CN103668119B - 一种硅酸盐类荧光粉及其表面包覆氧化物隔膜薄膜的装置和工艺 - Google Patents
一种硅酸盐类荧光粉及其表面包覆氧化物隔膜薄膜的装置和工艺 Download PDFInfo
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- CN103668119B CN103668119B CN201310528359.1A CN201310528359A CN103668119B CN 103668119 B CN103668119 B CN 103668119B CN 201310528359 A CN201310528359 A CN 201310528359A CN 103668119 B CN103668119 B CN 103668119B
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- 239000012159 carrier gas Substances 0.000 claims abstract description 12
- 239000000843 powder Substances 0.000 claims description 25
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 21
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- 229910052782 aluminium Inorganic materials 0.000 claims description 2
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- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 7
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- 238000000231 atomic layer deposition Methods 0.000 description 17
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 12
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 12
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
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- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
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- 208000035126 Facies Diseases 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
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CN201310528359.1A CN103668119B (zh) | 2013-10-31 | 2013-10-31 | 一种硅酸盐类荧光粉及其表面包覆氧化物隔膜薄膜的装置和工艺 |
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CN201310528359.1A CN103668119B (zh) | 2013-10-31 | 2013-10-31 | 一种硅酸盐类荧光粉及其表面包覆氧化物隔膜薄膜的装置和工艺 |
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CN103668119A CN103668119A (zh) | 2014-03-26 |
CN103668119B true CN103668119B (zh) | 2016-06-22 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3289044A1 (en) | 2015-04-27 | 2018-03-07 | Merck Patent GmbH | Silicate phosphors |
CN105750541B (zh) * | 2016-04-13 | 2018-10-12 | 西安近代化学研究所 | 一种利用原子层沉积包覆层降低锆粉静电火花感度的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6042652A (en) * | 1999-05-01 | 2000-03-28 | P.K. Ltd | Atomic layer deposition apparatus for depositing atomic layer on multiple substrates |
WO2006003735A1 (ja) * | 2004-07-01 | 2006-01-12 | Youtec Co., Ltd. | 被覆微粒子、cvd装置及びcvd成膜方法、マイクロカプセル及びその製造方法 |
US20120199793A1 (en) * | 2005-06-23 | 2012-08-09 | Weimer Alan W | Methods for producing coated phosphors and host material particles using atomic layer deposition methods |
CN103374713A (zh) * | 2012-04-19 | 2013-10-30 | 东京毅力科创株式会社 | 基板处理装置 |
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JP5140955B2 (ja) * | 2006-07-31 | 2013-02-13 | ダイキン工業株式会社 | 撥水性粉末の製造装置 |
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- 2013-10-31 CN CN201310528359.1A patent/CN103668119B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6042652A (en) * | 1999-05-01 | 2000-03-28 | P.K. Ltd | Atomic layer deposition apparatus for depositing atomic layer on multiple substrates |
WO2006003735A1 (ja) * | 2004-07-01 | 2006-01-12 | Youtec Co., Ltd. | 被覆微粒子、cvd装置及びcvd成膜方法、マイクロカプセル及びその製造方法 |
US20120199793A1 (en) * | 2005-06-23 | 2012-08-09 | Weimer Alan W | Methods for producing coated phosphors and host material particles using atomic layer deposition methods |
CN103374713A (zh) * | 2012-04-19 | 2013-10-30 | 东京毅力科创株式会社 | 基板处理装置 |
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Effective date of registration: 20171222 Address after: 214100 Jiangsu province Wuxi City Linghu New District Road No. 228 Wu Tian wisdom city 3-104 Patentee after: JIANGSU MNT MICRO AND NANOTECH CO.,LTD. Address before: 214028 room B, room B, No. 35, Airport Industrial Park, No. 35, Changjiang South Road, new area of Jiangsu Patentee before: Wuxi MNT Micro and Nanotech Co.,Ltd. |
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Denomination of invention: Silicate type fluorescent powder as well as device and process for coating oxide diaphragm film on surface of fluorescent powder Effective date of registration: 20190701 Granted publication date: 20160622 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: JIANGSU MNT MICRO AND NANOTECH CO.,LTD. Registration number: 2019990000646 |
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Date of cancellation: 20220920 Granted publication date: 20160622 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: JIANGSU MNT MICRO AND NANOTECH CO.,LTD. Registration number: 2019990000646 |
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Denomination of invention: A kind of silicate phosphor and its surface coating device and process of oxide diaphragm film Effective date of registration: 20220921 Granted publication date: 20160622 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: JIANGSU MNT MICRO AND NANOTECH CO.,LTD. Registration number: Y2022320010531 |
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