CN103132026B - 阴极弧离子镀制备AlCrN涂层的装置和方法 - Google Patents
阴极弧离子镀制备AlCrN涂层的装置和方法 Download PDFInfo
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- CN103132026B CN103132026B CN201310066560.2A CN201310066560A CN103132026B CN 103132026 B CN103132026 B CN 103132026B CN 201310066560 A CN201310066560 A CN 201310066560A CN 103132026 B CN103132026 B CN 103132026B
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- 238000000576 coating method Methods 0.000 title claims abstract description 43
- 239000011248 coating agent Substances 0.000 title claims abstract description 42
- 238000007733 ion plating Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims description 8
- 239000000463 material Substances 0.000 claims abstract description 19
- 238000010891 electric arc Methods 0.000 claims abstract description 9
- 230000007613 environmental effect Effects 0.000 claims abstract description 7
- 239000013049 sediment Substances 0.000 claims description 26
- 238000000151 deposition Methods 0.000 claims description 8
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 239000013077 target material Substances 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 4
- 238000002360 preparation method Methods 0.000 abstract description 4
- 230000004048 modification Effects 0.000 abstract description 2
- 238000012986 modification Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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CN201310066560.2A CN103132026B (zh) | 2013-03-04 | 2013-03-04 | 阴极弧离子镀制备AlCrN涂层的装置和方法 |
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CN201310066560.2A CN103132026B (zh) | 2013-03-04 | 2013-03-04 | 阴极弧离子镀制备AlCrN涂层的装置和方法 |
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CN103132026A CN103132026A (zh) | 2013-06-05 |
CN103132026B true CN103132026B (zh) | 2016-01-27 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103981496B (zh) * | 2014-02-10 | 2016-11-02 | 常州大学 | 一种制备TiAlCrN多元涂层的装置和方法 |
CN106835031B (zh) * | 2017-01-04 | 2019-01-15 | 西安交通大学 | 离子源增强电弧离子镀制备高温合金切削刀具涂层的方法 |
CN106893986B (zh) * | 2017-03-16 | 2019-03-15 | 天津职业技术师范大学 | 一种高硬度AlCrN纳米复合涂层及其制备工艺 |
CN108504998A (zh) * | 2018-04-17 | 2018-09-07 | 广东正德材料表面科技有限公司 | 一种制备自分层复合结构铬铝氮超硬膜的镀膜处理方法 |
CN109161841B (zh) * | 2018-07-27 | 2020-07-21 | 广东工业大学 | 一种AlCrN/AlCrSiN超硬纳米复合多层涂层及其制备方法和应用 |
CN109943813B (zh) * | 2019-04-28 | 2023-03-14 | 北京航空航天大学 | 一种Al-Cr金属复合涂层的高通量制备方法 |
CN112030105A (zh) * | 2020-08-29 | 2020-12-04 | 扬州大学 | 一种空压机转子表面AlCrNx涂层的制备方法 |
CN112746250B (zh) * | 2020-12-29 | 2022-11-08 | 平湖市良正五金科技股份有限公司 | 一种铝型材热挤压模具镀层加工工艺 |
Citations (2)
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CN101358330A (zh) * | 2008-05-23 | 2009-02-04 | 中国科学院金属研究所 | 一种结构紧凑的多功能磁控离子镀弧源装置 |
CN101818321A (zh) * | 2010-03-31 | 2010-09-01 | 西华大学 | 活塞环表面铝铬氮复合涂层及其工艺方法 |
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JP2000303172A (ja) * | 1999-04-16 | 2000-10-31 | Shin Etsu Chem Co Ltd | スパッター膜の形成方法 |
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CN101358330A (zh) * | 2008-05-23 | 2009-02-04 | 中国科学院金属研究所 | 一种结构紧凑的多功能磁控离子镀弧源装置 |
CN101818321A (zh) * | 2010-03-31 | 2010-09-01 | 西华大学 | 活塞环表面铝铬氮复合涂层及其工艺方法 |
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Effective date of registration: 20180305 Address after: No. 3, Guiyang Road, Lijia Town, Wujin District, Changzhou, Jiangsu Patentee after: JIANGSU TENGCHI TECHNOLOGY Co.,Ltd. Address before: Gehu Lake Road Wujin District 213164 Jiangsu city of Changzhou province No. 1 Changzhou University Patentee before: Changzhou University |
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Denomination of invention: Device and method for preparing AlCrN coating by cathodic arc ion plating Effective date of registration: 20231220 Granted publication date: 20160127 Pledgee: Jiangsu Jiangnan Rural Commercial Bank Limited by Share Ltd. Pledgor: JIANGSU TENGCHI TECHNOLOGY Co.,Ltd. Registration number: Y2023980072830 |
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