CN103466634B - 一种多晶硅生产中原料混合氯硅烷节能回收工艺 - Google Patents
一种多晶硅生产中原料混合氯硅烷节能回收工艺 Download PDFInfo
- Publication number
- CN103466634B CN103466634B CN201310393687.5A CN201310393687A CN103466634B CN 103466634 B CN103466634 B CN 103466634B CN 201310393687 A CN201310393687 A CN 201310393687A CN 103466634 B CN103466634 B CN 103466634B
- Authority
- CN
- China
- Prior art keywords
- chlorosilane
- energy
- mixed
- production
- tower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Silicon Compounds (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310393687.5A CN103466634B (zh) | 2013-09-03 | 2013-09-03 | 一种多晶硅生产中原料混合氯硅烷节能回收工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310393687.5A CN103466634B (zh) | 2013-09-03 | 2013-09-03 | 一种多晶硅生产中原料混合氯硅烷节能回收工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103466634A CN103466634A (zh) | 2013-12-25 |
CN103466634B true CN103466634B (zh) | 2015-07-15 |
Family
ID=49791723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310393687.5A Active CN103466634B (zh) | 2013-09-03 | 2013-09-03 | 一种多晶硅生产中原料混合氯硅烷节能回收工艺 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103466634B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105480981B (zh) * | 2014-09-19 | 2017-09-26 | 新特能源股份有限公司 | 一种多晶硅还原生产中的尾气中的二氯二氢硅的回收方法和装置 |
CN110734072A (zh) * | 2018-07-19 | 2020-01-31 | 新特能源股份有限公司 | 多晶硅生产中的固渣废弃物回收再利用的方法及装置 |
CN113024593A (zh) * | 2019-12-24 | 2021-06-25 | 新特能源股份有限公司 | 一种二甲基二氯硅烷、其制备方法及其制备装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101327912A (zh) * | 2007-06-18 | 2008-12-24 | 中国恩菲工程技术有限公司 | 从生产多晶硅所产生的尾气中回收氢气的方法 |
CN101372336A (zh) * | 2007-08-20 | 2009-02-25 | 中国恩菲工程技术有限公司 | 一种多晶硅生产方法 |
CN101444681A (zh) * | 2008-12-15 | 2009-06-03 | 浙江富士特硅材料有限公司 | 三氯氢硅生产尾气回收的方法及其专用设备 |
US20100284886A1 (en) * | 2007-03-19 | 2010-11-11 | Chisso Corporation | Method for manufacturing high purity polycrystalline silicon |
-
2013
- 2013-09-03 CN CN201310393687.5A patent/CN103466634B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100284886A1 (en) * | 2007-03-19 | 2010-11-11 | Chisso Corporation | Method for manufacturing high purity polycrystalline silicon |
CN101327912A (zh) * | 2007-06-18 | 2008-12-24 | 中国恩菲工程技术有限公司 | 从生产多晶硅所产生的尾气中回收氢气的方法 |
CN101372336A (zh) * | 2007-08-20 | 2009-02-25 | 中国恩菲工程技术有限公司 | 一种多晶硅生产方法 |
CN101444681A (zh) * | 2008-12-15 | 2009-06-03 | 浙江富士特硅材料有限公司 | 三氯氢硅生产尾气回收的方法及其专用设备 |
Also Published As
Publication number | Publication date |
---|---|
CN103466634A (zh) | 2013-12-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101503337B (zh) | 采用五塔热集成装置进行甲醇精馏的工艺方法 | |
CN103466634B (zh) | 一种多晶硅生产中原料混合氯硅烷节能回收工艺 | |
CN201482235U (zh) | 具有节能控制装置的酒精蒸馏塔 | |
CN103113614B (zh) | 一种pva节能降耗生产新工艺方法 | |
CN104876838A (zh) | 一种尿素生产系统 | |
CN202576304U (zh) | 二甲基乙酰胺的制备系统 | |
CN102886151B (zh) | 一种三塔甲醇精馏热能回收装置及方法 | |
CN104896798A (zh) | 低品位热分级回收热泵提升系统及余热分级回收方法 | |
CN204874161U (zh) | 一种负压蒸氨法去除渗滤液中氨氮的装置 | |
CN105777491A (zh) | 粗甲醇气分离系统及分离方法 | |
CN202876402U (zh) | 甲基硅氧烷高环体回收装置 | |
CN201842656U (zh) | 碱渣、钾长石制氯化钾的蒸发设备 | |
CN202730036U (zh) | 热回收系统 | |
CN101900492B (zh) | 一种氧化铝焙烧炉烟气余热回收过程的防结疤方法 | |
CN105037078B (zh) | 一种氯酮母液中回收二氯甲烷的方法 | |
CN206529298U (zh) | 一种多晶硅还原尾气节能喷淋回收氯硅烷装置 | |
CN202346788U (zh) | 设有高温乏气回收装置的氧化铁料浆生产系统 | |
CN204932941U (zh) | 一种预冷型冷却分离结构 | |
CN205473475U (zh) | 一种丙烯醛生产装置 | |
CN205076831U (zh) | 一种酚氨污水处理双效精馏系统 | |
CN105013269A (zh) | 一种用于颗粒苯甲酸钠生产过程改进型尾气综合回收塔 | |
CN202648226U (zh) | 生产工艺冷却水余热回收系统 | |
CN202470522U (zh) | 一种二氧化碳增湿回收利用低温余热的装置 | |
CN203763881U (zh) | 氯乙烯高沸物精馏节能装置 | |
CN203999649U (zh) | 高炉渣余热回收利用系统 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20131225 Assignee: Xinte silicon based new materials Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000325 Denomination of invention: An energy-saving recovery process of raw material mixed chlorosilane in polysilicon production Granted publication date: 20150715 License type: Common License Record date: 20220627 Application publication date: 20131225 Assignee: Inner Mongolia Xinte silicon material Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000326 Denomination of invention: An energy-saving recovery process of raw material mixed chlorosilane in polysilicon production Granted publication date: 20150715 License type: Common License Record date: 20220627 |