CN103814056A - 树脂组合物 - Google Patents
树脂组合物 Download PDFInfo
- Publication number
- CN103814056A CN103814056A CN201280044064.0A CN201280044064A CN103814056A CN 103814056 A CN103814056 A CN 103814056A CN 201280044064 A CN201280044064 A CN 201280044064A CN 103814056 A CN103814056 A CN 103814056A
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- resin combination
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- resin
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Abstract
本发明要解决的技术问题在于防止硬化后在树脂组合物中的迁移且抑制树脂组合物保存中硬化反应,具体就是抑制树脂组合物以液态使用时在保存中增粘。故,本发明目的就在于提供一种保存特性优异、硬化后抗迁移性优异的高可靠性树脂组合物。该树脂组合物特征在于,含有(A)环氧树脂、(B)硬化剂、和(C)从特定构造的母育酚类和生育三烯酚类等化合物所构成的群中选出的至少1种物质。
Description
技术领域
本发明涉及树脂组合物,尤其是涉及适于倒装芯片型(flip chip)半导体元件封装的树脂组合物。
背景技术
一般,半导体装置具备衬底、被安装于衬底上的半导体元件,将半导体元件和衬底之间用凸块(bump)或绑定线(bonding wire)等电连接后用树脂组合物封装而进行制造。
近年来,为适应液晶驱动IC等半导体元件的高密度化和高输出化的要求,安装半导体元件的衬底的布线图案(wiring pattern)的密脚距(fine pitch)化不断发展。因该密脚距化和伴随高输出化而生的高电压化,布线图案间的迁移(migration)令人担忧。迁移,它是布线图案金属因电化学反应而洗脱,引发电阻值降低的现象。在此,布线图案在半导体装置工作时作为电极而发挥作用。图1给出说明电极为Cu时的迁移的模式图。迁移,首先是在阳极2,按反应式:Cu+2(OH)→2(CuOH)有Cu洗脱,Cu(OH)在衬底1上朝实线箭头指示方向即阴极3方向移动,而在阴极3,按反应式:CuOH+H3O+→Cu+2H2O有Cu在衬底1上朝虚线箭头指示方向即阳极2方向析出。通常,布线图案用环氧树脂系液态树脂组合物构成的半导体封装剂封装,但因来自环氧树脂所吸附H2O的OH或H3O+,将产生迁移。进一步,若周围环境中存在Cl-离子,迁移将飞跃式加速。该Cl-离子通常是作为环氧树脂中杂质而存在的。迁移产生时,布线图案阳极与阴极间的电阻值变低,当迁移发展时,将导致阳极与阴极短路。另外,Cu(OH),正确地讲,有时是Cu(OH)2,有时是Cu(OH)+,当为Cu(OH)2时,因其浓度差而朝阴极侧移动;当为Cu(OH)+时则电移动。
为防止这种迁移,被报道过一种含有从苯并三唑(benzotriazole)类、三嗪(triazine)类和此两者的异氰脲(isocyanuric acid)类中选出的至少1种可用物的树脂组合物,用作离子结合剂(专利文献1)。
然而却存在以下问题。当把苯并三唑类等往环氧树脂中分散时,室温下环氧树脂和苯并三唑类的硬化反应前行不停,粘度显著增大。另外,苯并三唑类虽具有防止迁移效果,但却不能防止电极部分的铜腐蚀。
已有技术文献
专利文献
专利文献1:日本特开2008-98646号公报
发明内容
技术问题
本发明要解决的技术问题在于防止硬化后在树脂组合物中的迁移且抑制树脂组合物保存中硬化反应,具体就是抑制树脂组合物以液态使用时在保存中增粘。故,本发明目的就在于提供一种保存特生优异、硬化后抗迁移性优异的高可靠性树脂组合物。
技术方案
本发明涉及通过具有以下构成而解决了上述问题的树脂组合物。
[1]一种树脂组合物,其特征在于,含有(A)环氧树脂、(B)硬化剂和(C)从通式(1)所表示的化合物和通式(2)所表示的化合物所构成的群中选出的至少1种物质;
通式(1)中,R1、R2、R3和R4各自独立,分别是氢或碳数1~3的烷基,m为1~5的整数;
通式(2)中,R5、R6、R7和R8各自独立,分别是氢或碳数1~3的烷基,n为1~5的整数。
[2]按上述[1]所述的树脂组合物,其中,(C)成分是从5,7,8-三甲基母育酚(5,7,8-trimethyltocol)、5,8-二甲基母育酚(5,8-dimethyltocol)、7,8-二甲基母育酚(7,8-dimethyltocol)、8-甲基母育酚(8-methyltocol)、5,7,8-三甲基生育三烯酚(5,7,8-trimethyltocotrienol)、5,8-二甲基生育三烯酚(5,8-dimethyltocotrienol)、7,8-二甲基生育三烯酚(7,8-dimethyltocotrienol)和8-甲基生育三烯酚(8-methyltocotrienol)构成的群选择的至少一种。
[3]按上述[1]所述的树脂组合物,其中,还含有(D)偶联剂。
[4]按上述[1]所述的树脂组合物,其中,还含有(E)填料。
[5]按上述[1]所述的树脂组合物,其中,还含有(F)橡胶成分。
[6]按上述[1]所述的树脂组合物的硬化物,其中,相对树脂组合物100质量份,(C)成分为0.01~10质量份。
[7]一种半导体封装剂,其中,含有上述[1]所述的树脂组合物。
[8]一种半导体装置,其中,具有使用上述[7]所述的半导体封装剂封装的倒装芯片型半导体元件。
发明的效果
根据本发明[1],能提供保存特性优异,具体就是抑制树脂组合物以液态使用时在保存中增粘,且硬化后抗迁移性优异的树脂组合物。
根据本发明[7],能容易地提供抗迁移性优异的高可高性的半导体装置。
附图说明
图1是说明电极为Cu时的迁移的模式图。
图2是说明树脂组合物浇注性评价方法的模式图。
图3是用实施例4的树脂组合物作了抗迁移性评价后的照片。
图4是用比较例2的树脂组合物作了抗迁移性评价后的照片。
具体实施方式
本发明树脂组合物特征在于,含有(A)环氧树脂、(B)硬化剂和(C)从通式(1)所表示的化合物和通式(2)所表示的化合物所构成的群中选出的至少1种物质;
通式(1)中,R1、R2、R3和R4各自独立,分别是氢或碳数1~3的烷基,m为1~5的整数;
通式(2)中,R5、R6、R7和R8各自独立,分别是氢或碳数1~3的烷基,n为1~5的整数。
作为(A)成分,在把树脂组合物用做底部填充胶(underfill material)的场合,优选液态环氧树脂,可例举出:液态双酚A型环氧树脂(bisphenol Atype epoxy resin)、液态双酚F型环氧树脂(bisphenol F type epoxy resin)、液态萘型环氧树脂(naphthalene type epoxy resi n)、液态氨基苯酚型环氧树脂(aminophenol type epoxy resin)、液态氢化双酚型环氧树脂(hydrogenatedbisphenol type epoxy resin)、液态脂环式环氧树脂、液态醇醚型环氧树脂(alcohol ether type epoxy resin)、液态环状脂肪族型环氧树脂、液态芴型环氧树脂(fluorene type epoxy resin)、液态硅氧烷系环氧树脂(si loxanesystem epoxy resin)等,但出于硬化性、耐热性、结合性和耐久性观点,优选液态双酚A型环氧树脂、液态双酚F型环氧树脂、液态氨基苯酚型环氧树脂、液态硅氧烷系环氧树脂。另外,以薄膜状等固体来使用树脂组合物的场合,则(A)成分优选为固体环氧树脂,而作为固体环氧树脂则可举出作为液态环氧树脂例举之物的固体,从薄膜成型生观点,优选苯氧基树脂(phenoxy resin)。还有,出于粘度调整的观点,优选环氧树脂当量为80~250g/eq。作为市场销售产品,可例举出新日铁化学公司制双酚F型环氧树脂(商品名:YDF8170)、新日铁化学公司制双酚F型环氧树脂(商品名:YDF870GS)、三菱化学公司制氨基苯酚型环氧树脂(等级:JER630,JER630LSD)、DIC制萘型环氧树脂(商品名:HP4032D)、Moment i ve Performanc e公司制硅氧烷系环氧树脂(商品名:TSL9906)、新日铁化学公司制1,4-环己烷二甲醇缩水甘油醚(1,4-cyclohexanedimethanoldiglycidyl ether)(品名:ZX1658GS)等。(A)成分既可单独使用也可2种以上并用。
(B)成分,可例举出酸酐、胺系硬化剂、苯酚系硬化剂。作为酸酐可例举出四氢邻苯二甲酸酐(tetrahydrophthal ic anhydride)、六氢邻苯二甲酸酐(hexahydrophthal ic anhydride)、甲基四氢邻苯二甲酸酐(methyltetrahydrophthalic anhydride)、甲基六氢邻苯二甲酸酐(methylhexahydrophthal ic anhydride)、甲基纳迪克酸酐(methyl nadicanhydride)、氢化甲基纳迪克酸酐(hydrogenated methyl nadic anhydride)、三烷基四氢邻苯二甲酸酐(trialkyltetrahydrophthalic anhydride)、甲基环己烷四羧酸二酐(methylcyclohexene tetracarboxyl icdianhydride)、邻苯二甲酸酐(phthal ic anhydride)、偏苯三甲酸酐(trimellitic anhydride)、均苯四酸酐(pyromellitic anhydride)、苯酮四羧酸二酐(benzophenonetetracarboxyl ic dianhydride)、乙二醇双脱水偏苯三酸酯(ethylene glycol bi sanhydrotrimellitate)、甘油双(脱水偏苯三酸酯)单乙酸酯(glycerin bis(anhydrotrimellitate)monoacetate)、十二烯基琥珀酸酐(dodecenylsuccinic anhydride)、脂肪族二元酸聚酸酐(aliphatic dibasicacidpolyanhydride)、氯茵酸酐(chlorendic anhydride)、甲基丁烯基四氢邻苯二甲酸酐(methylbutenyltrahydrophthalic anhydride)、烷基化四氢邻苯二甲酸酐(alkylation tetrahydrophthal ic anhydride)、甲基HIMIC酸酐、烯基取代的琥珀酸酐、戊二酸酐(glutaric anhydride)等,优选甲基丁烯基四氢邻苯二甲酸酐。作为胺系硬化剂,可例举出链状脂肪族胺、环状脂肪族胺、脂肪芳香族胺、芳香族胺等,优选芳香族胺。作为苯酚系硬化剂,可例举出苯酚酚醛(phenol novolac)、邻甲酚醛(cresol novolac)等,优选苯酚酚醛。作为市场销售产品,可例举三菱化学公司制酸酐(等级:YH306,YH307)、日本化药公司制胺硬化剂(商品名:KAYAHARD A-A)、明和化成制苯酚系硬化剂(商品名:MEH8005)等。(B)成分既可单独使用也可2种以上并用。
(C)成分通常为液体,抑制树脂组合物保存时硬化反应,具体就是抑制树脂组合物以液态使用时在保存时增粘,且提高硬化后抗迁移性。至于(C)成分提高硬化后树脂组合物抗迁移性的理由,被认为是由于(C)成分中的环氧乙烷环(四氢吡喃(tetrahydropyran)环)与金属铜或Cu(OH)等的Cu离子配位键合的缘故。另外、环氧乙烷环由于不具有太大的电子给予性,所以与譬如含有带偶氮基或迭氮基的环状结构的化合物不同,能抑制树脂组合物保存中硬化反应造成的增粘。另外,与环氧乙烷环结合的烃(见通式(1)或通式(2)注)被认为有助于(C)成分的液体化。
进一步,(C)成分由于是液体,所以能做到在(A)成分里含有所期望的量。详细说明的话就是这么回事:一般,制造树脂组合物时,把(A)成分和(C)成分混合后再混合(B)成分,在此,往(A)成分混合固体粉体材料时,若不预先将(A)成分和粉体材料混合而制作母体胶料,则难以获得均匀的树脂组合物,故母体胶料制作工序就成为必须,这样能获得均匀的母体胶料的(A)成分和粉体材料之比率就受到限制,对此,由于(C)成分为液体,所以不需要制作母体胶料,就能做到在(A)成分里含有所期望的量。
(C)成分是从通式(1)所表示的化合物和通式(2)所表示的化合物所构成的群中选出的至少1种物质;尤其优选为母育酚类或生育三烯酚类。
通式(1)中,R1、R2、R3和R4各自独立,分别是氢或碳数1~3的烷基,优选氢或碳数1的烷基;m为1~5的整数,优选为3。
通式(2)中,R5、R6、R7和R8各自独立,分别是氢或碳数1~3的烷基,优选氢或碳数1的烷基;n为1~5的整数,优选为3。
出于树脂组合物保存特性或硬化后树脂组合物抗迁移性的观点,母育酚类优选5,7,8-三甲基母育酚(α-生育酚)、5,8-二甲基母育酚(β-生育酚)、7,8-二甲基母育酚(γ-生育酚)、8-甲基母育酚(6-生育酚),而生育三烯酚类则优选5,7,8-三甲基生育三烯酚(α-生育三烯酚)、5,8-二甲基生育三烯酚(β-生育三烯酚)、7,8-二甲基生育三烯酚(γ-生育三烯酚)、8-甲基生育三烯酚(6-生育三烯酚)。作为(C)成分譬如可使用和光纯药工业在市场上销售的试剂。(C)成分既可单独使用也可2种以上并用。
树脂组合物,出于良好反应性和可靠性观点,相对(A)成分环氧树脂当量1,(B)成分酸酐当量优选为0.6~1.2,更优选0.65~1.1。当为0.6以上时,反应性、硬化后树脂组合物的根据PCT试验的耐湿可靠性和抗迁移性良好,而当为1.2以下时,则增粘倍数变得过高,空穴的产生被抑制。
相对于树脂组合物100质量份,(C)成分最好含有0.01~10质量份,更优选含有0.01~5质量份。当为0.01质量份以上时,抗引线腐蚀性良好;当为10质量份以下时,能抑制树脂组合物增粘率上升。
还有,相对于树脂组合物硬化物100质量份,(C)成分最好含有0.01~10质量份,更优选含有0.01~5质量份。在此,树脂组合物,由于硬化时质量减少较少、大约为1~2质量%,(C)成分的挥发量非常小,所以硬化物中的优选的(C)成分含有量和在树脂组合物中的含有量一样。在此,(C)成分的定量分析通过质量分析法进行。
树脂组合物,出于密着性观点,优选还含有(D)成分即偶联剂。作为(D)成分,可例举出:3-缩水甘油醚氧基丙基三甲氧基硅烷
(3-glyc idoxypropyl trimethoxys i lane)、3-氨基丙基三甲氧基硅烷
(3-aminopropyltrimethoxysi lane)、乙烯基三甲氧基硅烷
(vinyltrimethoxysi lane),p-苯乙烯基三甲氧基硅烷
(p-styryltrimethoxysilane)、3-甲基丙烯酰氧基丙基甲基三甲氧基硅烷
(3-methacryloxypropylmethyltrimethoxysilane)、3-丙烯酰氧基丙基三甲氧
基硅烷(3-acryloxypropyltrimethoxysilane)、3-脲基丙基三乙氧基硅烷
(3-ureidopropyltriethoxysilane)、3-巯基丙基三甲氧基硅烷
(3-mercaptopropyltrimethoxysilane)、双(三乙氧基硅基丙基)四硫化物
(bis(triethoxysilylpropyl)tetrasulfide)、3-异氰酸酯基丙基三乙氧基硅烷(3-isocyanatepropyltriethoxysilane)等。出于密着性观点,优选3-缩水甘油醚氧基丙基三甲氧基硅烷、3-氨基丙基三甲氧基硅烷。作为市场销售产品可例举出信越化学工业制KBM403、KBE903、KBE9103等。(D)成分既可单独使用也可2种以上并用。
优选树脂组合物还含有(E)成分即填料。作为(E)成分,可例举出硅溶胶(colloidal silica)、疏水性二氧化硅、微细二氧化硅、纳米二氧化硅(Nano-silica)等二氧化硅、丙烯酸珠(acrylbeads)、玻璃珠、聚氨酯珠、膨润土、乙炔黑、科琴碳黑等。另外,作为(E)成分的填料的平均粒径(非粒状时为其平均最大径)虽并无特别限定,但在把填料均匀地分散于树脂组合物中这点上,还有从树脂组合物用做底部填充胶时浇注性优异等理由出发,优选为0.01~50μm。若不足0.01μm,则树脂组合物的粘度上升,当做底部填充胶使用时浇注性恐怕要劣化。而若超过50μm,则让填料均匀地往树脂组合物中分散恐怕要变得困难。更优选作为(E)成分的填料的平均粒径为0.05~30μm,进一步更优选填料的平均粒径为0.1~10μm。作为市场销售产品,可例举出扶桑化学工业制非晶态二氧化硅(商品名:SP03B,平均粒径:200nm)、NIPPON AEROSIL公司制疏水性气相二氧化硅(Fumed silica)(商品名:R805,平均粒径:20nm)等。在此,填料的平均粒径利用动态光散射纳米粒度分析仪(nano track particlesize analyzer of dynamiclight scattering)测定。(E)成分既可单独使用也可2种以上并用。
出于缓冲树脂组合物硬化物应力的观点,优选树脂组合物还含有(F)成分即橡胶成分。作为(F)成分,可例举出丙烯橡胶、聚氨酯橡胶、硅橡胶、丁二烯橡胶。(F)成分能使用固体的。其形态无特别限定,譬如可使用粒子状、粉末状、塑粒状(pellet type)的。当为粒子状时,平均粒径譬如是10~750nm,优选为30~500nm,更优选为50~300nm。(F)成分也可使用常温下液态的,譬如可例举出平均分子量比较低的聚丁二烯、丁二烯-丙烯腈共聚物、聚异戊二烯、聚氧丙烯、聚二有机硅氧烷(polydiorganosi loxane)。还有,(F)成分能使用末端带有与环氧基反应的基团的物质,这些无论是固体还是液态哪种形态的都可。作为市场销售产品,可例举出宇部兴产公司制ATBN1300-16、CTBN1008-SP等。(F)成分既可单独使用也可2种以上并用。
树脂组合物,若还含有(G)成分即硬化促进剂,就能获得适当的硬化性,所以优选。硬化促进剂并无特别限定,只要是环氧树脂硬化促进剂即可,可使用公知的。譬如可例举出胺系硬化促进剂、磷系硬化促进剂等。
作为胺系硬化促进剂,可例举出2-甲基咪唑(2-methyl imidazol)、2-十一烷基咪唑(2-undecyl imidazole)、2-十七烷基咪唑(2-heptadecyl imidazole)、2-乙基-4-甲基咪唑(2-ethyl-4-methyl imidazol)、,2-苯基咪唑(2-phenylimidazole)、2-苯基-4-甲基咪唑(2-phenyl-4-methylimidazol)等咪唑化合物、2,4-二氨基-6-[2-(2-甲基-1-咪唑)乙基]-1,3,5-三嗪(2,4-Diamino-6-[2-(2-methyl-1-imidazolyl)ethyl]-1,3,5-triazine)等三嗪化合物、1,8-二氮杂双环[5.4.0]十一碳-7-烯(1,8-Diazabicyclo[5.4.0]-7-undecene)(DBU)、三亚乙基二胺,苄基二甲胺,三乙醇胺等叔胺化合物。其中优选2,4-二氨基-6-2-(2-甲基-1-咪唑)乙基]-1,3,5-三嗪、2-苯基-4-甲基咪唑。还有,作为磷系硬化促进剂,可例举出三苯基磷(triphenylphosphine)、三丁基磷(tributylphosphine)、三(对甲苯基)膦(tri s(p-methylphenyl)phosphine)、三(壬苯基)膦(tri s(nonylphenyl)phosphine)等。硬化促进剂既可单独使用也可2种以上并用。另外,(B)成分使用酸酐系硬化剂时,出于硬化性和保存稳定性的观点,优选使用胺系硬化促进剂。
(G)成分既可是用环氧树脂等加合的加合型也可是微胶囊型。作为微胶囊型市场销售产品,可例举出旭化成电子材料制微胶囊化潜在性硬化剂(商品名:HX3088)等。
相对于树脂组合物100质量份,(D)成分最好含有0.01~15质量份,更优选含有0.05~10质量份,进一步优选含有0.1~5质量份。当为0.05质量份以上时,密着性提高,根据PCT试验的耐湿可靠性更良好;而当为15质量份以下时,树脂组合物发泡被抑制。
相对于树脂组合物100质量份,(E)成分最好含有0.1~90质量份,更优选含有0.5~60质量份。当为0.5~60质量份时,不但能降低线膨胀系数而且还能避免浇注性恶化。
相对于树脂组合物100质量份,(F)成分最好含有0.1~30质量份,更优选含有0.5~20质量份,进一步更优选含有1~10质量份。当为0.1质量份以上时,能缓和树脂组合物硬化物应力;而当为30质量份以下时则耐湿可靠性不降低。
相对于树脂组合物100质量份,(G)成分最好含有大于0.1质量份而小于5质量份,更优选含有0.2~4质量份,进一步更优选含有0.3~3.0质量份。当为0.1质量份以上时,反应性良好;而当为5质量份以下时,则耐湿可靠性良好,而且增粘倍数稳定。
在不有损于本发明目的的范围内,还可根据需要往本发明树脂组合物里配合碳黑等顔料、染料、消泡剂、防氧化剂、应力缓冲剂以及其他添加剂等。
本发明树脂组合物譬如能这样得到:对于(A)成分~(C)成分和其它添加剂等同时地或分别地,一边根据需要进行加热处理一边进行搅拌、溶融、混合、分散。作为进行这种混合、搅拌、分散等的装置,无特别限定,可使用具备搅拌和加热装置的捣碎机、三辊轧机、球磨机、行星式搅拌机(p]anetary mi xer)、珠磨机(beads mil1)等。另外,把这些装置适当组合起来使用也可。
出于浇注性的观点,优选本发明树脂组合物在温度25℃下的粘度为50~2000mPa·s。在此,粘度用东机产业公司制E型粘度计(型号:TVE-22H)测定。
本发明树脂组合物用点胶机(dispenser)、印刷等形成或涂布于衬底的希望位置。在此,树脂组合物形成于柔生线路板等的衬底与半导体元件之间,并至少使一部分接于衬底的布线上。
本发明树脂组合物的硬化最好是在80~300℃下进行,而且,从作为半导体封装剂使用时提高生产性的观点出发,优选在200秒以内硬化。
另外,虽然半导体元件、衬底都可使用所希望的,但是优选使用倒装芯片键合的半导体元件与COF封装用衬底的组合。
这样,本发明树脂组合物非常适于半导体封装剂,具有使用该半导体封装剂封装的倒装芯片型半导体元件的半导体装置,其抗迁移性和抗引线腐蚀性优异,可靠性高。
实施例
通过实施例来描述本发明,但本发明并非受其限制。另外,以下实施例中,份和%只要没有特别限定,都分别表示质量份和质量%。
[实施例1~20、比较例1、2]
按表1和表2所示配比制作了树脂组合物。所制作树脂组合物均为液态。(C)成分使用了和光纯药工业制α-生育酚、β-生育酚或α-生育三烯酚等。另外,在实施例1~20、比较例1、2中,相对于(A)成分环氧树脂当量1,(B)成分酸酐当量、胺当量或苯酚当量均为0.8。
[粘度评价]
用东机产业公司制E型粘度计(型号:TVE-22H)测定了刚制作出的树脂组合物的粘度(初始粘度,单位:mPa·s)。表3和表4给出初始粘度(表中记作粘度)的测定结果。另外,测定了树脂组合物在25℃、相对湿度50%下保管24小时或48小时后的粘度,设(24或48小时后粘度)/(初始粘度)为粘度上升率(单位:%)。表3和表4给出结果。
[吸水率评价]
设所制作树脂组合物在150℃硬化60分后的试样的初始重量为W0(g),又设放置于PCT试验箱(121℃±2℃/湿度100%/2atm的槽)中20小时后冷却到室温而得到的试验片的重量为W1(g),用以下公式求出吸水率(单位:%)。
吸水率=(W1-W0)/W0×100(%)
表3和表4给出吸水率评价结果。
[弯曲弹性率评价]
把所制作树脂组合物夹在在涂布了脱模剂的玻璃板与玻璃板之间,150℃下用60分硬化成350μm的薄膜状,用万能试验机(株式会社岛津制作所制AG-I)求出室温弯曲弹性率。另外,是以n=3进行测定,取平均值。还有,试验片的膜厚和宽度测定了5点,将平均值用作计算值。弯曲弹性率最好为1.0~10.OGPa,更优选为2.0~8.OGPa。表3和表4给出弯曲弹性率评价结果。
[提取Cl离子量评价]
把所制作树脂组合物在150℃硬化60分而得到的试样粉碎成5mm左右四方形。往硬化涂膜2.5g加入离子交换水25cm3,在PCT试验箱(121℃±2℃/湿度100%/2atm的槽)中放置20小时后,冷却到室温,把所得提取液当作试验液。用离子色谱(Ion Chromatography)测定了以上述步骤得到的提取液的Cl离子浓度。表3和表4给出提取Cl离子量评价结果。
[浇注性评价]
图2给出说明树脂组合物浇注性评价方法的模式图。首先,如图2(A)所示制作试验片:在衬底20上设置20μm的沟40,固定玻璃板30以取代半导体元件。只不过,衬底20采用玻璃衬底取代了柔生衬底。接着,把该试验片放置于设定到110℃的热板上,如图2(B)所示,在玻璃板30一端侧涂布所制作树脂组合物10,如图2(C)所示,沟40被树脂组合物11充满时测定经过的时间,以90秒以内充满的为“良好”。表3和表4给出浇注生评价结果。
[抗迁移性评价]
为评价树脂组合物的抗离子迁移性,实施了高温高湿偏压试验(THB试验)。试验方法如下。在具有镀锡(0.2±0.05μm)铜金属布线(图案宽10μm、线间宽15μm、图案间距25μm)的聚酰亚胺胶带基材上涂布所制作树脂组合物,20μm厚;150℃下处理30分,让封装剂硬化,制作出试验片。对该试验片,用离子迁移评价系统(Ion Migration Evaluation System)(ESPEC公司制)在110℃/湿度85%的条件下测定施加DC60V电压时的电阻值变化,设电阻值低过1.00×107Ω时为阈值,评价了铜金属布线的迁移(单位:小时)。对于电阻值没低过阈值的,规定在超过1000小时的时刻结束试验。表3和表4给出抗迁移性评价结果。图3和图4给出抗迁移性评价后的照片。虽然照片没有附尺标,但如上述,铜金属布线的图案宽10μm、线间宽15μm。图3是实施例4的照片,图4是比较例2的照片。
[抗引线腐蚀性评价]
用OLYMPUS公司制光学显微镜(型号:STM6)50倍物镜观察了进行过上述抗迁移性评价的试验片。以布线的腐蚀不满布线宽1/3的为“○”,1/3以上的为“×”。
由表3和表4可知,在所有实施例1~20中,粘度上升率低,浇注性良好,吸水率低,抗迁移性和抗引线腐蚀性优异,弯曲弹性率为希望值。另外,促进迁移的氯元素量也在离子色谱检测限度以下。对此,不含(C)成分的比较例1的抗引线腐蚀性却不良。不含(C)成分而代之以含有苯并三唑的比较例2的粘度上升率高,抗引线腐蚀性也不良。比较实施例4的图3和比较例2的图4可知,图4中引线腐蚀发展了。
实用性
根据本发明,能提供一种保存特性优异、硬化后抗迁移性优异的高可靠性树脂组合物。本发明树脂组合物可用作半导体封装剂,尤其是用作倒装芯片型半导体元件封装剂。
Claims (8)
2.按权利要求1所述的树脂组合物,其中,(C)成分是从5,7,8-三甲基母育酚、5,8-二甲基母育酚、7,8-二甲基母育酚、8-甲基母育酚、5,7,8-三甲基生育三烯酚、5,8-二甲基生育三烯酚、7,8-二甲基生育三烯酚和8-甲基生育三烯酚构成的群选择的至少一种。
3.按权利要求1所述的树脂组合物,其中,还含有(D)偶联剂。
4.按权利要求1所述的树脂组合物,其中,还含有(E)填料。
5.按权利要求1所述的树脂组合物,其中,还含有(F)橡胶成分。
6.按权利要求1所述的树脂组合物的硬化物,其中,相对树脂组合物100质量份,(C)成分为0.01~10质量份。
7.一种半导体封装剂,其中,含有权利要求1所述的树脂组合物。
8.一种半导体装置,其中,具有使用权利要求7所述的半导体封装剂封装的倒装芯片型半导体元件。
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