CN103209757A - 过滤用过滤器的制造方法 - Google Patents
过滤用过滤器的制造方法 Download PDFInfo
- Publication number
- CN103209757A CN103209757A CN2011800545934A CN201180054593A CN103209757A CN 103209757 A CN103209757 A CN 103209757A CN 2011800545934 A CN2011800545934 A CN 2011800545934A CN 201180054593 A CN201180054593 A CN 201180054593A CN 103209757 A CN103209757 A CN 103209757A
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- CN
- China
- Prior art keywords
- filter
- manufacture method
- substrate
- filtration
- groove
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001914 filtration Methods 0.000 title claims abstract description 260
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 168
- 239000000758 substrate Substances 0.000 claims abstract description 236
- 239000012528 membrane Substances 0.000 claims abstract description 54
- 238000005530 etching Methods 0.000 claims abstract description 32
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 26
- 239000010703 silicon Substances 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims description 244
- 238000001223 reverse osmosis Methods 0.000 claims description 41
- 239000000463 material Substances 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 230000008676 import Effects 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 238000012856 packing Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 42
- 239000013505 freshwater Substances 0.000 abstract description 29
- 229910052814 silicon oxide Inorganic materials 0.000 abstract description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 25
- 239000008399 tap water Substances 0.000 abstract 1
- 235000020679 tap water Nutrition 0.000 abstract 1
- 230000008569 process Effects 0.000 description 76
- 229910003481 amorphous carbon Inorganic materials 0.000 description 48
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 36
- 241000894006 Bacteria Species 0.000 description 29
- 239000013535 sea water Substances 0.000 description 20
- 239000010865 sewage Substances 0.000 description 18
- 206010008631 Cholera Diseases 0.000 description 16
- 230000008859 change Effects 0.000 description 16
- 239000000919 ceramic Substances 0.000 description 15
- 238000004380 ashing Methods 0.000 description 13
- 208000037386 Typhoid Diseases 0.000 description 12
- 241000700605 Viruses Species 0.000 description 12
- 201000008297 typhoid fever Diseases 0.000 description 12
- 229910010293 ceramic material Inorganic materials 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 241000709664 Picornaviridae Species 0.000 description 9
- 241000125945 Protoparvovirus Species 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000004821 distillation Methods 0.000 description 7
- 238000000746 purification Methods 0.000 description 7
- 238000007670 refining Methods 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 239000003814 drug Substances 0.000 description 4
- 229940079593 drug Drugs 0.000 description 4
- 239000010687 lubricating oil Substances 0.000 description 4
- 230000001954 sterilising effect Effects 0.000 description 4
- 238000004659 sterilization and disinfection Methods 0.000 description 4
- 238000009875 water degumming Methods 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000004069 differentiation Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000008929 regeneration Effects 0.000 description 3
- 238000011069 regeneration method Methods 0.000 description 3
- 208000019901 Anxiety disease Diseases 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 2
- 230000036506 anxiety Effects 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 229910001415 sodium ion Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000370738 Chlorion Species 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 230000001580 bacterial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000001631 haemodialysis Methods 0.000 description 1
- 230000000322 hemodialysis Effects 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000001699 photocatalysis Effects 0.000 description 1
- 238000007146 photocatalysis Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 241000712461 unidentified influenza virus Species 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0034—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0037—Organic membrane manufacture by deposition from the gaseous phase, e.g. CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
- B01D69/106—Membranes in the pores of a support, e.g. polymerized in the pores or voids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
- B01D69/108—Inorganic support material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
- B01D69/1216—Three or more layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/024—Oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/024—Oxides
- B01D71/027—Silicium oxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/219—Specific solvent system
- B01D2323/225—Use of supercritical fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/24—Use of template or surface directing agents [SDA]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/28—Pore treatments
- B01D2323/283—Reducing the pores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0283—Pore size
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0283—Pore size
- B01D2325/02832—1-10 nm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0283—Pore size
- B01D2325/02833—Pore size more than 10 and up to 100 nm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/08—Patterned membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/48—Antimicrobial properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/025—Reverse osmosis; Hyperfiltration
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Water Supply & Treatment (AREA)
- Nanotechnology (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Filtering Materials (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010253080A JP2012101196A (ja) | 2010-11-11 | 2010-11-11 | 濾過用フィルタの製造方法 |
| JP2010-253080 | 2010-11-11 | ||
| PCT/JP2011/076129 WO2012063953A1 (ja) | 2010-11-11 | 2011-11-08 | 濾過用フィルタの製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103209757A true CN103209757A (zh) | 2013-07-17 |
Family
ID=46051087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011800545934A Pending CN103209757A (zh) | 2010-11-11 | 2011-11-08 | 过滤用过滤器的制造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20130240479A1 (cg-RX-API-DMAC10.html) |
| JP (1) | JP2012101196A (cg-RX-API-DMAC10.html) |
| KR (1) | KR20140029359A (cg-RX-API-DMAC10.html) |
| CN (1) | CN103209757A (cg-RX-API-DMAC10.html) |
| WO (1) | WO2012063953A1 (cg-RX-API-DMAC10.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112399325A (zh) * | 2019-08-15 | 2021-02-23 | 新科实业有限公司 | 薄膜过滤件、薄膜过滤基板、mems麦克风、及其制造方法 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014057934A (ja) * | 2012-09-19 | 2014-04-03 | Tokyo Electron Ltd | 濾過用フィルタの製造方法 |
| CN116747613B (zh) * | 2016-06-07 | 2024-07-19 | 苏州苏瑞膜纳米科技有限公司 | 流体处理装置及其制备方法 |
| WO2021217044A1 (en) | 2020-04-23 | 2021-10-28 | Saint-Gobain Abrasives, Inc. | System and method for conducting an abrasive operation |
| WO2022187720A1 (en) | 2021-03-05 | 2022-09-09 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for forming same |
| JP2024509813A (ja) | 2021-03-05 | 2024-03-05 | サンーゴバン アブレイシブズ，インコーポレイティド | 研磨物品及びそれを形成するための方法 |
| CN118541240B (zh) | 2021-12-30 | 2025-11-07 | 圣戈班磨料磨具有限公司 | 磨料制品及其形成方法 |
| US12064850B2 (en) | 2021-12-30 | 2024-08-20 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for forming same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006043704A (ja) * | 1994-03-07 | 2006-02-16 | Univ California | 微小組み立てされた粒子フィルタ |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4728591A (en) * | 1986-03-07 | 1988-03-01 | Trustees Of Boston University | Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures |
| JP3161362B2 (ja) * | 1997-05-01 | 2001-04-25 | 富士ゼロックス株式会社 | 微小構造体、その製造方法、その製造装置、基板および成形型 |
| JP4361271B2 (ja) * | 2000-10-10 | 2009-11-11 | バイオトローブ・インコーポレイテツド | アッセイ、合成、および保存用の器具、ならびに、その作製、使用、および操作の方法 |
| JP3845372B2 (ja) * | 2002-12-13 | 2006-11-15 | 本田技研工業株式会社 | 水素分離部材の製造方法 |
| JP2005177626A (ja) * | 2003-12-19 | 2005-07-07 | Sumitomo Electric Ind Ltd | フィルタ、その製造方法およびフィルタユニット |
| JP2006068699A (ja) * | 2004-09-06 | 2006-03-16 | New Industry Research Organization | フィルタ、マイクロリアクターとその製造方法、マイクロリアクター並設構造体及び分析装置 |
| JP4862190B2 (ja) * | 2005-05-26 | 2012-01-25 | 日本碍子株式会社 | 水選択透過特性に優れた無機分離膜 |
| US8038887B2 (en) * | 2005-08-24 | 2011-10-18 | Lawrence Livermore National Security, Llc | Membranes for nanometer-scale mass fast transport |
| KR101767125B1 (ko) * | 2008-06-06 | 2017-08-10 | 바이오나노 제노믹스, 인크. | 통합 나노유체 분석 장치, 제작 방법 및 분석 기술 |
| DE102009034575A1 (de) * | 2009-07-24 | 2011-01-27 | Universität Bielefeld | Perforierte Membranen |
| US8297449B2 (en) * | 2010-01-12 | 2012-10-30 | International Business Machines Corporation | Nanoporous semi-permeable membrane and methods for fabricating the same |
| US8512588B2 (en) * | 2010-08-13 | 2013-08-20 | Lawrence Livermore National Security, Llc | Method of fabricating a scalable nanoporous membrane filter |
-
2010
- 2010-11-11 JP JP2010253080A patent/JP2012101196A/ja active Pending
-
2011
- 2011-11-08 WO PCT/JP2011/076129 patent/WO2012063953A1/ja not_active Ceased
- 2011-11-08 KR KR1020137011945A patent/KR20140029359A/ko not_active Withdrawn
- 2011-11-08 CN CN2011800545934A patent/CN103209757A/zh active Pending
-
2013
- 2013-05-09 US US13/890,529 patent/US20130240479A1/en not_active Abandoned
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006043704A (ja) * | 1994-03-07 | 2006-02-16 | Univ California | 微小組み立てされた粒子フィルタ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112399325A (zh) * | 2019-08-15 | 2021-02-23 | 新科实业有限公司 | 薄膜过滤件、薄膜过滤基板、mems麦克风、及其制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012101196A (ja) | 2012-05-31 |
| KR20140029359A (ko) | 2014-03-10 |
| US20130240479A1 (en) | 2013-09-19 |
| WO2012063953A1 (ja) | 2012-05-18 |
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Application publication date: 20130717 |