CN202700862U - Spraying device - Google Patents
Spraying device Download PDFInfo
- Publication number
- CN202700862U CN202700862U CN 201220318045 CN201220318045U CN202700862U CN 202700862 U CN202700862 U CN 202700862U CN 201220318045 CN201220318045 CN 201220318045 CN 201220318045 U CN201220318045 U CN 201220318045U CN 202700862 U CN202700862 U CN 202700862U
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- Prior art keywords
- spray
- spray head
- apertures
- spray equipment
- fixed mount
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Abstract
The utility model discloses a spraying device which comprises a spraying head, a rotary actuator, a lifting actuator and a containing tank for containing spraying liquid medicine, wherein the spraying head is connected with the lifting actuator through the rotary actuator. By means of the spraying device, the whole cleaning process is coherent, manufacture cost is reduced, incidence of device failures is lowered, and maintenance cost is reduced.
Description
Technical field
The utility model relates to the spray equipment technical field, particularly a kind of spray equipment.
Background technology
Along with being growing more intense of semi-conductor market competition, each large semiconductor manufacturer requires more and more higher to performance and the production efficiency of equipment.Cleaning machine proportion in the semiconductor factory all devices is maximum, in the last few years the monolithic cleaning equipment in Wafer Cleaning, use more and more extensive.The monolithic cleaning equipment is used in the technique of cleaning silicon chip in water, alkaline reagent, acid reagent and the drying process and is used nitrogen etc., in addition because No. 1 liquid of standard cooperates mega sonic wave field energy to produce good cleaning performance, so that the application that mega sonic wave cleans is also rather extensive.Mostly be water, liquid, gas and mega sonic wave generator are divided into the cleaning that whole silicon chip is finished in a plurality of independently unit in the liquid spray system in current monolithic cleaning equipment.Each independently unit self-movement in production process have the following disadvantages: (1) can cause whole technical process discontinuous; (2) a plurality of separate units are controlled meeting respectively so that control procedure is too complicated; (3) a plurality of separate units cause the plant maintenance difficulty; (4) a plurality of separate units can increase the fault rate of equipment.Given this, we need to have novel liquid spray system to solve these problems.
The utility model content
The technical problem that (one) will solve
The technical problems to be solved in the utility model is, for the deficiencies in the prior art, provides a kind of spray equipment, and whole cleaning process is linked up, and reduces manufacturing cost and rate of occurrence of equipment failure and can reduce maintenance cost.
(2) technical scheme
The utility model provides a kind of spray equipment, comprising: spray head, rotary actuator, lifting executing agency and be used for holding the access groove that sprays liquid, described spray head is connected with lifting executing agency by rotary actuator.
Better, described spray equipment also comprises: be used for the fixed mount of fixed showerhead, described fixed mount is connected with rotary actuator; Described fixed mount edge on average is provided with at least three levelling bolts.
Better, described rotary actuator comprises: swing arm, rotating shaft, shaft coupling and rotary drive motor, described swing arm one end is connected with described fixed mount, and the other end is connected with described rotating shaft upper end, and the lower end of described rotating shaft is connected with described rotary drive motor by described shaft coupling.
Better, described lifting executing agency comprises: lifting motor and be installed on sliding shoe on the described lifting motor.
Better, described spray head comprises: feed liquor or air admission hole, be used for the connecting hole be fixedly connected with described fixed mount, the mega sonic wave generator that is integrated in the spray head body interior, spray apertures, spray apertures runner and be used for the through wires hole of described mega sonic wave generator threading and poling; Described feed liquor or air admission hole are connected with described spray apertures runner; Described spray head material is anticorrosive.
Better, described spray apertures runner is the smooth face of cylinder or curved surface or irregular surface.
Better, described each spray apertures runner is corresponding with at least 2 spray apertures.
Better, described spray apertures is straight hole, taper hole or irregular hole.
Better, described access groove comprises: inboard lead channel, outside overflow launder, inlet opening and outage, described spray head are dipped in when original position in the inboard lead channel of access groove; Described rotary actuator and described lifting executing agency are electronic or pneumatic.
Better, the integrated a plurality of mega sonic wave generators of described spray head, the radius of described mega sonic wave generator is greater than the radius that is sprayed object.
(3) beneficial effect
Spray equipment of the present utility model can make whole cleaning process link up, and reduces manufacturing cost and rate of occurrence of equipment failure and can reduce maintenance cost.
Description of drawings
Fig. 1 is the overall structure schematic diagram of the utility model spray equipment;
Fig. 2 a is spray head and the fixed mount joint face structure chart of the utility model spray equipment;
Fig. 2 b is the spray head spraying area structural representation of the utility model spray equipment;
Fig. 2 c is the spray head vertical section structure schematic diagram of the utility model spray equipment;
Fig. 3 is the access grooved profile perspective view of the utility model spray equipment;
Fig. 4 is the fixed rack structure schematic diagram of the utility model spray equipment;
Fig. 5 is the utility model spray equipment technique original position structural representation when beginning;
Structural representation when Fig. 6 is the utility model spray equipment technical process.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but are not used for limiting scope of the present utility model.
As shown in Figure 1, a kind of spray equipment, comprise: be used for the spray head 1 of water spray, chemical reagent and air blowing, the fixed mount 2 that is used for fixed showerhead 1, rotary actuator, lifting executing agency and be used for holding the access groove 3 that sprays liquid, described spray head 1 is connected with lifting executing agency by rotary actuator, and described fixed mount 2 is connected with rotary actuator; Described rotary actuator and described lifting executing agency are electronic or pneumatic.Described rotary actuator comprises: swing arm 8, rotating shaft 9, shaft coupling 10 and rotary drive motor 11, described swing arm 8 one ends are connected with described fixed mount 2, its other end is connected with described rotating shaft 9 upper ends, the effect of support is played in described swing arm 8, and the lower end of described rotating shaft 9 is connected with described rotary drive motor 11 by described shaft coupling 10.During work, described rotary drive motor 11 drives swing arm 8 and rotates by shaft coupling 10, rotating shaft 9, and the spray head 1 that is connected with swing arm 8 also rotates thereupon.Described lifting executing agency comprises: lifting motor 13 and be installed on sliding shoe 12 on the described lifting motor, described sliding shoe 12 is connected with rotary drive motor 11.During work, described lifting motor 13 drives spray head 1 by the rotary actuator that is connected with sliding shoe 12 and moves up and down.
Fig. 2 a is spray head and the fixed mount joint face structure chart of spray equipment of the present invention, Fig. 2 b is the spray head spraying area structural representation of spray equipment of the present invention, Fig. 2 c is the spray head vertical section structure schematic diagram of spray equipment of the present invention, shown in Fig. 2 a-Fig. 2 c, described spray head 1 comprises: feed liquor or air admission hole 14, connecting hole 15, be integrated in the spray head body interior mega sonic wave generator 19, be used for through wires hole 16, spray apertures 17 and the spray apertures runner 18 of described mega sonic wave generator 19 threading and poling; As shown in Figure 4, described spray head 1 passes described connecting hole 15 by attachment screw 22 and is fixedly connected with described fixed mount 2; Described feed liquor or air admission hole 14 are connected with described spray apertures runner 18, described spray apertures runner 18 is the smooth face of cylinder or curved surface or irregular surface, wherein each spray apertures runner 18 is corresponding with at least 2 spray apertures 17, and described spray apertures 17 is straight hole or taper hole or irregular hole; Described spray head 1 integrated a plurality of mega sonic wave generators 19, the shape of described mega sonic wave generator 19 is greater than the radius that is sprayed object; The material of described spray head 1 is anticorrosive.
As shown in Figure 3, described access groove 3 comprises: inboard lead channel 31, outside overflow launder 32, inlet opening 33 and outage 34; Described access groove 3 is used for cleaning described spray head 1, described spray head 1 is dipped in when original position in the inboard lead channel 31 of access groove 3, ultra-pure water continues to flow in the described inboard lead channel 31 by described inlet opening 33, spray head 1 is carried out continuation to be cleaned, when the ultra-pure water in the described inboard lead channel 31 is overflowed, discharge by the outage 34 of outside overflow launder 32 interior settings.
Such as Fig. 4 and with reference to figure 2a and shown in Figure 5, fixed mount 2 edges on average are provided with at least three levelling bolts 21.Levelling bolt is three in the present embodiment, if spray head 1 is with to be cleaned silicon chip 5 not parallel, the degree that screws that can adjust respectively three levelling bolts 21 comes top spray head 1 parallel with silicon chip 5 to adjust spray head 1, passes connecting hole 15 on the spray head 1 with attachment screw 22 again after having adjusted and fixed mount 2 is connected with spray head 1 and fixes.Described levelling bolt 21 can also be for a plurality of.
Such as Fig. 5-shown in Figure 6, the cleaning process is as follows:
When cleaning was initial, described spray head 1 placed in the inboard lead channel 31 of access groove 3.
When cleaning begins, described lifting motor 13 begins to drive spray head 1 and rises, separate with described access groove 3, described rotary drive motor 11 drives described spray head 1 and rotates to the top of process cavity 4, described lifting motor 13 do descending motion make described spray head 1 drop to can with the position of the cavity mouth seamless link of described process cavity 4.
When cleaning is carried out, flow in the described spray apertures runner 18 according to process requirements water or chemical reagent feed liquor or the air admission hole 14 by spray head, and ejection from the spray apertures 17 of described spray apertures runner 18 correspondences, be sprayed on the silicon chip 5 in the process cavity 4, clean; In addition, when alkaline reagent cleans, the integrated mega sonic wave generator 19 of spray head 1 inside can be opened, the cleaning performance of alkaline reagent can be better brought into play.After process water and chemical reagent cleaning are complete, from spray apertures 17, spray by spray apertures runner 18 from feed liquor or air admission hole 14 ejection gases, described silicon chip 5 is dried up.
When cleaning finishes, described lifting motor 13 is done ascending motion makes described spray head 1 rising separate with process cavity 4, described rotary drive motor 11 drives described spray head 1 and rotates to the top of access groove 3, described lift 13 is done descending motion places in the inboard lead channel 31 of access groove 3 described spray head 1, the inlet opening 33 that ultra-pure water is passed through continues to flow in the inboard lead channel 31 of access groove 3, spray head 1 is carried out continuation to be cleaned, when the ultra-pure water in the described inboard lead channel 31 was overflowed, the outage 34 of the outside overflow launder 32 interior settings by access groove 3 was discharged.
Above embodiment only is used for explanation the utility model; and be not limitation of the utility model; the those of ordinary skill in relevant technologies field; in the situation that do not break away from spirit and scope of the present utility model; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (10)
1. a spray equipment is characterized in that, comprising: spray head, rotary actuator, lifting executing agency and be used for holding the access groove of described spray head, described spray head is connected with lifting executing agency by rotary actuator.
2. spray equipment as claimed in claim 1 is characterized in that, described spray equipment also comprises: be used for the fixed mount of fixed showerhead, described fixed mount is connected with rotary actuator; Described fixed mount edge on average is provided with at least three levelling bolts.
3. spray equipment as claimed in claim 2, it is characterized in that, described rotary actuator comprises: swing arm, rotating shaft, shaft coupling and rotary drive motor, described swing arm one end is connected with described fixed mount, its other end is connected with described rotating shaft upper end, and the lower end of described rotating shaft is connected with described rotary drive motor by described shaft coupling.
4. spray equipment as claimed in claim 1 or 2 is characterized in that, described lifting executing agency comprises: lifting motor and be installed on sliding shoe on the described lifting motor.
5. spray equipment as claimed in claim 2, it is characterized in that, described spray head comprises: feed liquor or air admission hole, the through wires hole that is used for connecting the connecting hole of described fixed mount, the mega sonic wave generator that is integrated in the spray head body interior, spray apertures, spray apertures runner and is used for described mega sonic wave generator threading and poling; Described feed liquor or air admission hole are connected with described spray apertures runner; Described spray head material is anticorrosive.
6. spray equipment as claimed in claim 5 is characterized in that, described spray apertures runner is the smooth face of cylinder or curved surface or irregular surface.
7. such as claim 5 or 6 described spray equipments, it is characterized in that, described each spray apertures runner is corresponding with at least 2 spray apertures.
8. such as claim 5 or 7 described spray equipments, it is characterized in that, described spray apertures is straight hole or taper hole or irregular hole.
9. spray equipment as claimed in claim 1 is characterized in that, described access groove comprises: inboard lead channel, outside overflow launder, inlet opening and outage, described spray head are dipped in when original position in the inboard lead channel of access groove; Described rotary actuator and described lifting executing agency are electronic or pneumatic.
10. spray equipment as claimed in claim 5 is characterized in that, the integrated a plurality of mega sonic wave generators of described spray head, and the radius of described mega sonic wave generator is greater than the radius that is sprayed object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220318045 CN202700862U (en) | 2012-06-29 | 2012-06-29 | Spraying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220318045 CN202700862U (en) | 2012-06-29 | 2012-06-29 | Spraying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202700862U true CN202700862U (en) | 2013-01-30 |
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ID=47581202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220318045 Expired - Lifetime CN202700862U (en) | 2012-06-29 | 2012-06-29 | Spraying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202700862U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103506340A (en) * | 2012-06-29 | 2014-01-15 | 北京七星华创电子股份有限公司 | Spraying device |
| CN103894361A (en) * | 2014-04-21 | 2014-07-02 | 温州捷高科技有限公司 | Lifting type annular washing device |
-
2012
- 2012-06-29 CN CN 201220318045 patent/CN202700862U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103506340A (en) * | 2012-06-29 | 2014-01-15 | 北京七星华创电子股份有限公司 | Spraying device |
| CN103506340B (en) * | 2012-06-29 | 2016-12-21 | 北京七星华创电子股份有限公司 | A kind of spray equipment |
| CN103894361A (en) * | 2014-04-21 | 2014-07-02 | 温州捷高科技有限公司 | Lifting type annular washing device |
| CN103894361B (en) * | 2014-04-21 | 2016-04-20 | 温岭市创嘉信息科技有限公司 | A kind of lift annular cleaning device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130130 |