CN103276362B - 多级磁场直管磁过滤与脉冲偏压复合的电弧离子镀方法 - Google Patents
多级磁场直管磁过滤与脉冲偏压复合的电弧离子镀方法 Download PDFInfo
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- CN103276362B CN103276362B CN201310226754.4A CN201310226754A CN103276362B CN 103276362 B CN103276362 B CN 103276362B CN 201310226754 A CN201310226754 A CN 201310226754A CN 103276362 B CN103276362 B CN 103276362B
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CN201310226754.4A CN103276362B (zh) | 2013-06-08 | 2013-06-08 | 多级磁场直管磁过滤与脉冲偏压复合的电弧离子镀方法 |
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CN103276362B true CN103276362B (zh) | 2015-08-19 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN104947046B (zh) * | 2015-07-28 | 2017-10-27 | 魏永强 | 多级磁场电弧离子镀和高功率脉冲磁控溅射复合沉积方法 |
CN104975263A (zh) * | 2015-07-28 | 2015-10-14 | 魏永强 | 多级磁场电弧离子镀和射频磁控溅射复合沉积方法 |
CN105088150B (zh) * | 2015-09-10 | 2019-04-16 | 魏永强 | 传输方向可调式的多级磁场电弧离子镀方法 |
CN105925940A (zh) * | 2016-06-12 | 2016-09-07 | 魏永强 | 内衬正偏压直管的多级磁场电弧离子镀方法 |
EP3355338A1 (en) * | 2017-01-25 | 2018-08-01 | Sergueï Mikhailov | Apparatus and method for surface processing |
CN109989039A (zh) * | 2017-12-30 | 2019-07-09 | 魏永强 | 一种组合磁场、组合管和多孔挡板复合的真空沉积方法 |
Citations (3)
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CN1854333A (zh) * | 2005-04-27 | 2006-11-01 | 北京实力源科技开发有限责任公司 | 一种新的真空镀膜方法和设备 |
CN101363116A (zh) * | 2008-03-26 | 2009-02-11 | 中国科学院金属研究所 | 多模式可编程调制的旋转横向磁场控制的电弧离子镀装置 |
CN202945320U (zh) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | 一种多型复合磁场可选紧凑旋转磁场辅助离子镀弧源装置 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1854333A (zh) * | 2005-04-27 | 2006-11-01 | 北京实力源科技开发有限责任公司 | 一种新的真空镀膜方法和设备 |
CN101363116A (zh) * | 2008-03-26 | 2009-02-11 | 中国科学院金属研究所 | 多模式可编程调制的旋转横向磁场控制的电弧离子镀装置 |
CN202945320U (zh) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | 一种多型复合磁场可选紧凑旋转磁场辅助离子镀弧源装置 |
Non-Patent Citations (2)
Title |
---|
Improved control of TiN coating properties using cathodic arc evaporation with a pulsed bias;W. Olbrich;《Surface and Coatings Technology》;19911231;258-262页 * |
偏压对电弧离子镀薄膜表面形貌的影响机理;黄美东;《金属学报》;20030531;第39卷(第5期);全文 * |
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