CN103562732B - 具有紧凑型扫描器的扫描探针显微镜 - Google Patents

具有紧凑型扫描器的扫描探针显微镜 Download PDF

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Publication number
CN103562732B
CN103562732B CN201280026601.9A CN201280026601A CN103562732B CN 103562732 B CN103562732 B CN 103562732B CN 201280026601 A CN201280026601 A CN 201280026601A CN 103562732 B CN103562732 B CN 103562732B
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China
Prior art keywords
scanner
probe
head
free end
afm
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CN201280026601.9A
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English (en)
Chinese (zh)
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CN103562732A (zh
Inventor
恩吉·方
杰夫·马卡基斯
约翰尼斯·金特
卡尔·马瑟
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Bruker Nano Inc
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Bruker Nano Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CN201280026601.9A 2011-04-29 2012-04-27 具有紧凑型扫描器的扫描探针显微镜 Active CN103562732B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/068,052 2011-04-29
US13/068,052 US8474060B2 (en) 2011-04-29 2011-04-29 Scanning probe microscope with compact scanner
PCT/US2012/035628 WO2012149453A2 (en) 2011-04-29 2012-04-27 Scanning probe microscope with compact scanner

Publications (2)

Publication Number Publication Date
CN103562732A CN103562732A (zh) 2014-02-05
CN103562732B true CN103562732B (zh) 2017-05-31

Family

ID=47069078

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280026601.9A Active CN103562732B (zh) 2011-04-29 2012-04-27 具有紧凑型扫描器的扫描探针显微镜

Country Status (7)

Country Link
US (1) US8474060B2 (https=)
EP (1) EP2702416B1 (https=)
JP (1) JP5944982B2 (https=)
KR (1) KR101626193B1 (https=)
CN (1) CN103562732B (https=)
RU (1) RU2571449C2 (https=)
WO (1) WO2012149453A2 (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012149449A2 (en) 2011-04-29 2012-11-01 Bruker Nano, Inc. Cleaning station for atomic force microscope
US10307167B2 (en) 2012-12-14 2019-06-04 Corquest Medical, Inc. Assembly and method for left atrial appendage occlusion
US10813630B2 (en) 2011-08-09 2020-10-27 Corquest Medical, Inc. Closure system for atrial wall
US10314594B2 (en) 2012-12-14 2019-06-11 Corquest Medical, Inc. Assembly and method for left atrial appendage occlusion
EP2781925B1 (en) * 2011-11-15 2019-09-18 National University Corporation Kanazawa University Sealed-type afm cell
US9081028B2 (en) * 2012-03-19 2015-07-14 Bruker Nano, Inc. Scanning probe microscope with improved feature location capabilities
JP5909020B2 (ja) * 2012-03-27 2016-04-26 ハイジトロン, インク.Hysitron, Inc. 顕微鏡対物レンズ機械検査機器
US20140142689A1 (en) 2012-11-21 2014-05-22 Didier De Canniere Device and method of treating heart valve malfunction
US9566443B2 (en) 2013-11-26 2017-02-14 Corquest Medical, Inc. System for treating heart valve malfunction including mitral regurgitation
CN107076779B (zh) * 2014-10-24 2019-11-01 株式会社岛津制作所 扫描型探针显微镜
US10842626B2 (en) 2014-12-09 2020-11-24 Didier De Canniere Intracardiac device to correct mitral regurgitation
SG10201914103PA (en) * 2016-02-01 2020-03-30 Marco Martin Dental imager and method for recording photographic impressions
CN107192854B (zh) * 2017-04-18 2020-12-04 天津大学 原子力显微镜的z扫描器和探针装置及探针装置安装器
RU2695517C2 (ru) * 2017-08-14 2019-07-23 Общество с ограниченной ответственностью "НТ-МДТ" Сканирующий зондовый микроскоп с устройством для функционирования многозондового датчика
WO2020172444A1 (en) * 2019-02-20 2020-08-27 Omniome, Inc. Scanning apparatus and methods for detecting chemical and biological analytes
JP6631739B1 (ja) * 2019-04-04 2020-01-15 株式会社島津製作所 表面分析装置
US11119118B2 (en) * 2019-05-03 2021-09-14 Bruker Nano, Inc. Torsion wing probe assembly
CN112730897B (zh) * 2020-12-26 2022-02-18 厦门大学 一种隔离式扫描隧道显微镜的针尖扫描头装置
JP2025537475A (ja) * 2022-10-21 2025-11-18 カメカ インストゥルメンツ，インコーポレイテッド 真空チャンバー内の分析機器用の位置決め装置
WO2025068314A1 (en) * 2023-09-25 2025-04-03 Artidis Ag Holder for a cantilever for atomic force microscopy and atomic force microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6435015B1 (en) * 1999-03-17 2002-08-20 Seiko Instruments Inc. Scanning probe microscope
WO2011016256A1 (ja) * 2009-08-06 2011-02-10 国立大学法人 金沢大学 カンチレバー励振装置及び走査型プローブ顕微鏡

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6138503A (en) 1997-10-16 2000-10-31 Raymax Technology, Inc. Scanning probe microscope system including removable probe sensor assembly
US6677567B2 (en) * 2002-02-15 2004-01-13 Psia Corporation Scanning probe microscope with improved scan accuracy, scan speed, and optical vision
DE102004012740A1 (de) * 2004-03-15 2005-10-06 Suss Microtec Test Systems Gmbh Anordnung zur Abtastung der Oberfläche oder physikalischer Reaktionssignale von Substraten
US7249494B2 (en) 2005-06-06 2007-07-31 Academia Sinica Beam tracking system for scanning-probe type atomic force microscope
US8166567B2 (en) 2007-03-16 2012-04-24 Bruker Nano, Inc. Fast-scanning SPM scanner and method of operating same
US8393834B2 (en) 2007-06-05 2013-03-12 Airbus Operations Gmbh Machining apparatus and method for machining a laminate
US8136389B2 (en) * 2007-10-31 2012-03-20 Agilent Technologies, Inc. Probe tip assembly for scanning probe microscopes
CN102640007B (zh) 2009-10-29 2015-05-13 布鲁克纳米公司 具有包括运动挠性装置的支撑工作台的扫描探针显微镜

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6435015B1 (en) * 1999-03-17 2002-08-20 Seiko Instruments Inc. Scanning probe microscope
WO2011016256A1 (ja) * 2009-08-06 2011-02-10 国立大学法人 金沢大学 カンチレバー励振装置及び走査型プローブ顕微鏡

Also Published As

Publication number Publication date
WO2012149453A3 (en) 2013-01-10
US20120278957A1 (en) 2012-11-01
KR20140026508A (ko) 2014-03-05
EP2702416B1 (en) 2019-11-20
RU2013152668A (ru) 2015-06-10
WO2012149453A2 (en) 2012-11-01
EP2702416A4 (en) 2014-10-15
US8474060B2 (en) 2013-06-25
KR101626193B1 (ko) 2016-05-31
EP2702416A2 (en) 2014-03-05
JP5944982B2 (ja) 2016-07-05
CN103562732A (zh) 2014-02-05
RU2571449C2 (ru) 2015-12-20
JP2014512547A (ja) 2014-05-22

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