CN103629146B - 真空泵 - Google Patents

真空泵 Download PDF

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Publication number
CN103629146B
CN103629146B CN201310339850.XA CN201310339850A CN103629146B CN 103629146 B CN103629146 B CN 103629146B CN 201310339850 A CN201310339850 A CN 201310339850A CN 103629146 B CN103629146 B CN 103629146B
Authority
CN
China
Prior art keywords
bearing
space
labyrinth seal
vacuum pump
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310339850.XA
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English (en)
Chinese (zh)
Other versions
CN103629146A (zh
Inventor
芦田修
大上耕平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
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Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN103629146A publication Critical patent/CN103629146A/zh
Application granted granted Critical
Publication of CN103629146B publication Critical patent/CN103629146B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
CN201310339850.XA 2012-08-24 2013-08-05 真空泵 Active CN103629146B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012185509A JP6079052B2 (ja) 2012-08-24 2012-08-24 真空ポンプ
JP2012-185509 2012-08-24

Publications (2)

Publication Number Publication Date
CN103629146A CN103629146A (zh) 2014-03-12
CN103629146B true CN103629146B (zh) 2016-08-10

Family

ID=50148136

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310339850.XA Active CN103629146B (zh) 2012-08-24 2013-08-05 真空泵

Country Status (3)

Country Link
US (1) US9714661B2 (enExample)
JP (1) JP6079052B2 (enExample)
CN (1) CN103629146B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014134168A (ja) * 2013-01-11 2014-07-24 Shimadzu Corp 真空ポンプ
DE102014103060B4 (de) * 2014-03-07 2019-01-03 Pfeiffer Vacuum Gmbh Verfahren zum Wuchten eines Rotors einer Vakuumpumpe oder eines Rotors einer Rotationseinheit für eine Vakuumpumpe
GB2535163B (en) 2015-02-09 2017-04-05 Edwards Ltd Pump lubricant supply systems
EP3139044B1 (de) * 2015-09-04 2020-04-22 Pfeiffer Vacuum Gmbh Verfahren zum wuchten eines rotors einer vakuumpumpe oder eines rotors einer rotationseinheit für eine vakuumpumpe
DE202016005208U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Trockenverdichtende Vakuumpumpe
KR101925975B1 (ko) 2017-09-04 2018-12-06 주식회사 우성진공 진공오일 사용 회전식 진공펌프
JP7327132B2 (ja) * 2019-12-06 2023-08-16 株式会社島津製作所 真空ポンプ
JP7766998B2 (ja) * 2020-03-31 2025-11-11 エドワーズ株式会社 真空ポンプ
CN112185427B (zh) * 2020-10-10 2021-10-01 中央美术学院 缓震唱片机
CN113804320B (zh) * 2021-09-07 2023-05-02 西安交通大学 一种高温高压露端式热电偶的引线密封装置
CN116241497B (zh) * 2021-12-07 2025-09-26 纬湃汽车电子(芜湖)有限公司 燃油蒸气泵及包括其的燃油蒸发排放控制系统
US12107475B2 (en) 2022-05-06 2024-10-01 Ford Global Technologies, Llc Vehicle and electric machine configuration for a vehicle
CN116696836A (zh) * 2023-04-24 2023-09-05 上海裕达实业有限公司 高洁净分子泵的混合轴承轴系结构及分子泵

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1037195A (zh) * 1988-04-29 1989-11-15 瓦拉里·波里斯维奇·肖鲁克夫 分子真空泵
US5124997A (en) * 1989-02-23 1992-06-23 Fanuc Ltd. Turbo blower for a laser device and a laser oscillator device
CN1432738A (zh) * 2001-12-04 2003-07-30 英国博克爱德华兹技术有限公司 真空泵
US7059828B2 (en) * 2004-01-29 2006-06-13 Pfeiffer Vacuum Gmbh Gas friction pump
CN1878962A (zh) * 2003-11-13 2006-12-13 莱博尔德真空技术有限责任公司 多级摩擦真空泵
CN201292961Y (zh) * 2008-10-31 2009-08-19 东北大学 一种卧式干式真空泵

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4199154A (en) * 1976-07-28 1980-04-22 Stauffer Chemical Company Labyrinth sealing system
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
JPS62288386A (ja) 1986-06-04 1987-12-15 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
JPS6385286A (ja) * 1986-09-26 1988-04-15 Hitachi Ltd 真空ポンプ
JPH01102498A (ja) 1987-10-15 1989-04-20 Fuji Electric Co Ltd アクティブマトリックス基板の試験方法
JPH01102498U (enExample) * 1987-12-25 1989-07-11
JPH0720396Y2 (ja) * 1988-05-27 1995-05-15 株式会社島津製作所 ターボ分子ポンプのガスパージ機構
FR2633675B1 (fr) * 1988-06-29 1991-02-15 Cit Alcatel Pompe turbomoleculaire
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
JP2002317790A (ja) 2001-04-24 2002-10-31 Shimadzu Corp ターボ形ドライ真空ポンプ
JP2005240690A (ja) * 2004-02-26 2005-09-08 Kashiyama Kogyo Kk 真空ポンプ
JP4679119B2 (ja) * 2004-11-10 2011-04-27 株式会社大阪真空機器製作所 ターボ分子ポンプの軸封防塵構造
FR2907498B1 (fr) * 2006-10-24 2009-01-23 Snecma Sa Systeme d'equilibrage pour rotor de turbomachine

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1037195A (zh) * 1988-04-29 1989-11-15 瓦拉里·波里斯维奇·肖鲁克夫 分子真空泵
US5124997A (en) * 1989-02-23 1992-06-23 Fanuc Ltd. Turbo blower for a laser device and a laser oscillator device
CN1432738A (zh) * 2001-12-04 2003-07-30 英国博克爱德华兹技术有限公司 真空泵
CN1878962A (zh) * 2003-11-13 2006-12-13 莱博尔德真空技术有限责任公司 多级摩擦真空泵
US7059828B2 (en) * 2004-01-29 2006-06-13 Pfeiffer Vacuum Gmbh Gas friction pump
CN201292961Y (zh) * 2008-10-31 2009-08-19 东北大学 一种卧式干式真空泵

Also Published As

Publication number Publication date
US9714661B2 (en) 2017-07-25
JP6079052B2 (ja) 2017-02-15
CN103629146A (zh) 2014-03-12
JP2014043789A (ja) 2014-03-13
US20140056735A1 (en) 2014-02-27

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