CN103021896B - Apparatus for testing and repairing of substrate - Google Patents
Apparatus for testing and repairing of substrate Download PDFInfo
- Publication number
- CN103021896B CN103021896B CN201210348293.3A CN201210348293A CN103021896B CN 103021896 B CN103021896 B CN 103021896B CN 201210348293 A CN201210348293 A CN 201210348293A CN 103021896 B CN103021896 B CN 103021896B
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- China
- Prior art keywords
- substrate
- block
- probe
- detects
- repair apparatus
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2632—Circuits therefor for testing diodes
- G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
Abstract
The present invention discloses an apparatus for testing and repairing of a substrate. According to the apparatus for testing and repairing of the substrate, the substrate is supported and fixed on a detecting unit. A probe of the detecting unit lifts and drops below the substrate and is connected or not connected with an electrode line of the substrate. Namely, the lifting/dropping probe has small dimension and small volume relative to the substrate, and is mounted in the detecting unit. Therefore, the apparatus for testing and repairing of the substrate has an effect of reducing mounting space of the apparatus. Besides, high-price device for moving the substrate is not required, thereby effectively reducing the cost of the apparatus for testing and repairing of the substrate.
Description
Technical field
The present invention relates to a kind of substrate to detect and repair apparatus, is that one is lighted substrate and checks it, to checking that the substrate that the rear defect found is repaired detects and repair apparatus.
Background technology
Flat-panel monitor is roughly divided into liquid crystal display (LCD:Liquid Crystal Display), plasma display (PDP:Plasma Display Panel), light-emitting diode (LED:Light-Emitting Diode) display, Organic Light Emitting Diode (OLED:Organic Light-Emitting Diode) display etc.
Organic light emitting diode display has low voltage drive, and luminous efficiency is high, and angle of visibility is wide, and the advantages such as reaction speed is fast, as flat-panel monitor of new generation, get most of the attention because showing high definition image.
The manufacturing process of organic light emitting diode display comprises detects operation and repairing (Repair) operation.Detecting operation is to the anode line be formed on substrate and cathode line supply power, and check the defect of substrate, repair procedure utilizes laser to repair the rejected region on the substrate detected.
When manufacturing flat-panel monitor, zero defect be had to detect substrate on detection means, find that substrate has defect, need by base plate transfer to repair apparatus, to repair the rejected region of substrate.Then, the substrate after repairing is transferred to checkout gear again, it is rechecked.That is, shortcoming will be equipped with checkout gear and repair apparatus respectively, and be completing substrate detection → repairing → reinspection, also needs to transfer substrate, and then cause production performance low.
For solving the problem and developing a kind of detection and the repair apparatus that realize checkout gear and repair apparatus integration.
But, existing substrate detects and the feature of repair apparatus is, to be connected with cathode line with substrate anode line and be probe (Probe) position of substrate supply power to be fixing, so just need to transfer substrate from the bottom up, and the anode line of substrate and cathode line are connected on probe.That is, the shortcoming of existing substrate detection and repair apparatus needs the installing space suitable with base plate transfer space size.In addition, shortcoming is also, because needing the high-priced apparatus of moving substrate, and then raises the cost.
Summary of the invention
The present invention is studied for solving above-mentioned problems of the prior art, its object is to provide one can reduce installing space, and the substrate that simultaneously can reduce costs again detects and repair apparatus.
For reaching above-mentioned purpose, substrate provided by the invention detects and repair apparatus, and its feature is, comprising: workbench; Detecting unit, is installed on above-mentioned workbench, carries and supports the substrate being formed with anode line and cathode line, also has the multiple probes (Probe) to aforesaid substrate supply power, whether has defect to detect aforesaid substrate; Repair unit, be mounted on the table, can move in X-direction and Y direction, the rejected region of aforesaid substrate is repaired, wherein, above-mentioned probe is positioned at the below of aforesaid substrate, can be elevated, to realize with the above-mentioned anode line of aforesaid substrate and the connection of above-mentioned cathode line or not connect.
Substrate provided by the invention detects and the effect of repair apparatus is: substrate is fixed and is supported on detecting unit, and the probe of detecting unit is elevated below substrate, thus realize with the connection of electrode of substrate line be not connected.That is, the size of the probe of lifting and small volume, probe is placed in again detecting unit inside, detects and the installing space of repair apparatus therefore, it is possible to reduce substrate.
In addition, its effect is also: without the need to using the substrate moving device of high price, can reduce the cost of substrate detection and repair apparatus.
Accompanying drawing explanation
Fig. 1 detects and the stereogram of repair apparatus for the substrate shown in one embodiment of the invention.
Fig. 2 is the amplification stereogram of detecting unit shown in Fig. 1.
Fig. 3 is the state schematic isometric of the movement laterally of pressing plate shown in Fig. 2.
Fig. 4 is the enlarged drawing in " A " portion of Fig. 3.
Fig. 5 is the sectional view of probe shown in Fig. 4.
Reference numeral:
100: workbench 200: detecting unit
261: probe 271: pressing plate
300: repair unit
Embodiment
Below, the enforceable specific embodiment of the present invention is illustrated with reference to the accompanying drawings.Though various embodiment of the present invention is different, do not repel each other.For enabling those skilled in the art fully implement the present invention, will be described in detail these embodiments.Such as, given shape described here, ad hoc structure is relevant to an embodiment with characteristic, and without departing from the spirit and scope of the present invention, also can be embodied by other embodiment.In addition, the position of the discrete structure part separately in disclosed embodiment or configuration, also can change without departing from the spirit and scope of the present invention.Therefore, aftermentioned detailed description the meaning of indefinite, as long as rationally illustrate, scope of the present invention is then only defined in all scopes and additional claim that the content advocated with its claim is equal to.For simplicity, the length of accompanying drawing illustrated embodiment, area, thickness and form can also likely be showed turgidly.
Below, the substrate being described with reference to the accompanying drawings one embodiment of the invention detects and repair apparatus.
Fig. 1 detects and the stereogram of repair apparatus for the substrate shown in one embodiment of the invention.
As shown in Figure 1, substrate of the present invention detects and comprises with repair apparatus: workbench 100, detecting unit 200 and repairing unit 300.
Detecting unit 200 is arranged on above workbench 100, for carrying and support substrate 50.Detecting unit 200 comprises, to substrate 50 supply power and each pixel lighting substrate to detect the probe (Probe) 261 (with reference to Fig. 4) of substrate 50 whether existing defects.At this moment, the side of substrate 50 to be connected to receive with opposite side outer edge is formed with the anode line and cathode line that power supply supplies with probe 261.
Below, the anode line of formation on substrate 50 and cathode line is claimed to be ' electrode wires '.
Repairing unit 300 is arranged on workbench 100, can realize the movement of X-direction and Y direction, repairs point defect (Point Defect) position of substrate 50 or line defect (Line Defect) position.
With reference to Fig. 2 to Fig. 4, detecting unit 200 shown in the present embodiment is described.Fig. 2 is the amplification stereogram of detecting unit shown in Fig. 1.Fig. 3 is the state schematic isometric of the movement laterally of pressing plate shown in Fig. 2.Fig. 4 is the enlarged drawing in " A " portion of Fig. 3.
As shown in the figure, detecting unit 200 comprise be arranged on workbench 100(with reference to Fig. 1) on base 210.The central portion of base 210 is provided with length direction first back-up block 220, first back-up block 220 parallel with X-direction carry and support needs the substrate 50(detecting or repair with reference to Fig. 1) central portion.
First back-up block 220 is provided with the first clamper 231.First clamper 231 is formed by mutually opposing a pair, and one of them is arranged on one end of the first back-up block 220, and another is arranged on the other end of the first back-up block 220.First clamper 231, with close to each other or move away from mode, supports a side and another side of the substrate 50 vertical with X-direction.
First back-up block 220 is provided with motor 233, motor 233 is connected with ball-screw, above-mentioned ball-screw is provided with the first clamper 231.Therefore, when motor 233 drives above-mentioned ball-screw positive and negative rotation, the first clamper 231 also can do straight line back and forth movement with ball-screw.
Base 210 is provided with a pair second back-up blocks 240.Second back-up block 240 is arranged on the side of the first back-up block 240 and base 210 position of opposite side respectively across the first back-up block 220.That is, be as the criterion with the first back-up block 220, one of them second back-up block 240 is arranged in Y-axis positive direction, and another second back-up block 240 is arranged in Y-axis negative direction.
While the length direction of the second back-up block 240 and X-direction keeping parallelism, with the first back-up block 220 also keeping parallelism.Second back-up block 240 can move along Y direction, with close to each other and away from form move, carry and support side and the opposite side outer edge of the substrate 50 vertical with Y direction.
Second back-up block 240 is separately mounted on base plate 243, base 210 is separately installed with the supporting guide 245 of support baseboard 243.In addition, base plate 243 is connected by LM guide rail etc. with supporting guide 245, and base plate 243 does rectilinear motion with supporting guide 245.Like this, the second back-up block 240 with close to each other or away from mode, namely with near or mode away from the first back-up block 220 move.
Second back-up block 240 is separately installed with the second clamper 251.Multiple second clamper 251 installed respectively by second back-up block 240 with another second back-up block 240, and itself and the second back-up block 240 together move a side and another side of supporting the substrate 50 vertical with Y direction.
Distance variable between a pair first clampers 231 of mutual subtend, the distance being separately installed with the second mutually opposing back-up block 240 of a pair of the second clamper 251 is also variable, can be used to support the substrate 50 with various sizes.
When substrate 50 is Organic Light Emitting Diode (OLED:Organic Light-Emitting Diode) displays, only have by above-mentioned electrode wires supply power, substrate 50 whether existing defects could be detected.
For this reason, the detecting unit 200 shown in the present embodiment is provided with the multiple probes 261 be connected with the electrode wires of substrate 50.Probe 261 is positioned at and carries and be supported on the below of the substrate 50 on detecting unit 200, liftable and carry out being connected or not connecting with the above-mentioned electrode wires of substrate.
Probe 261 is separately mounted on the second back-up block 240, synkinematic with the second back-up block 240 1 while, can be elevated towards the second back-up block 240.
Below, the lifting structure of probe 261 is explained.
Second back-up block 240 is separately installed with lifter plate 263, lifter plate 263 is combined with bracing frame 265 removably respectively.At this moment, lifter plate 263 and the second back-up block 240 1 synkinematic while, can be elevated relative to the second bracing frame 240.In addition, bracing frame 265 and lifter plate 263 together move.Lifter plate 263 drives lifting by cylinder (not shown) etc.
Bracing frame 265 is separately installed with multiple probe 261.Therefore, while lifter plate 263 is elevated, bracing frame 265 also can be elevated, and along with the lifting of bracing frame 265, probe 261 also can be elevated, to carry out being connected or not connecting with the above-mentioned electrode wires of substrate 50.By pop one's head in 261 to substrate 50 supply power time, not luminous substrate 50 position or substrate 50 position not showing required color are rejected region.
Substrate 50 supports and is fixed on detecting unit 200, and the probe 261 that size is little with volume ratio substrate 50 is elevated and carries out being connected or not connecting with substrate 50, therefore the substrate shown in the present embodiment detects and repair apparatus, can install in relatively little space.
The climb of probe 261 is suitably controlled by control part (not shown).But, if probe 261 is fixed on bracing frame 265, under the state that probe 261 is connected with substrate 50, when the active force between probe 261 and substrate 50 is in more than setting, probe 261 can be caused impaired.For preventing the generation of this phenomenon, probe 261 is configured to be elevated relative to bracing frame 265.In addition, as shown in Figure 5, bracing frame 265 is provided with the spring support member 267 probe 261 being carried out to resiliency supported to substrate 50 side.
Like this, even if probe 261 has been connected on substrate 50, if probe 261 continues to rise, then probe 261 can decline, thus prevents probe 261 impaired.Probe 261 is connected on substrate 50 firmly by spring support member 267.
Probe 261 being when rising and be connected on substrate 50, if substrate 50 is also because popping one's head in 261 and rise, popping one's head in 261 cannot firmly be connected with substrate 50.For preventing the generation of this phenomenon, the detecting unit 200 shown in the present embodiment is provided with liftable and the pressing plate 271 of downward pressing substrate 50.
Pressing plate 271, synkinematic with the second back-up block 240 1 while, also can be elevated relative to the second back-up block 240, thus presses the outer edge portion side above substrate 50 downwards.
Be specially, base plate 243 be provided with supporting guide 273, supporting guide 273 is provided with horizontal supporting plate 275a, horizontal supporting plate 275a is provided with vertical support plate 275b.In addition, vertical support plate 275b is installed with carries out by cylinder (not shown) pressing plate 271 that is elevated.
Like this, substrate 50 is carried by supporting with mechanical arm etc. and is supported on the first and second back-up blocks 220,240, then the first clamper 231 moves in mode close to each other, and the second back-up block 240 moves in mode close to each other, thus supporting substrate 50.In this state, pressing plate 271 declines and carries out pressing to substrate 50 and supports, then probe 261 rises and is connected to substrate 50.Therefore, probe 261 can be connected on substrate 50 securely.
Horizontal supporting plate 275a independent of the rectilinear motion of the second back-up block 240, and separately along with the first back-up block 220 near or away from direction, i.e. Y direction do rectilinear motion.For this reason, supporting guide 273 and horizontal supporting plate 275a are interconnected by LM guide rail, and horizontal supporting plate 275a can do rectilinear motion along supporting guide 273.Therefore, the rectilinear motion of pressing plate 275a and the second back-up block 240 carries out rectilinear motion independently.
When repairing or replace probe 261, because the bracing frame 265 being provided with probe 261 is removably attached on the second back-up block 240, therefore, as shown in Figure 3, under the state of the outside mobile and horizontal supporting bracket 275a towards the first back-up block 220, i.e. replaceable bracing frame 265.
Base plate 243 is formed the first link stopper 243a and the second link stopper 243b.First link stopper 243a limits the displacement towards the horizontal supporting plate 275a moved near the direction of the first back-up block 220, and the second link stopper 243b limits the displacement of the horizontal supporting plate 275a moved towards the direction away from the first back-up block 220.That is, the first link stopper 243a and the second link stopper 243b limits the displacement doing the pressing plate 271 of rectilinear motion because of horizontal supporting plate 275a.
In addition, the horizontal supporting plate 275a making pressing plate 271 do rectilinear motion forms the linear movement direction along horizontal supporting plate 275a and the protruding 275aa that snaps on the first link stopper 243a or the second link stopper 243b.
In Fig. 5, unaccounted label 261a is the electric wire to probe 261 supply power.
Substrate shown in the present embodiment detects and repair apparatus, and its substrate 50 is supported and is fixed on detecting unit 200, and the probe 261 of detecting unit 200 is elevated in the below of substrate 50 and carries out being connected or not connecting with the above-mentioned electrode wires of substrate 50.That is, the probe 261 of lifting has small size and small size compared with substrate 50, and probe 261 is installed in the inside of detecting unit 200, so can be arranged in narrow space.In addition, without the need to the attachment device of moving substrate 50, and then reduce costs.
In sum, be described in detail in conjunction with most preferred embodiment and accompanying drawing, but not as limit, all technical staff possessing general knowledge in the technical field of the invention, all without departing from the spirit of the scope of the invention, can carry out various distortion and variation.These variation and variation example are all counted as being included within the present invention and right.
Claims (8)
1. substrate detects and a repair apparatus, it is characterized in that, comprising:
Workbench;
Detecting unit, is installed on described workbench, carries and supports the substrate being formed with anode line and cathode line, and has the multiple probes to described substrate supply power, to detect described substrate whether existing defects; And
Repair unit, being arranged on described workbench along the mode of X-direction and Y direction movement, the rejected region of described substrate is repaired;
Described detecting unit comprises:
Base, is arranged on above-mentioned workbench;
First back-up block, the mode being parallel to X-direction with length direction is arranged on described base, for carrying and supporting the central portion side of described substrate;
A pair second back-up blocks, be separately positioned on the side of described first back-up block be as the criterion with the length direction of described first back-up block and the described base position of opposite side across described first back-up block, and length direction is parallel with X-direction, can move along Y direction, and with close to each other or away from mode move, for carrying and supporting the side of described substrate vertical with Y direction and the outer edge of opposite side;
A pair first clampers, are arranged on one end and the other end of described first back-up block, with close to each other or away from mode move, and respectively a side of the described substrate vertical with X-direction and another side to be supported; And
Second clamper, is separately positioned on together to move with described second back-up block on described second back-up block, and supports a side of the described substrate vertical with Y direction and another side respectively;
Described probe is positioned at the below of described substrate, can be elevated, and carries out being connected or not connecting with described anode line and described cathode line.
2. substrate according to claim 1 detects and repair apparatus, it is characterized in that:
Described probe is separately positioned on described second back-up block side, together moves with described second back-up block, and, can be elevated relative to described second back-up block.
3. substrate according to claim 2 detects and repair apparatus, it is characterized in that:
Described second back-up block is respectively arranged with lifter plate, described lifter plate with described second back-up block together movement while, can be elevated relative to described second supporting bracket,
Described lifter plate is removably combined with bracing frame respectively,
Support frame as described above supports respectively and is provided with multiple described probe.
4. substrate according to claim 3 detects and repair apparatus, it is characterized in that:
Described probe is arranged to liftable and is arranged on bracing frame,
Support frame as described above is provided with towards the spring support member of popping one's head in described in the resiliency supported of substrate side.
5. substrate according to claim 3 detects and repair apparatus, it is characterized in that:
Described second back-up block is separately installed with multiple pressing plate, this pressing plate respectively with described second back-up block together movement while, can be elevated relative to the second bracing frame, and the outer edge above of the downward described substrate of pressing.
6. substrate according to claim 5 detects and repair apparatus, it is characterized in that:
Described pressing plate is arranged to, and can move linearly independently with the movement of described second back-up block along Y direction.
7. substrate according to claim 6 detects and repair apparatus, it is characterized in that:
Described base is provided with can along the base plate of Y direction movement,
Described base plate is provided with described second back-up block,
Described base plate is formed the first link stopper and the second link stopper, this first link stopper is for limiting the displacement of the described pressing plate towards the close direction movement of described second back-up block, and this second link stopper is for limiting towards the displacement away from the described pressing plate of the direction movement of described second back-up block.
8. substrate according to claim 7 detects and repair apparatus, it is characterized in that:
Described pressing plate is formed with the moving direction along described pressing plate and the projection snapped on described first link stopper and described second link stopper.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110094889A KR101269443B1 (en) | 2011-09-20 | 2011-09-20 | Apparatus for testing and repairing of substrate |
| KR10-2011-0094889 | 2011-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103021896A CN103021896A (en) | 2013-04-03 |
| CN103021896B true CN103021896B (en) | 2015-06-10 |
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ID=47970356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210348293.3A Active CN103021896B (en) | 2011-09-20 | 2012-09-18 | Apparatus for testing and repairing of substrate |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101269443B1 (en) |
| CN (1) | CN103021896B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107225857B (en) * | 2016-03-25 | 2020-03-24 | 灿美工程股份有限公司 | Pattern line forming apparatus and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1223455A (en) * | 1997-11-28 | 1999-07-21 | 联华电子股份有限公司 | Repairing test method for semiconductor device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0783998A (en) * | 1993-09-10 | 1995-03-31 | Fujitsu Ltd | Semiconductor testing device |
| KR100450194B1 (en) | 2002-05-06 | 2004-09-24 | 삼성에스디아이 주식회사 | Lighting Test and Repair Device for Plasma Display Panel |
| JP4570930B2 (en) * | 2004-10-22 | 2010-10-27 | 株式会社日本マイクロニクス | Electrical connection device used in panel inspection equipment |
| KR100822223B1 (en) * | 2006-08-16 | 2008-04-17 | 참앤씨(주) | Repair Apparatus For Flat Panel Display |
| KR100756438B1 (en) * | 2006-12-20 | 2007-09-07 | 주식회사 영우디에스피 | Probeing apparatus for testing cell of lcd |
-
2011
- 2011-09-20 KR KR1020110094889A patent/KR101269443B1/en active IP Right Grant
-
2012
- 2012-09-18 CN CN201210348293.3A patent/CN103021896B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1223455A (en) * | 1997-11-28 | 1999-07-21 | 联华电子股份有限公司 | Repairing test method for semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101269443B1 (en) | 2013-05-30 |
| KR20130031140A (en) | 2013-03-28 |
| CN103021896A (en) | 2013-04-03 |
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