CN103367222B - A kind of many film magazines elevating rotary system - Google Patents
A kind of many film magazines elevating rotary system Download PDFInfo
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- CN103367222B CN103367222B CN201210102311.XA CN201210102311A CN103367222B CN 103367222 B CN103367222 B CN 103367222B CN 201210102311 A CN201210102311 A CN 201210102311A CN 103367222 B CN103367222 B CN 103367222B
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- many film
- film magazines
- rotating mechanism
- elevating
- control system
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
A kind of many film magazines jacking system of the present invention, it is characterised in that including: rotating mechanism, described rotating mechanism is driven by rotating driving device；Some elevating mechanisms, are fastened around the outer rim of described rotating mechanism；Wherein, being provided with lifting drive bottom each elevating mechanism, described lifting drive top connects film magazine.Multiple film magazine elevator are evenly distributed on rotating mechanism, and rotating mechanism are driven by DDR motor by many film magazines jacking system of the present invention, it is possible to ensure the high accuracy of location and stablize.Independently controlled by motion controller, fluctuating plate process can be completed in real time.Meet the equipment requirement to many film magazines.The high accuracy simultaneously provided, can fully meet device requirement.
Description
Technical field
The present invention relates to lowering or hoisting gear, in particular it relates to a kind of many film magazines elevating rotary system for carrying substrates.
Background technology
In semiconductor integrated circuit manufacturing, produce and in the production process of solar battery chip at LED especially, flatness to substrate, these indexs of angularity have the highest requirement, therefore it is frequently necessary to detect flatness and the thickness of substrate, during this, it is especially desirable to carry out substrate quick, free of contamination upper slice and bottom sheet operation.
After detection substrate operation completes, carrying out bottom sheet operation, in prior art, this kind equipment is usually at some lower sheet devices of bottom sheet area distribution, is used for placing detection or the substrate of completion of processing.So limited by lower sheet devices quantity.
The problem thus brought is, the transmission operating speed of substrate is relatively low, it is difficult to meet efficient job requirement.
On the other hand, in current same category of device, automaticity is the highest, in the transmitting procedure of substrate, often causes unnecessary pollution.
Therefore it provides one can carry out descending operation to multiple substrate unit simultaneously, can the device of automatization's transmission classification substrate just be particularly important again.
Summary of the invention
It is an object of the invention to the deficiency avoiding jacking equipment of the prior art cannot realize multiple substrate automation mechanized operation.
The present invention provides a kind of many film magazines elevating rotary system, wherein, and including:
Rotating mechanism, described rotating mechanism is driven by rotating driving device；
Some elevating mechanisms, are fastened around the outer rim of described rotating mechanism；
Wherein, being provided with lifting drive bottom each elevating mechanism, film magazine can be placed in described lifting drive top.
Above-mentioned many film magazines elevating rotary system, wherein, described rotating mechanism is octagon column structure.
Above-mentioned many film magazines elevating rotary system, wherein, the quantity of described film magazine is 8.
Above-mentioned many film magazines elevating rotary system, wherein, described rotating driving device includes DDR motor.
Above-mentioned many film magazines elevating rotary system, wherein, described lifting drive includes servo motor.
According to another aspect of the present invention, also provide for a kind of control system, be used for controlling above-mentioned any one many film magazines elevating rotary system, wherein, including:
Motor control system, for controlling rotating driving device and the lifting drive of described many film magazines elevating rotary system；
Signal processing system, there is the sensor for detecting fault and hand push button, if the fault of detecting or trigger button, then send alarm by warning devices, and send a command to described motor control system, make described rotating driving device and lifting drive quit work.
Above-mentioned control system, wherein, described motor control system has encoder, is used for controlling described rotating driving device running accuracy.
Above-mentioned control system, wherein, described warning devices includes LED warning lamp and buzzer.
According to a further aspect of the invention, also provide for a kind of many film magazines detection device, including frame, wherein, including:
Scanning workbench, is arranged on one end of described frame, described scanning workbench is provided with elevating mechanism；
Above-mentioned many film magazines elevating rotary system, is arranged on the other end of described frame；
Band to band transfer module, is located between described scanning workbench and described many film magazines elevating rotary system, described band to band transfer module is provided with and takes sheet mechanical hand；
Upper slice platform, is located at by described band to band transfer module, does not detects substrate for placing.
Above-mentioned many film magazines detection device, wherein, described mechanical hand includes an arm and bottom sheet arm.
Multiple film magazine elevator are evenly distributed on rotating mechanism, and rotating mechanism are driven by DDR motor by many film magazines elevating rotary system of the present invention, it is possible to ensure the high accuracy of location and stablize.Independently controlled by motion controller, fluctuating plate process can be completed in real time.Meet the equipment requirement to many film magazines.The high accuracy simultaneously provided, can fully meet device requirement.
Accompanying drawing explanation
The detailed description made non-limiting example with reference to the following drawings by reading, the present invention and feature, profile and advantage will become more apparent upon.The part that labelling instruction identical in whole accompanying drawings is identical.The most deliberately it is drawn to scale accompanying drawing, it is preferred that emphasis is the purport of the present invention is shown.In the accompanying drawings, for cheer and bright, being exaggerated section components, for same parts, only indicate wherein part, those skilled in the art can understand in conjunction with detailed description of the invention part.
Fig. 1 shows according to one specific embodiment of the present invention, the top view of a kind of many film magazines detection device with many film magazines elevating rotary system；
Fig. 2 shows according to one specific embodiment of the present invention, the schematic diagram of a kind of control system for controlling above-mentioned any one many film magazines elevating rotary system；And
Fig. 3 shows the flow chart of many film magazines detection plant running process of the present invention.
Detailed description of the invention
Below in conjunction with the drawings and the specific embodiments, the present invention is further elaborated.Detailed description of the invention described herein is only used for explaining the present invention, the protection domain being not intended to limit the present invention.
In conjunction with reference Fig. 1 and Fig. 2, a kind of many film magazines elevating rotary system of many film magazines elevating rotary system of the present invention, including: rotating mechanism 6, described rotating mechanism 6 is driven by rotating driving device 60；Some elevating mechanisms 5, are fastened around the outer rim of described rotating mechanism 6；Wherein, being provided with lifting drive 50 bottom each elevating mechanism 5, described lifting drive 50 top connects film magazine (non-label in Fig. 1).
In a specific embodiment, described rotating mechanism 6 is octagon, skilled artisan understands that, rotating mechanism 6 can also use other shapes, such as circle or other centrosymmetry polygons, such change has no effect on the enforcement of the present invention, does not repeats them here.
Preferably, the quantity of described film magazine is 8.
Further, described rotating driving device 60 includes DDR motor.
Further, described lifting drive 50 includes servo motor.
Wherein, rotating driving device 60 and lifting drive 50 can also realize with other motors, and this is prior art, and those skilled in the art can use different motors according to actual needs, does not repeats them here.
Control system 20 as shown in Figure 2, for controlling above-mentioned many film magazines elevating rotary system, including: motor control system 40, for controlling rotating driving device 60 and the lifting drive 50 of described many film magazines elevating rotary system；Signal processing system 30, there is the sensor 31 for detecting fault and hand push button 32, if the fault of detecting or trigger button 32, then send alarm by warning devices 33, and send a command to described motor control system 40, make described rotating driving device 60 and lifting drive 50 quit work.
Skilled artisan understands that, so that running accuracy can be controlled, described motor control system 40 has encoder, is used for controlling described rotating driving device 60 running accuracy, those skilled in the art can realize described encoder in conjunction with prior art, does not repeats them here.
At another specific embodiment, described warning devices 33 includes LED warning lamp and buzzer.
With reference to the many film magazines detection device shown in Fig. 1, including frame (not shown in figure 1), also include: scanning workbench 10, be arranged on one end of described frame, described scanning workbench 10 is provided with monitor station 1；Described many film magazines elevating rotary system, is arranged on the other end of described frame；Band to band transfer module 100, is located between described scanning workbench 10 and described many film magazines elevating rotary system, described band to band transfer module is provided with and takes sheet mechanical hand (non-label in Fig. 1)；Upper slice platform 4, is located at described band to band transfer module 100 other, does not detects substrate for placing.
More specifically, described mechanical hand includes an arm 2 and bottom sheet arm 3.
Referring again to Fig. 3, many film magazines detection device of the present invention carries out 5 steps successively.First, it is confirmed whether to need slice, the most then drives Shang Pian mechanism to run, wait slice, if it is not, the most do not perform action.Specifically, time upper slice, by taking sheet mechanical hand, the substrate that do not detects on upper slice platform 4 was placed on monitor station 1.
Then, after substrate scan terminates, obtain the numbering of selected bottom sheet mechanism according to result, the most in one embodiment, many film magazines elevating rotary system has 8 film magazines for bottom sheet, select one of them as lower magazine.Then, forward bottom sheet station to according to the lower magazine number obtained, then moved up and down by bottom sheet elevating mechanism, wait transmission mechanism bottom sheet, to complete whole action.
Those skilled in the art combine prior art and above-described embodiment can realize described change case, and such change case has no effect on the flesh and blood of the present invention, do not repeats them here.
Above presently preferred embodiments of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned particular implementation, the equipment and the structure that do not describe in detail the most to the greatest extent are construed as being practiced with the common mode in this area；Any those of ordinary skill in the art, without departing under technical solution of the present invention ambit, technical solution of the present invention is made many possible variations and modification by the method and the technology contents that all may utilize the disclosure above, or it being revised as the Equivalent embodiments of equivalent variations, this has no effect on the flesh and blood of the present invention.Therefore, every content without departing from technical solution of the present invention, the technical spirit of the foundation present invention, to any simple modification made for any of the above embodiments, equivalent variations and modification, all still falls within the range of technical solution of the present invention protection.
Claims (13)
1. a control system, is used for controlling many film magazines elevating rotary system, described many film magazines lifting rotations system
System includes:
Rotating mechanism, described rotating mechanism is driven by rotating driving device；
Some elevating mechanisms, are fastened around the outer rim of described rotating mechanism；
Wherein, being provided with lifting drive bottom each elevating mechanism, sheet is placed at described lifting drive top
Box；
It is characterized in that, described control system includes:
Motor control system, drives for the rotating driving device and lifting controlling described many film magazines elevating rotary system
Dynamic device；
Signal processing system, has the sensor for detecting fault and hand push button, if the fault of detecting or tactile
Send out button, then send alarm by warning devices, and send a command to described motor control system, make described rotation
Rotary driving device and lifting drive quit work.
Control system the most according to claim 1, it is characterised in that described rotating mechanism is octagon post
Body structure.
Control system the most according to claim 1 and 2, it is characterised in that the quantity of described film magazine is 8.
Control system the most according to claim 1, it is characterised in that described rotating driving device includes DDR
Motor.
Control system the most according to claim 1, it is characterised in that described lifting drive includes servo
Motor.
System the most according to claim 1, it is characterised in that described motor control system has encoder,
For controlling described rotating driving device running accuracy.
System the most according to claim 1, it is characterised in that described warning devices include LED warning lamp with
And buzzer.
8. the detection device of film magazine more than, including frame, it is characterised in that including:
Scanning workbench, is arranged on one end of described frame, described scanning workbench is provided with elevating mechanism；
Many film magazines elevating rotary system, is arranged on the other end of described frame；
Band to band transfer module, is located between described scanning workbench and described many film magazines elevating rotary system, described band to band transfer module
On be provided with and take sheet mechanical hand；
Upper slice platform, is located at by described band to band transfer module, does not detects substrate for placing；
Described many film magazines elevating rotary system includes:
Rotating mechanism, described rotating mechanism is driven by rotating driving device；
Some elevating mechanisms, are fastened around the outer rim of described rotating mechanism；
Wherein, being provided with lifting drive bottom each elevating mechanism, described lifting drive top is put
Put film magazine.
A many film magazines the most according to claim 8 detection device, it is characterised in that described mechanical hand includes slice
Arm and bottom sheet arm.
Many film magazines the most according to claim 8 detection device, it is characterised in that described rotating mechanism is just
Octagonal cylinder structure.
Many film magazines detection device described in 11. according to Claim 8 or 10, it is characterised in that the number of described film magazine
Amount is 8.
12. many film magazines according to claim 8 detection devices, it is characterised in that described rotating driving device
Including DDR motor.
13. many film magazines according to claim 8 detection devices, it is characterised in that described lifting drive
Including servo motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210102311.XA CN103367222B (en) | 2012-04-10 | 2012-04-10 | A kind of many film magazines elevating rotary system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210102311.XA CN103367222B (en) | 2012-04-10 | 2012-04-10 | A kind of many film magazines elevating rotary system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103367222A CN103367222A (en) | 2013-10-23 |
| CN103367222B true CN103367222B (en) | 2016-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210102311.XA Active CN103367222B (en) | 2012-04-10 | 2012-04-10 | A kind of many film magazines elevating rotary system |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1111033A (en) * | 1994-01-31 | 1995-11-01 | 松下电器产业株式会社 | Vacuum treating apparatus |
| US6559070B1 (en) * | 2000-04-11 | 2003-05-06 | Applied Materials, Inc. | Mesoporous silica films with mobile ion gettering and accelerated processing |
| CN1711155A (en) * | 2002-11-14 | 2005-12-21 | 东京毅力科创株式会社 | Device for correcting reference position for transfer mechanism, and correction method |
| CN101316473A (en) * | 2007-05-31 | 2008-12-03 | 细美事有限公司 | Apparatus and method for treating substrate using plasma |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2665202B2 (en) * | 1995-05-31 | 1997-10-22 | 九州日本電気株式会社 | Semiconductor wafer processing equipment |
| US6896513B2 (en) * | 2002-09-12 | 2005-05-24 | Applied Materials, Inc. | Large area substrate processing system |
-
2012
- 2012-04-10 CN CN201210102311.XA patent/CN103367222B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1111033A (en) * | 1994-01-31 | 1995-11-01 | 松下电器产业株式会社 | Vacuum treating apparatus |
| US6559070B1 (en) * | 2000-04-11 | 2003-05-06 | Applied Materials, Inc. | Mesoporous silica films with mobile ion gettering and accelerated processing |
| CN1711155A (en) * | 2002-11-14 | 2005-12-21 | 东京毅力科创株式会社 | Device for correcting reference position for transfer mechanism, and correction method |
| CN101316473A (en) * | 2007-05-31 | 2008-12-03 | 细美事有限公司 | Apparatus and method for treating substrate using plasma |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103367222A (en) | 2013-10-23 |
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