CN201681417U - Needle inserting frequency counting device of probe card and probe card - Google Patents
Needle inserting frequency counting device of probe card and probe card Download PDFInfo
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- CN201681417U CN201681417U CN2010201427834U CN201020142783U CN201681417U CN 201681417 U CN201681417 U CN 201681417U CN 2010201427834 U CN2010201427834 U CN 2010201427834U CN 201020142783 U CN201020142783 U CN 201020142783U CN 201681417 U CN201681417 U CN 201681417U
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Abstract
The utility model relates to a needle inserting frequency counting device of a probe card, comprising an interface, a counting module and a display module. The counting module is connected with the interface and the display module. The interface receives the ascending/descending signals of a probe platform sucking disc and transmits the ascending/descending signals to the counting module. The counting module records the ascending/descending frequency of the sucking disc as the needle inserting frequency of the probe card, and transmits the needle inserting frequency to the display module. The display module receives and displays the needle inserting frequency. The utility model also relates to a probe card integrating the needle inserting frequency counting device of the probe card. The needle inserting frequency counting device of the prove card can automatically count the needle inserting frequency of the probe card quickly and accurately, and can calculate the probe card depreciation cost which should be shared by a wafer according to the needle inserting frequency of each wafer.
Description
[technical field]
The utility model relates to the measuring technology in the semi-conductor industry, particularly relates to a kind of probe pricking times counting assembly, also relates to a kind of probe with pricking times tally function.
[background technology]
Probe station is a kind of equipment that is used for wafer sort in the semiconductor production process, and the fixedly step pitch of mainly finishing reliable contact, the wafer of wafer sort middle probe card and wafer moves, probe station and functions such as the signal of test machine is connected.
Test machine (Automatic Test Equipment, ATE) be a kind of specialized equipment that is used for wafer and other finished product tests, measurement and the probe station that can realize various electrical quantitys cooperate the test that can finish the wafer electrical quantity, and it has a plurality of interfaces that are connected with probe station.
Probe is a kind of parts of realizing that test machine is connected with the electrical equipment of wafer of being used to, the probe on the probe directly and tin pad (pad) or projection (bump) on the wafer contact, draw electric signal, cooperate test machine to measure again.The quantity of probe does not wait from several to the hundreds of root on the probe, and the big more probe price of quantity is expensive more.The serviceable life of probe is generally all more than 1,000 ten thousand times, therefore needs repeatedly to safeguard in this process that new probe is scrapped from coming into operation to.Just need carry out the maintaining first time when generally requiring pricking times to reach 1,000,000 times, will carry out regular maintaining per afterwards 300,000 times probe.Therefore, need make statistics to the pricking times of probe.
Adopt the method for complicate statistics in the conventional art, promptly write down the access times of probe by the operator.But complicate statistics is trouble, inefficiency and make mistakes easily very.
[utility model content]
In order to solve traditional complicate statistics probe pricking times inefficiency and the problem of makeing mistakes easily, be necessary to provide a kind of probe pricking times counting assembly.
A kind of probe pricking times counting assembly comprises interface, counting module and display module, and described counting module is connected with interface, display module; Described interface receives the rising/dropping signal of probe station sucker, and is transferred to counting module; Rising/decline the number of times of described counting module record sucker as the pricking times of probe, and is transferred to display module with described pricking times; Described display module receives and the demonstration pricking times.
Preferably, also comprise the alarm module that is connected with described counting module; Described counting module or alarm module internal memory contain alarm threshold value, and when pricking times reached alarm threshold value, alarm module was reported to the police.
Preferably, also comprise load module, described load module is connected with described counting module, the pricking times zero clearing of setting alarm threshold value and counting module being write down; Or described load module is connected the setting alarm threshold value with alarm module.
Preferably, described alarm module comprises the reset key that is used to cancel warning.
Preferably, described display module adopts liquid crystal module to show.
Also be necessary to provide a kind of probe of built-in probe pricking times counting assembly.
A kind of probe comprises probe pricking times counting assembly, and described device comprises interface, counting module and display module, and described counting module is connected with interface, display module; Described interface receives the rising/dropping signal of probe station sucker, and is transferred to counting module; Rising/decline the number of times of described counting module record sucker as the pricking times of probe, and is transferred to display module with described pricking times; Described display module receives and the demonstration pricking times.
Preferably, described probe pricking times counting assembly also comprises the alarm module that is connected with described counting module; Described counting module or alarm module internal memory contain alarm threshold value, and when pricking times reached alarm threshold value, alarm module was reported to the police.
Preferably, described probe pricking times counting assembly also comprises load module, and described load module is connected with described counting module, the pricking times zero clearing of setting alarm threshold value and counting module being write down; Or described load module is connected the setting alarm threshold value with alarm module.
Preferably, described alarm module comprises the reset key that is used to cancel warning.
Preferably, described display module adopts liquid crystal module to show.
Above-mentioned probe pricking times counting assembly can be added up the probe pricking times automatically, and is accurately quick.This wafer can also be calculated according to the pricking times of every wafer and negative probe depreciation cost should be spread out.
Above-mentioned probe is built-in probe pricking times counting assembly can be added up the probe pricking times automatically, and is accurately quick.This wafer can also be calculated according to the pricking times of every wafer and negative probe depreciation cost should be spread out.Increase the ease for use of product and with better function, improved the surcharge of probe.
[description of drawings]
Fig. 1 is the transmission diagram of the rising/dropping signal of sucker;
Fig. 2 is the structural representation of an embodiment middle probe card pricking times counting assembly;
Fig. 3 is the structural representation of another embodiment middle probe card pricking times counting assembly;
Fig. 4 is the synoptic diagram of the probe of integrated probe pricking times counting assembly among the embodiment.
[embodiment]
Probe station is to use sucker (Chuck) that wafer is fixed, and realizes contacting of wafer and probe by sucker being sent rising/dropping signal then.Traditional probe station can output to the rising/dropping signal of sucker on the pilot lamp of probe station control panel.Fig. 1 is the transmission diagram of the rising/dropping signal of sucker, and probe station 100 comprises mainboard 110 and pilot lamp 120, and mainboard 110 need be exported to pilot lamp 120 with the rising/dropping signal of sucker.
Fig. 2 is the structural representation of an embodiment middle probe card pricking times counting assembly.Probe pricking times counting assembly 200 comprises interface 210, counting module 220, display module 230, alarm module 240 and load module 250.Counting module 220 all is connected with interface 210, display module 230, alarm module 240 and load module 250.
The data of display module 230 count pick up modules 220 records also show.In a preferred embodiment, display module 230 can adopt liquid crystal module to show, to obtain smaller volume; Also can adopt charactron or other modes to show in other embodiments.In a preferred embodiment, display module 230 can only provide the Presentation Function of 6 figure places, promptly be 999999 to the maximum, can save the cost (cost of display module 230 only not like this, the storage unit cost that also comprises the data that relate to storage or buffer memory counting module 220 records, these storage unit if can store greater than 999999 number just can, so cost just can correspondingly reduce).Because the main problem that the user is concerned about is when this carries out maintaining to probe, thus the figure place that display module 230 can show only need satisfy between twice maintenance of probe pricking times just can (just the figure place of counting module 220 records can greater than the pricking times between twice maintenance of probe just can).Certainly, display module 230 also can adopt and can show the more parts of long number, the number of times that the record probe was had an acupuncture treatment in the whole life-span.
The alarm command that alarm module 240 count pick up modules 220 are sent is reported to the police, and reminds operator's probe to have safeguarded.Alarm module 240 also comprises reset key, is used for cancellation and reports to the police.
Fig. 3 is the structural representation of another embodiment middle probe card pricking times counting assembly.In this embodiment, probe pricking times counting assembly 200 comprises interface 210, counting module 220, display module 230, alarm module 240.Counting module 220 all is connected with interface 210, display module 230, alarm module 240.
The key distinction of itself and a last embodiment is that alarm module 240 carries the function that alarm threshold value is set, and counting module 220 also carries the function of zero clearing.And counting module 220 is not used in the transmission alarm command, but gives alarm module 240 with the data transmission of record, the judgement of whether being reported to the police according to alarm threshold value by alarm module 240.
The pricking times that said apparatus counts provides scientific basis for estimated cost.For example total pricking times of a probe is 1,000 ten thousand times, and the probe price is 40,000 circles, and pricking times is 10,000 times in the test of certain sheet disk, and then the depreciation cost of the probe that the stand is born on this sheet disk is: the 40000*10000/10000000=40 circle.
Above-mentioned probe pricking times counting assembly both can adopt " external hanging type ", promptly made an independent device; Also can make " embedded ", promptly be integrated on the probe." external hanging type " scheme highly versatile is applicable to different types of probe station and probe, and can repeated multiple times use.And " embedded " scheme relatively is fit to the manufacturer of probe, and the integrated probe of above-mentioned probe pricking times counting assembly has increased the ease for use of product and with better function, has improved the surcharge of probe.
Fig. 4 is the synoptic diagram of the probe of integrated probe pricking times counting assembly among the embodiment.Probe 300 comprises the test interface 310 and the probe 320 of probe and test machine, also integrated probe pricking times counting assembly.The structure of probe pricking times counting assembly and Fig. 2 or embodiment illustrated in fig. 3 identical, but counting module 220 and load module 250 etc. are not to be located at probe 300 surfaces, therefore do not show among Fig. 4, can only see interface 210, display module 230 and alarm module 240 among the figure.
Above-mentioned probe pricking times counting assembly can be added up the probe pricking times automatically, and is accurately quick.This wafer can also be calculated according to the pricking times of every wafer and negative probe depreciation cost should be spread out.
The above embodiment has only expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (10)
1. a probe pricking times counting assembly is characterized in that, comprises interface, counting module and display module, and described counting module is connected with interface, display module;
Described interface receives the rising/dropping signal of probe station sucker, and is transferred to counting module;
Rising/decline the number of times of described counting module record sucker as the pricking times of probe, and is transferred to display module with described pricking times;
Described display module receives and the demonstration pricking times.
2. probe pricking times counting assembly according to claim 1 is characterized in that, also comprises the alarm module that is connected with described counting module;
Described counting module or alarm module internal memory contain alarm threshold value, and when pricking times reached alarm threshold value, alarm module was reported to the police.
3. probe pricking times counting assembly according to claim 2 is characterized in that, also comprises load module, and described load module is connected with described counting module, the pricking times zero clearing of setting alarm threshold value and counting module being write down; Or described load module is connected the setting alarm threshold value with alarm module.
4. according to claim 2 or 3 described probe pricking times counting assemblys, it is characterized in that described alarm module comprises the reset key that is used to cancel warning.
5. according to any described probe pricking times counting assembly among the claim 1-3, it is characterized in that described display module adopts liquid crystal module to show.
6. a probe is characterized in that, comprises probe pricking times counting assembly, and described device comprises interface, counting module and display module, and described counting module is connected with interface, display module;
Described interface receives the rising/dropping signal of probe station sucker, and is transferred to counting module;
Rising/decline the number of times of described counting module record sucker as the pricking times of probe, and is transferred to display module with described pricking times;
Described display module receives and the demonstration pricking times.
7. probe according to claim 6 is characterized in that, described probe pricking times counting assembly also comprises the alarm module that is connected with described counting module;
Described counting module or alarm module internal memory contain alarm threshold value, and when pricking times reached alarm threshold value, alarm module was reported to the police.
8. probe according to claim 7 is characterized in that, described probe pricking times counting assembly also comprises load module, and described load module is connected with described counting module, the pricking times zero clearing of setting alarm threshold value and counting module being write down; Or described load module is connected the setting alarm threshold value with alarm module.
9. according to claim 7 or 8 described probe, it is characterized in that described alarm module comprises the reset key that is used to cancel warning.
10. according to any described probe among the claim 6-8, it is characterized in that described display module adopts liquid crystal module to show.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201427834U CN201681417U (en) | 2010-03-22 | 2010-03-22 | Needle inserting frequency counting device of probe card and probe card |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201427834U CN201681417U (en) | 2010-03-22 | 2010-03-22 | Needle inserting frequency counting device of probe card and probe card |
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| Publication Number | Publication Date |
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| CN201681417U true CN201681417U (en) | 2010-12-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201427834U Expired - Fee Related CN201681417U (en) | 2010-03-22 | 2010-03-22 | Needle inserting frequency counting device of probe card and probe card |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102991759A (en) * | 2012-08-22 | 2013-03-27 | 苏州久三智能科技有限公司 | Carton adsorption counting device |
| CN103217558A (en) * | 2013-03-14 | 2013-07-24 | 上海华力微电子有限公司 | Probe card maintaining method |
| CN103336256A (en) * | 2013-06-26 | 2013-10-02 | 上海华力微电子有限公司 | WAT probe card intelligent processing system and method |
| CN103439643A (en) * | 2013-08-02 | 2013-12-11 | 上海华力微电子有限公司 | Intelligent test system and test method for improving probe card test abnormality |
| CN103809099A (en) * | 2014-03-05 | 2014-05-21 | 上海华虹宏力半导体制造有限公司 | Method for detecting test times of wafer probe |
| CN104143113A (en) * | 2014-07-25 | 2014-11-12 | 冯广建 | Circle type quantifying counting device |
| CN104237695A (en) * | 2014-09-24 | 2014-12-24 | 苏州博众精工科技有限公司 | Probe service life testing mechanism |
| CN106093751A (en) * | 2016-06-20 | 2016-11-09 | 珠海格力电器股份有限公司 | The probe access times detection apparatus and method of circuit board testing instrument |
| CN109540051A (en) * | 2018-11-21 | 2019-03-29 | 中国科学院苏州纳米技术与纳米仿生研究所南昌研究院 | A kind of monitoring method of wafer test probe card wear intensity |
| CN110850268A (en) * | 2018-08-21 | 2020-02-28 | 华邦电子股份有限公司 | Test system and method thereof |
| CN111308302A (en) * | 2018-12-12 | 2020-06-19 | 东京毅力科创株式会社 | Probe card management system and probe card management method |
| CN112038253A (en) * | 2020-09-28 | 2020-12-04 | 上海华虹宏力半导体制造有限公司 | Wafer test probe card capable of life warning and test method |
| CN112069170A (en) * | 2020-07-31 | 2020-12-11 | 嘉兴威伏半导体有限公司 | Probe card cloud management system |
| CN115656587A (en) * | 2022-11-15 | 2023-01-31 | 广州粤芯半导体技术有限公司 | Probe card monitoring system and method |
-
2010
- 2010-03-22 CN CN2010201427834U patent/CN201681417U/en not_active Expired - Fee Related
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102991759A (en) * | 2012-08-22 | 2013-03-27 | 苏州久三智能科技有限公司 | Carton adsorption counting device |
| CN103217558A (en) * | 2013-03-14 | 2013-07-24 | 上海华力微电子有限公司 | Probe card maintaining method |
| CN103217558B (en) * | 2013-03-14 | 2015-08-19 | 上海华力微电子有限公司 | A kind of probe maintaining method |
| CN103336256A (en) * | 2013-06-26 | 2013-10-02 | 上海华力微电子有限公司 | WAT probe card intelligent processing system and method |
| CN103336256B (en) * | 2013-06-26 | 2016-03-30 | 上海华力微电子有限公司 | WAT probe intelligent processing system and method |
| CN103439643A (en) * | 2013-08-02 | 2013-12-11 | 上海华力微电子有限公司 | Intelligent test system and test method for improving probe card test abnormality |
| CN103809099A (en) * | 2014-03-05 | 2014-05-21 | 上海华虹宏力半导体制造有限公司 | Method for detecting test times of wafer probe |
| CN103809099B (en) * | 2014-03-05 | 2016-09-28 | 上海华虹宏力半导体制造有限公司 | The detection method of wafer probe testing time |
| CN104143113B (en) * | 2014-07-25 | 2017-07-11 | 冯广建 | A kind of all segmentation quantitative counting devices |
| CN104143113A (en) * | 2014-07-25 | 2014-11-12 | 冯广建 | Circle type quantifying counting device |
| CN104237695A (en) * | 2014-09-24 | 2014-12-24 | 苏州博众精工科技有限公司 | Probe service life testing mechanism |
| CN104237695B (en) * | 2014-09-24 | 2017-01-25 | 苏州博众精工科技有限公司 | Probe service life testing mechanism |
| CN106093751A (en) * | 2016-06-20 | 2016-11-09 | 珠海格力电器股份有限公司 | The probe access times detection apparatus and method of circuit board testing instrument |
| CN110850268A (en) * | 2018-08-21 | 2020-02-28 | 华邦电子股份有限公司 | Test system and method thereof |
| CN109540051A (en) * | 2018-11-21 | 2019-03-29 | 中国科学院苏州纳米技术与纳米仿生研究所南昌研究院 | A kind of monitoring method of wafer test probe card wear intensity |
| CN111308302A (en) * | 2018-12-12 | 2020-06-19 | 东京毅力科创株式会社 | Probe card management system and probe card management method |
| CN111308302B (en) * | 2018-12-12 | 2022-09-16 | 东京毅力科创株式会社 | Probe card management system and probe card management method |
| TWI820261B (en) * | 2018-12-12 | 2023-11-01 | 日商東京威力科創股份有限公司 | Probe card management system and probe card management method |
| CN112069170A (en) * | 2020-07-31 | 2020-12-11 | 嘉兴威伏半导体有限公司 | Probe card cloud management system |
| CN112069170B (en) * | 2020-07-31 | 2024-04-09 | 嘉兴威伏半导体有限公司 | Probe Card Cloud Management System |
| CN112038253A (en) * | 2020-09-28 | 2020-12-04 | 上海华虹宏力半导体制造有限公司 | Wafer test probe card capable of life warning and test method |
| CN115656587A (en) * | 2022-11-15 | 2023-01-31 | 广州粤芯半导体技术有限公司 | Probe card monitoring system and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101222 Termination date: 20190322 |