CN103506340B - A kind of spray equipment - Google Patents
A kind of spray equipment Download PDFInfo
- Publication number
- CN103506340B CN103506340B CN201210226886.2A CN201210226886A CN103506340B CN 103506340 B CN103506340 B CN 103506340B CN 201210226886 A CN201210226886 A CN 201210226886A CN 103506340 B CN103506340 B CN 103506340B
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- CN
- China
- Prior art keywords
- spray
- spray head
- actuator
- equipment
- spray equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
- B05B15/68—Arrangements for adjusting the position of spray heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0217—Use of a detergent in high pressure cleaners; arrangements for supplying the same
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0288—Ultra or megasonic jets
Landscapes
- Nozzles (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of spray equipment, including: spray head, rotary actuator, lifting actuator and for accommodating the access groove of spray medicinal liquid, described spray head is connected with lifting actuator by rotary actuator.The spray equipment of the present invention, can make whole cleaning process link up, reduce manufacturing cost and rate of occurrence of equipment failure and can reduce maintenance cost.
Description
Technical field
The present invention relates to spray equipment technical field, particularly to a kind of spray equipment.
Background technology
Along with being growing more intense of semi-conductor market competition, the Ge great semiconductor manufacturer performance to equipment
Require more and more higher with production efficiency.Cleaning machine proportion in semiconductor factory all devices is
Maximum, in the last few years monolithic cleaning equipment apply in Wafer Cleaning more and more extensive.Monolithic
Cleaning equipment uses water, alkaline reagent, acid reagent and drying in the technique of cleaning silicon chip
During use nitrogen etc., additionally due to No. 1 liquid of standard to coordinate mega sonic wave energy field energy to produce good
Cleaning performance so that mega sonic wave clean application the most extensive.Clean at current monolithic and set
Mostly medicinal liquid spray system in Bei is water, medicinal liquid, gas and mega sonic wave generator decile
Become multiple independent unit to complete the cleaning of whole silicon chip.Each independent unit is being given birth to
During production. art, self-movement has the disadvantage that (1) can cause whole technical process not connect
Pass through；(2) control respectively of multiple separate units can make control process the most complicated；(3) multiple
Separate unit causes plant maintenance difficulty；(4) multiple separate units can increase the fault of equipment and send out
Raw probability.In consideration of it, we need novel medicinal liquid spray system to solve these problems.
Summary of the invention
(1) to solve the technical problem that
The technical problem to be solved in the present invention is, for the deficiencies in the prior art, it is provided that a kind of spray
Shower device, can make whole cleaning process link up, reduce manufacturing cost and equipment fault
Incidence rate and maintenance cost can be reduced.
(2) technical scheme
The present invention provides a kind of spray equipment, including: spray head, rotary actuator, lifting
Actuator and for accommodate spray medicinal liquid access groove, described spray head by rotate execution machine
Structure is connected with lifting actuator.
Preferably, described spray equipment also includes: for the fixed mount of fixed showerhead, described
Fixed mount is connected with rotary actuator；Described fixed mount edge is averagely provided with at least three leveling
Screw.
Preferably, described rotary actuator includes: swing arm, rotary shaft, shaft coupling and rotation
Driving motor, described swing arm one end is connected with described fixed mount, on the other end and described rotary shaft
End connects, and the lower end of described rotary shaft is by described shaft coupling with described rotary drive motor even
Connect.
Preferably, described lifting actuator includes: lifting motor and be installed on described lifting electricity
Sliding shoe on machine.
Preferably, described spray head includes: feed liquor or air inlet, for solid with described fixed mount
Fixed connect connecting hole, be integrated in the mega sonic wave generator of spray head body interior, spray apertures,
Spray apertures runner and for described mega sonic wave generator threading and the through wires hole of poling；Described feed liquor
Or air inlet is connected with described spray apertures runner；Described spray head material is anticorrosive.
Preferably, described spray apertures runner is smooth, cylindrical peripheral surface or curved surface or irregular surface.
Preferably, described each spray apertures runner is corresponding with at least 2 spray apertures.
Preferably, described spray apertures is straight hole, taper hole or irregular hole.
Preferably, described access groove includes: inner side lead channel, outside overflow launder, inlet opening and
Outage, described spray head is dipped in the inner side lead channel of access groove when original position；Described
Rotary actuator and described lifting actuator are electric or pneumatic.
Preferably, the integrated multiple mega sonic wave generators of described spray head, described mega sonic wave generator
Radius more than by spray object radius.
(3) beneficial effect
The spray equipment of the present invention, can make whole cleaning process link up, minimizing manufacturing cost,
And rate of occurrence of equipment failure and maintenance cost can be reduced.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of spray equipment of the present invention；
Fig. 2 a is spray head and the fixed mount joint face structure chart of spray equipment of the present invention；
Fig. 2 b is the spray head spraying area structural representation of spray equipment of the present invention；
Fig. 2 c is the spray head vertical section structure schematic diagram of spray equipment of the present invention；
Fig. 3 is the access grooved profile perspective view of spray equipment of the present invention；
Fig. 4 is the fixed rack structure schematic diagram of spray equipment of the present invention；
Fig. 5 is spray equipment technique of the present invention original position structural representation when starting；
Structural representation when Fig. 6 is spray equipment technical process of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawings and embodiment, the detailed description of the invention of the present invention is made the most in detail
Describe.Following example are used for illustrating the present invention, but are not limited to the scope of the present invention.
As it is shown in figure 1, a kind of spray equipment, including: it is used for spraying water, chemical reagent and blowing
The spray head 1 of gas, the fixed mount 2 for fixed showerhead 1, rotary actuator, lifting are held
Row mechanism and for accommodate spray medicinal liquid access groove 3, described spray head 1 by rotate execution machine
Structure is connected with lifting actuator, and described fixed mount 2 is connected with rotary actuator；Described rotation
Turn actuator and described lifting actuator is electric or pneumatic.Described rotary actuator
Including: swing arm 8, rotary shaft 9, shaft coupling 10 and rotary drive motor 11, described swing arm 8 one
End is connected with described fixed mount 2, and its other end is connected with described rotary shaft 9 upper end, described swing arm
8 effects playing support, the lower end of described rotary shaft 9 is by described shaft coupling 10 and described rotation
Motor 11 is driven to connect.During work, described rotary drive motor 11 is by shaft coupling 10, rotation
Axle 9 drives swing arm 8 to rotate, and the spray head 1 being connected with swing arm 8 does rotation fortune the most therewith
Dynamic.Described lifting actuator includes: lifting motor 13 and being installed on described lifting motor
Sliding shoe 12, described sliding shoe 12 is connected with rotary drive motor 11.During work, described lifting
Motor 13 drives spray head 1 to do lifting fortune by the rotary actuator being connected with sliding shoe 12
Dynamic.
Fig. 2 a is spray head and fixed mount joint face structure chart, Fig. 2 b of spray equipment of the present invention
For the spray head spraying area structural representation of spray equipment of the present invention, Fig. 2 c is that the present invention sprays dress
The spray head vertical section structure schematic diagram put, as shown in Fig. 2 a-Fig. 2 c, described spray head 1 includes:
Feed liquor or air inlet 14, connecting hole 15, it is integrated in the mega sonic wave generator of spray head body interior
19, for described mega sonic wave generator 19 threading and the through wires hole 16 of poling, spray apertures 17 and spray
Drench hole runner 18；As shown in Figure 4, described spray head 1 passes described connection by attachment screw 22
Hole 15 is fixing with described fixed mount 2 to be connected；Described feed liquor or air inlet 14 and described spray apertures stream
Road 18 connects, and described spray apertures runner 18 is smooth, cylindrical peripheral surface or curved surface or irregular surface, its
In each spray apertures runner 18 corresponding with at least 2 spray apertures 17, described spray apertures 17 is straight
Hole or taper hole or irregular hole；The integrated multiple mega sonic wave generators 19 of described spray head 1, described
The shape of mega sonic wave generator 19 is more than the radius by spray object；The material of described spray head 1
For anticorrosive.
As it is shown on figure 3, described access groove 3 includes: inner side lead channel 31, outside overflow launder 32,
Inlet opening 33 and outage 34；Described access groove 3 is used for cleaning described spray head 1, described spray
1 is dipped in when original position in the inner side lead channel 31 of access groove 3, and ultra-pure water is by described
Inlet opening 33 continues to flow in described inner side lead channel 31, and spray head 1 is carried out persistence cleaning,
When the ultra-pure water in described inner side lead channel 31 is overflowed, by arranging in outside overflow launder 32
Outage 34 discharge.
Such as Fig. 4 and with reference to shown in Fig. 2 a and Fig. 5, fixed mount 2 edge is averagely provided with at least three and adjusts
Plain screw 21.Levelling bolt is three in the present embodiment, if spray head 1 be cleaned by silicon
Sheet 5 is not parallel, can adjust the degree that screws of three levelling bolts 21 respectively to push up spray head 1
Parallel with silicon chip 5 to adjust spray head 1, pass spray head 1 with attachment screw 22 again after having adjusted
On connecting hole 15 fixed mount 2 is connected with spray head 1 and fixes.Described levelling bolt 21 also may be used
Think multiple.
As shown in Fig. 5-Fig. 6, cleaning process is as follows:
When cleaning initiates, described spray head 1 is placed in the inner side lead channel 31 of access groove 3.
When cleaning starts, described lifting motor 13 starts to drive spray head 1 to rise, with institute
Stating access groove 3 to separate, described rotary drive motor 11 drives described spray head 1 to rotate to process cavity
The top of body 4, described lifting motor 13 do descending motion make described spray head 1 drop to can be with institute
State the position of the cavity mouth seamless link of process cavity 4.
When cleaning is carried out, the entering by spray head according to process requirements water or chemical reagent
Liquid or air inlet 14 are flowed in described spray apertures runner 18, and from described spray apertures runner 18
Corresponding spray apertures 17 sprays, is sprayed on the silicon chip 5 in process cavity 4, is carried out；
It addition, when alkaline reagent cleans, the integrated mega sonic wave within spray head 1 can be opened and occurs
Device 19, can preferably play the cleaning performance of alkaline reagent.Clean through water and chemical reagent
After, spray gas by spray apertures runner 18 from spray apertures 17 from feed liquor or air inlet 14
Middle ejection, dries up described silicon chip 5.
At the end of cleaning, described lifting motor 13 does ascending motion and makes on described spray head 1
Rising and separate with process cavity 4, described rotary drive motor 11 drives described spray head 1 to rotate to containing
The top of access slot 3, described elevator 13 does descending motion makes described spray head 1 be placed in access groove 3
Inner side lead channel 31 in, the inlet opening 33 that ultra-pure water is passed through continues to flow into the interior of access groove 3
In side lead channel 31, spray head 1 is carried out persistence cleaning, when in described inner side lead channel 31
Ultra-pure water when overflowing, by the outage 34 arranged in the outside overflow launder of access groove 3 32
Discharge.
Embodiment of above is merely to illustrate the present invention, and not limitation of the present invention, relevant
The those of ordinary skill of technical field, without departing from the spirit and scope of the present invention,
Can also make a variety of changes and modification, the technical scheme of the most all equivalents falls within the present invention
Category, the scope of patent protection of the present invention should be defined by the claims.
Claims (7)
1. a spray equipment, it is characterised in that including: be used for spraying water, chemical reagent with
And blow spray head, rotary actuator, lifting actuator and be used for accommodating described spray
The access groove of head, described spray head is connected with lifting actuator by rotary actuator；
Described spray equipment also includes: for the fixed mount of fixed showerhead；
Described spray head includes: feed liquor or air inlet, for connect described fixed mount connecting hole,
Be integrated in the mega sonic wave generator of spray head body interior, spray apertures, spray apertures runner and for
Described mega sonic wave generator threading and the through wires hole of poling；Described feed liquor or air inlet and described spray
Drench hole runner to connect；Described spray head material is anticorrosive；Described each spray apertures runner
Corresponding with at least 2 spray apertures.
2. spray equipment as claimed in claim 1, it is characterised in that described fixed mount and rotation
Turn actuator to connect；Described fixed mount edge is averagely provided with at least three levelling bolt, passes through
Adjust the degree that screws of described at least three levelling bolt to push up spray head with adjust spray head with
It is cleaned by silicon chip parallel；
Described access groove includes: inner side lead channel, outside overflow launder, inlet opening and outage,
Described spray head is dipped in the inner side lead channel of access groove when original position；Described rotation performs
Mechanism and described lifting actuator are electric or pneumatic.
3. spray equipment as claimed in claim 2, it is characterised in that described rotation performs
Mechanism includes: swing arm, rotary shaft, shaft coupling and rotary drive motor, described swing arm one end with
Described fixed mount connects, and its other end is connected with described rotary shaft upper end, under described rotary shaft
End is connected with described rotary drive motor by described shaft coupling.
4. spray equipment as claimed in claim 1 or 2, it is characterised in that described lifting
Actuator includes: lifting motor and the sliding shoe being installed on described lifting motor.
5. spray equipment as claimed in claim 1, it is characterised in that described spray apertures stream
Road is smooth, cylindrical peripheral surface or curved surface or irregular surface.
6. spray equipment as claimed in claim 1, it is characterised in that described spray apertures is
Straight hole or taper hole or irregular hole.
7. spray equipment as claimed in claim 1, it is characterised in that described spray head collection
Becoming multiple mega sonic wave generator, the shape of described mega sonic wave generator is more than by the half of spray object
Footpath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210226886.2A CN103506340B (en) | 2012-06-29 | 2012-06-29 | A kind of spray equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210226886.2A CN103506340B (en) | 2012-06-29 | 2012-06-29 | A kind of spray equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103506340A CN103506340A (en) | 2014-01-15 |
| CN103506340B true CN103506340B (en) | 2016-12-21 |
Family
ID=49890070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210226886.2A Active CN103506340B (en) | 2012-06-29 | 2012-06-29 | A kind of spray equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103506340B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106345720B (en) * | 2015-07-17 | 2019-04-30 | 沈阳芯源微电子设备有限公司 | A kind of spraying nozzle automatic flushing device and its cleaning method |
| CN111261553B (en) * | 2020-01-19 | 2024-03-26 | 北京北方华创微电子装备有限公司 | Wafer cleaning device |
| CN112742775B (en) * | 2020-12-14 | 2022-04-19 | 安徽华铂再生资源科技有限公司 | Waste lead storage battery cleaning equipment convenient for material taking and dismounting and cleaning method thereof |
| CN114369876A (en) * | 2021-12-31 | 2022-04-19 | 至微半导体(上海)有限公司 | Spraying method for realizing etching reaction of gradient structure |
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|---|---|---|---|---|
| US5846335A (en) * | 1994-06-28 | 1998-12-08 | Ebara Corporation | Method for cleaning workpiece |
| US5947136A (en) * | 1996-09-10 | 1999-09-07 | Silicon Valley Group Inc. | Catch cup cleaning system |
| CN101276739A (en) * | 2007-03-29 | 2008-10-01 | 东京毅力科创株式会社 | Substrate processing system and substrate cleaning apparatus |
| CN102148131A (en) * | 2010-02-09 | 2011-08-10 | 联华电子股份有限公司 | Method and device for cleaning wafer |
| CN202700862U (en) * | 2012-06-29 | 2013-01-30 | 北京七星华创电子股份有限公司 | Spraying device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0839014A (en) * | 1994-07-29 | 1996-02-13 | Hitachi Ltd | Cleaning device |
| JP3813672B2 (en) * | 1996-11-05 | 2006-08-23 | 芝浦メカトロニクス株式会社 | Spin processing device |
| JP3990073B2 (en) * | 1999-06-17 | 2007-10-10 | 株式会社荏原製作所 | Substrate cleaning apparatus and substrate cleaning method |
| JP2006294856A (en) * | 2005-04-11 | 2006-10-26 | Sansha Electric Mfg Co Ltd | Nozzle device for washing semiconductor wafer |
| JP4582654B2 (en) * | 2006-05-23 | 2010-11-17 | 東京エレクトロン株式会社 | NOZZLE CLEANING DEVICE, NOZZLE CLEANING METHOD, NOZZLE CLEANING PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM CONTAINING THE PROGRAM |
-
2012
- 2012-06-29 CN CN201210226886.2A patent/CN103506340B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5846335A (en) * | 1994-06-28 | 1998-12-08 | Ebara Corporation | Method for cleaning workpiece |
| US5947136A (en) * | 1996-09-10 | 1999-09-07 | Silicon Valley Group Inc. | Catch cup cleaning system |
| CN101276739A (en) * | 2007-03-29 | 2008-10-01 | 东京毅力科创株式会社 | Substrate processing system and substrate cleaning apparatus |
| CN102148131A (en) * | 2010-02-09 | 2011-08-10 | 联华电子股份有限公司 | Method and device for cleaning wafer |
| CN202700862U (en) * | 2012-06-29 | 2013-01-30 | 北京七星华创电子股份有限公司 | Spraying device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103506340A (en) | 2014-01-15 |
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| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180316 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: North China Science and technology group Limited by Share Ltd. |