echoed signals, thereby calculate the water layer thickness that this point is corresponding, i.e. d=c
0Δ t/2(c
0be the velocity of sound in water, be taken as 1048m/s), and two underlapped along track resolutions that the water layer thickness of corresponding measurement point is ultrasonic testing system before of echoed signals.
9. water layer thickness according to claim 1, is characterized in that: water layer thickness also can be according to the relation between glass sheet length L and wedge angle, according to d
0=L
i× tan θ (L
ifor an i is apart from the distance on angle of wedge top) obtain the theoretical value of water layer thickness, thus be analyzed with the numerical value of ultrasonic measurement, determine the degree of accuracy of Ultrasonic Detection.
10. longitudinal measurement characteristics calibration according to claim 1, it is characterized in that: utilize time difference method to measure by the water layer to different-thickness, and measured value and theoretical value are analyzed, caused mainly due to time interval Δ t error by the generation of the known error of measuring principle, and d and Δ t
ilinear, can utilize least square method to carry out linear fit to measurement result, calculate calibration value.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105866256A (en) * | 2016-03-30 | 2016-08-17 | 西北工业大学 | Automatic ultrasonic transducer calibrating apparatus |
| CN105973988A (en) * | 2016-07-05 | 2016-09-28 | 方大特钢科技股份有限公司 | Method for detecting ultrasonic three-dimensional imaging of lamellarflaw distribution |
| CN106501378A (en) * | 2016-12-12 | 2017-03-15 | 北京理工大学 | A kind of integrated correction test block of ultrasonic microscope Non-Destructive Testing performance |
| CN106770690A (en) * | 2016-12-16 | 2017-05-31 | 贵州航天计量测试技术研究所 | A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation and calibration method |
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| CN110186654A (en) * | 2019-05-29 | 2019-08-30 | 深圳市慧视智图科技有限公司 | A kind of longitudinal resolution test device |
| CN110346114A (en) * | 2018-04-08 | 2019-10-18 | 中国科学院声学研究所 | It is a kind of for detecting the complete test specimen of high frequency ultrasound imaging instrument azimuthal resolution |
| CN110487669A (en) * | 2018-05-15 | 2019-11-22 | 中国石油化工股份有限公司 | The method for measuring polyethylene pellet density |
| CN110780440A (en) * | 2019-11-12 | 2020-02-11 | 四川沃文特生物技术有限公司 | Photographic microscope and method for rapidly photographing by using same |
| CN111879799A (en) * | 2020-07-03 | 2020-11-03 | 中国兵器科学研究院宁波分院 | Manual testing method for spatial resolution of optical system |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1180782A1 (en) * | 1984-01-05 | 1985-09-23 | Научно-производственное объединение по технологии машиностроения | Standard specimen for calibrating of ultrasonic converter |
| DE19935907A1 (en) * | 1999-07-30 | 2001-03-08 | Siemens Ag | Calibration member for ultrasound microscopes, comprises a plastic substrate with a structured metal layer on top. |
| US6720766B2 (en) * | 1995-04-14 | 2004-04-13 | Kevin J. Parker | Thin film phantoms and phantom systems |
| CN101332099A (en) * | 2008-07-10 | 2008-12-31 | 中国计量科学研究院 | Tissue-mimicking module system for B-ultrasound static image evaluation and production method thereof |
| CN103336055A (en) * | 2013-06-08 | 2013-10-02 | 大连理工大学 | Method for ultrasonically detecting weld quality of main loop pipeline of nuclear power plant by phased array |
| CN103472140A (en) * | 2013-09-05 | 2013-12-25 | 中国科学院声学研究所 | Ultrasonic phased array imaging flaw detection intensity calibrating method |
-
2014
- 2014-03-06 CN CN201410079667.5A patent/CN103822971B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1180782A1 (en) * | 1984-01-05 | 1985-09-23 | Научно-производственное объединение по технологии машиностроения | Standard specimen for calibrating of ultrasonic converter |
| US6720766B2 (en) * | 1995-04-14 | 2004-04-13 | Kevin J. Parker | Thin film phantoms and phantom systems |
| DE19935907A1 (en) * | 1999-07-30 | 2001-03-08 | Siemens Ag | Calibration member for ultrasound microscopes, comprises a plastic substrate with a structured metal layer on top. |
| CN101332099A (en) * | 2008-07-10 | 2008-12-31 | 中国计量科学研究院 | Tissue-mimicking module system for B-ultrasound static image evaluation and production method thereof |
| CN103336055A (en) * | 2013-06-08 | 2013-10-02 | 大连理工大学 | Method for ultrasonically detecting weld quality of main loop pipeline of nuclear power plant by phased array |
| CN103472140A (en) * | 2013-09-05 | 2013-12-25 | 中国科学院声学研究所 | Ultrasonic phased array imaging flaw detection intensity calibrating method |
Non-Patent Citations (2)
| Title |
|---|
| 杨平华等: "相控阵超声检测横向分辨力实验测试及分析", 《仪器仪表学报》 * |
| 郑政等: "一种新型眼科超声生物显微镜", 《上海理工大学学报》 * |
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| CN105973988A (en) * | 2016-07-05 | 2016-09-28 | 方大特钢科技股份有限公司 | Method for detecting ultrasonic three-dimensional imaging of lamellarflaw distribution |
| CN105973988B (en) * | 2016-07-05 | 2019-08-06 | 方大特钢科技股份有限公司 | A kind of ultrasonic three-dimensional imaging detection method of lamellar defect distribution |
| CN106501378A (en) * | 2016-12-12 | 2017-03-15 | 北京理工大学 | A kind of integrated correction test block of ultrasonic microscope Non-Destructive Testing performance |
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| CN110346114B (en) * | 2018-04-08 | 2024-03-26 | 中国科学院声学研究所 | Complete test piece for detecting axial resolution of high-frequency ultrasonic imaging instrument |
| CN110346114A (en) * | 2018-04-08 | 2019-10-18 | 中国科学院声学研究所 | It is a kind of for detecting the complete test specimen of high frequency ultrasound imaging instrument azimuthal resolution |
| CN110487669A (en) * | 2018-05-15 | 2019-11-22 | 中国石油化工股份有限公司 | The method for measuring polyethylene pellet density |
| CN109374739A (en) * | 2018-09-05 | 2019-02-22 | 广州联声电子科技有限公司 | A kind of ultrasonic microscope and method based on annular surface battle array |
| CN110186654A (en) * | 2019-05-29 | 2019-08-30 | 深圳市慧视智图科技有限公司 | A kind of longitudinal resolution test device |
| CN110780440A (en) * | 2019-11-12 | 2020-02-11 | 四川沃文特生物技术有限公司 | Photographic microscope and method for rapidly photographing by using same |
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| CN111879799B (en) * | 2020-07-03 | 2022-08-26 | 中国兵器科学研究院宁波分院 | Manual testing method for spatial resolution of optical system |
| CN112578024A (en) * | 2020-11-26 | 2021-03-30 | 北京理工大学 | Calculation method, measurement device and measurement method for ultrasonic C scanning detection resolution |
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