CN107290429A - Ultrasound measurement system and detection method for detecting deep structure crack - Google Patents

Ultrasound measurement system and detection method for detecting deep structure crack Download PDF

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Publication number
CN107290429A
CN107290429A CN201710557254.7A CN201710557254A CN107290429A CN 107290429 A CN107290429 A CN 107290429A CN 201710557254 A CN201710557254 A CN 201710557254A CN 107290429 A CN107290429 A CN 107290429A
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power spectrum
function
ultrasonic
ultrasound
signal
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项四平
陶超
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WUXI HAIYING ELECTRONIC MEDICAL SYSTEMS Inc
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WUXI HAIYING ELECTRONIC MEDICAL SYSTEMS Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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    • G01N2291/023Solids

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Abstract

This application discloses a kind of ultrasound measurement system and detection method for being used to detect deep structure crack, using the detection method, the wire microfissure size of the sub-wavelength dimensions of material deep layer can quantitatively be detected.After the micro-crack of material depths is excited by ultrasonic pulse, ultrasonic scattering and reflection can be produced, after receiving these ultrasonic signals using ultrasonic transducer, by signal amplifier, analog-digital converter, it is stored in computer, the power spectrum of ultrasonic signal is obtained by calculating.Power spectrum slope this frequency spectrum parameter can be obtained by making linear fit to power spectrum low frequency band, and the diameter of spectrum slope and microfissure has one-to-one relation, and qualitative assessment can be made to the microfissure diameter of sub-wavelength by calculating this slope.Because working frequency needed for the quantitative detecting method is low, therefore it this method provide a kind of Noninvasive, unionized, the appraisal procedure of the deep layer microfissure yardstick of cheap safety.

Description

Ultrasound measurement system and detection method for detecting deep structure crack
Technical field
The invention belongs to crack-crack interaction technical field, more particularly to a kind of ultrasonic measurement for being used to detect deep structure crack System and detection method.
Background technology
The assessment of material internal microdefect is the important step of modern manufacturing industry control of product quality, and such as metal inside is tired Labor crackle, weld defect control, 3D printing quality on-line monitoring, multilayer materials unsticking are assessed etc., and material internal Microfissure it is closely relevant.Therefore, have to the quantitative detection of material microfissure for the control of material and product quality important Construction value.
Ultrasound detection means are one of most important nondestructiving detecting means, and ultrasonic wave has that penetration depth is big, high resolution The features such as, detected sample various dimensions, different depth, the structural and functional characteristic of different scale can be provided;In addition, microfissure In parcel impurity or cavity, it is serious with the acoustic impedance mismatch of adjacent material, easily cause strong sound scattering and anti- Penetrate, therefore, ultrasound detection means in sensitivity for having innate advantage in the detection of microfissure;Finally, ultrasound detection phase Compared for the radiation flaw detection using the progress such as X-ray, gamma-rays, with extraordinary biological safety, therefore, ultrasound detection Means are not exclusively advantageous for the protection for detecting operator's health, and in biomedical imaging field also with huge Application prospect.
When conventional ultrasound method is detected and is imaged to microfissure, its spatial resolution depends on ultrasound measurement system institute The frequency and bandwidth of the ultrasonic wave of transmitting.In order to quantitatively measure microfissure size, it is necessary to using high frequency, broad band ultrasonic system. For example, in order to obtain 50 μm of spatial resolution, the working frequency of ultrasound measurement system is at least so high in more than 50MHz The ultrasonic wave of frequency can only penetrate very short material, such as, and the penetration depth in biologic soft tissue only has 3mm;If will Working frequency drops to 3.5MHz, although penetration depth is improved, but spatial resolution is reduced to only 200 μm or so.Therefore, Traditional ultrasonic testing system, it is always mutually afoul between its resolution ratio and penetration depth.
The content of the invention
The purpose of the present invention, there is provided a kind of ultrasound measurement system and detection side for being used to detect deep structure crack Method, this method extracts spectrum slope parameter as imaging parameter by calculating the power spectrum of microfissure ultrasound echo signal.By The low frequency band of ultrasonic signal is extracted from spectrum slope parameter, the wavelength corresponding to this frequency domain is more than microfissure size, and Low frequency signal can propagate relatively long distance in material, it is achieved thereby that to the qualitative assessment of material deep layer microfissure.Also, by drawing Enter a calibration process, can make it that the response of the method and experimental system in itself is unrelated.
Invent herein the technical scheme that uses for:
There is provided a kind of ultrasound measurement system for being used to detect deep structure crack for first aspect, it is characterised in that described Ultrasound measurement system includes ultrasonic transducer, signal amplifier, capture card, digital analog converter, analog-digital converter and computing module, Wherein:
The computing module is connected with the input of the digital analog converter, the output end of the digital analog converter with it is described Signal amplifier is connected;
Output end of the computing module also with the analog-digital converter is connected, the input of the analog-digital converter and institute State capture card to be connected, the capture card is connected with the signal amplifier;
The signal amplifier is connected with the ultrasonic transducer.
Optionally, the ultrasonic transducer is for launching ultrasonic wave and receiving the ultrasonic transmitter-receiver of ultrasonic wave.
Optionally, the ultrasound measurement system is placed in microscope, or, the ultrasound measurement system is microscope.
Second aspect provides a kind of detection method for deep structure crack, and methods described is applied to first aspect institute In the ultrasound measurement system stated, methods described includes:
Launch the first ultrasonic pulse to ultrasonic wave total reflection interface using the ultrasonic transducer of the ultrasound measurement system, obtain The first acoustic signals for taking first ultrasonic pulse to be reflected back, calculate the power spectrum of first acoustic signals, obtain first Power spectrum;
Using the microscopical ultrasonic transducer to the second ultrasonic pulse is launched on the microfissure of testee, institute is obtained The second acoustic signals that the second ultrasonic pulse is reflected back are stated, the power spectrum of second acoustic signals is calculated, obtains the second power Spectrum;
By first power spectrum divided by second power spectrum, the power spectrum after being calibrated;
Linear fit is done to the power spectrum after the calibration in predetermined low frequency band, the corresponding slope of linear fit is obtained Value;
Corresponding relation between the slope value and the diameter of microfissure that are obtained according to precalculating, obtains the linear fit Diameter corresponding to corresponding slope value.
Optionally, methods described also includes:
Obtain the ultrasonic echo power spectrum function after calibration, diameter of the ultrasonic echo power spectrum function only with microfissure Parameter is related;
The ultrasonic echo power spectrum function is converted into logarithmic coordinates, in the range of bandwidth, to carrying out logarithm The ultrasonic echo power spectrum function of coordinate transformation carries out linear fit, obtains corresponding slope function after linear fit, will be described It is independent variable that slope function, which is designated as diameter parameters in power spectrum slope function, the power spectrum slope function, and power spectrum slope is Dependent variable;
According to the power spectrum function, the power spectrum slope corresponding to each diameter is calculated, each diameter and power is obtained Compose the corresponding relation between slope.
Optionally, the acquisition ultrasonic echo power spectrum function, including:
The receptance function of ultrasound measurement system, ultrasound echo signal function and ultrasonic reflection coefficient function are rolled up Product computing, obtains ultrasound echo signal function;Fourier transformation is carried out to the ultrasound echo signal function, the super of frequency domain is obtained Acoustical signal function;
Conjugation is asked to the ultrasonic signal function, the power spectrum function of ultrasound echo signal is obtained;
Calculate the power spectrum function of calibration signal;
The power spectrum function of the ultrasound echo signal divided by the power spectrum function of the calibration signal are obtained after calibration Ultrasonic echo power spectrum function.
Optionally, the power spectrum function for calculating calibration signal, including:
The receptance function of ultrasound measurement system, ultrasound echo signal function and Dirac function are subjected to convolution algorithm, The ultrasound echo signal function of calibration signal is obtained, the independent variable of the Dirac function, which is included, to be used to indicate fully reflecting surface with surpassing The distance between ultrasonic transducer of sound measurement system parameter;
To seeking conjugation after the ultrasound echo signal function progress Fourier transformation of the calibration signal, calibration signal is obtained Power spectrum function.
Optionally, in the power spectrum slope corresponding to described each diameter of calculating, each diameter and power spectrum slope are obtained Between corresponding relation after, methods described also includes:
Store the corresponding relation between each diameter and power spectrum slope.
It is of the invention compared with traditional ultrasonic micro-imaging technique and other non-destructive testing technology, advantage is:
First, compared to traditional ultrasonic echo range parameter, the frequency spectrum parameter of the ultrasound echo signal after calibration has The advantage of device independence.Ultrasonic reflection of the spectrum slope extracted from the ultrasound echo signal after calibration only with microfissure Coefficient function is relevant, and the systematic parameter such as frequency response, gain with ultrasound measurement system is unrelated, therefore, using spectrum slope As imaging parameter, frequency spectrum value of consult volume can quantitatively reflect the characteristic dimension of microfissure.
Second, traditional ultrasonic detecting technology based on ultrasonic echo intensity, to obtain higher resolution ratio then needs to carry The frequency and bandwidth of high system, but high frequency ultrasound wave attenuation is big, penetration depth is shallow, so limiting traditional ultrasound detection skill Imaging depth of the art for microfissure.And the present invention is handled using the frequency domain to ultrasound echo signal, frequency in low frequency band is obtained Quantitative relationship between domain slope and microfissure characteristic dimension, can reach the microfissure to sub-wavelength dimensions in low-frequency band The purpose of quantitative measurment, while being also to improve detection depth.
3rd, the present invention have Noninvasive, without ionising radiation, safety is cheap the characteristics of.
It should be appreciated that the general description of the above and detailed description hereinafter are only exemplary, this can not be limited Invention.
Brief description of the drawings
Accompanying drawing herein is merged in specification and constitutes the part of this specification, shows the implementation for meeting the present invention Example, and for explaining principle of the invention together with specification.
Fig. 1 is the structure for being used to detect the ultrasound measurement system in deep structure crack provided in one embodiment of the invention Schematic diagram;
Fig. 2 is the flow chart of the detection method for deep structure crack provided in one embodiment of the invention;
Fig. 3 a are schematic diagrames when testing cylindrical microfissure provided in one embodiment of the invention;
Fig. 3 b are the functional arrangements of the power spectrum provided in one embodiment of the invention;
Fig. 3 c are the corresponding relation schematic diagrames of the microfissure diameter and power spectrum slope provided in one embodiment of the invention;
Fig. 4 a are the functional arrangements of the power spectrum provided in another embodiment of the present invention;
Fig. 4 b are that the corresponding relation of the microfissure diameter and power spectrum slope provided in another embodiment of the present invention is illustrated Figure;
Fig. 5 is that differentiation of the ultrasound measurement system to different size cylindrical fractured zones is utilized in one embodiment of the invention Schematic diagram.
Embodiment
Here exemplary embodiment will be illustrated in detail, its example is illustrated in the accompanying drawings.Following description is related to During accompanying drawing, unless otherwise indicated, the same numbers in different accompanying drawings represent same or analogous key element.Following exemplary embodiment Described in embodiment do not represent and the consistent all embodiments of the present invention.On the contrary, they be only with it is such as appended The example of the consistent apparatus and method of some aspects be described in detail in claims, the present invention.
Shown in Figure 1, it is the ultrasound for being used to detect deep structure crack provided in one embodiment of the invention The structural representation of measuring system, the ultrasound measurement system include ultrasonic transducer 110, signal amplifier 120, capture card 130, Digital analog converter 140, analog-digital converter 150 and computing module 160.
Computing module 160 is connected with the input of digital analog converter 140, and output end and the signal of digital analog converter 140 are put Big device 120 is connected;Output end of the computing module 160 also with analog-digital converter 150 is connected, the input of analog-digital converter 150 with Capture card 130 is connected, and capture card 130 is connected with signal amplifier 120;Signal amplifier 120 is connected with ultrasonic transducer 110.
In actual applications, computing module 160 is to the output digit signals of digital analog converter 140, and digital analog converter 140 will connect The data signal received is converted to ultrasonic pulse, and ultrasonic pulse is sent into signal amplifier 120,120 pairs of signal amplifier Ultrasonic pulse is amplified.Ultrasonic pulse after amplification is sent to ultrasonic transducer 110, ultrasonic transduction by signal amplifier 120 Device 110 launches the ultrasonic pulse.
Ultrasonic transducer 110 receives the ultrasonic pulse reflected, and the ultrasonic pulse received is sent into signal amplification Device 120, the ultrasonic pulse that capture card 130 is received to signal amplifier 120 is acquired, and the ultrasonic pulse collected is sent out Deliver to analog-digital converter 150, the ultrasonic pulse received is converted into data signal by analog-digital converter 150, and by obtained number Word signal is sent to computing module 160.
Optionally, the exomonental direction of ultrasonic transducer 110 is adjustable.
In general, ultrasonic transducer 110 can be for launching ultrasonic wave and receiving the ultrasonic transmitter-receiver of ultrasonic wave.
Ultrasound measurement system in various embodiments of the present invention can be placed in microscope, as a microscopical part, It can also be microscope.
In actual applications, there is one-to-one relationship in the diameter of efficiency value and microfissure, and theoretical calculation mode is as follows:
Ultrasonic echo power spectrum function after S1, acquisition calibration, diameter of the ultrasonic echo power spectrum function only with microfissure Parameter is related;
In the ultrasonic echo power spectrum function after obtaining calibration, following steps are generally included:
First, the receptance function of ultrasound measurement system, the ultrasonic pulse of transmitting and ultrasonic reflection coefficient function are entered Row convolution algorithm, obtains ultrasound echo signal function;
Assuming that ultrasound measurement system launches ultrasonic pulse p to detected material0(t), due to the fine fisssure being detected in material Contain the impurity different from adjacent material in gap, with the acoustic impedance different from adjacent material, therefore ultrasonic reflection can be formed, instead The ultrasonic echo being emitted back towards is p (t), and ultrasonic echo intensity is proportional to the ultrasonic reflection coefficient A (z) of microfissure.For cylinder Or the microfissure of sheet, ultrasonic reflection coefficient can be write as microfissure diameter d function, i.e. ultrasonic reflection coefficient function For:
A(z;D)=A0,||z||≤d/2;A(z;=0, d) | | z | | > d/2 (1)
Wherein, A0For ultrasonic reflection coefficient, z is the acoustic axis direction of ultrasonic transducer.Therefore, ultrasound echo signal function P (t) can be written as:
WhereinConvolution is represented, h (t) is the receptance function of ultrasound measurement system, and p0 (t) is the ultrasonic pulse of transmitting, and c is The velocity of sound in material.
Second, Fourier transformation is carried out to the ultrasound echo signal function, the ultrasonic signal function of frequency domain is obtained;
Fourier transformation is made to formula (2), the ultrasonic signal expression formula of frequency domain can be obtained:
P (f)=H (f) P0(f)Φ(f;d) (3)
Wherein, H (f) and Ф (f;D) it is respectively h (t) and A (ct/2;D) Fourier transformation.
3rd, conjugation is asked to the ultrasonic signal function, the power spectrum function of ultrasound echo signal is obtained;
Ultrasound echo signal power spectrum s (f) is:
Wherein asterisk subscript * represents conjugate complex number.
4th, calculate the power spectrum function of calibration signal;
When calculating the power spectrum function of calibration signal, first by the receptance function of ultrasound measurement system, standard signal Ultrasonic pulse and Dirac function carry out convolution algorithm, obtain the ultrasound echo signal function of calibration signal, the dirac Argument of function, which is included, to be used to indicate the distance between the ultrasonic transducer of fully reflecting surface and ultrasound measurement system parameter;Then To seeking conjugation after the ultrasound echo signal function progress Fourier transformation of the calibration signal, the power spectrum letter of calibration signal is obtained Number.
Because the power spectrum s (f) measured is not only relevant with microfissure acoustical reflection factor function, audible signal work(is also relied on Rate spectral property P0(f) with ultrasound measurement system frequency response characteristic H (f).So, in order to eliminate their influence, it can introduce One calibration process.Assuming that same ultrasound measurement system, perpendicular to a ultrasound total reflection interface transmitting ultrasonic pulse p0(t), The ultrasound echo signal for coming from the ultrasound reflecting interface is denoted as pc(t), the signal is used as calibration signal.Using same method, The calibration signal that can be write out is:
Wherein δ (t) is Dirac function, z0It is the distance for being totally reflected interface distance ultrasonic transducer.Fu is made to formula (5) In leaf transformation, its power spectrum expression formula s can be obtainedc(f) expression formula:
5th, the power spectrum function of the ultrasound echo signal divided by the power spectrum function of the calibration signal are calibrated Ultrasonic echo power spectrum function afterwards.
Therefore, with the ultrasonic echo power spectrum s (f) divided by the power s of calibration signal of detected materialc(f) H can, be eliminated And P (f)0(f) influence, i.e.,:
S (f)=s (f)/sC(f)=Φ (f;d)Φ*(f;d) (7)
Characteristic dimension d (diameter, thickness) of the ultrasound echo signal power spectrum only with microfissure after calibration has one-to-one corresponding Relation, it is and unrelated with measuring system frequency response characteristic and transmitting ultrasonic signal spectral characteristic etc..According to formula (1) to formula (7) the ultrasonic echo power spectrum after the calibration corresponding to given microfissure characteristic dimension d, theoretical can be solved, S (f) is denoted as.
S2, ultrasonic echo power spectrum function is converted into logarithmic coordinates, in the range of bandwidth, sat to carrying out logarithm The ultrasonic echo power spectrum function of subscript conversion carries out linear fit, obtains corresponding slope function after linear fit, will be described oblique It is independent variable that rate function, which is designated as in power spectrum slope function, the power spectrum slope function diameter parameters, power spectrum slope be because Variable;
Ultrasonic echo power spectrum function S (f) is converted into logarithmic coordinates, i.e. SdB(f)=10log10 (S (f)).In ultrasound survey In the bandwidth range of amount system, the ultrasonic echo power spectrum function S to carrying out logarithmic coordinates conversiondB(f) linear fit is done.Order L (f)=kf+a0 is the linear function on frequency f, the k and a0 optimized is selected using least square method so that SdBAnd L (f) (f) mould of error is minimum,
||S(f)-L(f)||→min;
So as to obtain in the frequency range, the power spectrum slope k of measurement signal is tested.
S3, according to the power spectrum function, calculate the power spectrum slope corresponding to each diameter, obtain each diameter and work( Corresponding relation between rate spectrum slope.
In order to allow ultrasound measurement system directly to apply the corresponding relation between each diameter and power spectrum slope, The corresponding relation calculated between each obtained diameter and power spectrum slope can be prestored to ultrasound measurement system.It is aobvious So, in actual applications, the corresponding relation between each diameter and power spectrum slope can also be stored in advance in other equipment Or on cloud server, it is above-mentioned right to storing according to the power spectrum slope that calculating is obtained when ultrasound measurement system is needed to use The equipment or cloud server that should be related to inquire about corresponding diameter value.
Fig. 2 is the flow chart of the detection method for deep structure crack provided in one embodiment of the invention, the inspection Survey method is applied in the ultrasound measurement system shown in Fig. 1, and the detection method includes:
Step 201, the first ultrasonic arteries and veins is launched to ultrasonic wave total reflection interface using the ultrasonic transducer of ultrasound measurement system Punching, obtains the first acoustic signals that the first ultrasonic pulse is reflected back, and calculates the power spectrum of the first acoustic signals, obtains the first power Spectrum;
Step 202, it is ultrasonic to transmitting second on the microfissure of testee using the ultrasonic transducer of ultrasound measurement system Pulse, obtains the second acoustic signals that the second ultrasonic pulse is reflected back, and calculates the power spectrum of the second acoustic signals, obtains the second work( Rate is composed;
In order to ensure the degree of accuracy of detection, step 201 and step 202 use same ultrasound measurement system, and hair The first ultrasonic pulse penetrated is identical with phase with the frequency of the second ultrasonic pulse, such as is ultrasonic pulse p0(t)。
In actual applications, by the first ultrasonic pulse p0(t) Fourier transformation is carried out, obtains the first acoustic signals p's (t) Power spectrum s (f), it is similar, by the first ultrasonic pulse p0(t) Fourier transformation is carried out, the second acoustic signals p is obtainedc(t) work( Rate composes sc(f)。
Step 203, by the first power spectrum divided by the second power spectrum, the power spectrum after being calibrated;
By the ultrasonic echo power spectrum s (f) from material sample divided by calibration signal power spectrum sc(f), obtain after calibration Ultrasonic echo power spectrum S (f)=s (f)/sc(f)。
According to formula (7), the power spectrum after the calibration is relevant only with the ultrasonic echo function of microfissure in material sample.
Step 204, linear fit is done to the power spectrum after calibration in predetermined low frequency band, obtains linear fit corresponding Slope value;
Power spectrum function S (f) after the calibration that measurement is obtained is converted into logarithmic coordinates, i.e. SdB(f)=10log10 (S (f)).In the bandwidth range of ultrasound measurement system, to power spectrum function SdB(f) linear fit is done.It is pass to make L (f)=kf+a0 In frequency f linear function, the k and a0 optimized is selected using least square method so that SdB(f) with the moulds of L (f) errors most It is small,
||S(f)-L(f)||→min;
So as to obtain in the frequency range, the power spectrum slope k of measurement signal is tested.
Step 205, the corresponding relation between the slope value and the diameter of microfissure that are obtained according to precalculating, obtains linear It is fitted the diameter corresponding to corresponding slope value.
In actual applications, the microfissure of testee is probably uneven, that is, the diameter for the position having is big, some positions The diameter put is small, in order to determine the distribution of microfissure diameter, to each the position tested can be needed to perform above-mentioned steps 201 to step 205 process, respectively obtain the diameter of each position, by these diameters and position correspondence arrange, will obtain The diameter distribution of the microfissure of testee.
By taking cylindrical microfissure as an example, ultrasonic pulse is launched to the position to be measured of the microfissure using ultrasonic transducer 110, The a diameter of d of microfissure of position to be measured, as shown in Figure 3 a.According to the power in formula (1-7), the theoretical calculation crack gone out after calibration Spectrum is (in units of dB).As shown in Figure 3 b, be 100 μm of cylindrical cracks power spectrum theoretical value.In 0.5~8MHz frequency ranges Make linear fit, the slope value of fitting a straight line can be obtained, further, can calculate diameter from 40 μm to 210 μ ms in Corresponding theoretical slope value, such as Fig. 3 c.
As shown in figures 4 a and 4b, a branch of ultrasonic pulse is launched to microfissure using ultrasonic transducer, sound wave is in fine fisssure Scattering is produced in gap and is reflected, and receives reflection and back scattered acoustic signals simultaneously.
Using same system, using ultrasonic transducer perpendicular to a ultrasound total reflection interface sounding ultrasonic pulse, and connect The sound wave being reflected back is received, in this, as calibration signal.
By Mathematical treatment software, the power spectrum and the power of calibration signal for the sound wave that microfissure is reflected back are calculated respectively Compose (dB is unit).The power spectrum of the reflection sound wave of microfissure is subtracted to the power spectrum of calibration signal, after being calibrated Power spectrum.Linear fit is done to power spectrum in a certain particular low frequency frequency range, a slope value can be obtained.
After the experiment value for having obtained slope, it can be closed according to the one-to-one corresponding of counted slope value and diameter in theory System, estimates the diameter of the microfissure in must testing.
Example 1:Crack is imitated using wire, wire diameter is respectively 60 μm, 100 μm, 150 μm, 200 μm, they It is embedded in agar respectively to make in 4 samples, depth is about 2cm.Using centre frequency be 4.39MHz, -6dB with a width of 4.4MHz Ultrasonic transducer, launch a branch of ultrasonic pulse, ultrasonic pulse produces reflection and scattered on the metal filament, and echo-signal is changed again Can device reception.Using same system, a branch of ultrasonic pulse is launched to a sufficiently large metal flat, and receive echo-signal.Fig. 4 a The power spectrum of 150 μ m diameter wire echo-signals after calibration is given, linear fit is made in 0.5~8MHz frequency ranges, can To obtain the slope value of fitting a straight line.Small figure is corresponding time-domain signal.Fig. 4 b give the reality of the wire of all 4 kinds of sizes Slope value is tested, compared with theoretical value, both meet ground very well.342 μm of phases corresponding with the centre frequency 4.39MHz of transducer Than illustrating that the present invention can quantitatively be detected to the microfissure of material depths.
Example 2:The diameter for taking total length to be each about 20cm is respectively 60 μm and 150 μm of wires, and they are cut into often These wire segments, are then randomly embedded in a certain plane of agar, depth is about 2cm by the section that segment length is about 1cm.Gold The area that category silk is occupied is about 2 × 2cm2, wherein, left one side of something is 60 μm of wire, right half of for 150 μm of wires.Profit It is the ultrasonic transducer of 4.39MHz, -6dB with a width of 4.4MHz with centre frequency, launches a branch of ultrasonic pulse, ultrasonic pulse exists Reflection is produced on wire and is scattered, echo-signal is received by transducer again.Sample levels are placed in stepper motor platform, point 2cm is not moved with 1mm step-length on x directions and y directions, wire region and a little detected one time, 400 are detected altogether Point.The power spectrum after the calibration for the echo-signal that each test position is measured is made respectively, and makees line in 0.5~8MHz frequency ranges Property fitting, the corresponding slope value of each detecting location can be obtained.Using this slope value as imaging parameters, Fig. 5 is obtained.According to Fig. 5, can very simply distinguish the cylindrical crack of two kinds of sizes.Calculate two-part G-bar in whole imaging region Value, is respectively -2.34 ± 0.89dB/MHz and -4.39 ± 0.59dB/MHz, according to Fig. 3 c theoretical value, we are estimated that Two-part diameter is about 54.6 μm and 185.2 μm, this and 60 μm of actual value, 150 μm it is fairly close.With the center frequency of transducer Corresponding 342 μm of rate 4.39MHz is compared, and the present invention can quantitatively be detected to the microfissure of material depths.
In summary, ultrasonic measurement method proposed by the present invention, compared to traditional ultrasonic echo range parameter, after calibration The frequency spectrum parameter of ultrasound echo signal there is device independence.In addition, at using the frequency domain to ultrasound echo signal Reason, obtains the quantitative relationship between frequency domain slope and microfissure characteristic dimension in low frequency band, can reach in low-frequency band To the purpose of the microfissure quantitative measurment of sub-wavelength dimensions, while being also to improve detection depth.
Those skilled in the art will readily occur to its of the present invention after the invention that specification and practice are invented here is considered Its embodiment.The application be intended to the present invention any modification, purposes or adaptations, these modifications, purposes or Person's adaptations follow the general principle of the present invention and the common knowledge in the art do not invented including the present invention Or conventional techniques.Description and embodiments are considered only as exemplary, and true scope and spirit of the invention are by following Claim is pointed out.
It should be appreciated that the invention is not limited in the precision architecture for being described above and being shown in the drawings, and And various modifications and changes can be being carried out without departing from the scope.The scope of the present invention is only limited by appended claim.

Claims (8)

1. a kind of ultrasound measurement system for being used to detect deep structure crack, it is characterised in that the ultrasound measurement system includes Ultrasonic transducer, signal amplifier, capture card, digital analog converter, analog-digital converter and computing module, wherein:
The computing module is connected with the input of the digital analog converter, the output end of the digital analog converter and the signal Amplifier is connected;
Output end of the computing module also with the analog-digital converter is connected, and the input of the analog-digital converter is adopted with described Truck is connected, and the capture card is connected with the signal amplifier;
The signal amplifier is connected with the ultrasonic transducer.
2. ultrasound measurement system according to claim 1, it is characterised in that the ultrasonic transducer is for launching ultrasound Ripple and the ultrasonic transmitter-receiver for receiving ultrasonic wave.
3. ultrasound measurement system according to claim 1 or 2, it is characterised in that the ultrasound measurement system is placed in aobvious In micro mirror, or, the ultrasound measurement system is microscope.
4. a kind of detection method for deep structure crack, it is characterised in that methods described is applied to described in claim 1 In ultrasound measurement system, methods described includes:
Launch the first ultrasonic pulse to ultrasonic wave total reflection interface using the ultrasonic transducer of the ultrasound measurement system, obtain institute The first acoustic signals that the first ultrasonic pulse is reflected back are stated, the power spectrum of first acoustic signals is calculated, obtains the first power Spectrum;
Ultrasonic transducer using the ultrasound measurement system is obtained to the second ultrasonic pulse is launched on the microfissure of testee The second acoustic signals that second ultrasonic pulse is reflected back, calculate the power spectrum of second acoustic signals, obtain the second work( Rate is composed;
By first power spectrum divided by second power spectrum, the power spectrum after being calibrated;
Linear fit is done to the power spectrum after the calibration in predetermined low frequency band, the corresponding slope value of linear fit is obtained;
Corresponding relation between the slope value and the diameter of microfissure that are obtained according to precalculating, obtains the linear fit correspondence Slope value corresponding to diameter.
5. method according to claim 4, it is characterised in that methods described also includes:
Obtain the ultrasonic echo power spectrum function after calibration, diameter parameters of the ultrasonic echo power spectrum function only with microfissure It is related;
The ultrasonic echo power spectrum function is converted into logarithmic coordinates, in the range of bandwidth, to carrying out logarithmic coordinates The ultrasonic echo power spectrum function of conversion carries out linear fit, corresponding slope function after linear fit is obtained, by the slope It is independent variable that function, which is designated as diameter parameters in power spectrum slope function, the power spectrum slope function, and power spectrum slope is because becoming Amount;
According to the power spectrum function, the power spectrum slope corresponding to each diameter is calculated, each diameter is obtained oblique with power spectrum Corresponding relation between rate.
6. method according to claim 5, it is characterised in that the acquisition ultrasonic echo power spectrum function, including:
The receptance function of ultrasound measurement system, the ultrasonic pulse of transmitting and ultrasonic reflection coefficient function are subjected to convolution fortune Calculate, obtain ultrasound echo signal function;Fourier transformation is carried out to the ultrasound echo signal function, the ultrasound letter of frequency domain is obtained Number function;
Conjugation is asked to the ultrasonic signal function, the power spectrum function of ultrasound echo signal is obtained;
Calculate the power spectrum function of calibration signal;
By the power spectrum function of the ultrasound echo signal divided by the power spectrum function of the calibration signal, surpassing after being calibrated Sound echo power spectral function.
7. method according to claim 6, it is characterised in that the power spectrum function of the calculating calibration signal, including:
The receptance function of ultrasound measurement system, the ultrasonic pulse of standard signal and Dirac function are subjected to convolution algorithm, obtained To the ultrasound echo signal function of calibration signal, the independent variable of the Dirac function, which is included, to be used to indicate fully reflecting surface and ultrasound The distance between ultrasonic transducer of measuring system parameter;
To seeking conjugation after the ultrasound echo signal function progress Fourier transformation of the calibration signal, the power of calibration signal is obtained Spectral function.
8. method according to claim 5, it is characterised in that oblique in the power spectrum corresponding to described each diameter of calculating Rate, is obtained after the corresponding relation between each diameter and power spectrum slope, methods described also includes:
Store the corresponding relation between each diameter and power spectrum slope.
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