CN103116208A - 滤光器装置、光模块及电子设备 - Google Patents

滤光器装置、光模块及电子设备 Download PDF

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Publication number
CN103116208A
CN103116208A CN201210359300XA CN201210359300A CN103116208A CN 103116208 A CN103116208 A CN 103116208A CN 201210359300X A CN201210359300X A CN 201210359300XA CN 201210359300 A CN201210359300 A CN 201210359300A CN 103116208 A CN103116208 A CN 103116208A
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CN
China
Prior art keywords
substrate
light
hole
reflectance coating
transparent substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201210359300XA
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English (en)
Chinese (zh)
Inventor
松野靖史
田中秀一
佐野朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN103116208A publication Critical patent/CN103116208A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN201210359300XA 2011-09-27 2012-09-24 滤光器装置、光模块及电子设备 Pending CN103116208A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011211497A JP6119090B2 (ja) 2011-09-27 2011-09-27 光学フィルターデバイス、光学モジュール、及び電子機器
JP2011-211497 2011-09-27

Publications (1)

Publication Number Publication Date
CN103116208A true CN103116208A (zh) 2013-05-22

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ID=47325780

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210359300XA Pending CN103116208A (zh) 2011-09-27 2012-09-24 滤光器装置、光模块及电子设备

Country Status (4)

Country Link
US (1) US9534954B2 (enExample)
EP (1) EP2574971A1 (enExample)
JP (1) JP6119090B2 (enExample)
CN (1) CN103116208A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104656176A (zh) * 2013-11-19 2015-05-27 精工爱普生株式会社 光学滤波器装置、光学模块以及电子设备
CN110365871A (zh) * 2018-03-26 2019-10-22 佳能株式会社 电子模块和成像系统
CN111902081A (zh) * 2018-03-28 2020-11-06 尼普洛株式会社 生物用电极垫、生物信号处理装置以及两者的组合

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JP2014082348A (ja) 2012-10-17 2014-05-08 Seiko Epson Corp 光学素子収納用パッケージ、光学フィルターデバイス、光学モジュール、および電子機器
JP6260080B2 (ja) 2013-01-07 2018-01-17 セイコーエプソン株式会社 波長可変干渉フィルター、波長可変干渉フィルターの製造方法、光学モジュール、及び電子機器
JP2015068887A (ja) * 2013-09-27 2015-04-13 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、電子機器、及びｍｅｍｓデバイス
JP6466851B2 (ja) * 2013-10-31 2019-02-06 浜松ホトニクス株式会社 光検出装置
JP6390117B2 (ja) * 2014-02-26 2018-09-19 セイコーエプソン株式会社 光学モジュール、及び電子機器
JP6115519B2 (ja) 2014-05-27 2017-04-19 セイコーエプソン株式会社 Ｍｅｍｓ駆動装置、電子機器、及びｍｅｍｓ駆動方法
JP6384239B2 (ja) 2014-09-29 2018-09-05 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP6613564B2 (ja) 2014-12-26 2019-12-04 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP6967910B2 (ja) * 2017-08-09 2021-11-17 新光電気工業株式会社 電子部品用パッケージ及び電子部品装置
US20210255376A1 (en) * 2018-05-17 2021-08-19 Unispectral Ltd. Optical device and a method for bonding
CN110929698B (zh) * 2019-12-17 2025-10-10 中国人民公安大学 一种高分辨率压力指纹采集仪
JP7517139B2 (ja) * 2020-12-24 2024-07-17 セイコーエプソン株式会社 波長可変光学フィルター
TW202245240A (zh) * 2021-05-04 2022-11-16 神盾股份有限公司 光學感測裝置
US20240092545A1 (en) * 2022-09-21 2024-03-21 Tae Technologies, Inc. Systems, devices, and methods for transport and storage of air-sensitive materials

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US5777329A (en) * 1995-07-21 1998-07-07 Texas Instruments Incorporated Bolometer array spectrometer
CN1624500A (zh) * 2003-12-03 2005-06-08 精工爱普生株式会社 波长可变滤波器及波长可变滤波器的制造方法
CN1707741A (zh) * 2004-05-21 2005-12-14 株式会社日立制作所 显示装置、显示模件以及显示面板
CN1719302A (zh) * 2004-07-09 2006-01-11 精工爱普生株式会社 可调波长滤波器及其制造方法、以及检测装置
US20070241451A1 (en) * 2006-04-18 2007-10-18 Shinko Electric Industries Co., Ltd. Electronic component device
CN101149341A (zh) * 2006-09-20 2008-03-26 株式会社电装 红外气体感测装置及方法
CN101419327A (zh) * 2007-10-24 2009-04-29 夏普株式会社 壳部件、传感器模块和电子信息设备

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JPH0212218A (ja) 1988-06-30 1990-01-17 Sharp Corp 可変干渉フィルターの製造方法
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US20060131600A1 (en) * 2004-03-05 2006-06-22 Junichi Nakaoka Light transmitting window member, semiconductor package provided with light transmitting window member and method for manufacturing light transmitting window member
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TWM308497U (en) * 2006-10-03 2007-03-21 Lingsen Precision Ind Ltd Microelectromechanical module package structure with reduced noise interference
JP2009042458A (ja) 2007-08-08 2009-02-26 Toshiba Corp 形状可変鏡装置およびこの形状可変鏡装置を用いた眼底観察装置
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JP5370246B2 (ja) 2009-05-27 2013-12-18 セイコーエプソン株式会社 光フィルター、光フィルター装置、分析機器、および光フィルターの製造方法
JP2011027780A (ja) 2009-07-21 2011-02-10 Denso Corp ファブリペロー干渉計及びその製造方法
US20120154915A1 (en) * 2010-12-21 2012-06-21 Seiko Epson Corporation Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus
JP5909850B2 (ja) 2011-02-15 2016-04-27 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5777329A (en) * 1995-07-21 1998-07-07 Texas Instruments Incorporated Bolometer array spectrometer
CN1624500A (zh) * 2003-12-03 2005-06-08 精工爱普生株式会社 波长可变滤波器及波长可变滤波器的制造方法
CN1707741A (zh) * 2004-05-21 2005-12-14 株式会社日立制作所 显示装置、显示模件以及显示面板
CN1719302A (zh) * 2004-07-09 2006-01-11 精工爱普生株式会社 可调波长滤波器及其制造方法、以及检测装置
US20070241451A1 (en) * 2006-04-18 2007-10-18 Shinko Electric Industries Co., Ltd. Electronic component device
CN101149341A (zh) * 2006-09-20 2008-03-26 株式会社电装 红外气体感测装置及方法
CN101419327A (zh) * 2007-10-24 2009-04-29 夏普株式会社 壳部件、传感器模块和电子信息设备

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104656176A (zh) * 2013-11-19 2015-05-27 精工爱普生株式会社 光学滤波器装置、光学模块以及电子设备
CN104656176B (zh) * 2013-11-19 2019-04-19 精工爱普生株式会社 光学滤波器装置、光学模块以及电子设备
CN110365871A (zh) * 2018-03-26 2019-10-22 佳能株式会社 电子模块和成像系统
CN111902081A (zh) * 2018-03-28 2020-11-06 尼普洛株式会社 生物用电极垫、生物信号处理装置以及两者的组合

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US9534954B2 (en) 2017-01-03
JP6119090B2 (ja) 2017-04-26
US20130075596A1 (en) 2013-03-28
JP2013072981A (ja) 2013-04-22
EP2574971A1 (en) 2013-04-03

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Application publication date: 20130522

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