CN103358409A - Cutting device - Google Patents
Cutting device Download PDFInfo
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- CN103358409A CN103358409A CN2013101171652A CN201310117165A CN103358409A CN 103358409 A CN103358409 A CN 103358409A CN 2013101171652 A CN2013101171652 A CN 2013101171652A CN 201310117165 A CN201310117165 A CN 201310117165A CN 103358409 A CN103358409 A CN 103358409A
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- leftover pieces
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Abstract
The present invention provides a cutting device capable of directly carrying a split chip in the way of low cost and space saving. The cutting device (1) has a static base (2) and a cutting unit (4) arranged at an upper surface (2a) of the static base (2). The cutting unit (4) at least comprises a chuck workbench (10), a processing member (20) for supplying processing fluid and performing cut processing at the same time, an X axis moving member, a Y axis moving member (80), a Z axis moving member (90), a shooting member (30), and a chip moving member (50). The chip moving member (50) has a chip blowing nozzle (51) arranged at a tail end of the shooting member (30) and a chip box (52) detachably arranged on the upper surface (2a) of the static base (2).
Description
Technical field
The present invention relates to tabular machined object is divided into the one by one topping machanism of device chip.
Background technology
In semiconductor device manufacturing process and various electronic unit manufacturing process, the topping machanism that is called as cutting machine (dicing saw) is indispensable, and described topping machanism makes as thin as a wafer cutting tool High Rotation Speed machined object is divided into one by one product or chip.In this topping machanism, cutting tool is made of adhesives and the small abrasive particle (diamond or carborundum (SiC) etc.) that contains in a large number in adhesives and the thickness of blade is 20～300 μ m, make described cutting tool High Rotation Speed, with machined object (semiconductor wafer or glass, CSP(wafer-level package) and BGA(BGA Package) etc. resin substrate, pottery etc.) the preset lines of cutting apart be crushed to micron order and remove, thereby machined object is divided into one by one product or chip.In machined object, even exist the machined object that the processing of the device chip after the processing also can not have problems relatively roughly.For example, there is following topping machanism without belt: for the resin substrate such as CSP and BGA and ceramic substrate etc., directly substrate is fixed to chuck table, direct conveyance chip after cutting apart, after cleaning, described chip is accommodated in (for example, with reference to patent documentations 1) such as boxes.In this case owing to not needing normally used cutting belt, so correspondingly realized running stores reduction, paste reduction and the cost cutting in man-hour.
Patent documentation 1: No. 4388640 communique of Japan Patent
Yet in the topping machanism shown in the above-mentioned patent documentation 1, the complex structure of the conveyance member of the device chip after being used for cutting apart from the chuck table conveyance requires device chip aspirated reliably and is fixed in the conveyance member.Therefore, it is relatively more expensive that topping machanism self becomes, and itself also maximizes device.
And, in the topping machanism shown in the above-mentioned patent documentation 1, have following situation: the smear metal that produces in the processing is attached to the contact-making surface that contacts with machined object (suction face) of suction retaining member, it has played the effect as bonding agent, machined object is close to the small concavo-convex of suction face, thereby machined object is firmly fixed.Under such state, stop swabbing action even can produce, the problem that machined object does not also break away from from the suction retaining member.
Summary of the invention
The present invention is just In view of the foregoing for finishing, and its purpose is, providing can be cheap and save the topping machanism of the chip after directly conveyance is cut apart spatially.
For solving above-mentioned problem, reach purpose, topping machanism of the present invention is for being used for that tabular machined object is divided into chip one by one and being accommodated in the topping machanism of chip cartridges, it is characterized in that, described topping machanism possesses: chuck table, described chuck table are used for keeping described machined object with the suction of maintenance face; Tool member utilizes cutting tool to carry out division processing on one side described tool member is used for the described machined object that remains in described chuck table being supplied with working fluid on one side; Processing feeding member, described processing feeding member is used for making described chuck table to move along the processing direction of feed taking out of to move between zone and the machining area, describedly take out of that to move into the zone be used to the zone of taking out of and move into described machined object, described machining area is for the zone of described machined object being carried out division processing; Index feed member, described index feed member are used for making described tool member to move along the index feed direction vertical with described processing direction of feed; And chip mobile member, described chip mobile member is used for taking in to described chip cartridges from chuck table to the described chip ejector fluid that is separated one by one and with described chip, described chip mobile member possesses: chip blows and flies nozzle, described chip blows and flies nozzle and be equipped on described taking out of and move into the zone, being used for the described index feed direction in an edge moves on one side from oblique upper and flies having stopped from the described chip ejector fluid after the cutting apart of the suction of described chuck table, described chip being blown from described chuck table towards the place ahead of moving direction; With the chip cartridges that can load and unload, described chip cartridges is equipped on described taking out of and moves into the zone, and described chip cartridges is equipped on that described chip blows the place ahead of the moving direction that flies nozzle and on the next door of described processing feeding member, described chip cartridges is at the position opening lower than the maintenance face of described chuck table, and described chip cartridges is used for taking in being blown by described chip and flies nozzle and blow the described chip that flies.
Preferably, in described topping machanism, described chip blows and flies nozzle and be banded ground ejecting fluid to the described maintenance face of described chuck table, and at least both ends of the width of described fluid are sprayed, described chip is imported described chip cartridges and be not scattered towards the central authorities of the width of described fluid.
Preferably, in described topping machanism, when the described chip that is separated is one by one broken away from, described chuck table is after the suction that stops from described maintenance face, supply with off and on fluid to described maintenance face, fluid is sprayed from described maintenance face, and described chip is broken away from from described chuck table reliably.
Preferably, described topping machanism possesses the corner magazine that disperses that can load and unload, the described corner magazine that disperses is equipped on described machining area and is used for taking in leftover pieces, and described leftover pieces are to produce and because the leftover pieces that the rotation of described cutting tool is dispersed from described machined object by division processing.
Preferably, described topping machanism also possesses the leftover pieces mobile member, described leftover pieces mobile member is equipped on described machining area, be used for just spraying fluid from the described leftover pieces that described machined object downcuts by described cutting tool, and described leftover pieces are accommodated in the corner magazine, described leftover pieces mobile member possesses: leftover pieces blow and fly nozzle, and described leftover pieces blow and fly nozzle and be equipped on described tool member, are used for spraying fluid along described index feed direction; With the corner magazine that can load and unload, described corner magazine is provided in the place ahead that described leftover pieces blow the injection direction that flies nozzle, is used for taking in being blown the described leftover pieces that fly.
Preferably, in described topping machanism, at least comprise that the cutting unit of described chuck table, described tool member, described processing feeding member, described index feed member and described chip mobile member is provided in the smooth upper surface of stationary base, described cutting unit is so that described chuck table is in the mode of low level tilts along described index feed direction take described processing direction of feed as fulcrum.
Therefore, in topping machanism of the present invention, add chip by the cutting machine that does not have transport mechanism to so-called type hand and blow and fly nozzle and chip cartridges, can be cheap and save chip after directly conveyance is cut apart spatially.And, as the scheme that prevents that chip from pasting with respect to chuck table, spray off and on fluid by the surface from chuck table, thereby can make the chip vibration that chip is broken away from from chuck table.
And, the outer edge of cutting base plate for packaging and the leftover pieces that produce are not aspirated by chuck table, therefore rotation and the injection of working fluid K and blown of described leftover pieces by cutting tool flies.Because being blown the direction that flies at described leftover pieces is provided with the loading and unloading corner magazine that disperses freely, automatically is accommodated in the corner magazine that disperses so blow the leftover pieces that fly.And, since comprise whole processing feeding members and index feed member cutting unit so that the mode that chuck table is in low level tilt as fulcrum along the index feed direction take the processing direction of feed, so utilize gravity naturally to promote the removal of working fluid and leftover pieces etc.
Description of drawings
Fig. 1 is the figure of structure example that the integral body of the topping machanism that embodiment relates to is shown.
Fig. 2 is the figure that the side of the topping machanism that embodiment relates to is shown.
Fig. 3 illustrates the chuck table of the topping machanism that embodiment relates to and as the stereogram of base plate for packaging of machined object etc.
Fig. 4 is the figure that the plane of the topping machanism that embodiment relates to is shown.
Fig. 5 is the front view that the major part of tool member in the division processing of the topping machanism that embodiment relates to and chuck table etc. is shown.
Fig. 6 is the side view that the major part of tool member in the division processing of the topping machanism that embodiment relates to and chuck table etc. is shown.
Fig. 7 is the figure of structure that the major part of chuck table that chip that making of topping machanism that embodiment relates to separated one by one breaks away from from chuck table etc. is shown.
Fig. 8 is the figure of the major part of the chip that will be separated one by one that the topping machanism that embodiment relates to the is shown state that is accommodated in chip cartridges.
Label declaration
1: topping machanism;
2: stationary base;
2a: upper surface;
4: cutting unit;
10: chuck table;
10a: surface (maintenance face);
20: tool member;
21: cutting tool;
35: the corner magazine disperses;
40: the leftover pieces mobile member;
41: leftover pieces blow and fly nozzle;
42: the corner magazine;
50: the chip mobile member;
51: chip blows and flies nozzle;
52: chip cartridges;
70:X axle mobile member (processing feeding member);
80:Y axle mobile member (index feed member);
X, XA: processing direction of feed;
YA: index feed direction;
O: take out of and move into the zone;
P: machining area;
K: working fluid;
F1, F2: water (fluid);
W: base plate for packaging (machined object);
T: chip;
E: leftover pieces.
The specific embodiment
Explain being used for implementing mode of the present invention (embodiment) with reference to accompanying drawing.And can't help the content that following embodiment puts down in writing and limit the present invention.And, comprise the structural element and identical in fact structural element that those skilled in the art can easily expect in the structural element of record below.And, the structural element of putting down in writing below suitably can be made up.And, in the scope that does not break away from purport of the present invention, can carry out various omissions, displacement or the change of structure.
[embodiment]
Fig. 1 is the figure of structure example that the integral body of the topping machanism that embodiment relates to is shown.Fig. 2 is the figure that the side of the topping machanism that embodiment relates to is shown.Fig. 3 illustrates the chuck table of the topping machanism that embodiment relates to and as the stereogram of base plate for packaging of machined object etc.Fig. 4 is the figure that the plane of the topping machanism that embodiment relates to is shown.Fig. 5 is the front view that the major part of tool member in the division processing of the topping machanism that embodiment relates to and chuck table etc. is shown.Fig. 6 is the side view that the major part of tool member in the division processing of the topping machanism that embodiment relates to and chuck table etc. is shown.Fig. 7 is the figure of structure that the major part of chuck table that chip that making of topping machanism that embodiment relates to separated one by one breaks away from from chuck table etc. is shown.Fig. 8 is the figure of the major part of the chip that will be separated one by one that the topping machanism that embodiment relates to the is shown state that is accommodated in chip cartridges.
1 couple of surperficial 10a(at chuck table 10 of the topping machanism that embodiment shown in Figure 1 relates to is equivalent to maintenance face) the base plate for packaging W(that keeps is equivalent to machined object) implement division processing, tabular base plate for packaging W is divided into one by one chip T, and the chip T that is partitioned into is accommodated in chip cartridges 52.
In addition, in embodiment, base plate for packaging W as machined object is the tabular machined object of being implemented division processing by topping machanism 1, in the present embodiment, as shown in Figure 3, base plate for packaging W has a plurality of devices, and described a plurality of devices are demarcated and had predetermined electrode etc. and utilize resin to encapsulate by orthogonal preset lines L, the L1 cut apart.Topping machanism 1 relatively moves chuck table 10 and the tool member 20 with cutting tool 21, and implements division processing at cut apart preset lines L, the L1 of base plate for packaging W, thus base plate for packaging W is divided into the one by one chip T that comprises device.
As shown in Figure 1, topping machanism 1 constitutes and comprises: stationary base 2(is shown in Figure 2), chuck table 10, tool member 20, take member 30, magazine 35(is shown in Figure 4 in the corner of dispersing), leftover pieces mobile member 40, chip mobile member 50 and control member 60(be shown in Figure 2).Topping machanism 1 constitutes also and comprises: 70(is shown in Figure 2 for the X-axis mobile member, is equivalent to process the feeding member), it is used for making chuck table 10 and tool member 20 along X(XA) direction of principal axis (being equivalent to process direction of feed) relatively moves; Y-axis shift moves member 80(Fig. 2 and shown in Figure 4, is equivalent to the index feed member), it is used for chuck table 10 and tool member 20 are relatively moved along YA direction of principal axis (being equivalent to index direction); With Z axis mobile member 90(Fig. 2 and shown in Figure 4, be equivalent to cutting-in feeding member), it is used for chuck table 10 and tool member 20 are relatively moved along ZA direction of principal axis (being equivalent to depth direction).
The upper surface 2a of stationary base 2 forms smooth tabular.Be provided with to take out of at the upper surface 2a of stationary base 2 and move into regional O and machining area P, described taking out of moved into regional O and taken out of and move into for base plate for packaging W and chip T, and described machining area P is for base plate for packaging W is carried out division processing.In addition, stationary base 2 is located in the stand section 3.And, such as Fig. 1, Fig. 2 and shown in Figure 4, be provided with separation in stationary base 2 and take out of the demarcation strip 5 of moving into regional O and machining area P.
Base plate for packaging W before the division processing is loaded the surperficial 10a of chuck table 10 by the operator, and described chuck table 10 keeps described base plate for packaging W with surperficial 10a suction.And, chuck table 10 is when breaking away from the chip T that is separated one by one, stop the suction from surperficial 10a, then supply with off and on the gas that pressurizes as the process of fluid to surperficial 10a, and make described gas from described surperficial 10a ejection, thereby chip T is broken away from from chuck table 10.
As shown in Figure 3, be formed with a plurality of escapes 11 at the surperficial 10a of chuck table 10, described a plurality of escapes 11 are used for avoiding the cutting tool 21 that preset lines L, L1 are cut apart in chuck table 10 and incision to contact.And, be formed with accordingly SS 12 for the one by one chip T of suction base plate for packaging W at the described surperficial 10a of chuck table 10 and each chip T.As shown in Figure 7, SS 12 is connected with the suction road 15 that is connected in suction source 14 via magnetic valve 13, and, suction road 15 be connected with the stream 18 that is connected with fluid supply source 17 via magnetic valve 16 midway. Magnetic valve 13,16 is used for opening and closing suction road 15 and stream 18 according to the order from control member 60.From SS 12 suction environmental gas, fluid supply source 17 will be through the gas ejection of pressurization from SS 12 via stream 18 and suction road 15 via suction road 15 for suction source 14.
In addition, chuck table 10 is located at movable workbench pedestal 19(Fig. 2 that the stationary base 2 at topping machanism 1 arranges and shown in Figure 3 in the mode that can load and unload).Movable workbench pedestal 19 is set as and utilizes X-axis mobile member 70 along X(XA) direction of principal axis moves freely and utilizes not shown pedestal drive source around central axis (parallel with the ZA axle) rotation freely.It is shown in Figure 4 that movable workbench pedestal 19 connects the pleated portions 25(that covers X-axis mobile member 70).Pleated portions 25 is made of the suitable material that cloth etc. folds freely, and pleated portions 25 is stretched along with the movement of chuck table 10, is used for preventing that working fluid K described later is attached to X-axis mobile member 70.
By movable workbench pedestal 19 along X(XA) direction of principal axis moves, chuck table 10 is in the lower side shifting of demarcation strip 5, and utilizes X-axis mobile member 70 to move between regional O and the machining area P along X(XA taking out of) direction of principal axis moves.And, as shown in Figure 3 and Figure 4, centered on by aqueduct 26 around the chuck table 10.Aqueduct 26 is accepted from the chip T and the working fluid K that fall between chuck table 10 and the chip cartridges 52, prevents that described chip T from falling to pleated portions 25, and the chip T that utilizes flowing of working fluid K to receive imports chip cartridges 52.
As shown in Figure 5, tool member 20 constitutes and comprises cutting tool 21, main shaft 22, not shown shell and nozzle 23.Cutting tool 21 is the cutting grinding tool as thin as a wafer of general toroidal, and it is used for by rotation base plate for packaging W being implemented division processing.Cutting tool 21 is loaded and unloaded is installed on main shaft 22 freely.Main shaft 22 is rotatably freely supported on the shell of drum, and is connected with the not shown cutter drives source that is connected in shell.Cutting tool 21 utilizes the revolving force that is produced by the cutter drives source and is driven in rotation.Shell is installed on the upper surface 2a of stationary base 2 via the moving member 80 of y-axis shift and Z axis mobile member 90.Nozzle 23 sprays working fluid K towards the cutting position by cutting tool 21 cuttings of cutting tool 21 and base plate for packaging W.In the present embodiment, as shown in Figure 5, nozzle 23 is along X(XA) direction of principal axis injection working fluid K.
Take member 30 and be equipped on to take out of and move into regional O and above chuck table 10, and described shooting member 30 is configured to utilize integratedly the moving member 80 of y-axis shift and Z axis mobile member 90 to move freely along YA direction of principal axis and ZA direction of principal axis with tool member 20.Take member 30 and possess ccd video camera, described ccd video camera is used for taking taking out of the cutting zone of answering by the base plate for packaging W before the machining of chuck table 10 maintenances of moving into regional O.Ccd video camera is taken the base plate for packaging W that remains in chuck table 10, obtain for the image of carrying out calibration, and with the information output of the image that obtains at the control member 60 and the display member 100 that arrange than tool member 20 top sides, described calibration is used for carrying out the contraposition of base plate for packaging W and cutting tool 21.
The corner magazine 35 that disperses is equipped on machining area P, and with respect to loading and unloading such as the upper surface 2a of stationary base 2 freely.It is shown in Figure 6 that the corner magazine 35 of dispersing is used for taking in leftover pieces E(), described leftover pieces E is produced and because the rotation of cutting tool 21 reaches from the working fluid K that ejects of nozzle 23 disperses from base plate for packaging W by tool member 20.In addition, the division processing of preset lines L1 is cut apart on the edge that utilizes tool member 20 to carry out, and downcuts and generation leftover pieces E from base plate for packaging W.The corner magazine 35 that disperses forms the case shape that top is provided with opening, in the present embodiment, as shown in Figure 4, in the ratio chuck table 10 of the injection direction of the working fluid K that sprays from nozzle 23 and pleated portions 25 side on the front, the corner magazine 35 that disperses is equipped on chuck table 10 and pleated portions 25 along X(XA) direction of principal axis position arranged side by side.
Leftover pieces mobile member 40 is disposed at machining area P, and is used for leftover pieces E after just downcut from base plate for packaging W by cutting tool 21 and sprays water F1 as fluid, thereby described leftover pieces E is accommodated in corner magazine 42.As shown in Figure 6, leftover pieces mobile member 40 possesses leftover pieces and blows and fly nozzle 41 and corner magazine 42.
Leftover pieces blow and fly the end that nozzle 41 is equipped on tool member 20, and are used for the leftover pieces E that downcuts to the base plate for packaging W from the surperficial 10a of chuck table 10 and spray water F1 as fluid along the YA direction of principal axis.In the present embodiment, in the top view of topping machanism 1, leftover pieces blow and fly nozzle 41 along YA direction of principal axis injection water F1, and in the side view of topping machanism 1, as shown in Figure 6, leftover pieces blow and fly nozzle 41 to the direction injection water F1 slightly more downward than horizontal direction.
Corner magazine 42 with respect to loading and unloading such as the upper surface 2a of stationary base 2 freely.Corner magazine 42 is equipped on the place ahead that leftover pieces blow the injection direction that flies nozzle 41 injection water F1, is used for taking in by blow the water F1 that flies nozzle 41 injections from leftover pieces blowing the leftover pieces E that flies.Corner magazine 42 forms the case shape that top is provided with peristome, in the present embodiment, as shown in Figure 4, corner magazine 42 is in from leftover pieces and blows on the front side of the ratio tool member 20 of the injection direction that flies the water F1 that nozzle 41 sprays and pleated portions 25, and as shown in Figure 6, peristome is provided in than the surperficial 10a of chuck table 10 on the lower.As shown in Figure 4, corner magazine 42 be equipped on pleated portions 25 the next door and with tool member 20 and pleated portions 25 along YA direction of principal axis position arranged side by side.
Chip mobile member 50 makes chip T from chuck table 10 disengagings and is accommodated in chip cartridges 52 to the water F2 of the chip T injection that is separated one by one as fluid.As shown in Figure 8, chip mobile member 50 possesses chip and blows and fly nozzle 51 and chip cartridges 52.
Chip blows and flies nozzle 51 and be equipped on to take out of and move into regional O, be used on one side moving along the YA direction of principal axis with respect to the chip T that has stopped from after the cutting apart of the suction of chuck table 10, on one side from being YA axial the place ahead by oblique upper towards moving direction than horizontal direction the chip T after cutting apart on the surperficial 10a of chuck table 10 is sprayed water F2 as fluid, described chip T is blown from chuck table 10 fly.Chip blows and flies the end that nozzle 51 is installed on shooting member 30.Chip blows and flies nozzle 51 and be provided with along X(XA) direction extends and is used for spraying the slit 53 of described water F2 as fluid.In the side view of topping machanism 1, chip blows the slit 53 that flies nozzle 51 and blows from chip and fly nozzle 51 towards than the slightly downward ejection water F2 of horizontal direction.And in the top view of topping machanism 1, as shown in Figure 4, chip blows and flies nozzle 51 and form Japanese く word shape with two-end part in the mode central bend in the place ahead of the emission direction of the water F2 that rely on from the slit 53 ejections than central authorities.
Chip cartridges 52 is equipped on to take out of moves into regional O and with respect to loading and unloading such as the upper surface 2a of stationary base 2 freely.As shown in Figure 4, blowing the moving direction that flies nozzle 51 at chip is the axial the place ahead of YA, chip cartridges 52 is equipped on the next door of X-axis mobile member 70 and pleated portions 25, as shown in Figure 8, chip cartridges 52 is at the position opening lower than the surperficial 10a of chuck table 10, is used for taking in being blown by chip flying nozzle 51 and blowing the chip T that flies.Chip cartridges 52 forms the case shape that top is provided with peristome, in the present embodiment, chip cartridges 52 be in from chip blow the water F2 that flies nozzle 51 ejection emission direction than X-axis mobile member 70 and pleated portions 25 side on the front, and peristome is provided in than the surperficial 10a of chuck table 10 on the lower.Chip cartridges 52 be equipped on X-axis mobile member 70 and pleated portions 25 along the YA direction of principal axis side by side and with corner magazine 42 along X(XA) direction of principal axis position arranged side by side.
And chip blows and flies nozzle 51 from along X(XA) the slit 53 ejection water F2 of the linearly extension of direction of principal axis, thus in the top view of topping machanism 1, be to the surperficial 10a of chuck table 10 and spray water F2 bandedly.Chip blows and flies nozzle 51 and form Japanese く word shape, makes thus at least both ends of the width of the water F2 of 53 ejections from the slit towards central authorities' ejection of the width of described water F2.And chip blows and flies nozzle 51 and chip T is guided to chip cartridges 52 and chip T can not dispelled.
In addition, the above-mentioned corner magazine 35 that disperses, corner magazine 42 and chip cartridges 52 is made of the Web materials with rigidity.And, corner magazine 42 and chip cartridges 52 by the next door of being located at pleated portions 25 between chuck table 10 and operator.
In above-mentioned topping machanism 1, at least consist of cutting unit 4 by chuck table 10, tool member 20, X-axis mobile member 70, the moving member 80 of y-axis shift, Z axis mobile member 90, shooting member 30 and chip mobile member 50 etc., described cutting unit 4 is equipped on the smooth upper surface 2a of stationary base 2.And, in above-mentioned topping machanism 1, the ZA axle vertical with the upper surface 2a of stationary base 2 and be parallel to angulation θ between the Z axis of vertical direction, consistent with the X-axis that is parallel to horizontal direction with the parallel XA axle of the upper surface 2a of stationary base 2, the YA axle parallel with the upper surface 2a of stationary base 2 and be parallel to angulation θ between the Y-axis of horizontal direction.
In topping machanism 1, so that angulation θ between ZA axle and the Z axis, the XA axle is consistent with X-axis, the mode of angulation θ between YA axle and the Y-axis, make stationary base 2 take X(XA) axle as fulcrum along Y(YA) direction of principal axis (around the X(XA) axle that tilts tilts) so that chuck table 10 is in low level.In the present embodiment, topping machanism 1 is so that chuck table 10 is in the mode of low level, make stationary base 2 by stationary base 2 by centered by the edge 2b of chuck table 10 sides around X(XA) axle tilts.In addition, angle θ preferably is between 3 degree～7 degree, more preferably about 5 degree.And, in topping machanism 1, even stationary base 2 tilts as previously mentioned, display member 100 towards still can be altered to the operator easy-to-use towards.
Then, the division processing of the base plate for packaging W that uses the topping machanism 1 that embodiment relates to described.The operator arrives control member 60 with the processing content information registration, the operator is carried base plate for packaging W and is placed at the surperficial 10a that takes out of the chuck table 10 of moving into regional O location, in the situation that begin indicate of existence from operator's processing action, topping machanism 1 beginning processing action.In processing action, control member 60 is opened magnetic valve 13 and shut electromagnetic valve 16, drives suction source 14, base plate for packaging W suction is remained in the surperficial 10a of chuck table 10 by SS 12.
Then, control member 60 utilizes X-axis mobile member 70 to move chuck table 10, will be positioned at the base plate for packaging W that chuck table 10 keeps to take member 30 below, make and take member 30 and take.Take member 30 with the information of the image that photographs to control member 60 outputs.Then, control member 60 is carried out for the images such as pattern match of the contraposition of carrying out base plate for packaging W and cutting tool 21 and is processed,, to machining area P, adjust and remain in the base plate for packaging W of chuck table 10 and the relative position of tool member 20 in the base plate for packaging W conveyance that will remain in chuck table 10.
Then, control member 60 is based on processing content information, on one side supply with working fluid K from nozzle 23 as illustrated in fig. 5 and make cutting tool 21 rotations on one side, and water F1 is blown from leftover pieces fly nozzle 41 ejections, that utilizes topping machanism 21 cutting base plate for packaging W cuts apart preset lines L1.Like this, because base plate for packaging W is sucked and remains in chuck table 10, so the leftover pieces E that has just downcut from base plate for packaging by cutting tool 21 rotation and blown from the working fluid K of nozzle 23 ejections to fly and to be accommodated in and dispersed in the corner magazine 35, perhaps blow and fly and be accommodated in the corner magazine 42 by blow the water F1 that flies nozzle 41 ejections from leftover pieces.After preset lines L1 was cut apart in cutting, control member 60 made that cutting tool 21 cutting base plate for packaging W's cut apart preset lines L.To whole cut apart preset lines L, L1 and implemented division processing after, as illustrated in fig. 6, base plate for packaging W is divided into one by one chip T.
After having finished whole division processing of cutting apart preset lines L, the chuck table 10 that control member 60 utilizes X-axis mobile member 70 to keep a plurality of chip T that separated one by one moves to take out of moves into regional O.Then, as shown in Figure 7, control member 60 stops suction source 14, and shut electromagnetic valve 13 makes the surface that acts on chuck table 10 and suction keep the suction force of the one by one chip T be partitioned into to stop.
Then, as shown in Figure 7, control member 60 drive fluid supply sources 17 open and close magnetic valve 16 with predetermined time interval, with the gas that predetermined time interval is supplied with through pressurization to the SS 12 of surperficial 10a, make described gas from SS 12 ejections of surperficial 10a.Then, control member 60 utilizes the gas through pressurization that a plurality of chip T that separated are one by one applied vibration from chuck table 10 reliably, so that a plurality of chip T that separated one by one break away from from chuck table 10 reliably.
As mentioned above, the topping machanism 1 that relates to according to embodiment adds chip by the topping machanism that does not have transport mechanism at so-called type hand and blows and fly nozzle 51 and chip cartridges 52 etc., can be cheap and save chip T after directly conveyance is cut apart spatially.And, as the scheme that prevents that chip T from pasting with respect to chuck table 10, spray off and on gas through pressurization by the surperficial 10a from chuck table 10, thereby chip T is vibrated chip T is broken away from from chuck table 10.
And, the outer edge of cutting base plate for packaging W and the leftover pieces E that produces is not aspirated by chuck table 10, therefore described leftover pieces E is cut the rotation of cutter 21 and the impact of the working fluid K that sprays from nozzle 23 is blown and flown.Because being blown the direction that flies at described leftover pieces E is provided with the loading and unloading corner magazine 35 that disperses freely, automatically is accommodated in the corner magazine 35 that disperses so blow the leftover pieces E that flies.And topping machanism 1 possesses leftover pieces and blows and fly nozzle 41 and corner magazine 42, sprays water F1 as fluid to leftover pieces E afterwards leftover pieces E is just cut, so that leftover pieces E is accommodated in corner magazine 42.And, owing to comprising the cutting unit 4 of whole X-axis mobile members 70, the moving member 80 of y-axis shift and Z axis mobile member 90 so that chuck table 10 is in the mode of low level, take X(XA) direction of principal axis as fulcrum to Y(YA) direction of principal axis tilts, so utilize gravity naturally to promote the removal of working fluid K and leftover pieces E etc.
And, not only naturally promoted the removal of working fluid K, and because XA axle, YA axle are mutually vertical with the ZA axle, so the control of X-axis mobile member 70, the moving member 80 of y-axis shift and Z axis mobile member 90 with tilt before compare without any variation, also obtained the effect that guarantees precision.And because stationary base 2 is tilted, the chuck table 10 that therefore is used for mobile base plate for packaging W is in low level, so also have operator's easy to handle effect when loading base plate for packaging W in chuck table 10.Therefore, in topping machanism 1, can easily remove leftover pieces E of the liquid such as working fluid K and machined object etc.
In the above-described embodiment, fluid supply source 17 is supplied with the gas through pressurization as fluid, but the invention is not restricted to this, also can supply with the liquid such as water as fluid.Especially, in the situation that chuck table 10, fluid supply source 17 also can be supplied with off and on as liquid such as the water of fluid and make its ejection.And, in the present invention, also can blow from chip and fly nozzle 51 and leftover pieces and blow and fly nozzle 41 ejections as the gas through pressurization of fluid.And, in the present invention, as machined object, so long as directly remain in chuck table 10, then also can be applied to the various machined objects beyond the base plate for packaging W are implemented the topping machanism of division processing.
In the above-described embodiment, so that chuck table 10 is in the mode of low level, centered by the edge 2b of the close chuck table 10 of stationary base 2, inclination stationary base 2, but in the present invention, so long as by X(XA) inclination stationary base 2 centered by the axle, then can be centered by the optional position of stationary base 2 inclination stationary base 2.And, also can blow at chip fly nozzle 51 with along X(XA) direction of principal axis is arranged with the squit hole that a plurality of modes arranges a plurality of ejection water F2, replaces slit 53.And in the present invention, it is leftover pieces mobile member 40 that corner magazine 42 also can be set, and in this case, can realize the miniaturization of the integral body of topping machanism 1.
In addition, the invention is not restricted to above-mentioned embodiment.That is, can implement various distortion in the scope that does not break away from spirit of the present invention.
Claims (6)
1. topping machanism, described topping machanism are used for tabular machined object is divided into one by one chip and is accommodated in chip cartridges, and described topping machanism is characterised in that,
Described topping machanism possesses: chuck table, described chuck table are used for keeping described machined object with the suction of maintenance face; Tool member utilizes cutting tool to carry out division processing on one side described tool member is used for the described machined object that remains in described chuck table being supplied with working fluid on one side; Processing feeding member, described processing feeding member is used for making described chuck table to move along the processing direction of feed taking out of to move between zone and the machining area, describedly take out of that to move into the zone be used to the zone of taking out of and move into described machined object, described machining area is for the zone of described machined object being carried out division processing; Index feed member, described index feed member are used for making described tool member to move along the index feed direction vertical with described processing direction of feed; And the chip mobile member, described chip mobile member is used for taking in to described chip cartridges from described chuck table to the described chip ejector fluid that is separated one by one and with described chip,
Described chip mobile member possesses:
Chip blows and flies nozzle, described chip blows and flies nozzle and be equipped on described taking out of and move into the zone, being used for the described index feed direction in an edge moves on one side from oblique upper and flies so that described chip is blown from described chuck table from the described chip ejector fluid after the cutting apart of the suction of described chuck table having stopped towards the place ahead of moving direction; With
The chip cartridges that can load and unload, described chip cartridges is equipped on described taking out of and moves into the zone, and described chip cartridges is provided in that described chip blows the place ahead of the moving direction that flies nozzle and on the next door of described processing feeding member, described chip cartridges is at the position opening lower than the maintenance face of described chuck table, and described chip cartridges is used for taking in being blown by described chip and flies nozzle and blow the described chip that flies.
2. topping machanism according to claim 1,
Described chip blows and flies nozzle and be banded ground ejecting fluid to the described maintenance face of described chuck table, and at least both ends of width that make described fluid are towards central authorities' ejection of the width of described fluid, described chip is imported described chip cartridges and be not scattered.
3. topping machanism according to claim 1 and 2,
When the described chip that is separated is one by one broken away from, described chuck table is after the suction that stops from described maintenance face, supply with off and on fluid to described maintenance face, fluid is sprayed from described maintenance face, and described chip is broken away from from described chuck table reliably.
4. topping machanism according to claim 1 and 2,
Described topping machanism possesses the corner magazine that disperses that can load and unload, the described corner magazine that disperses is equipped on described machining area and is used for taking in leftover pieces, and described leftover pieces are to produce and because the leftover pieces that the rotation of described cutting tool is dispersed from described machined object by division processing.
5. topping machanism according to claim 1 and 2,
Described topping machanism also possesses the leftover pieces mobile member, described leftover pieces mobile member is equipped on described machining area, for the described leftover pieces injection fluid to just having been downcut from described machined object by described cutting tool, and described leftover pieces are accommodated in the corner magazine
Described leftover pieces mobile member possesses:
Leftover pieces blow and fly nozzle, and described leftover pieces blow and fly nozzle and be equipped on described tool member, are used for spraying fluid along described index feed direction; With
The corner magazine that can load and unload, described corner magazine is provided in the place ahead that described leftover pieces blow the injection direction that flies nozzle, is used for taking in being blown the described leftover pieces that fly.
6. topping machanism according to claim 1 and 2,
At least comprise that the cutting unit of described chuck table, described tool member, described processing feeding member, described index feed member and described chip mobile member is provided in the smooth upper surface of stationary base,
Described cutting unit tilts along described index feed direction take described processing direction of feed as fulcrum so that described chuck table is in the mode of low level.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP2012-088731 | 2012-04-09 | ||
| JP2012-088731 | 2012-04-09 | ||
| JP2012088731A JP5975703B2 (en) | 2012-04-09 | 2012-04-09 | Cutting equipment |
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| CN103358409A true CN103358409A (en) | 2013-10-23 |
| CN103358409B CN103358409B (en) | 2017-06-13 |
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| CN201310117165.2A Active CN103358409B (en) | 2012-04-09 | 2013-04-07 | Topping machanism |
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| JP (1) | JP5975703B2 (en) |
| CN (1) | CN103358409B (en) |
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| CN105374710A (en) * | 2014-08-13 | 2016-03-02 | 株式会社迪思科 | Processing method of packaging substrate |
| CN106098621A (en) * | 2015-04-28 | 2016-11-09 | 株式会社迪思科 | Topping machanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6257266B2 (en) * | 2013-10-29 | 2018-01-10 | Ｔｏｗａ株式会社 | Electronic component manufacturing apparatus and manufacturing method |
| JP6333648B2 (en) * | 2014-07-16 | 2018-05-30 | Ｔｏｗａ株式会社 | Transfer method, manufacturing method, and manufacturing apparatus for individualized articles |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN103358409B (en) | 2017-06-13 |
| JP5975703B2 (en) | 2016-08-23 |
| JP2013219201A (en) | 2013-10-24 |
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