CN103310991B - 薄膜电极及其制法 - Google Patents
薄膜电极及其制法 Download PDFInfo
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- CN103310991B CN103310991B CN201310146263.9A CN201310146263A CN103310991B CN 103310991 B CN103310991 B CN 103310991B CN 201310146263 A CN201310146263 A CN 201310146263A CN 103310991 B CN103310991 B CN 103310991B
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- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101150657 | 2012-12-27 | ||
TW101150657A TWI502792B (zh) | 2012-12-27 | 2012-12-27 | 薄膜電極及其製法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103310991A CN103310991A (zh) | 2013-09-18 |
CN103310991B true CN103310991B (zh) | 2016-12-28 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201310146263.9A Expired - Fee Related CN103310991B (zh) | 2012-12-27 | 2013-04-24 | 薄膜电极及其制法 |
Country Status (2)
Country | Link |
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CN (1) | CN103310991B (zh) |
TW (1) | TWI502792B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104009124B (zh) * | 2014-06-13 | 2018-09-18 | 苏州苏大维格光电科技股份有限公司 | 太阳能电池超精细电极转移薄膜、制备方法及其应用方法 |
CN104526093B (zh) * | 2014-08-22 | 2017-01-11 | 华侨大学 | 一种表面织构微细电解加工用阴极的制作方法 |
CN104362227B (zh) * | 2014-10-22 | 2017-01-18 | 西安交通大学苏州研究院 | 一种金属电极贴片的制备方法 |
CN104458882A (zh) * | 2014-11-24 | 2015-03-25 | 江汉大学 | 修饰电极制备方法、修饰电极及对硫磷检测系统 |
KR20180075520A (ko) * | 2015-10-30 | 2018-07-04 | 유니티카 가부시끼가이샤 | 축전 소자 전극용 폴리이미드 용액, 축전 소자 전극의 제조 방법 및 축전 소자 전극 |
EP3522277B1 (en) | 2016-09-30 | 2022-06-15 | Kolon Industries, Inc. | Method for manufacturing membrane electrode assembly for fuel cell |
TWI641010B (zh) * | 2017-11-29 | 2018-11-11 | 住華科技股份有限公司 | 感壓性黏著組成物、電極複合膜及其製造方法 |
CN108346776B (zh) * | 2018-02-08 | 2021-01-15 | 清华大学 | 一种三明治结构的复合金属锂负极及其制备方法 |
CN108777286A (zh) * | 2018-05-31 | 2018-11-09 | 合肥国轩高科动力能源有限公司 | 一种金属锂的表面修饰方法 |
CN110517889A (zh) * | 2019-08-28 | 2019-11-29 | 广东风华高新科技股份有限公司 | 一种多层陶瓷电容器及其制备方法 |
CN112420872B (zh) * | 2020-11-12 | 2023-06-16 | 苏州科技大学 | 基于WSe2/KTaO3范德华异质结的光电探测器及其制备方法 |
CN112736222B (zh) * | 2020-12-25 | 2022-08-09 | 合肥国轩高科动力能源有限公司 | 一种双极性电极制备方法 |
CN114388260A (zh) * | 2021-12-21 | 2022-04-22 | 广东风华高新科技股份有限公司 | 一种元器件电极的制作方法 |
Citations (2)
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CN101485035A (zh) * | 2006-07-13 | 2009-07-15 | 帝人杜邦薄膜日本有限公司 | 染料敏化太阳能电池以及用于该电池的电极和层压薄膜 |
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