CN103035850A - Apparatus for testing and repairing substrate - Google Patents
Apparatus for testing and repairing substrate Download PDFInfo
- Publication number
- CN103035850A CN103035850A CN2012103621086A CN201210362108A CN103035850A CN 103035850 A CN103035850 A CN 103035850A CN 2012103621086 A CN2012103621086 A CN 2012103621086A CN 201210362108 A CN201210362108 A CN 201210362108A CN 103035850 A CN103035850 A CN 103035850A
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- Prior art keywords
- substrate
- block
- detects
- prosthetic device
- probe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Environmental & Geological Engineering (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Abstract
The invention discloses an apparatus for testing and repairing a substrate. The invention relates to the apparatus for testing and repairing a substrate, which make the substrate stand up by rotating a detecting unit for bearing a support substrate, thus, the distance between the substrate and an operator becomes closer and the operator's visual angle on the substrate can be set in a comfortable angle. Thus, the detection operation is more convenient. Moreover, the substrate is supported and fixed on the detection unit, and the probe of the detection unit is connected or disconnected with the electrode line of the substrate while elevating at the lower side of the substrate. The probe in small size and volume elevates and is arranged inside the detection unit, therefore, the space for receiving the apparatus for testing and repairing the substrate is reduced. In addition, a high-cost device for a moving substrate can be saved and the cost of the apparatus for testing and repairing the substrate can be reduced.
Description
Technical field
The present invention relates to a kind of substrate and detect and prosthetic device, light substrate and it is checked, can repair the defective that checks rear discovery.
Background technology
Flat-panel monitor roughly is divided into liquid crystal display (LCD, Liquid Crystal Display), plasma display (PDP, Plasma Display Panel), light-emitting diode (LED, Light-Emitting Diode) display, Organic Light Emitting Diode (OLED, Organic Light-Emitting Diode) display etc.
Organic light emitting diode display has low voltage drive, and luminous efficiency is high, and visible angle is wide, and the advantages such as fast response time get most of the attention as the flat-panel monitor of new generation that can show the high definition image.
Comprise testing process and repair process in the manufacture process of organic light emitting diode display.Testing process is the anode line that forms on substrate and cathode line supply power and check the defective of substrate, and repair process is the rejected region that utilizes on the detected substrate of laser repairing.
When making flat-panel monitor, detecting substrate at checkout gear has zero defect, finds that there is defective in substrate, then with base plate transfer to prosthetic device, and the rejected region of substrate repaired.Then, the substrate through repairing being transferred to checkout gear again rechecks.That is, be equipped with respectively checkout gear and prosthetic device, so detect → repair in order to carry out substrate → recheck, also need to transfer substrate, thereby have the shortcoming that reduces productivity ratio.
For addressing the above problem, a kind of realization checkout gear and the integrated detection of prosthetic device and prosthetic device have been developed.
Existing substrate detects and prosthetic device, when lighting substrate and check, checks under the state of operator with the substrate horizontal positioned.And like this, substrate distance operator is far away, thus the operator need to bend over or bow, thereby very inconvenient.
In addition, be fixed with probe (Probe) in existing substrate detection and prosthetic device, this probe is used for being connected with cathode line with the anode line of substrate and to the substrate supply power, substrate being transferred from the bottom up, and the anode line of substrate and cathode line are connected on the probe.That is, by transferring substrate substrate is connected with probe, so need to be corresponding to the larger installing space in base plate transfer space.In addition, need to be used for the high price device of moving substrate, and then raise the cost.
Summary of the invention
The present invention proposes for solving above-mentioned problems of the prior art, the object of the invention is to, and provides a kind of person of being convenient to operation to carry out substrate detection and prosthetic device that substrate detects.
Another object of the present invention is to, provide a kind of substrate that can reduce again cost when reducing installing space to detect and prosthetic device.
Technical solution
In order to achieve the above object, the substrate that the present invention relates to detects and prosthetic device, comprising: workbench; Detecting unit is arranged on the described workbench, and bearing support the substrate that is formed with anode line and cathode line, and has a plurality of probes (Probe) to described substrate supply power, for detection of described substrate zero defect is arranged; Repair the unit, being arranged on the described workbench to the mode that X-direction and Y direction move, to repair the rejected region of described substrate; Described detecting unit is provided in can make take a side as benchmark the another side rotation on the described workbench, described probe is positioned at the downside of described substrate, and liftably arrange, thus with the described anode line of described substrate be connected cathode line and be connected or do not connect.The invention has the beneficial effects as follows:
The substrate that the present invention relates to detects and prosthetic device, is used for the detecting unit of bearing support substrate and substrate is erected by rotation, thereby further distance between substrate and the operator, the operator can be set as comfortable angle to the sight angle of substrate.Therefore, has the detection effect that operation is very easy.
In addition, substrate is supported and fixed on the detecting unit, and the probe of detecting unit is connected or does not connect with the electrode wires of substrate when the downside of substrate carries out lifting.That is, the probe of small size and small size is carrying out lifting, and probe is arranged on the inside of detecting unit, therefore, can reduce that substrate detects and the installing space of prosthetic device.
In addition, do not need the high price device for moving substrate, can reduce the cost of substrate detection and prosthetic device.
Description of drawings
Fig. 1 is that the substrate that relates to of one embodiment of the invention detects and the stereogram of prosthetic device.
Fig. 2 is the end view that detecting unit rotation status shown in Figure 1 is shown.
Fig. 3 illustrates the summary side elevation that operator under the state of rotation detecting unit shown in Figure 1 detects substrate.
Fig. 4 is the amplification stereogram of detecting unit shown in Figure 1.
Fig. 5 illustrates the laterally stereogram of mobile state of pressing plate shown in Figure 4.
Fig. 6 is the enlarged drawing of Fig. 5 " A " part.
Fig. 7 is the sectional view of probe shown in Figure 6.
Reference numeral:
100: workbench 200: detecting unit
261: probe 271: pressing plate
300: repair unit 400: the darkroom
Embodiment
Below, with reference to accompanying drawing with can implement specific embodiments of the invention and describe the present invention in detail.In order to enable those skilled in the art to abundant enforcement, describe these embodiment in detail.Be interpreted as, various embodiment of the present invention differ from one another, but mutually do not repel.For example, concrete shape, concrete structure and the characteristic of an embodiment who puts down in writing here without departing from the spirit and scope of the present invention, also can be realized by other embodiment.In addition, it will be appreciated that for, separately position or the configuration of the indivedual inscapes among the disclosed embodiment also can changed without departing from the spirit and scope of the present invention.Therefore, the meaning of detailed description described later and indefinite explains in precise term, and protection scope of the present invention only is as the criterion with the content that claims are put down in writing, and comprises all scopes that the content advocated with its claim is equal to.For simplicity, also might show turgidly length, area, thickness and the form of embodiment shown in the drawings.
Below, the substrate that the embodiment that present invention will be described in detail with reference to the accompanying relates to detects and prosthetic device.
Fig. 1 is that the substrate that relates to of one embodiment of the invention detects and the stereogram of prosthetic device, and Fig. 2 is the end view that detecting unit rotation status shown in Figure 1 is shown.
As shown in the figure, the substrate that present embodiment relates to detects and prosthetic device comprises: workbench 100, detecting unit 200 and reparation unit 300.
Detecting unit 200 is arranged on the workbench 100, is used for bearing support substrate 50.Detecting unit 200 comprises that probe (Probe) 261(is with reference to Fig. 6), this probe 261 is used for to substrate 50 supply powers and lights each pixel of substrate 50, to detect substrate 50 zero defect is arranged.At this moment, be formed with respectively anode line and cathode line on a side of substrate 50 and opposite side outer edge, this anode line and cathode line and probe 261 are connected to receive the power supply of supply.
Below, the anode line and the cathode line that form at substrate 50 are called ' electrode wires '.
Repairing unit 300 can be arranged on the workbench 100 movably to X-direction and Y direction, with point defect (Point Defect) position or line defect (Line Defect) position of repairing substrate 50.
The detecting unit 200 that present embodiment relates to rotatably arranges.Describe in detail, a side of detecting unit 200 is supported on the workbench 100, and the another side rotatably arranges take this side as benchmark.That is, detecting unit 200 rotatably arranges with respect to workbench 100, forms being rotated of predetermined angular from level with respect to workbench 100.
Detecting unit 200 rotations, then the substrate 50 of bearing support on detecting unit 200 also together rotates, and forms the angle of stipulating with workbench 100.Like this, can make supply power and the substrate 50 that is lit is holded up with predetermined angular, the person's that is located at the Proximity operation position, thus the operator can be set as comfortable angle to the sight angle of substrate 50, therefore very convenient.
Preferred detection unit 200 by motor 202 or cylinder (not shown) etc. take workbench 100 as benchmark rotates about 80 the degree about.
Fig. 3 illustrates the summary side elevation that operator under the state of rotation detecting unit shown in Figure 1 detects substrate, and this is illustrated.
As shown in the figure, light substrate 50(with reference to Fig. 1) after, when the operator had zero defect by visual inspection substrate 50, the illumination around substrate 50 then was difficult to judge that substrate 50 has zero defect more than setting.Therefore, arrange that substrate that present embodiment relates to detects and the illumination of the usage space of prosthetic device remains on below the setting.
At this moment, can judge more exactly that in order to make the operator substrate 50 has zero defect, be formed with darkroom 400 as the operating space in a side of workbench 100.Like this, can make the state of side direction darkroom, another side 400 sideway swivels of detecting unit 200 substrate 50 that judges that zero defect is arranged, thereby the operator can judge more exactly that substrate 50 has zero defect.
With reference to Fig. 4 to Fig. 6 the detecting unit 200 that present embodiment relates to is described.Fig. 4 is the amplification stereogram of detecting unit shown in Figure 1, and Fig. 5 illustrates the laterally stereogram of mobile state of pressing plate shown in Figure 4, and Fig. 6 is the enlarged drawing of Fig. 5 " A " part.
As shown in the figure, detecting unit 200 comprise be arranged on workbench 100(with reference to Fig. 1) on base frame 210.The central portion of base frame 210 is provided with length direction first back-up block 220 parallel with X-direction, and the substrate 50(that bearing support for detection of or repaired on the first back-up block 220 is with reference to Fig. 1) central portion.
Be provided with the first clamper 231 at the first back-up block 220.The first clamper 231 a pair ofly is made of mutually opposed, and one of them is arranged on the distolateral of the first back-up block 220, and it is distolateral that another is arranged on another of the first back-up block 220.The first clamper 231 with mutually near or away from the form motion, to support a side and the another side of the substrate 50 vertical with X-direction.
Be provided with motor 233 on the first back-up block 220, be connected with ball-screw on the motor 233, be provided with the first clamper 231 on the described ball-screw.Therefore, when described ball-screw carried out positive and negative rotation by motor 233, the first clamper 231 was along with ball-screw carries out the straight line back and forth movement.
Be provided with a pair of the second back-up block 240 on the base frame 210.The second back-up block 240 is separately positioned on base frame 210 positions of a side of the first back-up block 240 and opposite side across the first back-up block 220.That is, take the first back-up block 220 as benchmark, one of them second back-up block 240 is arranged on+Y direction on, another second back-up block 240 is arranged on-Y direction on.
When the length direction of the second back-up block 240 is also parallel with X-direction, parallel with the first back-up block 220.The second back-up block 240 can arrange movably along Y direction, with mutually near or away from form move a side of the substrate 50 that bearing support is vertical with Y direction and opposite side outer edge.
The second back-up block 240 is separately positioned on the supporting plate 243, is respectively arranged with the supporting guide 245 that supports supporting plate 243 on the base frame 210.And supporting plate 243 and supporting guide 245 interconnect by LM guide rail etc., and supporting plate 243 carries out rectilinear motion along supporting guide 245.Therefore, the second back-up block 240 with mutually near or away from form, namely with near or move away from the form of the first back-up block 220.
Be respectively arranged with the second clamper 251 on the second back-up block 240.At arbitrary the second back-up block 240 and another second back-up block 240 a plurality of the second clampers 251 are set respectively, itself and the second back-up block 240 1 a synkinematic side and another sides of supporting simultaneously the substrate 50 vertical with Y direction.
Distance variable between mutual opposed a pair of the first clamper 231, a pair of mutually distance between opposed the second back-up block 240 that is respectively arranged with the second clamper 251 is also variable, so can support the substrate 50 of various sizes.
When substrate 50 was Organic Light Emitting Diode (OLED, Organic Light-Emitting Diode) display, could detect substrate 50 by described electrode wires supply power had zero defect.
For this reason, be provided with a plurality of probes 261 that are connected with the electrode wires of substrate 50 on the detecting unit 200 that present embodiment relates to.Probe 261 is positioned at the downside of the substrate 50 of detected unit 200 bearing supports, liftably arranges, and is connected or does not connect with the described electrode wires of substrate 50.
Below, the lifting structure of probe 261 is explained.
Be respectively arranged with lifter plate 263 at the second back-up block 240, on lifter plate 263, be combined with removably respectively bracing frame 265.At this moment, lifter plate 263 and 240 1 synkinematic whiles of the second back-up block, liftably arrange with respect to the second back-up block 240.And bracing frame 265 together moves with lifter plate 263.Lifter plate 263 carries out lifting by cylinder (without diagram) etc.
Be respectively arranged with a plurality of probes 261 on the bracing frame 265.Therefore, along with lifter plate 263 liftings, also lifting of bracing frame 265, and also probe 261 is connected or does not connect with the described electrode wires of substrate 50 when carrying out lifting along with bracing frame 265.By probe 261 during to substrate 50 supply power, the position that substrate 50 is not luminous or substrate 50 positions that do not show the expectation color are rejected region.
The climb of probe 261 is suitably controlled by control part (not shown).But when if probe 261 is fixed on the bracing frame 265, under probe 261 and the state that substrate 50 is connected, when the active force between probe 261 and the substrate 50 was above greater than setting, probe 261 may be damaged.Occur for fear of this situation, probe 261 liftably arranges with respect to bracing frame 265.In addition, as shown in Figure 7, be provided with to the spring support member 267 of substrate 50 side resiliency supported probes 261 at bracing frame 265.
Like this, probe 261 has been connected under the state of substrate 50, if probe 261 continues to rise, then probe 261 descends to downside, thereby prevents that probe 261 from damaging.Probe 261 is connected with substrate 50 securely by spring support member 267.
Probe 261 rises and when being connected with substrate 50, if substrate 50 because of probe 261 risings, then probe 261 can't be connected securely with substrate 50.Occur for fear of this situation, be provided with pressing plate 271 on the detecting unit 200 that present embodiment relates to, this pressing plate 271 liftably arranges, and presses substrate 50 downwards.
Describe in detail, then be provided with supporting guide 273 at supporting plate 243, be provided with horizontal supporting plate 275a at supporting guide 273, be provided with vertical support plate 275b at horizontal supporting plate 275a.And, be provided with the pressing plate 271 that carries out lifting by cylinder (not shown) etc. at vertical support plate 275b.
Like this, when bearing support was on the first back-up block 220 and the second back-up block 240 by the supporting substrates such as robotic arm 50, the first clamper 231 was with mutually close form motion, and the second back-up block 240 is with mutually close form motion, thus supporting substrate 50.In this state, pressing plate 271 descends and presses supporting substrate 50, and then probe 261 rises and is connected with substrate 50.Therefore, probe 261 is connected securely with substrate 50.
Be independent of the rectilinear motion of the second back-up block 240, horizontal supporting plate 275a along near or carry out rectilinear motion ground setting away from the Y direction of the first back-up block 220.For this reason, supporting guide 273 interconnects by the LM guide rail with horizontal supporting plate 275a, and horizontal supporting plate 275a can carry out rectilinear motion ground along supporting guide 273 and arrange.Therefore, pressing plate 271 also is independent of the rectilinear motion of the second back-up block 240 and carries out rectilinear motion.
Maintenance or when changing probe 261, because of the bracing frame 265 that is provided with probe 261 is combined on the second back-up block 240 removably, therefore, as shown in Figure 5, under the state of the outside mobile and horizontal supporting bracket 275a of the first back-up block 220, replacing bracing frame 265 gets final product.
Be formed with the first retainer 243a and the second retainer 243b on the supporting plate 243.The first retainer 243a restriction is to the move distance of the horizontal supporting plate 275a that moves near the direction of the first back-up block 220, and the second retainer 243b restriction is to the move distance of the horizontal supporting plate 275a that moves away from the direction of the first back-up block 220.That is, the first retainer 243a and the second retainer 243b restricted passage horizontal supporting plate 275a carry out the move distance of straight-line pressing plate 271.
And, making pressing plate 271 carry out being formed with on the straight-line horizontal supporting plate 275a to lock protruding 275aa, this locks protruding 275aa and is stuck on the first retainer 243a and the second retainer 243b along the linear movement direction of horizontal supporting plate 275a.
The undeclared mark 261a of Fig. 7 is for the electric wire to probe 261 supply powers.
The substrate inspection and repair device that present embodiment relates to, substrate 50 is supported and fixed on the detecting unit 200, and the probe 261 of detecting unit 200 is connected or does not connect with the described electrode wires of substrate 50 when the downside of substrate 50 carries out lifting.That is, carry out lifting than substrate 50 sizes and the little probe 261 of volume, and probe 261 is arranged on the inside of detecting unit 200, so, can be arranged on narrow space.And, do not need the independent device for moving substrate 50, and then reduce cost.
In sum, the present invention's preferred illustrated embodiment of giving an example is described in detail, but is not limited in this, and the general technical staff of the technical field of the invention in the scope that does not break away from spirit of the present invention, can carry out various distortion and change.These variation and modification all are contained within the protection range of the present invention and claim.
Claims (10)
1. a substrate detects and prosthetic device, it is characterized in that, comprising:
Workbench;
Detecting unit is arranged on the described workbench, and bearing support the substrate that is formed with anode line and cathode line, and has a plurality of probes to described substrate supply power, for detection of described substrate zero defect is arranged;
Repair the unit, being arranged on the described workbench along the mode that X-direction and Y direction move, to repair the rejected region of described substrate;
Described detecting unit is configured to, and can make take a side as benchmark the another side rotation on described workbench,
Described probe is positioned at the downside of described substrate, is arranged to liftable, and with the described anode line of described substrate be connected cathode line and be connected or do not connect.
2. substrate according to claim 1 detects and prosthetic device, it is characterized in that,
Side at described workbench is formed with the darkroom, and this darkroom together rotates the working space that the described substrate of predetermined angular carries out visual inspection for operator couple and described detecting unit.
3. substrate according to claim 1 detects and prosthetic device, it is characterized in that described detecting unit comprises:
Base frame is arranged on the described workbench;
The first back-up block, length direction and X-direction are arranged on the described base frame abreast, and the central portion side of the described substrate of bearing support;
A pair of the second back-up block, be separately positioned on a side of described the first back-up block and the described base frame position of opposite side across described the first back-up block, and length direction is parallel with X-direction, can move along Y direction, and with mutually near or away from the form motion, and a side and the opposite side outer edge of the bearing support described substrate vertical with Y direction;
A pair of the first clamper is arranged on the distolateral and another is distolateral of described the first back-up block, with mutually near or away from the form motion, and support respectively a side and the another side of the described substrate vertical with X-direction;
The second clamper is separately positioned on described the second back-up block, and respectively with the described one synkinematic while of the second back-up block, support respectively a side and the another side of the described substrate vertical with Y direction.
4. substrate according to claim 3 detects and prosthetic device, it is characterized in that,
Described probe is separately positioned on described the second back-up block side, and respectively with the described one synkinematic while of the second back-up block, can carry out lifting with respect to described the second back-up block.
5. substrate according to claim 4 detects and prosthetic device, it is characterized in that,
Be respectively arranged with lifter plate at described the second back-up block, this lifter plate respectively with the described one synkinematic while of the second back-up block, can carry out lifting with respect to described the second supporting bracket,
On described lifter plate, be combined with removably respectively bracing frame,
On support frame as described above, support respectively and be provided with a plurality of described probes.
6. substrate according to claim 5 detects and prosthetic device, it is characterized in that,
Described probe is configured to, can be with respect to the support frame as described above lifting,
Be provided with spring support member at support frame as described above, this spring support member is to the described probe of described substrate-side resiliency supported.
7. substrate according to claim 5 detects and prosthetic device, it is characterized in that,
Be respectively arranged with a plurality of pressing plates at described the second back-up block, this pressing plate respectively with the described one synkinematic while of the second back-up block, can be with respect to described the second back-up block lifting, and the outer edge portion side of pressing the upper surface of described substrate downwards.
8. substrate according to claim 7 detects and prosthetic device, it is characterized in that,
Described pressing plate is configured to, and can carry out rectilinear motion along Y direction respectively independently with the motion of described the second back-up block.
9. substrate according to claim 8 detects and prosthetic device, it is characterized in that,
Be provided with the supporting plate that can move along Y direction at described base frame,
Be provided with described the second back-up block at described supporting plate,
Be formed with the first retainer and the second retainer at described supporting plate, this the first retainer restriction is to the move distance of the described pressing plate that moves near the direction of described the second back-up block, and this second retainer restriction is to the move distance of the described pressing plate that moves away from the direction of described the second back-up block.
10. substrate according to claim 9 detects and prosthetic device, it is characterized in that,
Be formed with the locking projection at described pressing plate, this locking projection is stuck on described the first retainer or described the second retainer along the direction of motion of described pressing plate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110101297A KR101269446B1 (en) | 2011-10-05 | 2011-10-05 | Apparatus for testing and repairing of substrate |
| KR10-2011-0101297 | 2011-10-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103035850A true CN103035850A (en) | 2013-04-10 |
| CN103035850B CN103035850B (en) | 2015-10-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210362108.6A Active CN103035850B (en) | 2011-10-05 | 2012-09-25 | Substrate detects and prosthetic device |
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| Country | Link |
|---|---|
| KR (1) | KR101269446B1 (en) |
| CN (1) | CN103035850B (en) |
Cited By (1)
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| CN109001501A (en) * | 2018-06-01 | 2018-12-14 | 英特尔产品（成都）有限公司 | A kind of floating foundation substrate for chip semiconductor test |
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| KR20080015557A (en) * | 2006-08-16 | 2008-02-20 | 참앤씨(주) | Repair apparatus for flat panel display |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101269446B1 (en) | 2013-05-30 |
| KR20130036996A (en) | 2013-04-15 |
| CN103035850B (en) | 2015-10-07 |
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