CN103085058B - 洁净机器人 - Google Patents

洁净机器人 Download PDF

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Publication number
CN103085058B
CN103085058B CN201210345238.9A CN201210345238A CN103085058B CN 103085058 B CN103085058 B CN 103085058B CN 201210345238 A CN201210345238 A CN 201210345238A CN 103085058 B CN103085058 B CN 103085058B
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CN
China
Prior art keywords
working shaft
cap
pars contractilis
shaft
abdomen shape
Prior art date
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Active
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CN201210345238.9A
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English (en)
Chinese (zh)
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CN103085058A (zh
Inventor
石塚健次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Motor Co Ltd
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Yamaha Motor Co Ltd
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Publication date
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Publication of CN103085058A publication Critical patent/CN103085058A/zh
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Publication of CN103085058B publication Critical patent/CN103085058B/zh
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CN201210345238.9A 2011-11-07 2012-09-17 洁净机器人 Active CN103085058B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-243330 2011-11-07
JP2011243330A JP5845061B2 (ja) 2011-11-07 2011-11-07 クリーンロボット

Publications (2)

Publication Number Publication Date
CN103085058A CN103085058A (zh) 2013-05-08
CN103085058B true CN103085058B (zh) 2014-10-29

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ID=48198438

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210345238.9A Active CN103085058B (zh) 2011-11-07 2012-09-17 洁净机器人

Country Status (2)

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JP (1) JP5845061B2 (ja)
CN (1) CN103085058B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104647348B (zh) * 2013-11-20 2017-03-15 科沃斯商用机器人有限公司 分体式机器人
CN106181972A (zh) * 2016-08-30 2016-12-07 浙江琦星电子有限公司 机械手

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6288592A (ja) * 1985-10-16 1987-04-23 株式会社東芝 クリ−ンロボツト
JPH0557666A (ja) * 1991-08-30 1993-03-09 Mitsubishi Electric Corp ロボツト装置
JPH06181176A (ja) * 1992-12-14 1994-06-28 Fuji Electric Co Ltd 半導体製造装置
US5676472A (en) * 1995-07-10 1997-10-14 Smart Machines Rotary labyrinth seal
JPH09102526A (ja) * 1995-10-05 1997-04-15 Kokusai Electric Co Ltd 真空内基板搬送装置
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JP2000195923A (ja) * 1998-12-28 2000-07-14 Hitachi Ltd 搬送用ロボット、搬送装置、真空チャンバ内搬送装置およびプロセス処理装置
JP4524132B2 (ja) * 2004-03-30 2010-08-11 東京エレクトロン株式会社 真空処理装置
JP4732716B2 (ja) * 2004-06-29 2011-07-27 株式会社アルバック 搬送装置及びその制御方法並びに真空処理装置
CN2762970Y (zh) * 2004-11-04 2006-03-08 大连理工大学 一种传输机器人
FR2900591B1 (fr) * 2006-05-02 2008-06-20 Staubli Faverges Sca Structure de robot de type scara, et robot correspondant
JP5168093B2 (ja) * 2008-11-11 2013-03-21 株式会社デンソーウェーブ クリーンロボット
JP5292160B2 (ja) * 2009-03-31 2013-09-18 東京エレクトロン株式会社 ガス流路構造体及び基板処理装置
JP5304601B2 (ja) * 2009-11-10 2013-10-02 株式会社安川電機 アーム機構およびそれを備えた真空ロボット
JP2011101907A (ja) * 2009-11-10 2011-05-26 Seiko Epson Corp スカラーロボット
US8528438B2 (en) * 2009-11-25 2013-09-10 Chung-Shan Institute Of Science And Technology, Armaments Bureau, Ministry Of National Defense Robotic arm for transporting substrate in ultrahigh vacuum

Also Published As

Publication number Publication date
JP2013094953A (ja) 2013-05-20
CN103085058A (zh) 2013-05-08
JP5845061B2 (ja) 2016-01-20

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