CN103090786B - 用于用干涉测量法测量物体的装置和方法 - Google Patents

用于用干涉测量法测量物体的装置和方法 Download PDF

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Publication number
CN103090786B
CN103090786B CN201210434215.5A CN201210434215A CN103090786B CN 103090786 B CN103090786 B CN 103090786B CN 201210434215 A CN201210434215 A CN 201210434215A CN 103090786 B CN103090786 B CN 103090786B
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China
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ray
measurement
detector
measurement ray
object lens
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Chinese (zh)
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CN103090786A (zh
Inventor
马西亚斯·许斯勒
克里斯蒂安·伦贝
亚历山大·德雷本施泰特
罗伯特·科瓦尔施
万贾·奥赫斯
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Polytec GmbH
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Polytec GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN201210434215.5A 2011-11-02 2012-11-02 用于用干涉测量法测量物体的装置和方法 Active CN103090786B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011085599.8 2011-11-02
DE102011085599A DE102011085599B3 (de) 2011-11-02 2011-11-02 Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts

Publications (2)

Publication Number Publication Date
CN103090786A CN103090786A (zh) 2013-05-08
CN103090786B true CN103090786B (zh) 2017-07-18

Family

ID=47137545

Family Applications (1)

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CN201210434215.5A Active CN103090786B (zh) 2011-11-02 2012-11-02 用于用干涉测量法测量物体的装置和方法

Country Status (6)

Country Link
US (1) US10018460B2 (https=)
EP (1) EP2589924B1 (https=)
JP (2) JP2013096997A (https=)
CN (1) CN103090786B (https=)
DE (1) DE102011085599B3 (https=)
SG (1) SG189672A1 (https=)

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US9829373B1 (en) * 2014-09-19 2017-11-28 The United States Of America As Represented By The Secretary Of The Army Apparatus and method for improving detection precision in laser vibrometric studies
DE102015003019A1 (de) 2015-03-06 2016-09-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur optischen Detektion einer Bewegung in einer biologischen Probe mit räumlicher Ausdehnung
DE102018111921B4 (de) 2018-05-17 2023-11-23 Technische Universität Clausthal Kontaktloser optischer Dehnungsmesssensor
CN108548489A (zh) * 2018-05-24 2018-09-18 郑州辰维科技股份有限公司 一种利用光学标志对固面天线进行精度测量的方法
CN108548506A (zh) * 2018-05-24 2018-09-18 郑州辰维科技股份有限公司 一种利用光学标志对高精度平面进行平面度测量的方法
CN111307268B (zh) * 2020-03-11 2021-01-01 北京理工大学 激光共焦/差动共焦振动参数测量方法
JP7571616B2 (ja) * 2021-02-26 2024-10-23 セイコーエプソン株式会社 レーザー干渉計
DE102024131662B3 (de) * 2024-10-30 2025-11-13 Technische Universität Clausthal, Körperschaft des öffentlichen Rechts Vorrichtung und Verfahren zum kontaktlosen Messen einer Dehnungsänderung eines Messobjekts

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US5883714A (en) * 1996-10-07 1999-03-16 Phase Metrics Method and apparatus for detecting defects on a disk using interferometric analysis on reflected light
CN1657947A (zh) * 2004-02-12 2005-08-24 夏普株式会社 光学移动信息检测器和检测系统、电子设备以及编码器
CN101105390A (zh) * 2007-08-08 2008-01-16 北京交通大学 合成波干涉纳米表面三维在线测量系统及方法
CN101275822A (zh) * 2008-05-06 2008-10-01 哈尔滨工业大学 基于移相干涉的二次共焦测量方法与装置
CN102216803A (zh) * 2008-11-17 2011-10-12 法罗技术股份有限公司 测量六个自由度的装置和方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5883714A (en) * 1996-10-07 1999-03-16 Phase Metrics Method and apparatus for detecting defects on a disk using interferometric analysis on reflected light
CN1657947A (zh) * 2004-02-12 2005-08-24 夏普株式会社 光学移动信息检测器和检测系统、电子设备以及编码器
CN101105390A (zh) * 2007-08-08 2008-01-16 北京交通大学 合成波干涉纳米表面三维在线测量系统及方法
CN101275822A (zh) * 2008-05-06 2008-10-01 哈尔滨工业大学 基于移相干涉的二次共焦测量方法与装置
CN102216803A (zh) * 2008-11-17 2011-10-12 法罗技术股份有限公司 测量六个自由度的装置和方法

Also Published As

Publication number Publication date
JP6631978B2 (ja) 2020-01-15
DE102011085599B3 (de) 2012-12-13
EP2589924A1 (de) 2013-05-08
CN103090786A (zh) 2013-05-08
JP2013096997A (ja) 2013-05-20
US10018460B2 (en) 2018-07-10
JP2018119991A (ja) 2018-08-02
US20130107276A1 (en) 2013-05-02
SG189672A1 (en) 2013-05-31
EP2589924B1 (de) 2016-04-20

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