CN103367222A - Multiple-substrate-magazine lifting and rotating system - Google Patents
Multiple-substrate-magazine lifting and rotating system Download PDFInfo
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- CN103367222A CN103367222A CN201210102311XA CN201210102311A CN103367222A CN 103367222 A CN103367222 A CN 103367222A CN 201210102311X A CN201210102311X A CN 201210102311XA CN 201210102311 A CN201210102311 A CN 201210102311A CN 103367222 A CN103367222 A CN 103367222A
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- disc box
- rotary system
- substrate
- elevating rotary
- driving device
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Abstract
The invention discloses a multiple-substrate-magazine lifting system which is characterized by including: a rotation mechanism driven by a rotation driving mechanism; and a plurality of lifting mechanisms which surrounds and are fixed at an outer periphery of the rotation mechanism, wherein a bottom part of each lifting mechanism is provided with a lifting driving mechanism and tops of the lifting driving mechanisms are connected with substrate magazines. The multiple-substrate-magazine lifting system enables the plurality of substrate-magazine lifting mechanisms to be distributed on the rotation mechanism uniformly and the rotation mechanism is driven by a DDR motor so that high-precision and stability of location can be ensured. And the system is controlled independently by a motion controller so that a substrate ascending and descending process can be completed in a real-time manner. Therefore, requirements for the multiple-substrate magazines by a device are met and at the same time the high precision provided can fully meet demands of the device.
Description
Technical field
The present invention relates to lowering or hoisting gear, particularly, relate to a kind of multi-disc box elevating rotary system for carrying substrates.
Background technology
In the semiconductor integrated circuit manufacturing, especially in the production process of LED production and solar battery chip, evenness to substrate, these indexs of angularity have very high requirement, therefore often need to detect evenness and the thickness of substrate, in this process, especially need to carry out substrate quick, free of contamination upper slice and lower operation.
After detection substrate operation is finished, carry out lower operation, in the prior art, this kind equipment generally is sheet devices under lower panel region distributes some, is used for placing the substrate of detection or completion of processing.Be subject to so lower sheet devices restricted number.
The problem of bringing thus is that the transmission operating speed of substrate is lower, is difficult to satisfy efficient job requirement.
On the other hand, in the present same category of device, automaticity is not high, in the transmission course of substrate, tends to cause unnecessary pollution.
Therefore, providing a kind of can carry out descending operation to a plurality of substrate unit simultaneously, again can automation the device of transmission classification substrate just seem particularly important.
Summary of the invention
The objective of the invention is to avoid jacking equipment of the prior art can't realize the deficiency of a plurality of substrate automation mechanized operations.
The invention provides a kind of multi-disc box elevating rotary system, wherein, comprising:
Rotating mechanism, described rotating mechanism is driven by rotating driving device;
Some elevating mechanisms are around the outer rim that is fixed on described rotating mechanism;
Wherein, each elevating mechanism bottom is provided with lifting drive, and film magazine can be placed in described lifting drive top.
Above-mentioned multi-disc box elevating rotary system, wherein, described rotating mechanism is the octagon column structure.
Above-mentioned multi-disc box elevating rotary system, wherein, the quantity of described film magazine is 8.
Above-mentioned multi-disc box elevating rotary system, wherein, described rotating driving device comprises the DDR motor.
Above-mentioned multi-disc box elevating rotary system, wherein, described lifting drive comprises servo motor.
According to another aspect of the present invention, also provide a kind of control system, be used for controlling above-mentioned any one multi-disc box elevating rotary system, wherein, comprising:
Motor control system is for rotating driving device and the lifting drive of controlling described multi-disc box elevating rotary system;
Signal processing system, have transducer and hand push button for detection of fault, if the fault of detecting or trigger button then give the alarm by alarm device, and send instruction to described motor control system, described rotating driving device and lifting drive are quit work.
Above-mentioned control system, wherein, described motor control system has encoder, is used for controlling described rotating driving device running accuracy.
Above-mentioned control system, wherein, described alarm device comprises LED warning lamp and buzzer.
According to a further aspect of the invention, also provide a kind of multi-disc box checkout gear, comprise frame, wherein, comprising:
Scanning workbench is arranged on an end of described frame, is provided with elevating mechanism on the described scanning workbench;
Above-mentioned multi-disc box elevating rotary system is arranged on the other end of described frame;
Band to band transfer module is located between described scanning workbench and the described multi-disc box elevating rotary system, is provided with on the described band to band transfer module and gets the sheet manipulator;
Upper slice platform is located at by the described band to band transfer module, is used for placing not detecting substrate.
Above-mentioned multi-disc box checkout gear, wherein, described manipulator comprises an arm and lower arm.
Multi-disc box elevating rotary system of the present invention a plurality of film magazine lifts are evenly distributed on the rotating mechanism, and rotating mechanism is driven by the DDR motor, and the high accuracy that can guarantee to locate is with stable.Independently controlled by motion controller, can finish in real time the fluctuating plate process.Satisfied the requirement of equipment to the multi-disc box.The high accuracy that provides simultaneously can fully satisfy device requirement.
Description of drawings
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that the present invention and feature thereof, profile and advantage will become.Mark identical in whole accompanying drawings is indicated identical part.Deliberately proportionally do not draw accompanying drawing, focus on illustrating purport of the present invention.In the accompanying drawings, for cheer and bright, amplified the part parts, for same parts, only indicated wherein part, those skilled in the art can partly understand in conjunction with embodiment.
Fig. 1 shows according to a present invention specific embodiment, a kind of vertical view with multi-disc box checkout gear of multi-disc box elevating rotary system;
Fig. 2 shows according to a present invention specific embodiment, a kind of schematic diagram of the control system be used to controlling above-mentioned any one multi-disc box elevating rotary system; And
Fig. 3 shows the flow chart of multi-disc box checkout gear running of the present invention.
Embodiment
Below in conjunction with the drawings and the specific embodiments the present invention is further elaborated.Embodiment described herein only is used for explaining the present invention, the protection range that is not intended to limit the present invention.
In conjunction with reference to figure 1 and Fig. 2, a kind of multi-disc box of multi-disc box elevating rotary system of the present invention elevating rotary system comprises: rotating mechanism 6, and described rotating mechanism 6 is driven by rotating driving device 60; Some elevating mechanisms 5 are around the outer rim that is fixed on described rotating mechanism 6; Wherein, each elevating mechanism 5 bottom is provided with lifting drive 50, and described lifting drive 50 tops are connected with film magazine (among Fig. 1 not label).
In a specific embodiment, described rotating mechanism 6 is octagon, and those skilled in the art understand, rotating mechanism 6 also can adopt other shapes, circular or other Central Symmetry polygons for example, such variation does not affect enforcement of the present invention, does not repeat them here.
Preferably, the quantity of described film magazine is 8.
Further, described rotating driving device 60 comprises the DDR motor.
Further, described lifting drive 50 comprises servo motor.
Wherein, rotating driving device 60 and lifting drive 50 also can realize with other motors, and this is prior art, and those skilled in the art can adopt different motors according to actual needs, do not repeat them here.
Those skilled in the art understand, for so that running accuracy can be controlled, described motor control system 40 has encoder, is used for controlling described rotating driving device 60 running accuracies, those skilled in the art can in conjunction with the described encoder of existing techniques in realizing, not repeat them here.
At another specific embodiment, described alarm device 33 comprises LED warning lamp and buzzer.
With reference to multi-disc box checkout gear shown in Figure 1, comprise the frame (not shown in figure 1), also comprise: scanning workbench 10, be arranged on an end of described frame, be provided with monitor station 1 on the described scanning workbench 10; Described multi-disc box elevating rotary system is arranged on the other end of described frame; Band to band transfer module 100 is located between described scanning workbench 10 and the described multi-disc box elevating rotary system, is provided with on the described band to band transfer module to get sheet manipulator (among Fig. 1 not label); Upper slice platform 4 is located at described band to band transfer module 100 other, is used for placing and does not detect substrate.
More specifically, described manipulator comprises an arm 2 and lower arm 3.
With reference to figure 3, multi-disc box checkout gear of the present invention carries out 5 steps successively again.At first, be confirmed whether to need upper slice, if, then drive mechanism's operation, wait for upper slice, if not, execution action not then.Particularly, in the time of upper slice, by getting the sheet manipulator the not detection substrate on upper slice platform 4 was placed on the monitor station 1.
Then, behind the substrate end of scan, obtain the numbering of selected lower mechanism according to the result, for example in one embodiment, have 8 film magazines in the multi-disc box elevating rotary system and be used for lower, select one of them as lower magazine.Then, number forward lower station to according to the lower magazine that obtains, moved up and down by lower elevating mechanism again, wait for sheet under the transport sector, to finish whole action.
Those skilled in the art can realize described variation example in conjunction with prior art and above-described embodiment, and such variation example does not affect flesh and blood of the present invention, does not repeat them here.
Above preferred embodiment of the present invention is described.It will be appreciated that, the present invention is not limited to above-mentioned specific implementations, and the equipment of wherein not describing in detail to the greatest extent and structure are construed as with the common mode in this area to be implemented; Any those of ordinary skill in the art, do not breaking away from the technical solution of the present invention scope situation, all can utilize method and the technology contents of above-mentioned announcement that technical solution of the present invention is made many possible changes and modification, or being revised as the equivalent embodiment of equivalent variations, this does not affect flesh and blood of the present invention.Therefore, every content that does not break away from technical solution of the present invention according to any simple modification, equivalent variations and the modification that technical spirit of the present invention is done above embodiment, all still belongs in the scope of technical solution of the present invention protection.
Claims (10)
1. a multi-disc box elevating rotary system is characterized in that, comprising:
Rotating mechanism, described rotating mechanism is driven by rotating driving device;
Some elevating mechanisms are around the outer rim that is fixed on described rotating mechanism;
Wherein, each elevating mechanism bottom is provided with lifting drive, and film magazine is placed at described lifting drive top.
2. multi-disc box elevating rotary system according to claim 1 is characterized in that, described rotating mechanism is the octagon column structure.
3. multi-disc box elevating rotary system according to claim 1 and 2 is characterized in that, the quantity of described film magazine is 8.
4. multi-disc box elevating rotary system according to claim 1 is characterized in that, described rotating driving device comprises the DDR motor.
5. multi-disc box elevating rotary system according to claim 1 is characterized in that, described lifting drive comprises servo motor.
6. a control system is used for the described multi-disc box of control claim 1 to 5 any one elevating rotary system, comprising:
Motor control system is for rotating driving device and the lifting drive of controlling described multi-disc box elevating rotary system;
Signal processing system, have transducer and hand push button for detection of fault, if the fault of detecting or trigger button then give the alarm by alarm device, and send instruction to described motor control system, described rotating driving device and lifting drive are quit work.
7. system according to claim 6 is characterized in that, described motor control system has encoder, is used for controlling described rotating driving device running accuracy.
8. system according to claim 6 is characterized in that, described alarm device comprises LED warning lamp and buzzer.
9. a multi-disc box checkout gear comprises frame, it is characterized in that, comprising:
Scanning workbench is arranged on an end of described frame, is provided with elevating mechanism on the described scanning workbench;
The described multi-disc box of any one elevating rotary system in the claim 1 to 5 is arranged on the other end of described frame;
Band to band transfer module is located between described scanning workbench and the described multi-disc box elevating rotary system, is equipped with on the described band to band transfer module and gets the sheet manipulator;
Upper slice platform is located at by the described band to band transfer module, is used for placing not detecting substrate.
10. multi-disc box checkout gear according to claim 9 is characterized in that, described manipulator comprises an arm and lower arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210102311.XA CN103367222B (en) | 2012-04-10 | 2012-04-10 | A kind of many film magazines elevating rotary system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210102311.XA CN103367222B (en) | 2012-04-10 | 2012-04-10 | A kind of many film magazines elevating rotary system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103367222A true CN103367222A (en) | 2013-10-23 |
| CN103367222B CN103367222B (en) | 2016-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210102311.XA Active CN103367222B (en) | 2012-04-10 | 2012-04-10 | A kind of many film magazines elevating rotary system |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1111033A (en) * | 1994-01-31 | 1995-11-01 | 松下电器产业株式会社 | Vacuum treating apparatus |
| JPH08330202A (en) * | 1995-05-31 | 1996-12-13 | Nec Kyushu Ltd | Semiconductor wafer treatment device |
| US6559070B1 (en) * | 2000-04-11 | 2003-05-06 | Applied Materials, Inc. | Mesoporous silica films with mobile ion gettering and accelerated processing |
| US20040053184A1 (en) * | 2002-09-12 | 2004-03-18 | Applied Materials, Inc. | Large area substrate processing system |
| CN1711155A (en) * | 2002-11-14 | 2005-12-21 | 东京毅力科创株式会社 | Device for correcting reference position for transfer mechanism, and correction method |
| CN101316473A (en) * | 2007-05-31 | 2008-12-03 | 细美事有限公司 | Apparatus and method for treating substrate using plasma |
-
2012
- 2012-04-10 CN CN201210102311.XA patent/CN103367222B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1111033A (en) * | 1994-01-31 | 1995-11-01 | 松下电器产业株式会社 | Vacuum treating apparatus |
| JPH08330202A (en) * | 1995-05-31 | 1996-12-13 | Nec Kyushu Ltd | Semiconductor wafer treatment device |
| US6559070B1 (en) * | 2000-04-11 | 2003-05-06 | Applied Materials, Inc. | Mesoporous silica films with mobile ion gettering and accelerated processing |
| US20040053184A1 (en) * | 2002-09-12 | 2004-03-18 | Applied Materials, Inc. | Large area substrate processing system |
| CN1711155A (en) * | 2002-11-14 | 2005-12-21 | 东京毅力科创株式会社 | Device for correcting reference position for transfer mechanism, and correction method |
| CN101316473A (en) * | 2007-05-31 | 2008-12-03 | 细美事有限公司 | Apparatus and method for treating substrate using plasma |
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| Publication number | Publication date |
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| CN103367222B (en) | 2016-08-17 |
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