CN103085058B - 洁净机器人 - Google Patents
洁净机器人 Download PDFInfo
- Publication number
- CN103085058B CN103085058B CN201210345238.9A CN201210345238A CN103085058B CN 103085058 B CN103085058 B CN 103085058B CN 201210345238 A CN201210345238 A CN 201210345238A CN 103085058 B CN103085058 B CN 103085058B
- Authority
- CN
- China
- Prior art keywords
- working shaft
- cap
- pars contractilis
- shaft
- abdomen shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-243330 | 2011-11-07 | ||
JP2011243330A JP5845061B2 (ja) | 2011-11-07 | 2011-11-07 | クリーンロボット |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103085058A CN103085058A (zh) | 2013-05-08 |
CN103085058B true CN103085058B (zh) | 2014-10-29 |
Family
ID=48198438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210345238.9A Active CN103085058B (zh) | 2011-11-07 | 2012-09-17 | 洁净机器人 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5845061B2 (ja) |
CN (1) | CN103085058B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104647348B (zh) * | 2013-11-20 | 2017-03-15 | 科沃斯商用机器人有限公司 | 分体式机器人 |
CN106181972A (zh) * | 2016-08-30 | 2016-12-07 | 浙江琦星电子有限公司 | 机械手 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6288592A (ja) * | 1985-10-16 | 1987-04-23 | 株式会社東芝 | クリ−ンロボツト |
JPH0557666A (ja) * | 1991-08-30 | 1993-03-09 | Mitsubishi Electric Corp | ロボツト装置 |
JPH06181176A (ja) * | 1992-12-14 | 1994-06-28 | Fuji Electric Co Ltd | 半導体製造装置 |
US5676472A (en) * | 1995-07-10 | 1997-10-14 | Smart Machines | Rotary labyrinth seal |
JPH09102526A (ja) * | 1995-10-05 | 1997-04-15 | Kokusai Electric Co Ltd | 真空内基板搬送装置 |
JPH11198070A (ja) * | 1998-01-12 | 1999-07-27 | Shin Meiwa Ind Co Ltd | 搬送装置 |
JP2000195923A (ja) * | 1998-12-28 | 2000-07-14 | Hitachi Ltd | 搬送用ロボット、搬送装置、真空チャンバ内搬送装置およびプロセス処理装置 |
JP4524132B2 (ja) * | 2004-03-30 | 2010-08-11 | 東京エレクトロン株式会社 | 真空処理装置 |
JP4732716B2 (ja) * | 2004-06-29 | 2011-07-27 | 株式会社アルバック | 搬送装置及びその制御方法並びに真空処理装置 |
CN2762970Y (zh) * | 2004-11-04 | 2006-03-08 | 大连理工大学 | 一种传输机器人 |
FR2900591B1 (fr) * | 2006-05-02 | 2008-06-20 | Staubli Faverges Sca | Structure de robot de type scara, et robot correspondant |
JP5168093B2 (ja) * | 2008-11-11 | 2013-03-21 | 株式会社デンソーウェーブ | クリーンロボット |
JP5292160B2 (ja) * | 2009-03-31 | 2013-09-18 | 東京エレクトロン株式会社 | ガス流路構造体及び基板処理装置 |
JP5304601B2 (ja) * | 2009-11-10 | 2013-10-02 | 株式会社安川電機 | アーム機構およびそれを備えた真空ロボット |
JP2011101907A (ja) * | 2009-11-10 | 2011-05-26 | Seiko Epson Corp | スカラーロボット |
US8528438B2 (en) * | 2009-11-25 | 2013-09-10 | Chung-Shan Institute Of Science And Technology, Armaments Bureau, Ministry Of National Defense | Robotic arm for transporting substrate in ultrahigh vacuum |
-
2011
- 2011-11-07 JP JP2011243330A patent/JP5845061B2/ja active Active
-
2012
- 2012-09-17 CN CN201210345238.9A patent/CN103085058B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2013094953A (ja) | 2013-05-20 |
CN103085058A (zh) | 2013-05-08 |
JP5845061B2 (ja) | 2016-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |