CN103165418A - 在GaAs纳米线侧壁生长同质量子结构的MBE方法 - Google Patents
在GaAs纳米线侧壁生长同质量子结构的MBE方法 Download PDFInfo
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103346476A (zh) * | 2013-06-24 | 2013-10-09 | 中国科学院长春光学精密机械与物理研究所 | 光子晶体纳腔量子环单光子发射器件及其制备方法 |
CN103367588A (zh) * | 2013-07-11 | 2013-10-23 | 中国科学院半导体研究所 | 在GaAs纳米线侧壁利用纳米环作为掩膜生长量子点的方法 |
CN103531441A (zh) * | 2013-10-23 | 2014-01-22 | 中国科学院半导体研究所 | 基于分叉纳米线的多端量子调控器件的制备方法 |
CN103531679A (zh) * | 2013-10-23 | 2014-01-22 | 中国科学院半导体研究所 | 制备六棱柱纳米微腔中的量子点单光子源的方法 |
CN103794474A (zh) * | 2014-01-29 | 2014-05-14 | 中国科学院半导体研究所 | 硅衬底上生长纳米线的衬底处理方法 |
CN105019027A (zh) * | 2014-04-23 | 2015-11-04 | 长春理工大学 | 用分子束外延(MBE)在GaSb衬底上无催化制备GaSb纳米线的方法 |
CN108470674A (zh) * | 2018-01-16 | 2018-08-31 | 长春理工大学 | 一种利用应力调控实现纯相GaAs纳米线的制备方法 |
CN109801835A (zh) * | 2018-12-14 | 2019-05-24 | 华南理工大学 | 一种低温下生长GaAs纳米线的方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6242326B1 (en) * | 1998-12-02 | 2001-06-05 | Electronics And Telecommunications Research Institute | Method for fabricating compound semiconductor substrate having quantum dot array structure |
CN101567521A (zh) * | 2008-04-23 | 2009-10-28 | 中国科学院半导体研究所 | 一种生长可控量子点和量子环的方法 |
-
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- 2013-03-13 CN CN201310079069.3A patent/CN103165418B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6242326B1 (en) * | 1998-12-02 | 2001-06-05 | Electronics And Telecommunications Research Institute | Method for fabricating compound semiconductor substrate having quantum dot array structure |
CN101567521A (zh) * | 2008-04-23 | 2009-10-28 | 中国科学院半导体研究所 | 一种生长可控量子点和量子环的方法 |
Non-Patent Citations (7)
Title |
---|
A.FONTCUBERTA I MORRAL,ET AL.: "Nucleation mechanism of gallium-assisted molecular beam epitaxy growth of gallium arsenide nanowires", 《APPLIED PHYSICS LETTERS》, vol. 92, 13 February 2008 (2008-02-13), pages 063112 * |
A.NEMCSICS,ET AL.: "Composition of the GaAs quantum dot, grown by droplet epitaxy", 《SUPERLATTICES AND MICROSTRUCTURES》, vol. 48, 12 August 2010 (2010-08-12), pages 352 * |
A.NEMCSICS,ET AL.: "The RHEED tracking of the droplet epitaxial grown quantum dot and ring structures", 《MATERIAL SCIENCE AND ENGINEERING B》, vol. 165, 11 March 2009 (2009-03-11), pages 118 - 119 * |
C.COLOMBO,ET AL.: "Ga-assisted catalyst-free growth mechanism of GaAs nanowires by molecular beam epitaxy", 《PHYSICAL REVIEW B》, vol. 77, 28 April 2008 (2008-04-28), pages 155326 - 1 * |
EMANUELE UCCELLI,ET AL.: "InAs quantum dot arrays decorating the facets of GaAs nanowires", 《ACS NANO》, vol. 4, no. 10, 14 September 2010 (2010-09-14), pages 5991 * |
XIN YAN,ET AL.: "Growth of InAs quantum dots on GaAs nanowires by Metal organic chemical vapor deposition", 《NANO LETTERS》, vol. 11, 17 August 2011 (2011-08-17), pages 3941 - 3944 * |
YING YU,ET AL.: "Single InAs quantum dot grown at the junction of branched gold-free GaAs nanowre", 《NANO LETTERS》, vol. 13, 6 March 2013 (2013-03-06), pages 1400 * |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103346476A (zh) * | 2013-06-24 | 2013-10-09 | 中国科学院长春光学精密机械与物理研究所 | 光子晶体纳腔量子环单光子发射器件及其制备方法 |
CN103346476B (zh) * | 2013-06-24 | 2015-10-28 | 中国科学院长春光学精密机械与物理研究所 | 光子晶体纳腔量子环单光子发射器件及其制备方法 |
CN103367588A (zh) * | 2013-07-11 | 2013-10-23 | 中国科学院半导体研究所 | 在GaAs纳米线侧壁利用纳米环作为掩膜生长量子点的方法 |
CN103531441A (zh) * | 2013-10-23 | 2014-01-22 | 中国科学院半导体研究所 | 基于分叉纳米线的多端量子调控器件的制备方法 |
CN103531679A (zh) * | 2013-10-23 | 2014-01-22 | 中国科学院半导体研究所 | 制备六棱柱纳米微腔中的量子点单光子源的方法 |
CN103531679B (zh) * | 2013-10-23 | 2016-03-23 | 中国科学院半导体研究所 | 制备六棱柱纳米微腔中的量子点单光子源的方法 |
CN103531441B (zh) * | 2013-10-23 | 2016-05-04 | 中国科学院半导体研究所 | 基于分叉纳米线的多端量子调控器件的制备方法 |
CN103794474A (zh) * | 2014-01-29 | 2014-05-14 | 中国科学院半导体研究所 | 硅衬底上生长纳米线的衬底处理方法 |
CN105019027A (zh) * | 2014-04-23 | 2015-11-04 | 长春理工大学 | 用分子束外延(MBE)在GaSb衬底上无催化制备GaSb纳米线的方法 |
CN105019027B (zh) * | 2014-04-23 | 2019-04-30 | 长春理工大学 | 用分子束外延(MBE)在GaSb衬底上无催化制备GaSb纳米线的方法 |
CN108470674A (zh) * | 2018-01-16 | 2018-08-31 | 长春理工大学 | 一种利用应力调控实现纯相GaAs纳米线的制备方法 |
CN109801835A (zh) * | 2018-12-14 | 2019-05-24 | 华南理工大学 | 一种低温下生长GaAs纳米线的方法 |
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Inventor after: Cha Guowei Inventor after: Niu Zhichuan Inventor after: Ni Haiqiao Inventor after: Shang Xiangjun Inventor after: Li Mifeng Inventor after: Yu Ying Inventor after: Wang Lijuan Inventor after: Xu Jianxing Inventor after: He Zhenhong Inventor before: Cha Guowei Inventor before: Li Mifeng Inventor before: Yu Ying Inventor before: Wang Lijuan Inventor before: Xu Jianxing Inventor before: Shang Xiangjun Inventor before: Ni Haiqiao Inventor before: He Zhenhong Inventor before: Niu Zhichuan |
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