CN103187372A - 芯片封装结构 - Google Patents

芯片封装结构 Download PDF

Info

Publication number
CN103187372A
CN103187372A CN2012105677480A CN201210567748A CN103187372A CN 103187372 A CN103187372 A CN 103187372A CN 2012105677480 A CN2012105677480 A CN 2012105677480A CN 201210567748 A CN201210567748 A CN 201210567748A CN 103187372 A CN103187372 A CN 103187372A
Authority
CN
China
Prior art keywords
chip
thermoelectric element
packaging structure
disposed
daisy chain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012105677480A
Other languages
English (en)
Other versions
CN103187372B (zh
Inventor
张景尧
张道智
黄昱玮
林育民
黄馨仪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industrial Technology Research Institute ITRI
Original Assignee
Industrial Technology Research Institute ITRI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Industrial Technology Research Institute ITRI filed Critical Industrial Technology Research Institute ITRI
Publication of CN103187372A publication Critical patent/CN103187372A/zh
Application granted granted Critical
Publication of CN103187372B publication Critical patent/CN103187372B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/38Cooling arrangements using the Peltier effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16135Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/16145Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73257Bump and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/0651Wire or wire-like electrical connections from device to substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06513Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06541Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06589Thermal management, e.g. cooling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L24/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • H01L2924/01327Intermediate phases, i.e. intermetallics compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/10251Elemental semiconductors, i.e. Group IV
    • H01L2924/10253Silicon [Si]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/157Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

本发明公开一种芯片封装结构,其包括载板、第一、二芯片、凸块、第一、二菊链线路、异质热电元件对、第一、二散热元件与封装胶体。第一芯片配置于载板上。第一芯片的第一背面朝向载板的第一表面,第一芯片的第一有源面上具有第一接垫。第二芯片配置于第一芯片上并与载板电连接。第二芯片的第二有源面朝向第一有源面且具有第二接垫。凸块连接第一、二接垫。第一、二菊链线路分别配置于第一、二有源面上。异质热电元件对通过第一、二菊链线路串联连接且与外部元件构成封闭回路。第一、二散热元件分别配置于载板的第二表面与第二芯片的第二背面上。

Description

芯片封装结构
技术领域
本发明涉及一种芯片封装结构,且特别是涉及一种具有热电转换功能的芯片封装结构。
背景技术
一般而言,集成电路(integrated circuit,IC)制造完成后需经过封装制作工艺来保护芯片免于外力破坏,并且将芯片上的电极通过载板扩大电极间距而引接至外部装置(例如:印刷电路板、显示面板等)。球格阵列封装(Ball GridArray,BGA)、薄膜倒装(chip-on-film,COF)封装皆为常见的封装技术。
电子产品的功能不断地扩充而体积及重量则不断地缩小,促使芯片功能需求持续增加,相对应地I/O端点数目增加,而芯片尺寸则持续在缩小,芯片与载板之间的间距也随之缩小。然而,芯片功能增加伴随而来的还有运作过程中产生的热也增加,而热对于元件效能的影响也趋于明显。
因此,如何回收且重新利用芯片运作过程中所产生的热来进行热电转换已成为近年来产业研发的重点技术之一。
发明内容
本发明的目的在于提供一种芯片封装结构,其具有热电转换功能。
为达上述目的,本发明提出一种芯片封装结构,其包括载板、第一芯片、第二芯片、多个凸块、第一菊链线路、第二菊链线路、多个异质(hetero)热电元件对、第一散热元件、第二散热元件以及封装胶体。载板具有彼此相对的第一表面与第二表面。第一芯片配置于载板上。第一芯片具有第一有源面与第一背面。第一背面朝向第一表面,且第一有源面上具有多个第一接垫。第二芯片配置于第一芯片上,并与载板电连接。第二芯片具有第二有源面与第二背面。第二有源面朝向第一有源面,且第二有源面上具有多个第二接垫。凸块连接第一接垫与第二接垫,且作为第一芯片与第二芯片的电性传输接点。第一菊链线路配置于第一有源面上,且与第一芯片电性分离。第二菊链线路配置于第二有源面上,且与第二芯片电性分离。异质热电元件对配置于第一芯片与第二芯片之间,并通过第一菊链线路与第二菊链线路而串联连接,且这些异质热电元件对与外部元件构成封闭回路。第一散热元件配置于载板的第二表面上。第二散热元件配置于第二芯片的第二背面上。第一散热元件与第二散热元件具有不同的散热效率。封装胶体包覆载板、第一芯片与第二芯片。
本发明另提出一种芯片封装结构,其包括载板、第一芯片、第二芯片、第三芯片、多个凸块、多个第一导通孔、第一菊链线路、第二菊链线路、第三菊链线路、第四菊链线路、第二导通孔、多个异质热电元件对、第一散热元件、第二散热元件以及封装胶体。载板具有彼此相对的第一表面与第二表面。第一芯片配置于载板上。第一芯片具有第一有源面与第一背面。第一背面朝向第一表面,且第一有源面上具有多个第一接垫。第二芯片配置于第一芯片上。第二芯片具有第二有源面与第二背面。第二有源面朝向第一有源面,且第二有源面具有多个第二接垫,而第二背面具有多个第三接垫。第三芯片配置于第二芯片上,并与载板电连接。第三芯片具有第三有源面与第三背面。第三有源面朝向第二背面,且第三有源面上具有多个第四接垫。凸块连接第一接垫与第二接垫,以及连接第三接垫与第四接垫。第一导通孔配置于第二芯片中,并连接第二接垫与第三接垫。第一菊链线路配置于第一有源面上,且与第一芯片电性分离。第二菊链线路配置于第二有源面上,且与第二芯片电性分离。第三菊链线路配置于第二背面上,且与第二芯片电性分离。第四菊链线路配置于第三有源面上,且与第三芯片电性分离。第二导通孔配置于第二芯片中,并连接第二菊链线路与第三菊链线路。异质热电元件对配置于第一芯片与第二芯片之间以及配置于第二芯片与第三芯片之间,并通过第一菊链线路、第二菊链线路、第二导通孔、第三菊链线路与第四菊链线路而串联连接,且这些异质热电元件对与外部元件构成封闭回路。第一散热元件配置于载板的该第二表面上。第二散热元件配置于第三芯片的第三背面上。第一散热元件与第二散热元件具有不同的散热效率。封装胶体包覆载板、第一芯片、第二芯片与第三芯片。
为让本发明的上述特征能更明显易懂,下文特举实施例,并配合所附附图作详细说明如下。
附图说明
图1为本发明第一实施例所绘示的芯片封装结构的剖面示意图;
图2为本发明第二实施例所绘示的芯片封装结构的剖面示意图;
图3为本发明第三实施例所绘示的芯片封装结构的剖面示意图;
图4为本发明第四实施例所绘示的芯片封装结构的剖面示意图。
主要元件符号说明
10、20、30、40:芯片封装结构
100:载板
100a:第一表面
100b:第二表面
102:第一芯片
102a:第一有源面
102b:第一背面
102c:第一接垫
104:第二芯片
104a:第二有源面
104b:第二背面
104c:第二接垫
104d:第三接垫
105、304、402:打线
106、404:凸块
108:第一菊链线路
109、111、408、412:绝缘层
110:第二菊链线路
112:异质热电元件对
112a:第一热电元件
112b:第二热电元件
114:第一散热元件
115:外部元件
116:第二散热元件
118:封装胶体
200、300、302:内连线
202:线路层
400:第三芯片
400a:第三有源面
400b:第三背面
400c:第四接垫
406:第一导通孔
407:第三菊链线路
410:第四菊链线路
414:第二导通孔
416:第三导通孔
418:线路层
具体实施方式
第一实施例
图1为依照本发明第一实施例所绘示的芯片封装结构的剖面示意图。请参照图1,芯片封装结构10包括载板100、第一芯片102、第二芯片104、凸块106、第一菊链线路108、第二菊链线路110、异质热电元件对112、第一散热元件114、第二散热元件116以及封装胶体118。载板100具有彼此相对的第一表面100a与第二表面100b。载板100可以是硅芯片、碳化硅芯片、氮化镓经片、有机载板、无机载板或金属载板。载板100用以承载配置于其上的芯片与其他构件。
第一芯片102具有彼此相对的第一有源面102a与第一背面102b。第一芯片102以第一背面102b朝向第一表面100a的方式配置于载板100上。第一有源面102a上具有多个第一接垫102c。本发明对第一芯片102的种类并不作任何限制。在本实施例中,第一芯片102例如为高功率芯片或高发热芯片。
第二芯片104具有彼此相对的第二有源面104a与第二背面104b。第二芯片104以第二有源面104a朝向第一有源面100a的方式配置于第一芯片102上,亦即第二芯片104以倒装(flip chip)的方式配置于第一芯片102上。第二有源面104a上具有多个第二接垫104c。此外,在本实施例中,第二芯片104通过打线105而电连接至载板100。本发明对第二芯片104的种类并不作任何限制。在本实施例中,第二芯片104例如为高功率芯片或高发热芯片。
凸块106连接第一接垫102c与第二接垫104c,用以电连接第一芯片102与第二芯片104。第一菊链线路108配置于第一有源面102a上。在本实施例中,第一菊链线路108与第一有源面102a之间配置有绝缘层109,以使第一菊链线路108与第一芯片102电性分离。第二菊链线路110配置于第二有源面104a上。在本实施例中,第二菊链线路110与第二有源面104a之间配置有绝缘层111,以使第二菊链线路110与第二芯片104电性分离。也就是说,第一菊链线路108并非第一芯片102中用以传导电流的线路层,且第二菊链线路110并非第二芯片104中用以传导电流的线路层。
异质热电元件对112配置于第一芯片102与第二芯片104之间,并通过第一菊链线路108与第二菊链线路110而串联连接。此外,这些异质热电元件对112与外部元件115构成封闭回路。详细地说,在本实施例中,多个异质热电元件对112通过第一菊链线路108与第二菊链线路110而彼此串联连接成一个热电模块,且此热电模块的两个端点分别经由打线113而连接至外部元件115。外部元件115例如为储能元件,以储存热电模块所产生的电能。上述储能元件可以是电池或电容器等可储存电能的元件。
以下进一步说明本实施例中的异质热电元件对112。每一个异质热电元件对112包括第一热电元件112a与第二热电元件112b。第一热电元件112a与第二热电元件112b具有不同的席贝克(Seebeck)系数。通过第一芯片102与第二芯片104之间的温度差异,由异质热电元件对112、第一菊链线路108与第二菊链线路110所构成的热电模块产生席贝克效应、珀耳帖(Peltier)效应或汤姆生(Thomson)效应以达到热电转换的效果。第一热电元件112a与第二热电元件112b的材料各自例如为金属(例如镍、铋、锑)、合金(例如银铜合金、铜镍合金)、介金属化合物(例如Cu3Sn、Ag3Sn、Ni3Sn4或AuSn4)、半导体介金属(PbTe、Bi2Te3)、纳米碳管、金属玻璃或陶瓷(氮化钛或碳化钛)。本发明对于第一热电元件112a的材料与第二热电元件112b的材料的组合并不做任何限制,只要第一热电元件112a的材料与第二热电元件112b的材料的符合热电转换特性的定义即可。此外,在其他实施例中,经由材料的选择,第一热电元件112a可为P型热电元件与N型热电元件中的一者,而第二热电元件112b则为P型热电元件与N型热电元件中的另一者。P型热电元件的材料例如为BiTe或Cu0.5Ag0.5InTe2。N型热电元件的材料例如为PbTe、ZrNi3Sn4或TiNi3Sn4
第一散热元件114配置于载板100的第二表面100b上。第二散热元件116配置于第二芯片104的第二背面104b上。第一散热元件114与第二散热元件116具有不同的散热效率。本发明对第一散热元件114与第二散热元件116的种类并不做任何限定。第一散热元件114与第二散热元件116可具有不同的材料、尺寸、散热方式,以达成分别具有不同的散热效率。由于第一散热元件114与第二散热元件具有不同的散热效率,使得异质热电元件对112的两端(分别为邻近第一芯片102与第二芯片104的部分)之间可以具有大的温差梯度,以延长达到热平衡的时间,因而可持续产生电能。
封装胶体118包覆载板100、第一芯片102与第二芯片104,以保护载板100、第一芯片102、第二芯片104以及位于第一芯片102与第二芯片104之间的各个构件。
第二实施例
图2为依照本发明第二实施例所绘示的芯片封装结构的剖面示意图。在图2中,与图1相同构件将以相同的标号表示,于此不另行说明。请参照图2,在本实施例中,芯片封装结构20与芯片封装结构10的差异在于:在芯片封装结构20中,第二芯片104通过内连线200而电连接至载板100。此外,内连线200中的线路层202位于第二芯片104上,除了用以电连接第二芯片104与载板100之外,还可取代芯片封装结构10中的第二散热元件116。
第三实施例
图3为依照本发明第三实施例所绘示的芯片封装结构的剖面示意图。在图3中,与图1相同构件将以相同的标号表示,于此不另行说明。请参照图3,在本实施例中,芯片封装结构30与芯片封装结构10的差异在于:在芯片封装结构30中,第二芯片104通过内连线300而电连接至载板100。此外,由异质热电元件对112、第一菊链线路108与第二菊链线路110所构成的热电模块的两个端点分别经由内连线302以及打线304而连接至外部元件115。需要注意的是,内连线302并未穿过第二芯片104与第二散热元件116,而是绕过第二芯片104与第二散热元件116,并在封装胶体118外部通过打线304而电连接至外部元件115。
第四实施例
图4为依照本发明第四实施例所绘示的芯片封装结构的剖面示意图。在图4中,与图1相同构件将以相同的标号表示,于此不另行说明。请参照图4,在本实施例中,芯片封装结构40与芯片封装结构10的差异在于:在芯片封装结构40中,具有三个堆叠的芯片。当然,本发明并不限于此,在其他实施例中也可以是具有更多个堆叠的芯片。在芯片封装结构40中,第二芯片104上还配置有第三芯片400。详细地说,第二芯片104的第二背面104b上具有多个第三接垫104d。第三芯片400具有彼此相对的第三有源面400a与第三背面400b。第三芯片400以第三有源面400a朝向第二背面104b的方式配置于第二芯片104上,亦即第三芯片400以倒装的方式配置于第二芯片104上。此外,在本实施例中,第二芯片104并未通过打线105电连接至载板100,而是第三芯片400通过打线402而电连接至载板100。当然,在其他实施例中,第三芯片400也可通过内连线而电连接至载板100(如第三实施例所述)。第三有源面400a上具有多个第四接垫400c。凸块404连接第三接垫104d与第四接垫400c。第一导通孔406配置于第二芯片104中,并连接第二接垫104c与第三接垫104d。
此外,第三菊链线路407配置于第二背面104b上。在本实施例中,第三菊链线路407与第二背面104b之间配置有绝缘层408,以使第三菊链线路407与第二芯片104电性分离。第四菊链线路410配置于第三有源面400a上。在本实施例中,第四菊链线路410与第三有源面400a之间配置有绝缘层412,以使第四菊链线路410与第三芯片400电性分离。第二导通孔414配置于第二芯片104中,并连接第二菊链线路110与第三菊链线路407。异质热电元件对112除了配置于第一芯片102与第二芯片104之间外,也配置于第二芯片104与第三芯片400之间,并通过第三菊链线路407与第四菊链线路410而串联连接。第三导通孔416配置于第三芯片400中,并连接第四菊链线路410与线路层418。由此,多个异质热电元件对112通过第一菊链线路108、第二菊链线路110、第三菊链线路407与第四菊链线路410而彼此串联连接成一个热电模块,且此热电模块的两个端点分别经由第三导通孔416、线路层418与打线113而连接至外部元件115。当然在其他实施例中,热电模块的两个端点也可皆仅经由打线而连接至外部元件115(如第二实施例所述)。
第二散热元件116配置于第三芯片400的第三背面400b上。封装胶体118包覆载板100、第一芯片102、第二芯片104与第三芯片400,以保护载板100、第一芯片102、第二芯片104、第三芯片400以及位于第一芯片102与第二芯片104之间以及第二芯片104与第三芯片400之间的各个构件。
特别一提的是,在上述各个实施例中,第一热电元件112a、第二热电元件112b以及凸块106、404皆是采用先印刷(printing)或喷印((inject)膏状原料于第一菊链线路108,再将第二芯片104以倒装(flip chip)的方式配置于第一芯片102上,接着进行高温烧结的方式来形成第一热电元件112a、第二热电元件112b及凸块106、404。
基于上述,在本发明的芯片封装结构中,于芯片之间配置异质热电元件对,且利用二个具有不同散热效率的散热元件来制造异质热电元件对二侧的温度差异,并使异质热电元件对与外部元件构成封闭回路。因此,本发明可以有效地使用芯片运作过程中所产生的热来进行热电转换。
虽然已结合以上实施例举例说明了本发明,然而其并非用以限定本发明,任何所属技术领域中熟悉此技术者,在不脱离本发明的精神和范围内,可作些许的更动与润饰,故本发明的保护范围应以附上的权利要求所界定的为准。

Claims (21)

1.一种芯片封装结构,包括:
载板,具有彼此相对的第一表面与第二表面;
第一芯片,配置于该载板上,该第一芯片具有第一有源面与第一背面,该第一背面朝向该第一表面,且该第一有源面上具有独立区域的多个第一接垫及绝缘层;
第二芯片,配置于该第一芯片上,并与该载板电连接,该第二芯片具有第二有源面与第二背面,该第二有源面朝向该第一有源面,且该第二有源面上具有独立区域的多个第二接垫及一绝缘层;
多个凸块,连接该些第一接垫与该些第二接垫,作为第一芯片与第二芯片电性导通功能;
第一菊链线路,配置于该第一有源面的绝缘层上;
第二菊链线路,配置于该第二有源面的绝缘层上;
多个异质热电元件对,配置于该第一芯片与该第二芯片之间,并通过该第一菊链线路与该第二菊链线路而串联连接,且该些异质热电元件对与一外部元件构成一回路;
第一散热元件,配置于该载板的该第二表面上;
第二散热元件,配置于该第二芯片的该第二背面上,其中该第一散热元件与该第二散热元件具有不同的散热效率;以及
封装胶体,包覆该载板、该第一芯片与该第二芯片。
2.如权利要求1所述的芯片封装结构,其中每一异质热电元件对包括第一热电元件与第二热电元件,且该第一热电元件与该第二热电元件具有不同的席贝克系数。
3.如权利要求2所述的芯片封装结构,其中该第一热电元件与该第二热电元件的材料各自包括金属、合金、介金属化合物、纳米碳管、金属玻璃或陶瓷。
4.如权利要求2所述的芯片封装结构,其中该第一热电元件为P型热电元件与N型热电元件中的一者,而该第二热电元件为P型热电元件与N型热电元件中的另一者。
5.如权利要求1所述的芯片封装结构,其中该第二芯片通过一打线而与该载板电连接。
6.如权利要求1所述的芯片封装结构,其中该第二芯片通过一内连线而与该载板电连接。
7.如权利要求6所述的芯片封装结构,其中该第二散热元件为该内连线的一部分。
8.如权利要求1所述的芯片封装结构,其中该些异质热电元件对与该外部元件通过一外部连线而构成该封闭回路。
9.如权利要求1所述的芯片封装结构,其中该些异质热电元件对与该外部元件通过一内连线与一外部连线而构成该封闭回路。
10.如权利要求1所述的芯片封装结构,其中该第一芯片及第二芯片包括高功率芯片、高发热芯片。
11.如权利要求1所述的芯片封装结构,其中该外部元件包括储能元件。
12.一种芯片封装结构,包括:
载板,具有彼此相对的一第一表面与一第二表面;
第一芯片,配置于该载板上,该第一芯片具有第一有源面与第一背面,该第一背面朝向该第一表面,且该第一有源面上具有独立区域的多个第一接垫及一绝缘层;
第二芯片,配置于该第一芯片上,该第二芯片具有第二有源面与第二背面,该第二有源面朝向该第一有源面,且该第二有源面具有独立区域的多个第二接垫及一绝缘层,而该第二背面具有独立区域的多个第三接垫及一绝缘层;
第三芯片,配置于该第二芯片上,并与该载板电连接,该第三芯片具有第三有源面与第三背面,该第三有源面朝向该第二背面,且该第三有源面上具有独立区域的多个第四接垫及一绝缘层;
多个凸块,连接该些第一接垫与该些第二接垫,作为第一芯片与第二芯片电性导通功能,以及连接该些第三接垫与该些第四接垫,作为第三芯片与第四芯片电性导通功能;
多个第一导通孔,配置于该第二芯片中,并连接该些第二接垫与该些第三接垫;
第一菊链线路,配置于该第一有源面的绝缘层上;
第二菊链线路,配置于该第二有源面的绝缘层上;
第三菊链线路,配置于该第二背面的绝缘层上;
第四菊链线路,配置于该第三有源面的绝缘层上;
第二导通孔,配置于该第二芯片中,并连接该第二菊链线路与该第三菊链线路;
多个异质热电元件对,配置于该第一芯片与该第二芯片之间以及配置于该第二芯片与该第三芯片之间,并通过该第一菊链线路、该第二菊链线路、该第二导通孔、该第三菊链线路与该第四菊链线路而串联连接,且该些异质热电元件对与一外部元件构成一回路;
第一散热元件,配置于该载板的该第二表面上;
第二散热元件,配置于该第三芯片的该第三背面上,其中该第一散热元件与该第二散热元件具有不同的散热效率;以及
封装胶体,包覆该载板、该第一芯片、该第二芯片与该第三芯片。
13.如权利要求12所述的芯片封装结构,其中每一异质热电元件对包括第一热电元件与第二热电元件,且该第一热电元件与该第二热电元件具有不同的席贝克系数。
14.如权利要求13所述的芯片封装结构,其中该第一热电元件与该第二热电元件的材料各自包括金属、合金、介金属化合物、纳米碳管、金属玻璃或陶瓷。
15.如权利要求13所述的芯片封装结构,其中该第一热电元件为P型热电元件与N型热电元件中的一者,而该第二热电元件为P型热电元件与N型热电元件中的另一者。
16.如权利要求12所述的芯片封装结构,其中该第三芯片通过一打线而与该载板电连接。
17.如权利要求12所述的芯片封装结构,其中该第三芯片通过一内连线而与该载板电连接。
18.如权利要求17所述的芯片封装结构,其中该第二散热元件为该内连线的一部分。
19.如权利要求12所述的芯片封装结构,其中该些异质热电元件对与该外部元件通过一连线而构成该封闭回路。
20.如权利要求12所述的芯片封装结构,其中该第一芯片、第二芯片及第三芯片包括高功率芯片、高发热芯片。
21.如权利要求12所述的芯片封装结构,其中该外部元件包括储能元件。
CN201210567748.0A 2011-12-30 2012-12-24 芯片封装结构 Active CN103187372B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW100149703 2011-12-30
TW100149703A TWI463633B (zh) 2011-12-30 2011-12-30 晶片封裝結構

Publications (2)

Publication Number Publication Date
CN103187372A true CN103187372A (zh) 2013-07-03
CN103187372B CN103187372B (zh) 2016-03-30

Family

ID=48678466

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210567748.0A Active CN103187372B (zh) 2011-12-30 2012-12-24 芯片封装结构

Country Status (3)

Country Link
US (1) US8866309B2 (zh)
CN (1) CN103187372B (zh)
TW (1) TWI463633B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105304591A (zh) * 2014-07-07 2016-02-03 英飞凌科技股份有限公司 双侧冷却芯片封装和制造其的方法
CN112908984A (zh) * 2021-01-18 2021-06-04 上海先方半导体有限公司 一种带有散热片的ssd堆叠封装结构及其制作方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140006587A (ko) * 2012-07-06 2014-01-16 삼성전자주식회사 반도체 패키지
TWI572272B (zh) 2015-10-30 2017-02-21 財團法人工業技術研究院 功率散熱裝置
US11177317B2 (en) * 2016-04-04 2021-11-16 Synopsys, Inc. Power harvesting for integrated circuits
US9842827B2 (en) * 2016-04-18 2017-12-12 Avago Technologies General Ip (Singapore) Pte. Ltd. Wafer level system in package (SiP) using a reconstituted wafer and method of making
US10600679B2 (en) 2016-11-17 2020-03-24 Samsung Electronics Co., Ltd. Fan-out semiconductor package
KR101872619B1 (ko) * 2016-11-17 2018-06-28 삼성전기주식회사 팬-아웃 반도체 패키지
KR101983186B1 (ko) 2016-12-16 2019-05-28 삼성전기주식회사 팬-아웃 반도체 패키지
DE112018000874T5 (de) * 2017-02-15 2019-10-31 Ferrotec Holdings Corporation Gehäuse mit eingebautem thermoelektrischem element
DE102017126028B4 (de) 2017-06-30 2020-12-10 Taiwan Semiconductor Manufacturing Co., Ltd. Gehäuse und Herstellungsverfahren mit einem Trennfilm als Isolierfilm
US10170341B1 (en) 2017-06-30 2019-01-01 Taiwan Semiconductor Manufacturing Company, Ltd. Release film as isolation film in package
US11658095B2 (en) * 2019-03-29 2023-05-23 Intel Corporation Bump integrated thermoelectric cooler
CN113130731A (zh) * 2019-12-30 2021-07-16 华为技术有限公司 热电制冷器、热电制冷器的制备方法和电子设备
KR20220071399A (ko) 2020-11-24 2022-05-31 삼성전자주식회사 반도체 모듈
KR20220117622A (ko) 2021-02-17 2022-08-24 삼성전자주식회사 Pcb 보드 및 이를 포함하는 스토리지 시스템

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200416787A (en) * 2002-10-08 2004-09-01 Chippac Inc Semiconductor stacked multi-package module having inverted second package
CN101154609A (zh) * 2006-09-27 2008-04-02 台湾积体电路制造股份有限公司 凸块测试单元、装置及测试方法
US20100020499A1 (en) * 2008-07-25 2010-01-28 Samsung Electro-Mechanics Co., Ltd. Electronic chip module

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5356485A (en) 1992-04-29 1994-10-18 The United States Of America As Represented By The Secretary Of Commerce Intermetallic thermocouples
US6300150B1 (en) 1997-03-31 2001-10-09 Research Triangle Institute Thin-film thermoelectric device and fabrication method of same
US6297441B1 (en) 2000-03-24 2001-10-02 Chris Macris Thermoelectric device and method of manufacture
JP4401754B2 (ja) 2003-11-28 2010-01-20 清仁 石田 熱電変換モジュールの製造方法
TWI250596B (en) * 2004-07-23 2006-03-01 Ind Tech Res Inst Wafer-level chip scale packaging method
WO2007002342A2 (en) 2005-06-22 2007-01-04 Nextreme Thermal Solutions Methods of forming thermoelectric devices including electrically insulating matrixes between conductive traces and related structures
KR100629498B1 (ko) * 2005-07-15 2006-09-28 삼성전자주식회사 마이크로 패키지, 멀티―스택 마이크로 패키지 및 이들의제조방법
TWI257722B (en) 2005-07-15 2006-07-01 Ind Tech Res Inst Package structure of light-emitting diode with electrothermal component
US7855397B2 (en) 2007-09-14 2010-12-21 Nextreme Thermal Solutions, Inc. Electronic assemblies providing active side heat pumping
US7808258B2 (en) * 2008-06-26 2010-10-05 Freescale Semiconductor, Inc. Test interposer having active circuit component and method therefor
US7893529B2 (en) 2009-01-12 2011-02-22 International Business Machines Corporation Thermoelectric 3D cooling

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200416787A (en) * 2002-10-08 2004-09-01 Chippac Inc Semiconductor stacked multi-package module having inverted second package
CN101154609A (zh) * 2006-09-27 2008-04-02 台湾积体电路制造股份有限公司 凸块测试单元、装置及测试方法
US20100020499A1 (en) * 2008-07-25 2010-01-28 Samsung Electro-Mechanics Co., Ltd. Electronic chip module

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105304591A (zh) * 2014-07-07 2016-02-03 英飞凌科技股份有限公司 双侧冷却芯片封装和制造其的方法
CN112908984A (zh) * 2021-01-18 2021-06-04 上海先方半导体有限公司 一种带有散热片的ssd堆叠封装结构及其制作方法

Also Published As

Publication number Publication date
US8866309B2 (en) 2014-10-21
US20130168798A1 (en) 2013-07-04
TWI463633B (zh) 2014-12-01
TW201327770A (zh) 2013-07-01
CN103187372B (zh) 2016-03-30

Similar Documents

Publication Publication Date Title
CN103187372B (zh) 芯片封装结构
US20200251398A1 (en) Package with embedded heat dissipation features
CN107732651B (zh) 光发射器封装件
US9741638B2 (en) Thermal structure for integrated circuit package
US9595505B2 (en) Thermally-enhanced three dimensional system-in-packages and methods for the fabrication thereof
US6657864B1 (en) High density thermal solution for direct attach modules
TWI309549B (en) Printed circuit board with improved thermal dissipating structure and electronic device with the same
KR100973722B1 (ko) 방열기를 가지는 전자 모듈 어셈블리
TWI549322B (zh) 一種結合磊晶結構與封裝基板爲一體之整合式led元件及其製作方法
US20090091020A1 (en) Co-fired ceramic module
US20140073078A1 (en) Device for converting energy and method for manufacturing the device, and electronic apparatus with the device
US7298028B2 (en) Printed circuit board for thermal dissipation and electronic device using the same
CN100361296C (zh) 具有改善散热结构的印刷电路板及电子装置
US20200312741A1 (en) Thermoelectric cooler to enhance thermal-mechanical package performance
US20070056620A1 (en) Power connection for a thin film thermoelectric cooler
CN103794581B (zh) 一种热电散热装置
CN100417312C (zh) 具有改善散热结构的印刷电路板及电子装置
KR101343049B1 (ko) 방열 기능을 가지는 반도체 패키지
US7361982B2 (en) Bumpless chip package
US11171072B2 (en) Heat dissipation substrate and manufacturing method thereof
CN103050454A (zh) 堆迭封装构造
KR101897304B1 (ko) 파워 모듈
KR101381947B1 (ko) 열전 반도체 일체형 led 모듈
CN213212151U (zh) 一种半导体封装结构
US20220208628A1 (en) Chip packaging structure

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant