CN103035850B - Substrate detects and prosthetic device - Google Patents
Substrate detects and prosthetic device Download PDFInfo
- Publication number
- CN103035850B CN103035850B CN201210362108.6A CN201210362108A CN103035850B CN 103035850 B CN103035850 B CN 103035850B CN 201210362108 A CN201210362108 A CN 201210362108A CN 103035850 B CN103035850 B CN 103035850B
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- substrate
- block
- prosthetic device
- probe
- detects
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Environmental & Geological Engineering (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Abstract
The invention discloses a kind of substrate to detect and prosthetic device.The substrate that the present invention relates to detects and prosthetic device, by the detecting unit rotated for bearing support substrate, substrate is erected, thus the distance furthered between substrate and operator, and the sight angle of operator to substrate can be set as comfortable angle.Therefore have and detect the effect that operation is very easy.And base plate supports is fixed on detecting unit, and the probe of detecting unit is connected with the electrode wires of substrate or does not connect while the downside of substrate carries out being elevated.That is, the probe with small size and small size is being elevated, and probe is arranged on the inside of detecting unit, therefore, has the effect that reduction arranges the space of substrate detection and prosthetic device.And, there is no need for the high-priced apparatus of moving substrate, the cost of substrate detection and prosthetic device can be reduced.
Description
Technical field
The present invention relates to a kind of substrate to detect and prosthetic device, light substrate and it is checked, to checking that the rear defect found can be repaired.
Background technology
Flat-panel monitor is roughly divided into liquid crystal display (LCD, Liquid Crystal Display), plasma display (PDP, Plasma Display Panel), light-emitting diode (LED, Light-Emitting Diode) display, Organic Light Emitting Diode (OLED, Organic Light-Emitting Diode) display etc.
Organic light emitting diode display has low voltage drive, and luminous efficiency is high, and visible angle is wide, and the advantages such as fast response time, get most of the attention as the flat-panel monitor of new generation that can show high definition image.
The manufacture process of organic light emitting diode display comprises testing process and repair process.Testing process is the anode line and cathode line supply power that are formed on substrate and checks the defect of substrate, repair process be utilize laser repairing to detect substrate on rejected region.
When manufacturing flat-panel monitor, detecting substrate on detection means has zero defect, finds substrate existing defects, then by base plate transfer to prosthetic device, and the rejected region of substrate to be repaired.Then, the substrate through repairing is transferred to checkout gear again to recheck.That is, be equipped with checkout gear and prosthetic device respectively, so in order to carry out substrate detection → reparation → reinspection, also need to transfer substrate, thus there is the shortcoming reducing productivity ratio.
For solving the problem, develop a kind of detection and the prosthetic device that realize checkout gear and prosthetic device integration.
Existing substrate detects and prosthetic device, when lighting substrate and checking, checks under the state that substrate level is placed by operator.And like this, substrate distance operator is comparatively far away, so operator needs bend over or bow, thus very inconvenient.
In addition, detect at existing substrate and prosthetic device is fixed with probe (Probe), this probe is used for being connected with the anode line of substrate and cathode line and to substrate supply power, being transferred from the bottom up by substrate, and the anode line of substrate and cathode line are connected on probe.That is, by transfer substrate, substrate is connected with probe, so need the larger installing space corresponding to base plate transfer space.In addition, need the high-priced apparatus for moving substrate, and then raise the cost.
Summary of the invention
The present invention proposes for solving above-mentioned problems of the prior art, the object of the invention is to, and the substrate providing a kind of person of being convenient to operation to carry out substrate detection detects and prosthetic device.
Another object of the present invention is to, provide a kind of reduce installing space while the substrate that can reduce costs again detect and prosthetic device.
Technical solution
In order to achieve the above object, the substrate that the present invention relates to detects and prosthetic device, comprising: workbench; Detecting unit, is arranged on described workbench, and bearing support the substrate being formed with anode line and cathode line, and has the multiple probes (Probe) to described substrate supply power, has zero defect for detecting described substrate; Repair unit, being arranged on described workbench, to repair the rejected region of described substrate to the mode of X-direction and Y direction movement; Described detecting unit is provided in can with a side for benchmark makes another side rotate on described workbench, described probe is positioned at the downside of described substrate, and liftably arrange, thus be connected with the described anode line of described substrate and described cathode line or do not connect.The invention has the beneficial effects as follows:
The substrate that the present invention relates to detects and prosthetic device, is erected by substrate by the detecting unit rotated for bearing support substrate, thus the distance between substrate and operator that furthers, the sight angle of operator to substrate can be set as comfortable angle.Therefore, there is the detection effect that operation is very easy.
In addition, substrate is supported and fixed on detecting unit, and the probe of detecting unit is connected with the electrode wires of substrate or does not connect while the downside of substrate carries out being elevated.That is, the probe of small size and small size is being elevated, and probe is arranged on the inside of detecting unit, therefore, it is possible to reduction substrate detects and the installing space of prosthetic device.
In addition, there is no need for the high-priced apparatus of moving substrate, the cost of substrate detection and prosthetic device can be reduced.
Accompanying drawing explanation
Fig. 1 is that the substrate that relates to of one embodiment of the invention detects and the stereogram of prosthetic device.
Fig. 2 is the end view that the detecting unit rotation status shown in Fig. 1 is shown.
Fig. 3 illustrates that the state operator of the detecting unit shown in rotation diagram 1 detects the summary side elevation of substrate.
Fig. 4 is the amplification stereogram of the detecting unit shown in Fig. 1.
Fig. 5 is the stereogram of the state that the movement laterally of the pressing plate shown in Fig. 4 is shown.
Fig. 6 is the enlarged drawing of Fig. 5 " A " part.
Fig. 7 is the sectional view of the probe shown in Fig. 6.
Reference numeral:
100: workbench 200: detecting unit
261: probe 271: pressing plate
300: repair unit 400: darkroom
Embodiment
Below, with reference to accompanying drawing with specific embodiments of the invention can be implemented describe the present invention in detail.In order to enable those skilled in the art to abundant enforcement, describe these embodiments in detail.Be interpreted as, various embodiment of the present invention is different from each other, but does not mutually repel.Such as, the concrete shape of an embodiment described here, concrete structure and characteristic, without departing from the spirit and scope of the present invention, also can be realized by other embodiments.In addition, it will be appreciated that for, the position of the indivedual inscapes separately in disclosed embodiment or configuration, also can change without departing from the spirit and scope of the present invention.Therefore, detailed description described later the meaning of indefinite, explain in precise term, protection scope of the present invention is only as the criterion with the content described in claims, comprises all scopes that the content advocated with its claim is equal to.For simplicity, the length of embodiment shown in the drawings, area, thickness and form is also likely shown turgidly.
Below, the substrate that the embodiment that present invention will be described in detail with reference to the accompanying relates to detects and prosthetic device.
Fig. 1 is that the substrate that relates to of one embodiment of the invention detects and the stereogram of prosthetic device, and Fig. 2 is the end view that the detecting unit rotation status shown in Fig. 1 is shown.
As shown in the figure, the substrate that the present embodiment relates to detects and prosthetic device comprises: workbench 100, detecting unit 200 and reparation unit 300.
Detecting unit 200 is arranged on workbench 100, for bearing support substrate 50.Detecting unit 200 comprises probe (Probe) 261(with reference to Fig. 6), this probe 261, for lighting each pixel of substrate 50 to substrate 50 supply power, has zero defect to detect substrate 50.At this moment, the side of substrate 50 and opposite side outer edge are formed with anode line and cathode line respectively, and this anode line is connected with probe 261 power supply receiving supply with cathode line.
Below, anode line substrate 50 formed and cathode line are called ' electrode wires '.
Repairing unit 300 can be arranged on workbench 100 to X-direction and Y direction, with the point defect of repairing substrate 50 (Point Defect) position or line defect (Line Defect) position movably.
The detecting unit 200 that the present embodiment relates to rotatably is arranged.Describe in detail, a side of detecting unit 200 is supported on workbench 100, and another side with this side for benchmark is rotatably arranged.That is, detecting unit 200 is rotatably arranged relative to workbench 100, and the carrying out forming predetermined angular relative to workbench 100 from level rotates.
Detecting unit 200 rotates, then the substrate 50 of bearing support on detecting unit 200 also together rotates, and forms with workbench 100 angle specified.Like this, can supply power be made and the substrate 50 be lit is holded up with predetermined angular, the position of the person that is located at Proximity operation, thus the sight angle of operator to substrate 50 can be set as comfortable angle, therefore very convenient.
Preferred detection unit 200 passes through motor 202 or cylinder (not shown) etc. with workbench 100 for benchmark rotates about about 80 degree.
Fig. 3 illustrates that the state operator of the detecting unit shown in rotation diagram 1 detects the summary side elevation of substrate, is illustrated this.
As shown in the figure, light substrate 50(with reference to Fig. 1) after, when operator has a zero defect by visual inspection substrate 50, the illumination around substrate 50 more than setting, is then difficult to judge that substrate 50 has zero defect.Therefore, arrange substrate that the present embodiment relates to detect and the illumination of usage space of prosthetic device remains on below setting.
Now, judging that in order to enable operator substrate 50 has zero defect more exactly, being formed with the darkroom 400 as operating space in the side of workbench 100.Like this, the state of another side side direction darkroom 400 sideway swivel of detecting unit 200 can be made to judge that substrate 50 has zero defect, thus operator can judge that substrate 50 has zero defect more exactly.
With reference to Fig. 4 to Fig. 6, the detecting unit 200 that the present embodiment relates to is described.Fig. 4 is the amplification stereogram of the detecting unit shown in Fig. 1, and Fig. 5 is the stereogram of the state that the movement laterally of the pressing plate shown in Fig. 4 is shown, Fig. 6 is the enlarged drawing of Fig. 5 " A " part.
As shown in the figure, detecting unit 200 comprise be arranged on workbench 100(with reference to Fig. 1) on base frame 210.The central portion of base frame 210 is provided with length direction first back-up block 220 parallel with X-direction, and on the first back-up block 220, bearing support substrate 50(for detecting or repairing with reference to Fig. 1) central portion.
First back-up block 220 is provided with the first clamper 231.First clamper 231 is formed by mutually opposing a pair, and one of them is arranged on the end side of the first back-up block 220, and another is arranged on another side of the first back-up block 220.First clamper 231 with close to each other or away from form motion, to support a side and the another side of the substrate 50 vertical with X-direction.
First back-up block 220 is provided with motor 233, motor 233 is connected with ball-screw, described ball-screw is provided with the first clamper 231.Therefore, when described ball-screw carries out positive and negative rotation by motor 233, the first clamper 231 carries out straight line back and forth movement along with ball-screw.
Base frame 210 is provided with a pair second back-up blocks 240.Second back-up block 240 is separately positioned on the side of the first back-up block 240 and base frame 210 position of opposite side across the first back-up block 220.That is, with the first back-up block 220 for benchmark, one of them second back-up block 240 is arranged on+Y direction on, another second back-up block 240 is arranged on-Y direction on.
While the length direction of the second back-up block 240 is also parallel with X-direction, parallel with the first back-up block 220.Second back-up block 240 can be arranged movably along Y direction, with close to each other or away from form move, the side of the substrate 50 that bearing support is vertical with Y direction and opposite side outer edge.
Second back-up block 240 is separately positioned on supporting plate 243, base frame 210 is respectively arranged with the supporting guide 245 supporting supporting plate 243.And supporting plate 243 and supporting guide 245 are interconnected by LM guide rail etc., and supporting plate 243 carries out rectilinear motion along supporting guide 245.Therefore, the second back-up block 240 with close to each other or away from form, namely with near or form away from the first back-up block 220 move.
Second back-up block 240 is respectively arranged with the second clamper 251.On arbitrary second back-up block 240 and another second back-up block 240, multiple second clamper 251 is set, its side and another side of simultaneously supporting with Y direction vertical substrate 50 synkinematic with the second back-up block 240 1 respectively.
Distance variable between a pair mutually opposing first clampers 231, the distance be respectively arranged with between the second mutually opposing back-up block 240 of a pair of the second clamper 251 is also variable, so can support the substrate 50 of various sizes.
When substrate 50 is Organic Light Emitting Diode (OLED, Organic Light-Emitting Diode) display, could detect substrate 50 by described electrode wires supply power has zero defect.
For this reason, the detecting unit 200 that the present embodiment relates to is provided with the multiple probes 261 be connected with the electrode wires of substrate 50.Probe 261 is positioned at the downside of the substrate 50 of detected unit 200 bearing support, liftably arranges, and is connected with the described electrode wires of substrate 50 or does not connect.
Probe 261 is separately positioned on the second back-up block 240, and the while of synkinematic with the second back-up block 240 1, liftably arranges relative to the second back-up block 240.
Below, the lifting structure of probe 261 is explained.
Second back-up block 240 is respectively arranged with lifter plate 263, lifter plate 263 is combined with bracing frame 265 respectively removably.Now, lifter plate 263 and the second back-up block 240 1 synkinematic while, liftably arrange relative to the second back-up block 240.And bracing frame 265 and lifter plate 263 together move.Lifter plate 263 is elevated by cylinder (not shown) etc.
Bracing frame 265 is respectively arranged with multiple probe 261.Therefore, along with lifter plate 263 is elevated, bracing frame 265 is also elevated, and probe 261 along with bracing frame 265 carry out being elevated while be connected with the described electrode wires of substrate 50 or do not connect.During by probe 261 to substrate 50 supply power, the position that substrate 50 is not luminous or do not show and expect that substrate 50 position of color is rejected region.
Substrate 50 is supported and fixed on detecting unit 200, and the probe 261 less with volume than the size of substrate 50 to be connected with substrate 50 while carrying out being elevated or not to connect, therefore the substrate that the present embodiment relates to detects and prosthetic device, can be arranged in relatively little space.
The climb of probe 261 is suitably controlled by control part (not shown).But if when probe 261 is fixed on bracing frame 265, under the state that probe 261 is connected with substrate 50, when the active force between probe 261 and substrate 50 is greater than more than setting, probe 261 may be damaged.In order to avoid this situation occurs, probe 261 is liftably arranged relative to bracing frame 265.In addition, as shown in Figure 7, bracing frame 265 is provided with the spring support member 267 to substrate 50 side resiliency supported probe 261.
Like this, under the state that probe 261 has been connected to substrate 50, if probe 261 continues to rise, then probe 261 declines to downside, thus prevents probe 261 from damaging.Probe 261 is connected with substrate 50 securely by spring support member 267.
When probe 261 rises and is connected with substrate 50, if substrate 50 rises because of probe 261, then probe 261 cannot be connected securely with substrate 50.In order to avoid this situation occurs, the detecting unit 200 that the present embodiment relates to is provided with pressing plate 271, this pressing plate 271 is liftably arranged, and presses substrate 50 downwards.
Pressing plate 271 and the second back-up block 240 1 synkinematic while, liftably arrange relative to the second back-up block 240, thus press the outer edge portion side of substrate 50 upper surface downwards.
Describe in detail, then on supporting plate 243, be provided with supporting guide 273, supporting guide 273 is provided with horizontal supporting plate 275a, horizontal supporting plate 275a is provided with vertical support plate 275b.And, vertical support plate 275b is provided with the pressing plate 271 that cylinder (not shown) etc. carries out being elevated.
Like this, when by the supporting substrates such as robotic arm 50, bearing support is on the first back-up block 220 and the second back-up block 240, the first clamper 231 is with form close to each other motion, and the second back-up block 240 is with form close to each other motion, thus supporting substrate 50.In this state, pressing plate 271 declines and presses supporting substrate 50, then probe 261 rises and is connected with substrate 50.Therefore, probe 261 is connected securely with substrate 50.
Independent of the rectilinear motion of the second back-up block 240, horizontal supporting plate 275a is arranged along close or away from the first back-up block 220 Y direction with carrying out rectilinear motion.For this reason, supporting guide 273 and horizontal supporting plate 275a are interconnected by LM guide rail, and horizontal supporting plate 275a can be arranged along supporting guide 273 with carrying out rectilinear motion.Therefore, pressing plate 271 also carries out rectilinear motion independent of the rectilinear motion of the second back-up block 240.
When maintenance or replacing probe 261, because the bracing frame 265 being provided with probe 261 is combined on the second back-up block 240 removably, therefore, as shown in Figure 5, under the state of the outside mobile and horizontal supporting bracket 275a of the first back-up block 220, change bracing frame 265.
Supporting plate 243 is formed with the first retainer 243a and the second retainer 243b.First retainer 243a limits the move distance to the horizontal supporting plate 275a moved near the direction of the first back-up block 220, and the second retainer 243b limits the move distance of the horizontal supporting plate 275a moved to the direction away from the first back-up block 220.That is, the first retainer 243a and the second retainer 243b restricted passage horizontal supporting plate 275a carries out the move distance of the pressing plate 271 of rectilinear motion.
And the horizontal supporting plate 275a making pressing plate 271 carry out rectilinear motion is formed with the protruding 275aa of locking, the protruding 275aa of this locking is stuck on the first retainer 243a and the second retainer 243b along the linear movement direction of horizontal supporting plate 275a.
The undeclared mark 261a of Fig. 7 is for the electric wire to probe 261 supply power.
The substrate inspection and repair device that the present embodiment relates to, substrate 50 is supported and fixed on detecting unit 200, and the probe 261 of detecting unit 200 is connected with the described electrode wires of substrate 50 or does not connect while the downside of substrate 50 carries out being elevated.That is, be elevated than substrate 50 size and the little probe 261 of volume, and probe 261 is arranged on the inside of detecting unit 200, so, narrow space can be arranged on.And, there is no need for the independent device of moving substrate 50, and then reduce costs.
In sum, the present invention's preferred illustrated embodiment of illustrating is described in detail, but is not limited in this, general technical staff of the technical field of the invention, without departing from the spirit of the scope of the invention, can carry out various distortion and change.These variation and modification are all contained within the protection range of the present invention and claim.
Claims (9)
1. substrate detects and a prosthetic device, it is characterized in that, comprising:
Workbench;
Detecting unit, is arranged on described workbench, and bearing support the substrate being formed with anode line and cathode line, and has the multiple probes to described substrate supply power, has zero defect for detecting described substrate;
Repair unit, being arranged on described workbench, to repair the rejected region of described substrate along the mode of X-direction and Y direction movement;
Described detecting unit comprises:
Base frame, is arranged on described workbench;
First back-up block, length direction and X-direction are arranged on described base frame abreast, and the central portion side of substrate described in bearing support;
A pair second back-up blocks, the side of described first back-up block and the described base frame position of opposite side is separately positioned on across described first back-up block, and length direction is parallel with X-direction, can move along Y direction, and with close to each other or away from form motion, and the side of the bearing support described substrate vertical with Y direction and opposite side outer edge;
A pair first clampers, are arranged on the end side of described first back-up block and another side, with close to each other or away from form motion, and support a side and the another side of the described substrate vertical with X-direction respectively;
Second clamper, is separately positioned on described second back-up block, and the while of synkinematic with described second back-up block one respectively, supports a side and the another side of the described substrate vertical with Y direction respectively,
Described detecting unit is configured to, can with a side for benchmark makes another side rotate on described workbench,
Described probe is positioned at the downside of described substrate, is arranged to liftable, and is connected with the described anode line of described substrate and described cathode line or does not connect.
2. substrate according to claim 1 detects and prosthetic device, it is characterized in that,
Be formed with darkroom in the side of described workbench, the described substrate of to be operator couple with described detecting unit together rotate in this darkroom predetermined angular carries out the working space of visual inspection.
3. substrate according to claim 1 detects and prosthetic device, it is characterized in that,
Described probe is separately positioned on described second back-up block side, and the while of synkinematic with described second back-up block one respectively, can be elevated relative to described second back-up block.
4. substrate according to claim 3 detects and prosthetic device, it is characterized in that,
Described second back-up block is respectively arranged with lifter plate, the while that this lifter plate being synkinematic with described second back-up block one respectively, can be elevated relative to described second supporting bracket,
Described lifter plate is combined with bracing frame respectively removably,
Support frame as described above supports respectively and is provided with multiple described probe.
5. substrate according to claim 4 detects and prosthetic device, it is characterized in that,
Described probe is configured to, and can be elevated relative to support frame as described above,
Support frame as described above is provided with spring support member, and this spring support member is to probe described in described substrate-side resiliency supported.
6. substrate according to claim 4 detects and prosthetic device, it is characterized in that,
Described second back-up block is respectively arranged with multiple pressing plate, the while that this pressing plate being synkinematic with described second back-up block one respectively, can relative to described second back-up block lifting, and the outer edge portion side of the upper surface of the described substrate of pressing downwards.
7. substrate according to claim 6 detects and prosthetic device, it is characterized in that,
Described pressing plate is configured to, and can carry out rectilinear motion respectively independently with the motion of described second back-up block along Y direction.
8. substrate according to claim 7 detects and prosthetic device, it is characterized in that,
Described base frame is provided with the supporting plate that can move along Y direction,
Described supporting plate is provided with described second back-up block,
Described supporting plate is formed the first retainer and the second retainer, the restriction of this first retainer is to the move distance of the described pressing plate moved near the direction of described second back-up block, and this second retainer limits the move distance of the described pressing plate moved to the direction away from described second back-up block.
9. substrate according to claim 8 detects and prosthetic device, it is characterized in that,
Described pressing plate is formed with locking protruding, the protruding direction of motion along described pressing plate of this locking is stuck on described first retainer or described second retainer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110101297A KR101269446B1 (en) | 2011-10-05 | 2011-10-05 | Apparatus for testing and repairing of substrate |
| KR10-2011-0101297 | 2011-10-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103035850A CN103035850A (en) | 2013-04-10 |
| CN103035850B true CN103035850B (en) | 2015-10-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210362108.6A Active CN103035850B (en) | 2011-10-05 | 2012-09-25 | Substrate detects and prosthetic device |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101269446B1 (en) |
| CN (1) | CN103035850B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109001501B (en) * | 2018-06-01 | 2019-10-01 | 英特尔产品（成都）有限公司 | A kind of floating foundation substrate for chip semiconductor test |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101520558A (en) * | 2008-02-29 | 2009-09-02 | 乐金显示有限公司 | Inspection apparatus for liquid crystal display device and inspection method using the same |
| CN102033338A (en) * | 2009-09-24 | 2011-04-27 | 沋博普利斯金股份有限公司 | Vertical liquid crystal display panel detection device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4570930B2 (en) | 2004-10-22 | 2010-10-27 | 株式会社日本マイクロニクス | Electrical connection device used in panel inspection equipment |
| KR200412924Y1 (en) | 2006-01-18 | 2006-04-05 | (주)프로쎈 | Inspection stand opening and closing device for a tester of the liquid crystal display |
| KR100822223B1 (en) * | 2006-08-16 | 2008-04-17 | 참앤씨(주) | Repair Apparatus For Flat Panel Display |
| KR100756438B1 (en) * | 2006-12-20 | 2007-09-07 | 주식회사 영우디에스피 | Probeing apparatus for testing cell of lcd |
-
2011
- 2011-10-05 KR KR1020110101297A patent/KR101269446B1/en active IP Right Grant
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2012
- 2012-09-25 CN CN201210362108.6A patent/CN103035850B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101520558A (en) * | 2008-02-29 | 2009-09-02 | 乐金显示有限公司 | Inspection apparatus for liquid crystal display device and inspection method using the same |
| CN102033338A (en) * | 2009-09-24 | 2011-04-27 | 沋博普利斯金股份有限公司 | Vertical liquid crystal display panel detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101269446B1 (en) | 2013-05-30 |
| KR20130036996A (en) | 2013-04-15 |
| CN103035850A (en) | 2013-04-10 |
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