CN103045925A - 一种钼钠合金旋转溅射管形靶材的制备工艺 - Google Patents
一种钼钠合金旋转溅射管形靶材的制备工艺 Download PDFInfo
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- CN103045925A CN103045925A CN2013100332341A CN201310033234A CN103045925A CN 103045925 A CN103045925 A CN 103045925A CN 2013100332341 A CN2013100332341 A CN 2013100332341A CN 201310033234 A CN201310033234 A CN 201310033234A CN 103045925 A CN103045925 A CN 103045925A
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- molybdenum
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- 229910000528 Na alloy Inorganic materials 0.000 title claims abstract description 43
- 238000002360 preparation method Methods 0.000 title claims abstract description 12
- 239000000843 powder Substances 0.000 claims abstract description 59
- QMXBEONRRWKBHZ-UHFFFAOYSA-N [Na][Mo] Chemical compound [Na][Mo] QMXBEONRRWKBHZ-UHFFFAOYSA-N 0.000 claims abstract description 58
- TVXXNOYZHKPKGW-UHFFFAOYSA-N sodium molybdate (anhydrous) Chemical compound [Na+].[Na+].[O-][Mo]([O-])(=O)=O TVXXNOYZHKPKGW-UHFFFAOYSA-N 0.000 claims abstract description 35
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000005245 sintering Methods 0.000 claims abstract description 30
- 238000000137 annealing Methods 0.000 claims abstract description 22
- 238000005551 mechanical alloying Methods 0.000 claims abstract description 10
- 238000005242 forging Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 7
- 230000000704 physical effect Effects 0.000 claims abstract description 6
- 238000005303 weighing Methods 0.000 claims abstract description 6
- 238000010792 warming Methods 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 28
- 238000009413 insulation Methods 0.000 claims description 20
- 238000004544 sputter deposition Methods 0.000 claims description 17
- 238000000498 ball milling Methods 0.000 claims description 15
- 238000005516 engineering process Methods 0.000 claims description 11
- 238000000227 grinding Methods 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- 238000010073 coating (rubber) Methods 0.000 claims description 10
- 238000000748 compression moulding Methods 0.000 claims description 10
- 239000007787 solid Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 6
- 238000000465 moulding Methods 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 238000013022 venting Methods 0.000 claims description 5
- 229910001257 Nb alloy Inorganic materials 0.000 abstract description 5
- 235000015393 sodium molybdate Nutrition 0.000 abstract 5
- 239000011684 sodium molybdate Substances 0.000 abstract 5
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 abstract 2
- 238000009694 cold isostatic pressing Methods 0.000 abstract 1
- 238000011049 filling Methods 0.000 abstract 1
- 238000002156 mixing Methods 0.000 abstract 1
- 238000005204 segregation Methods 0.000 abstract 1
- 230000002194 synthesizing effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- DTSBBUTWIOVIBV-UHFFFAOYSA-N molybdenum niobium Chemical compound [Nb].[Mo] DTSBBUTWIOVIBV-UHFFFAOYSA-N 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000013467 fragmentation Methods 0.000 description 3
- 238000006062 fragmentation reaction Methods 0.000 description 3
- 238000000713 high-energy ball milling Methods 0.000 description 3
- 238000000462 isostatic pressing Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000003746 solid phase reaction Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Powder Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
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CN201310033234.1A CN103045925B (zh) | 2013-01-29 | 2013-01-29 | 一种钼钠合金旋转溅射管形靶材的制备工艺 |
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Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103572229A (zh) * | 2013-11-05 | 2014-02-12 | 研创应用材料(赣州)有限公司 | 一种真空卷对卷镀膜用可挠性基材及薄膜的制备方法 |
CN103898345A (zh) * | 2014-04-29 | 2014-07-02 | 金堆城钼业股份有限公司 | 一种钼钠合金材料的制备方法 |
CN104087903A (zh) * | 2014-07-25 | 2014-10-08 | 安泰科技股份有限公司 | 钼钠管型靶材及其制造方法和钼钠靶材 |
CN104439247A (zh) * | 2014-12-30 | 2015-03-25 | 山东昊轩电子陶瓷材料有限公司 | 钼合金靶材的制备方法 |
CN104561914A (zh) * | 2015-01-22 | 2015-04-29 | 烟台希尔德新材料有限公司 | 一种钼靶材的制备方法 |
CN105112859A (zh) * | 2015-09-17 | 2015-12-02 | 金堆城钼业股份有限公司 | 一种钠掺杂钼平面靶材的制备方法 |
CN106112401A (zh) * | 2016-07-21 | 2016-11-16 | 湖南中铼工业科技有限公司 | 一种钼铼合金管及其制备方法 |
CN106378455A (zh) * | 2015-07-31 | 2017-02-08 | 汉能新材料科技有限公司 | 一种钼合金旋转金属管材及其制备方法 |
CN106513664A (zh) * | 2016-11-11 | 2017-03-22 | 洛阳科威钨钼有限公司 | 一种钼钾合金靶材的制备方法 |
CN107022739A (zh) * | 2017-05-19 | 2017-08-08 | 包头稀土研究院 | 溅射镀膜用钼旋转靶材的制造方法 |
CN108517498A (zh) * | 2018-04-17 | 2018-09-11 | 洛阳科威钨钼有限公司 | 一种用于磁控溅射的一体式管状钼靶材的制备方法 |
CN109014189A (zh) * | 2018-08-27 | 2018-12-18 | 广州市石基耐火材料厂 | 钼电极及其制备方法 |
CN110396667A (zh) * | 2019-07-01 | 2019-11-01 | 洛阳科威钨钼有限公司 | 一种钼钠合金旋转靶的制备方法 |
CN110904374A (zh) * | 2019-12-17 | 2020-03-24 | 株洲硬质合金集团有限公司 | 一种钠掺杂钼合金材料的制备方法 |
CN111876621A (zh) * | 2020-07-30 | 2020-11-03 | 金堆城钼业股份有限公司 | 一种低氧钼铌合金、管材及制备方法 |
CN111889684A (zh) * | 2020-07-17 | 2020-11-06 | 洛阳科威钨钼有限公司 | 一种煤粉直接点火燃烧器的制备方法 |
CN112008073A (zh) * | 2020-08-03 | 2020-12-01 | 洛阳科威钨钼有限公司 | 一种内燃机等离子节油器阴阳极的制备方法 |
CN114121330A (zh) * | 2021-11-11 | 2022-03-01 | 中国核动力研究设计院 | 一种钼锝发生器、制备方法及装置 |
CN115007866A (zh) * | 2022-03-31 | 2022-09-06 | 中钨稀有金属新材料(湖南)有限公司 | 一种低成本磁控溅射用钼管靶的制备方法 |
CN115488333A (zh) * | 2022-09-27 | 2022-12-20 | 宁波江丰电子材料股份有限公司 | 一种钼钛合金管靶及其制备方法与应用 |
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US20090188789A1 (en) * | 2008-01-11 | 2009-07-30 | Climax Engineered Materials, Llc | Sodium/molybdenum powder compacts and methods for producing the same |
CN101613091A (zh) * | 2009-07-27 | 2009-12-30 | 中南大学 | 一种cigs粉末、靶材、薄膜及其制备方法 |
CN101919062A (zh) * | 2008-01-11 | 2010-12-15 | 克莱麦克斯工程材料有限公司 | 钠/钼复合金属粉末、其产品以及光伏电池的生产方法 |
CN102054897A (zh) * | 2009-10-27 | 2011-05-11 | 成都先锋材料有限公司 | 多元素合金单一靶材制备薄膜太阳能电池的方法 |
CN102347398A (zh) * | 2010-07-23 | 2012-02-08 | 思阳公司 | 大规模cigs基薄膜光伏材料的钠溅射掺杂方法 |
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Patent Citations (6)
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US20090188789A1 (en) * | 2008-01-11 | 2009-07-30 | Climax Engineered Materials, Llc | Sodium/molybdenum powder compacts and methods for producing the same |
CN101919062A (zh) * | 2008-01-11 | 2010-12-15 | 克莱麦克斯工程材料有限公司 | 钠/钼复合金属粉末、其产品以及光伏电池的生产方法 |
CN102333606A (zh) * | 2009-02-25 | 2012-01-25 | 克莱麦克斯工程材料有限公司 | 钠/钼粉末压块及其生产方法 |
CN101613091A (zh) * | 2009-07-27 | 2009-12-30 | 中南大学 | 一种cigs粉末、靶材、薄膜及其制备方法 |
CN102054897A (zh) * | 2009-10-27 | 2011-05-11 | 成都先锋材料有限公司 | 多元素合金单一靶材制备薄膜太阳能电池的方法 |
CN102347398A (zh) * | 2010-07-23 | 2012-02-08 | 思阳公司 | 大规模cigs基薄膜光伏材料的钠溅射掺杂方法 |
Cited By (28)
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---|---|---|---|---|
CN103572229A (zh) * | 2013-11-05 | 2014-02-12 | 研创应用材料(赣州)有限公司 | 一种真空卷对卷镀膜用可挠性基材及薄膜的制备方法 |
CN103898345B (zh) * | 2014-04-29 | 2016-04-06 | 金堆城钼业股份有限公司 | 一种钼钠合金材料的制备方法 |
CN103898345A (zh) * | 2014-04-29 | 2014-07-02 | 金堆城钼业股份有限公司 | 一种钼钠合金材料的制备方法 |
CN104087903A (zh) * | 2014-07-25 | 2014-10-08 | 安泰科技股份有限公司 | 钼钠管型靶材及其制造方法和钼钠靶材 |
CN104439247A (zh) * | 2014-12-30 | 2015-03-25 | 山东昊轩电子陶瓷材料有限公司 | 钼合金靶材的制备方法 |
CN104561914A (zh) * | 2015-01-22 | 2015-04-29 | 烟台希尔德新材料有限公司 | 一种钼靶材的制备方法 |
CN106378455A (zh) * | 2015-07-31 | 2017-02-08 | 汉能新材料科技有限公司 | 一种钼合金旋转金属管材及其制备方法 |
CN105112859B (zh) * | 2015-09-17 | 2018-03-30 | 金堆城钼业股份有限公司 | 一种钠掺杂钼平面靶材的制备方法 |
CN105112859A (zh) * | 2015-09-17 | 2015-12-02 | 金堆城钼业股份有限公司 | 一种钠掺杂钼平面靶材的制备方法 |
CN106112401A (zh) * | 2016-07-21 | 2016-11-16 | 湖南中铼工业科技有限公司 | 一种钼铼合金管及其制备方法 |
CN106513664A (zh) * | 2016-11-11 | 2017-03-22 | 洛阳科威钨钼有限公司 | 一种钼钾合金靶材的制备方法 |
CN107022739A (zh) * | 2017-05-19 | 2017-08-08 | 包头稀土研究院 | 溅射镀膜用钼旋转靶材的制造方法 |
CN108517498B (zh) * | 2018-04-17 | 2020-04-21 | 洛阳科威钨钼有限公司 | 一种用于磁控溅射的一体式管状钼靶材的制备方法 |
CN108517498A (zh) * | 2018-04-17 | 2018-09-11 | 洛阳科威钨钼有限公司 | 一种用于磁控溅射的一体式管状钼靶材的制备方法 |
CN109014189A (zh) * | 2018-08-27 | 2018-12-18 | 广州市石基耐火材料厂 | 钼电极及其制备方法 |
CN109014189B (zh) * | 2018-08-27 | 2020-11-06 | 广州市石基耐火材料厂 | 钼电极及其制备方法 |
CN110396667A (zh) * | 2019-07-01 | 2019-11-01 | 洛阳科威钨钼有限公司 | 一种钼钠合金旋转靶的制备方法 |
CN110904374A (zh) * | 2019-12-17 | 2020-03-24 | 株洲硬质合金集团有限公司 | 一种钠掺杂钼合金材料的制备方法 |
CN110904374B (zh) * | 2019-12-17 | 2021-08-10 | 株洲硬质合金集团有限公司 | 一种钠掺杂钼合金材料的制备方法 |
CN111889684A (zh) * | 2020-07-17 | 2020-11-06 | 洛阳科威钨钼有限公司 | 一种煤粉直接点火燃烧器的制备方法 |
CN111889684B (zh) * | 2020-07-17 | 2022-04-08 | 洛阳科威钨钼有限公司 | 一种煤粉直接点火燃烧器的制备方法 |
CN111876621A (zh) * | 2020-07-30 | 2020-11-03 | 金堆城钼业股份有限公司 | 一种低氧钼铌合金、管材及制备方法 |
CN112008073A (zh) * | 2020-08-03 | 2020-12-01 | 洛阳科威钨钼有限公司 | 一种内燃机等离子节油器阴阳极的制备方法 |
CN114121330A (zh) * | 2021-11-11 | 2022-03-01 | 中国核动力研究设计院 | 一种钼锝发生器、制备方法及装置 |
CN114121330B (zh) * | 2021-11-11 | 2024-05-14 | 中国核动力研究设计院 | 一种钼锝发生器、制备方法及装置 |
CN115007866A (zh) * | 2022-03-31 | 2022-09-06 | 中钨稀有金属新材料(湖南)有限公司 | 一种低成本磁控溅射用钼管靶的制备方法 |
CN115488333A (zh) * | 2022-09-27 | 2022-12-20 | 宁波江丰电子材料股份有限公司 | 一种钼钛合金管靶及其制备方法与应用 |
CN115488333B (zh) * | 2022-09-27 | 2023-12-29 | 宁波江丰电子材料股份有限公司 | 一种钼钛合金管靶及其制备方法与应用 |
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Denomination of invention: Preparation technology of a kind of molybdenum sodium alloy rotating sputtering tube target Effective date of registration: 20200803 Granted publication date: 20150128 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: LUOYANG SIFON ELECTRONIC Co.,Ltd. Registration number: Y2020990000866 |
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Address after: 471000 No.2, magou Industrial Park, Wuhan south road, Luoyang City, Henan Province Patentee after: Fenglianke Optoelectronics (Luoyang) Co.,Ltd. Address before: 471000 No.2, magou Industrial Park, Wuhan south road, Luoyang City, Henan Province Patentee before: LUOYANG SIFON ELECTRONIC Co.,Ltd. |
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