CN103217558B - A kind of probe maintaining method - Google Patents
A kind of probe maintaining method Download PDFInfo
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- CN103217558B CN103217558B CN201310081818.6A CN201310081818A CN103217558B CN 103217558 B CN103217558 B CN 103217558B CN 201310081818 A CN201310081818 A CN 201310081818A CN 103217558 B CN103217558 B CN 103217558B
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Abstract
Probe maintaining method of the present invention, comprises the following steps: set scrapping pricking times limit value and safeguarding pricking times limit value of probe; Obtain the actual pricking times of probe; Actual pricking times is added with original accumulative pricking times and obtains current accumulative pricking times; If current accumulative pricking times is more than or equal to scrap pricking times limit value, then change probe, and the numerical value of the numerical value of original pricking times and original accumulative pricking times is set to zero simultaneously; Otherwise, then the numerical value of original accumulative pricking times is updated to the numerical value of current accumulative pricking times, and continues actual pricking times and original pricking times to carry out being added to obtain current pricking times; If current pricking times is more than or equal to safeguard pricking times limit value, then probe is safeguarded, and the numerical value of original pricking times is set to zero; Otherwise, then the numerical value of original pricking times is updated to the numerical value of current pricking times.The invention solves the waste problem in probe maintenance.
Description
Technical field
The present invention relates to semiconductor testing apparatus area of maintenance, particularly relate to a kind of probe maintaining method.
Background technology
Using probe to detect semiconductor devices is a kind of very conventional method in current semiconducter device testing.Using probe to carry out testing is the electrical parameter test carried out on silicon chip integrated circuit in order to specification consistency, can find to the test of silicon chip the defect that tested silicon chip exists by using probe, defective silicon chip is avoided to put goods on the market, by data feedback to semiconducter engineering teacher, thus can find and correct the problem in manufacture process after the silicon chip finding existing defects simultaneously.
Silicon chip is installed on printed circuit board (PCB) (PCB) after production completes, and after printed circuit board (PCB) is produced, if at this moment pinpointed the problems in the detection carried out PCB, needs extremely complicated diagnostic procedure and manual analysis just can find the reason of problem.If the problem of integrated circuit, this just needs in-problem integrated circuit to disassemble, the integrated circuit of replacement is installed, because the encapsulation of large scale integrated circuit is instantly all generally BGA Package (Ball GridArray Package, BGA), make hand disassembly possibility hardly, in unloading process, therefore need the instrument using specialty.As can be seen here, if just test out problem after the production of printed circuit board (PCB), be much higher than pinpointing the problems of monolithic stage for the impact of producing, for the equipment of complexity, if just find the problem of integrated circuit in the complete machine stage, it is more huge for the impact of producing.
So test when producing for integrated circuit is highly significant.
And test when producing for integrated circuit adopts probe to test chip usually, probe is the bridge between auto testing instrument and device under test, is realized the connection of tester and chip under test by probe.Therefore be very important in the state of test process middle probe card, use a tool probe defective to carry out testing test result can be made undoubtedly inaccurate, thus lose the meaning of test.
Probe very easily breaks down in test use procedure repeatedly; usually there will be the oxidation of probe, contact force the wearing and tearing of flatness that is inaccurate, probe station not good, probe and pollute etc., the fault of these probe all can cause negative impact to the result of test.
Therefore, often probe is safeguarded it is very necessary, existing regulation be according to a set time be standard to carry out the maintenance of probe card state, general provision is 30 days to 60 days.This just makes probe there is excessive maintenance when safeguarding and safeguard not enough problem, because, erratic in the use of middle probe card during this period of time, there will be some probe to make to be used less other probe by contrast and then use to obtain situation comparatively frequently, even occur that the situation that some probe access times exceeds standard occurs, to such an extent as to adverse effect is caused to electric leakage, the test result after causing does not conform to the actual conditions.
Chinese patent (publication number: CN 101441625B) discloses a kind of computing method of the probe use amount utilizing probe tester to realize, be specially: the information of probe model that described tester obtains described test condition information and uses, the information of described probe word use amount is inquired in described test condition data storehouse, then by the information association of described probe model to described probe usage data storehouse, obtain accumulative use amount information, and store, when accumulative use amount information corresponding in described probe usage data storehouse is more than or equal to probe information in serviceable life, described probe tester sends the prompting changing probe.
Although it is that the standard probe of carrying out in probe maintenance uses unbalanced problem that this inventive method overcame with time, the process need of its inventive method is tabled look-up, therefore too loaded down with trivial details.
Chinese patent (publication number: CN 1979197A) discloses a kind of method increasing synchronous detecting number of chips, be specially: multiple stage tester uses a probe station jointly, common use probe or hardware interface are tested measured body, merge the test function of multiple stage independent test instrument.
This invention can improve the efficiency of probe test, can not solve probe and use unbalanced problem.
Summary of the invention
In view of the above problems, the invention provides a kind of probe maintaining method.
The technical scheme that technical solution problem of the present invention adopts is:
A kind of probe maintaining method, be applied in probe card detecting system, wherein, described probe card detecting system comprises the first database and the second database, original pricking times is stored in described first database, store original accumulative pricking times in described second database, described probe maintaining method comprises the following steps:
According to process requirements, set scrapping pricking times limit value and safeguarding pricking times limit value of probe, and set the time t=t of this probe work
n-t
0, n is the number of times this probe being carried out to data acquisition, and n is positive integer;
Data acquisition is carried out to described probe, to obtain described probe at time period T
n=t
n-t
n-1the actual pricking times of interior described probe;
Described actual pricking times is added with described original accumulative pricking times and obtains current accumulative pricking times, and the numerical value of this current accumulative pricking times and described pricking times limit value of scrapping are compared;
If scrap pricking times limit value described in the numerical value of described current accumulative pricking times is more than or equal to, then described probe is scrapped, more renew probe, the numerical value of the numerical value of described original pricking times and described original accumulative pricking times is set to zero simultaneously, and primary data acquisition is carried out to described new probe;
If scrap pricking times limit value described in the numerical value of described current accumulative pricking times is less than, then the numerical value of described original accumulative pricking times is updated to the numerical value of described current accumulative pricking times, and continue described actual pricking times to carry out being added with described original pricking times to obtain current pricking times, and by the numerical value of this current pricking times and describedly safeguard that pricking times limit value is compared;
If the numerical value of described current pricking times is more than or equal to and describedly safeguards pricking times limit value, then described probe is safeguarded, the numerical value of described original pricking times is set to zero, and continue the data acquisition carrying out next time to described probe;
If the numerical value of described current pricking times is less than and describedly safeguards pricking times limit value, then the numerical value of described original pricking times is updated to the numerical value of described current pricking times, and continues the data acquisition carrying out next time to described probe.
Described probe maintaining method, wherein, described probe card detecting system also comprises setting and stores end, stores end set and to scrap pricking times limit value described in described probe and describedly safeguard pricking times limit value by described setting.
Described probe maintaining method, wherein, described probe card detecting system also comprises information acquisition end, carries out described data acquisition by described information acquisition end to described probe.
Described probe maintaining method, wherein, also comprise information output in described probe card detecting system, described information output to describedly scrapping pricking times limit value, safeguard pricking times limit value, described current actual pricking times and described current accumulative pricking times export.
Described probe maintaining method, wherein, adopts display as described information output.
Described probe maintaining method, wherein, described probe card detecting system also comprises central end for process, is compared to the numerical value of described current accumulative pricking times and described pricking times limit value of scrapping by described central end for process.
Described probe maintaining method, wherein, by described central end for process to the numerical value of described current pricking times and describedly safeguard that pricking times limit value is compared.
Described probe maintaining method, wherein, describedly safeguards that pricking times limit value is 200000 times.
Described probe maintaining method, wherein, described in scrap pricking times limit value be 10000000 times.
Technique scheme tool has the following advantages or beneficial effect:
The inventive method is by the setting of probe access times correlation parameter and arrange corresponding multilevel iudge method, thus make the maintenance of probe not exclusively depend on the time, but by concrete probe service condition, namely probe pricking times number determine whether to need to be serviced operation and scrap operation accordingly, the probe largely solving classic method safeguards that middle probe card uses unbalanced problem, effectively prevent and too much safeguards and the waste that causes and very few maintenance and the probe that causes tests inaccurate situation.
Accompanying drawing explanation
With reference to appended accompanying drawing, to describe embodiments of the invention more fully.But, appended accompanying drawing only for illustration of and elaboration, do not form limitation of the scope of the invention.
Fig. 1 is the step schematic diagram of probe maintaining method of the present invention.
Embodiment
The present invention is a kind of probe maintaining method, is a kind of method to probe automated maintenance in particular.
The inventive method realizes based on detecting probe card testing system, and this detecting probe card testing system comprises information acquisition end, central end for process and setting and stores end.Detecting probe card testing system also comprises information output, this information output can to scrapping pricking times limit value, safeguard pricking times limit value, the necessary data such as current actual pricking times and current accumulative pricking times export, slip-stick artist can carry out the operation conditions of monitoring probe card according to the output data of information output.
Detecting probe card testing system also comprises the first database and the second database.Wherein, in the first database, store original pricking times, this original pricking times be from the last time safeguard after so far probe acupuncture treatment number of times; Store original accumulative pricking times in second database, this original accumulative pricking times is that probe uses with the number of times coming total acupuncture treatment instantly.
Fig. 1 is the block diagram of probe maintaining method of the present invention, and as shown in Figure 1, probe maintaining method of the present invention comprises the following steps:
First, according to concrete technology demand, store by setting the maintenance pricking times limit value (PM Limit) scrapping pricking times limit value (LifeLimit) and probe that end sets probe.The maintenance pricking times limit value scrapping pricking times limit value and this probe of this probe can set according to the situation of reality.
Then, information acquisition end carries out data acquisition to probe, to obtain the actual pricking times of probe within the time period.
Called the original accumulative pricking times in the second database by central end for process, and actual for this probe pricking times is added with the original accumulative pricking times called, obtain current accumulative pricking times.
What central authorities' end for process set before calling scraps pricking times limit value, is compared by the numerical value scrapping pricking times limit value and current accumulative pricking times:
If the numerical value of current accumulative pricking times is more than or equal to scrap pricking times limit value, then this probe needs to carry out scrapping operation, after completing and scrapping operation, be zero to the setting value of the accumulative pricking times in the second database, now, information acquisition end re-starts the collection of data automatically to new probe;
If the numerical value of current accumulative pricking times is less than scrap pricking times limit value, then setting stores the numerical value that the numerical value of original accumulative pricking times is updated to current accumulative pricking times by end automatically, and carries out follow-up step.
Central authorities' end for process calls the original pricking times in the first database, and is added with the original pricking times called by actual for this probe pricking times, obtains current pricking times.
The maintenance pricking times limit value of setting before central authorities' end for process continues to call, will safeguard that the numerical value of pricking times limit value and current pricking times is compared:
If the numerical value of current pricking times is more than or equal to safeguard pricking times limit value, then this probe needs to be serviced (Prevention Maintenance, PM), after maintenance completes, be zero by the setting value of the original pricking times in the first database, now, information acquisition end continues data acquisition probe being carried out to subsequent time period;
If the numerical value of current pricking times is less than safeguard pricking times limit value, then setting stores the numerical value that the numerical value of original pricking times is updated to current pricking times by end automatically, and now, information acquisition end continues data acquisition probe being carried out to subsequent time period.
Below in conjunction with specific embodiment, the inventive method is set forth.
In order to more clearly set forth the inventive method, be t, t=t in the service time of this hypothesis probe
n-t
0, the usage time interval of probe is T
n=t
n-t
n-1, wherein, n represents number of times probe being carried out to data acquisition, and n is natural number, if when n is 1, then and t=t
1-t
0, this t represent probe from use since to service time during first time data acquisition, corresponding T
1=t
1-t
0, then T
1then represent since using from probe to service time during first time data acquisition; If when n is 2, then t=t
2-t
0, this t represent probe from use since to service time during second time data acquisition, corresponding T
2=t
2-t
1, then T
1then represent the service time when second time data acquisition from probe from first time data acquisition, when n is greater than 3 time, situation and n=2 are identical, therefore do not repeat herein.
First, according to concrete technology demand, store end by setting and the pricking times limit value of scrapping of probe is set to 10000000 times and the maintenance pricking times limit value of probe is set to 200000 times.
Then, information acquisition end carries out data acquisition to probe, to obtain at time period T
1the interior actual pricking times of probe, for convenience of explanation, represents the numerical value of actual pricking times x in the present embodiment.
The original accumulative pricking times in the second database is called by central end for process, and actual for this probe pricking times is added with the original accumulative pricking times called, obtain current accumulative pricking times, due to when primary data acquisition, original accumulative pricking times in second database is zero, therefore, the current accumulative pricking times herein obtained is the actual pricking times x of probe.
What central authorities' end for process set before calling scraps pricking times limit value, is compared by the numerical value scrapping pricking times limit value and current accumulative pricking times:
If the numerical value of current accumulative pricking times is more than or equal to scrap pricking times limit value, i.e. x >=10000000, then this probe needs to carry out scrapping operation, after completing and scrapping operation, be zero to the setting value of the accumulative pricking times in the second database, now, information acquisition end re-starts primary data acquisition to new probe automatically;
If the numerical value of current accumulative pricking times is less than scrap pricking times limit value, i.e. x≤10000000, then setting stores the numerical value that the numerical value of original accumulative pricking times is updated to current accumulative pricking times by end automatically, numerical value by the accumulative pricking times in the second database is updated to x, and carries out follow-up step.
Central authorities' end for process calls the original pricking times in the first database, and actual for this probe pricking times x is added with this original pricking times called, obtain current pricking times, due to when primary data acquisition, original pricking times in first database is zero, therefore, the current pricking times numerical value herein obtained is x.
The maintenance pricking times limit value of setting before central authorities' end for process continues to call, will safeguard that the numerical value of pricking times limit value and current pricking times is compared:
If the numerical value of current pricking times is more than or equal to safeguard pricking times limit value, i.e. x >=200000, then this probe needs to be serviced, after maintenance completes, be zero by the setting value of the original pricking times in the first database, now, information acquisition end continues to carry out secondary data acquisition to probe;
If the numerical value of current pricking times is less than safeguard pricking times limit value, namely x≤200000 setting stores the numerical value that the numerical value of original pricking times is updated to current pricking times by end automatically, namely the numerical value of original pricking times is updated to x, now, information acquisition end continues data acquisition probe being carried out to subsequent time period.
In sum, the present invention is the pricking times by acquisition probe card, and is provided with concrete judgment rule, and by probe card detecting system, thus achieve the robotization of probe maintenance.Compared to the method that traditional dependence time safeguards probe, the present invention can fundamentally setting about from probe, react the concrete service condition of probe with accurate pricking times, thus overcome the waste that may occur when probe being safeguarded by the time and the problem such as not in time.
For a person skilled in the art, after reading above-mentioned explanation, various changes and modifications undoubtedly will be apparent.Therefore, appending claims should regard the whole change and correction of containing true intention of the present invention and scope as.In Claims scope, the scope of any and all equivalences and content, all should think and still belong to the intent and scope of the invention.
Claims (9)
1. a probe maintaining method, be applied in probe card detecting system, it is characterized in that, described probe card detecting system comprises the first database and the second database, original pricking times is stored in described first database, store original accumulative pricking times in described second database, described probe maintaining method comprises the following steps:
According to process requirements, set scrapping pricking times limit value and safeguarding pricking times limit value of probe, and the usage time interval setting this probe is T
n=t
n-t
n-1, wherein, n is the number of times this probe being carried out to data acquisition, and n is positive integer, t
nrepresent that described probe is from service time when having gathered to the n-th secondary data since using, T
nrepresent described probe from the (n-1)th secondary data collection up to n-th secondary data gather time usage time interval;
Data acquisition is carried out to described probe, with obtain described probe in use between section T
n=t
n-t
n-1the actual pricking times of interior described probe;
Described actual pricking times is added with described original accumulative pricking times and obtains current accumulative pricking times, and the numerical value of this current accumulative pricking times and described pricking times limit value of scrapping are compared;
If scrap pricking times limit value described in the numerical value of described current accumulative pricking times is more than or equal to, then described probe is scrapped, more renew probe, the numerical value of the numerical value of described original pricking times and described original accumulative pricking times is set to zero simultaneously, and primary data acquisition is carried out to described new probe;
If scrap pricking times limit value described in the numerical value of described current accumulative pricking times is less than, then the numerical value of described original accumulative pricking times is updated to the numerical value of described current accumulative pricking times, and continue described actual pricking times to carry out being added with described original pricking times to obtain current pricking times, and by the numerical value of this current pricking times and describedly safeguard that pricking times limit value is compared;
If the numerical value of described current pricking times is more than or equal to and describedly safeguards pricking times limit value, then described probe is safeguarded, the numerical value of described original pricking times is set to zero, and continue the data acquisition carrying out next time to described probe;
If the numerical value of described current pricking times is less than and describedly safeguards pricking times limit value, then the numerical value of described original pricking times is updated to the numerical value of described current pricking times, and continues the data acquisition carrying out next time to described probe.
2. probe maintaining method as claimed in claim 1, is characterized in that, described probe card detecting system also comprises setting and stores end, stores end set and to scrap pricking times limit value described in described probe and describedly safeguard pricking times limit value by described setting.
3. probe maintaining method as claimed in claim 1, it is characterized in that, described probe card detecting system also comprises information acquisition end, carries out described data acquisition by described information acquisition end to described probe.
4. probe maintaining method as claimed in claim 1, it is characterized in that, also comprise information output in described probe card detecting system, described information output to describedly scrapping pricking times limit value, safeguard pricking times limit value, described actual pricking times and described current accumulative pricking times export.
5. probe maintaining method as claimed in claim 4, is characterized in that, adopts display as described information output.
6. probe maintaining method as claimed in claim 1, it is characterized in that, described probe card detecting system also comprises central end for process, is compared to the numerical value of described current accumulative pricking times and described pricking times limit value of scrapping by described central end for process.
7. probe maintaining method as claimed in claim 6, is characterized in that, by described central end for process to the numerical value of described current pricking times and describedly safeguard that pricking times limit value is compared.
8. probe maintaining method as claimed in claim 1, is characterized in that, describedly safeguards that pricking times limit value is 200000 times.
9. probe maintaining method as claimed in claim 1, is characterized in that, described in scrap pricking times limit value be 10000000 times.
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|---|---|---|---|
| CN201310081818.6A CN103217558B (en) | 2013-03-14 | 2013-03-14 | A kind of probe maintaining method |
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|---|---|---|---|
| CN201310081818.6A CN103217558B (en) | 2013-03-14 | 2013-03-14 | A kind of probe maintaining method |
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| CN103217558A CN103217558A (en) | 2013-07-24 |
| CN103217558B true CN103217558B (en) | 2015-08-19 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336256B (en) * | 2013-06-26 | 2016-03-30 | 上海华力微电子有限公司 | WAT probe intelligent processing system and method |
| CN103439643A (en) * | 2013-08-02 | 2013-12-11 | 上海华力微电子有限公司 | Intelligent test system and test method for improving probe card test abnormality |
| CN105467174B (en) * | 2015-11-23 | 2018-11-09 | 上海华岭集成电路技术股份有限公司 | A method of obtaining the cantalever type probe system maintenance period |
| CN109901056A (en) * | 2019-04-09 | 2019-06-18 | 苏州通富超威半导体有限公司 | Chip test system and its method |
| CN115656587A (en) * | 2022-11-15 | 2023-01-31 | 广州粤芯半导体技术有限公司 | Probe card monitoring system and method |
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