CN103822971B - A kind of ultrasonic microscope resolution test and calibration steps - Google Patents
A kind of ultrasonic microscope resolution test and calibration steps Download PDFInfo
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Abstract
The present invention relates to a kind of ultrasonic microscope resolution test and calibration steps, it is applicable to field of ultrasonic nondestructive detection, can be used for verifying the horizontal and vertical Flaw detectability of ultrasonic testing system, make detection the most accurate by ultrasonic microscope testing result is carried out calibration.This method has etched a series of micron order aperture by laser micro/nano technology at optical glass sheet upper surface, the minimum pore size that ultrasonic micro-imaging can distinguish is and laterally detects resolving power, calculates pixel compensation value realization laterally calibration by standard gauge block longitudinal section carries out ultrasonic micrometering.Design glass voussoir sample, when utilizing sound, method carries out thickness measure, and the thinnest water layer thickness value that can measure is longitudinally detection resolving power, measured value and calculated value is analyzed try to achieve linear fit equation and realizes longitudinal alignment.The method is simple to operate, it is easy to accomplish, solve the objective evaluation problem of ultrasonic Flaw Detection ability, make the testing result of ultrasonic microscope more accurately and reliably.
Description
One, technical field
The invention belongs to ultrasound detection field, relate to resolution test and the calibration steps of a kind of ultrasonic microscope, be suitable for
In ultrasonic micro-and Ultrasonic C-Scan detection.
Two, background technology
Ultrasonic microscope is a kind of novel nondestructive detecting instrument, and it utilizes high frequency focusing ultrasound wave to carry out lossless to object
Detection, can carry out high accuracy, highly sensitive detection to interior of articles and sub-surface texture, and observable is from top layer to tens of milliseconds
The micron existed in depth bounds has high sensitivity, high-resolution and image to hundred micron scale structures, ultrasonic micro measurement
The feature such as directly perceived, is widely used to the fields such as electronics industry, medical science, material science at present.
Choosing of high frequency focused transducer has critically important impact to ultrasonic micro measurement effect, its main property
Index can have mid frequency, focal length, burnt district beam width etc., for ultrasonic micro-scanning imagery, burnt district beam width is more
Little, the image scanned is the most clear, i.e. transverse resolution is the highest.In general, frequency is the highest, and burnt district beam width is the narrowest, horizontal
The highest to imaging precision, therefore when ultrasonic micro measurement, it is generally desirable to the frequency of transducer used is the highest more good.But, when
When the frequency of transducer improves, the decay of the sound intensity can increase rapidly, and its penetration capacity can drastically decline, and general frequency is more
Height, its signal to noise ratio is the poorest, and echo-signal is often buried in noise signal, and the image of scanning can become due to the increase of noise on the contrary
Must obscure.Simultaneously for ultrasonic scanning microscopic examination, axial resolution is also an important indicator needing to consider, for
To higher axial resolution, it is desirable to the persistent period of pulse is short, and the most ultrasonic micro measurement system is frequently with burst pulse, and institute
It is generally wide-band transducer with transducer, and system is set to high frequency, high-damping mode.
The detection resolving power of ultrasonic microscope is the important indicator describing its detection performance, about ultrasonic micro measurement
The research of resolving power is international the most fewer.By carrying out patent consulting, Chinese utility model patent at Wanfang Database
CN201120393472.X provides a kind of layer target for testing vertical solution for ophthalmology, divides for testing the longitudinal direction of ophthalmology ultrasonic device
Distinguish power, but it needs the micro-sized metal paper tinsel of a series of different-thickness, sample preparation more difficulty.Therefore it is desirable to by one
Plant simple method of testing the detection performance of ultrasonic microscope is estimated.
Three, summary of the invention
It is an object of the invention to provide the detection test of resolving power of a kind of ultrasonic microscope and calibration steps, be used for verifying super
The horizontal and vertical Flaw detectability of sonomicroscope, is carried out ultrasonic microscope testing result by respective alignment method simultaneously
Calibration, solves the objective evaluation problem of Flaw detectability during ultrasound detection, makes the testing result of ultrasonic microscope more
For accurately.
The present invention utilizes laser micro/nano process technology to etch a series of micron order aperture at optical glass sheet upper surface, makes
Use high frequency focused transducer, with scanning parameter, it is carried out ultrasonic micro-scanning become by arranging corresponding acquisition parameter
Picture, what the size of the minimum micropore that can distinguish was system laterally detects resolving power.Design voussoir assay device simultaneously, utilizes
During sound, the water layer thickness between two voussoirs is measured by method, and the one-tenth-value thickness 1/10 of the thinnest water layer that can measure is the vertical of system
To detection resolving power, and contrast with the water layer thickness numerical value of Theoretical Calculation, so that it is determined that the degree of accuracy of ultrasound detection.For
The cross measure characteristic calibration of ultrasonic microscope, can be by carrying out ultrasonic micro-survey to the standard gauge block longitudinal section of different-thickness
Amount realizes.Use time difference method that standard water layer thickness is measured for longitudinal measurement characteristics calibration, by measured value with theoretical
Calculating water layer thickness is analyzed, and tries to achieve linear fit equation and calibrates.The method is simple to operate, it is easy to accomplish, spirit
Live reliable, can be widely used for various ultrasonic scan imaging detection device.
Four, accompanying drawing explanation
Fig. 1 ultrasonic scanning microscopic system figure
Fig. 2 micron order aperture sample schematic diagram
Fig. 3 micron order aperture ultrasonic scan image
Fig. 4 lateral dimension calibration schematic diagram
Fig. 5 glass voussoir sample schematic diagram
Fig. 6 voussoir detection A sweeps signal graph
Fig. 7 glass voussoir B sweeps figure
Five, detailed description of the invention
Below the detailed description of the invention of the present invention is described in detail:
1. as it is shown in figure 1, during ultrasonic scanning microscopy work, computer triggers pulse receiving/transmitting device and produces pumping signal,
Excitation piezoelectric chip produces high-frequency ultrasonic.Sound wave by sound lens focusing to tested specimen surface or inside, at sample interface or
Internal sound characteristics is discontinuously located to produce reflection.Echo is received and converted to the signal of telecommunication by piezoelectric chip.Echo-signal is through limit
Width, amplifying circuit deliver to data collecting card after amplifying, and transfer digital signal to, then carry out digital processing.Meanwhile, computer controls
Mechanical scanning platform carries out x-y horizontal plane two-dimensional scan and controls sound wave lens and sample such that it is able to provide the ultrasonic of two dimension
Image, and show the ultrasonoscopy of sample on computers.
2., as in figure 2 it is shown, utilize laser micro/nano technology to process a series of micron order apertures, for avoiding randomness, add herein
3 groups of parallel apertures of work, the degree of depth is respectively about 50 μm, 80 μm and 110 μm, and the diameter of each group aperture is about 120 μm, 100 μ
M, 80 μm, 60 μm and 40 μm.Adding man-hour, lasing beam diameter used is 5 μm, allows laser beam constantly transport around small hole center
Dynamic, to process required pore size, the aperture profile therefore actually obtained not is the circle of complete standard, little hole machined
Individual square frame has been carved around, in order to identify orifice region after Hao.
3. pair micropore sample carries out ultrasonic scan imaging, and native system transducer highest frequency is 100MHz, therefore uses
Panametrics V3394 transducer, the sample rate that gain is 26dB, A/D card of pulse transmitting-receiving instrument is set to 1GHz, voltage model
Enclose 0.5V(-0.25V-0.25V), Scan pitch is 10 μm, and the upper surface of glass is placed in the burnt zone position of transducer, adopts and uses water as
For couplant.For obtaining higher definition, use frequency domain imaging mode that glass sheet surface carries out scanning imaging, follow the tracks of lock
Door and data position of strobe are all placed on upper surface echo position.
4. the laterally detection resolving power of system can be estimated by Sparrow's criterion in theory, can calculate as the following formula:WhereinD is the diameter of transducer unit, z0It it is focal length；λ0It is in transducer
The wave length of sound that frequency of heart is corresponding.As a example by the high frequency focused transducers V3394 of 100MHz used in this test, its nominal center
Frequency is 100MHz, a diameter of 6mm of piezoelectricity unit, and focal length is 25mm, utilizes above formula can calculate its theoretical transverse resolution and is
44.48μm。
5., time as it is shown on figure 3, use 100MHz probe, the aperture of 120 μm, 100 μm, 80 μm, 60 μm and 40 μ m diameter is equal
Can distinguish, it is contemplated that the aperture profile imaging effect of high frequency ultrasound frequency decay in water, 60 μm and 40 μm is relative
Fuzzy.It can thus be appreciated that actual laterally detection resolving power when system uses 100MHz to pop one's head in is up to 40 μm, this and Theoretical Calculation
Result is the most identical.
The most as shown in Figure 4, the standard ceramic gauge block of various combination is tied patch benchmark gauge block and places, make two amounts by grinding
Block lower surface is close to benchmark gauge block, makes combined gauges upper surface on same datum line.Owing to gauge block 1 is different with gauge block 2 thickness,
Measure gauge block 1 upper surface relative to the distance of gauge block 2 upper surface, as thickness x cross sectional difference, each in ultrasonoscopy
Pixel is corresponding with each sampled point in scanning, is multiplied by Scan pitch by the distance between measurement pixel and is measurement
Value.
7. lateral dimension is based primarily upon image border and measures, and in ultrasonoscopy, the accuracy of Edge Feature Points will be changed
Can the impact of device focus characteristics, relevant with the diameter of burnt post, and the measurement error of lateral dimension mainly causes by measurement error.
If LiFor standard value, DiRepresenting and measure pixel value, δ represents pixel equivalent,Represent edge pixel offset.By Li=(Di+2λi)×
δ understands: λi=(Li/δ-Di)/2, are L by measuring series of standards valueiStandard gauge block, obtain measure measurement value be Di,
Substitute into above formula and be calculated pixel compensation amount λ of correspondencei, then system edges pixel compensation valueThen calibration value
8. as it is shown in figure 5, glass voussoir sample is made up of two pieces of optical glass sheets and a minipad, the one of two blocks of glass
Side is mutually lapped together, and opposite side minipad pads up, thus forms a wedge angle.This device is put among tank,
The hollow space of key is filled with water, makes high-frequency transducer be placed in directly over voussoir, and beam axis vertical incidence is (due to wedge
Angle is the least, therefore can be approximated to be vertical incidence), make transducer substantially focus on the upper surface of following sheet glass, by machinery
Scanning equipment drives ultrasonic transducer, and the A observing tetra-positions of A, B, C, D sweeps signal.
9. formed in pair voussoir sample water layer thickness carry out quantifying detection, main still use this layer upper and lower
The sound time difference at interface calculates with the product of the velocity of sound, i.e. d=(t2-t1) c/2, wherein t1And t2It is respectively this detection layers Lower and upper bounds
The acoustic beam time of return in face, c is the velocity of sound in this layer of medium.When the velocity of sound in medium it is known that and time layer is thicker, by ultrasonic instead
Penetrate echo-signal and may determine that t1And t2, just can calculate the thickness of layer.But it practice, when measuring thickness of thin layer, obtain returns
Ripple signal tends not to enough separate intuitively, and two echoes create overlap, it is difficult to determine the time of advent of two echoes, therefore
The vertical definition that water layer thickness is ultrasonic testing system measuring point corresponding before two echo-signals are underlapped.
10. relatively thin due to the water layer in optical glass sheet and the angle of wedge, the lower surface of top sheet glass and lower section sheet glass
Upper surface may produce multiple-reflection echoes.Optical glass can not be penetrated in view of its ultrasonic signal of 100MHz transducer
Sheet, therefore the PVDF point focusing probe using nominal center frequency to be 75MHz during test, sample frequency is 500MHz.Work as incidence point
Position is outside key (near pads placement) time, and the thickness of water layer is relatively large, and the upper and lower surface of this position water layer is returned
Ripple can separate from time domain；When incidence point moves (away from pads placement) inside key, owing to water layer thickness gradually subtracts
Little, the echo on the upper and lower surface of water layer can move closer in time domain, and the most superimposed together, and cannot directly distinguish.
11. as shown in Figure 6, for A, B, C point position, due to echo 2 and echo 3 in time domain along underlapped, can be direct
From oscillogram, obtain the sound time difference Δ t of the two echo, thus can directly calculate the water layer thickness d that these points are corresponding,
Wherein Δ t can accurately obtain its numerical value by the surveyors' staff of digital oscilloscope.Simultaneously because D point water layer thickness is less, up and down
The echo-signal on surface overlaps, thus causes to distinguish in time domain.The theoretical water layer of tetra-positions of A, B, C, D simultaneously
Thickness can pass through d0=Li× tan θ (LiFor the i distance away from angle of wedge top) calculate, and LiNumerical value can pass through scanning axle
Grating scale carries out reading measurement, and tan θ=h/L(L, h numerical value is given value).By the theoretical value of water layer thickness and ultrasound detection sound
Time the measured value that obtains of method be analyzed, so that it is determined that the degree of accuracy of ultrasonic measurement.
12. as it is shown in fig. 7, carry out scanning and gather all-wave data record and carry out B and sweep imaging to glass voussoir sample, and B sweeps
Read on cursor indicating positions the A total number evidence of each point on horizontal section during imaging, sweep the signal intensity of different time on signal with A
Represent color value, just can complete B and sweep horizontal section imaging, it is thus achieved that the profile image of voussoir sample is analyzed.
The measured value that time difference method calculates is analyzed by 13. with theoretical value, measuring principle understand the generation of error
Cause mainly due to time interval Δ t error, time interval Δ tiError compensation be, thendi
With Δ tiBetween meet linear relationship, if fitting a straight line equation is di=di(Δti)=a* Δ ti+ b, according to method of least square meter
Calculate:
Then calibration value is dcal=a* Δ ti+b 。
Claims (10)
1. a ultrasonic microscope resolution test and calibration steps, it is characterised in that: the detection resolving power bag of ultrasonic microscope
Include transverse resolution and vertical definition, utilize laser micro/nano process technology to etch at optical glass sheet upper surface a series of micro-
Meter level aperture, carries out ultrasonic micro-scanning imaging to it, and the minimum pore size that can distinguish is the transverse resolution of system,
Cross measure characteristic for ultrasonic microscope is calibrated, by the standard gauge block longitudinal section of different-thickness is carried out ultrasonic micro-survey
Amount calculates pixel compensation value and realizes, if LiFor standard value, DiRepresenting and measure pixel value, δ represents pixel equivalent,Represent edge picture
Element offset, by Li=(Di+2λi) × δ understands λi=(Li/δ-Di)/2, are L by measuring series of standards valueiStandard volume
Block, obtaining measuring measurement value is Di, substitute into above formula and be calculated pixel compensation amount λ of correspondencei, then system edges pixel is mended
Repay valueThen calibration valueDesign glass voussoir sample simultaneously, this sample is by two blocks of light
Learning sheet glass and a minipad composition, the side of two blocks of glass is mutually lapped together, and opposite side minipad pads up, from
And forming a wedge angle, when utilizing sound, the water layer thickness between two voussoirs is measured by method, the thinnest water layer that can measure
One-tenth-value thickness 1/10 be the vertical definition of system, standard water layer thickness is carried out by method during longitudinal measurement characteristics calibration employing sound
Measure, measured value is analyzed with Theoretical Calculation water layer thickness, tries to achieve linear fit equation and calibrate.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that: laterally divide
The power of distinguishing refer to on beam axis vertical plane, between two the differentiable picture points immediate, distinct that can distinguish
Distance, estimates by Sparrow's criterion in theory, calculates as the following formula:Wherein dSparrowFor
The transverse resolution determined by Sparrow's criterion,D is the diameter of transducer unit, z0It it is focal length；λ0It is to change
The wave length of sound that energy device mid frequency is corresponding.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that utilize and swash
The light micro & nano technology a series of micron order apertures of processing are particularly as follows: for avoiding randomness, machined 3 groups of parallel apertures, and the degree of depth is divided
It is not 50 μm, 80 μm and 110 μm, each a diameter of 120 μm, 100 μm, 80 μm, 60 μm and 40 μm organizing aperture, add man-hour, used
Lasing beam diameter be 5 μm, allow laser beam constantly at small hole center peripheral motor, to process required pore size, because of
The aperture profile that this actually obtains not is the circle of complete standard.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that to micropore
Sample carries out ultrasonic micro-scanning imaging particularly as follows: use 100MHz high-frequency transducer, and the sample rate of A/D card is set to
1GHz, Scan pitch is 10 μm, and the upper surface of glass is placed in the burnt zone position of transducer, adopts and uses water as couplant, for obtaining
Higher definition, uses frequency domain imaging mode that glass sheet surface carries out scanning imaging, follows the tracks of gate and data gate position
Putting and be all placed on upper surface echo position, the minimum pore size that can distinguish in ultrasonoscopy is the transverse resolution of system.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that laterally survey
Flow characteristic calibration is particularly as follows: by being applied in combination the standard gauge block of different-thickness, use C scanning mode to carry out thickness x cross sectional and sweep
Look into imaging, utilize ultrasonoscopy measurement to obtain combining the difference at test block thickness interface, make to compare by the standard value of measured value with test block
Right, calculate pixel compensation value, complete the calibration of lateral dimension.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that: longitudinally divide
The power of distinguishing refers to the minimum range identified on beam axis, and relevant with the effective bandwidth of ultrasonic pulse, its theoretical value is formulated
For Daxial=ct/2, in formula, c is ultrasonic velocity；T is the time difference that ultrasound wave is propagated between minimum range.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that glass wedge
Block sample is particularly as follows: be put among tank by this sample, and the hollow space of key is filled with water, makes high-frequency transducer be placed in
Directly over voussoir, beam axis vertical incidence, owing to the angle of wedge is the least, therefore it is approximately vertical incidence, order probe focuses on substantially
The upper surface of sheet glass below, the A then observing diverse location sweeps signal.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that utilize sound
Time method measure the water layer thickness between two voussoirs particularly as follows: when the observation station in voussoir is moved from remote location toward the top of the angle of wedge
Time dynamic, owing to the water layer thickness in key angle is gradually reduced, upper surface echo and the lower surface echo of water layer can gradually occur
Overlap, before two echoes are underlapped, obtain the time difference Δ t of two echo-signals in oscillogram time domain, thus calculates
The water layer thickness that this point is corresponding, i.e. d=c0Δ t/2, c0It is the velocity of sound in water, is taken as 1048m/s, and two echo-signals do not weigh
The vertical definition that water layer thickness is ultrasonic testing system measuring point corresponding before folded.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that: water layer is thick
Degree is always according to the relation between sheet glass length L and wedge angle, according to d0=Li× tan θ, LiFor the i distance away from angle of wedge top,
Obtain the theoretical value of water layer thickness, thus be analyzed with the numerical value of ultrasonic measurement, determine the degree of accuracy of ultrasound detection.
A kind of ultrasonic microscope resolution test the most according to claim 1 and calibration steps, it is characterised in that longitudinally survey
Flow characteristic calibration particularly as follows: utilize time difference method by the water layer of different-thickness is measured, and by measured value and theoretical value
It is analyzed, the generation of error knowable to measuring principle causes mainly due to time interval Δ t error, and d and Δ ti
Linear, utilize method of least square that measurement result carries out linear fit, calculate calibration value.
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Inventor after: Xu Chunguang Inventor after: Zhu Yanling Inventor after: Xiao Dingguo Inventor after: Peng Kai Inventor after: Guo Xianghui Inventor after: Fan Qiong Inventor after: Yang Liu Inventor before: Xu Chunguang Inventor before: Peng Kai Inventor before: Xiao Dingguo Inventor before: Guo Xianghui Inventor before: Fan Qiong Inventor before: Yang Liu |
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