CN102983089A - Solar battery unit inspection device - Google Patents
Solar battery unit inspection device Download PDFInfo
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- CN102983089A CN102983089A CN2012101841560A CN201210184156A CN102983089A CN 102983089 A CN102983089 A CN 102983089A CN 2012101841560 A CN2012101841560 A CN 2012101841560A CN 201210184156 A CN201210184156 A CN 201210184156A CN 102983089 A CN102983089 A CN 102983089A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8845—Multiple wavelengths of illumination or detection
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Abstract
The invention relates to a solar battery unit inspection device which can photograph a reflected image and a transmission image at the same time in the same position. The solar battery inspection device has a first irradiating portion which irradiates visible light towards a first surface of a semiconductor wafer, a first photographing portion which receives visible light reflected by the semiconductor wafer to obtain the reflected image of the semiconductor wafer, a second irradiating port has an imaging section (5) receiving visible light reflected portion which irradiates infrared light towards a second surface opposite to the first surface of the semiconductor wafer, a second photographing portion which receives infrared light that penetrates through the semiconductor wafer to obtain the transmission image of the semiconductor wafer, and a determining portion which determines whether a defect exists in the semiconductor wafer based on the reflected image and the transmission image. The abovementioned solar battery unit inspection device is characterized by comprising a beam splitter configured between the first photographing portion and the second photographing portion.
Description
Technical field
The present invention relates to a kind of solar battery cell (cell) testing fixture.
Background technology
In following patent documentation 1, disclosed following inspection method, this inspection method judges whether the inside of following poly semiconductor wafer (wafer) exists defective, and the size of described poly semiconductor wafer is that the square and thickness of 156mm is 180 μ m degree.According to this kind inspection method, lower surface (face) irradiation infrared light (900nm-1100nm) to the poly semiconductor wafer, infrared camera (infrared camera) by the upper surface that is disposed at the poly semiconductor wafer (another face) side, receive the infrared light that sees through the poly semiconductor wafer, thereby obtain the transmission image.Then, based on acquired transmission image, judge whether the inside of poly semiconductor wafer exists defective.Namely, if there is the defective of space (void) or crack (crack) etc. in the inside of poly semiconductor wafer, then the infrared light of irradiation can be because of the defective scattering, and the infrared light intensity of transmission descends, therefore, described defective shows as dim part in the transmission image.
In addition, disclosed following inspection method in following patent documentation 2, this inspection method judges whether the surface of poly semiconductor wafer exists defective.According to this kind inspection method, to the upper surface irradiating laser of poly semiconductor wafer, by the camera of the upper surface side that is disposed at the poly semiconductor wafer, receive the laser that the poly semiconductor wafer reflects, thereby obtain reflected image.Then, based on acquired reflected image, judge whether the surface of poly semiconductor wafer exists defective.That is, if there is defective in the surface of poly semiconductor wafer, then the laser of irradiation can be because of the defective scattering, and the intensity of the laser of reflection descends, and therefore, described defective shows as dim part in reflected image.
Yet, in aforesaid inspection method, not whether the inside of judging the poly semiconductor wafer exists defective, judge exactly whether the surface of poly semiconductor wafer exists defective.
In addition, also disclosed following crack detecting device, this crack detecting device judges positively successively whether the poly semiconductor wafer exists defective (for example with reference to patent documentation 3).Fig. 7 is the summary pie graph that represents an example of crack detecting device in the past.
This kind crack detecting device 201 comprises: wafer conveying unit 203, polysilicon handle wafer (silicon wafer) 202 is carried out conveyance; Metal halide lamp (metal halide lamp) (white light source) 204 is from the oblique top irradiation white light of the polysilicon handle wafer 202 of conveyance; The first charge coupled device (Charge Coupled Device, CCD) line sensor camera (line sensor camera) 205 is taken the upper face that has been shone the polysilicon handle wafer 202 of white light by metal halide lamp 204; Infrared tube 206 is from the irradiated infrared light (more than the 900nm) of polysilicon handle wafer 202; The second ccd line sensor camera 207 is taken the infrared ray that sees through polysilicon handle wafer 202; Main frame (host computer) 209, has image processing section 208, the transmission image (image data) that this image processing section 208 is captured with the second ccd line sensor camera 207 according to the captured reflected image (image data (data)) of the first ccd line sensor camera 205 detects the crack of polysilicon handle wafer 202; And wafer incorporating section 210, according to main frame 209 for whether crannied differentiation, take in crannied polysilicon handle wafer 202 and fissureless polysilicon handle wafer 202 with distinguishing.
Herein, First Line sensor camera 205 and the second line sensor camera 207 are that pixel is about 4000 line sensor camera, and take each pixel as the image data of 8 bits (bit), lightness is processed as the data that are divided into 256 GTGs.
In addition, wafer conveying unit 203 is equipped with a plurality of rollers (roller) 218 with being row, and the both ends of each roller 218 utilize belt (belt) 219 and connected to each other.Since a roller 218 rotations that are connected with conveyance drive division 211, therefore, belt 219 rotations, whereby, other roller 218 also rotates, thereby polysilicon handle wafer 202 is carried out conveyance.Utilize conveyance drive division 211 come pair roller 218 rotation running and stop, controlling with rotary speed.Whereby, polysilicon handle wafer 202 loads on wafer conveying unit 203 from the wafer supply unit, and by from left to towards the right conveyance.
Whereby, according to crack detecting device 201, after the First Line sensor camera 205 that utilizes the leading portion of wafer conveying unit 203 to dispose is taken, the second line sensor camera 207 that utilizes the back segment of wafer conveying unit 203 to dispose is taken, whereby, can judge positively successively whether polysilicon handle wafer 202 exists defective.
And, according to the formation technology of present device and the viewpoint of manufacturing technology, use the semiconductor crystal wafer of silicon metal (comprising polysilicon, monocrystalline silicon) system as cost performance (cost performance) the best of the solar battery cell of substrate, therefore, described solar battery cell is in occupation of ninety percent of the solar battery cell that sale is arranged.Fig. 2 is the stereogram of an example of expression solar battery cell.
In the production line of this kind solar battery cell 2, rely on inspectoral eyes, namely, rely on the visual inspection that is implemented as follows, this inspection judges whether solar battery cell 2 exists defective (crack, end damaged, and come off (aperture (pinhole)) of anti-reflective film, thickness is uneven, the pattern of finger electrode (pattern) (comes off unusually, width is unusual)) etc. (being to utilize visual colour of solution and the sampling check that utilizes determining film thickness device (ellipsometry (ellipsometry)) for the inspection of thickness inequality wherein).
Yet, in the production line of solar battery cell 2, for profit is improved, the minimum production throughput (throughput) that also needs 1500 pieces/hour-3000 pieces/hour scale, and also depend on the quantity of production line formation or testing fixture, but the review time that the inspection of a solar battery cell 2 allows is 1 second-2 seconds, is difficult to utilize visual the inspection.In addition, visually have a following problem points, that is, differentiation level (level) can there are differences according to inspectoral difference, checks careless omission (miss) thereby might exist.
Therefore, in the following inspection method of industrial needs, this inspection method is that the device that will embody the cheapness of cost advantage (cost merit) is directed into production line, with fixing judgement level, within the extremely short time (for example below 2 seconds), the defective of the crack of solar battery cell 2, damaged, aperture and electrode etc. is checked online (inline).
[prior art document]
[patent documentation]
[patent documentation 1] Japanese Patent Laid-Open 2006-351669 communique
[patent documentation 2] Japanese Patent Laid-Open 2002-122552 communique
[patent documentation 3] Japanese Patent Laid-Open 2010-034133 communique
Therefore, consider to use described crack detecting device 201, reflected image and the transmission image of solar battery cell 2 are taken, whereby, judge whether solar battery cell 2 exists defective.Yet, the device (metal halide lamp 204 and the first ccd line sensor camera 205) that reflected image is taken, be two table apparatus that are disposed at different positions from the device that the transmission image is taken (infrared tube 206 and the second ccd line sensor camera 207), therefore, installation cost rises, and can't embody cost advantage.In addition, owing to implement to take at the diverse location of carrying line, therefore, can produce skew etc., so when the computing between image processing section 208 enforcement reflected images and the transmission image, might have problems.
Whereby, to take in order implementing in identical position, to make device that reflected image is taken, become one with the device that the transmission image is taken.Yet because the wavelength of the near infrared region of the light that uses is different from the wavelength of visible region, therefore, not only illumination is different, and the wave-length coverage of the aberration correction of imaging len is also different.Therefore, be difficult to implement to take in identical position.
This shows that above-mentioned existing inspection method obviously still has inconvenience and defective, and demands urgently further being improved in structure and use.Therefore how to found a kind of solar battery cell testing fixture of new structure, also becoming the current industry utmost point needs improved target.
Summary of the invention
The object of the invention is to, overcome the defective that existing inspection method exists, and provide a kind of solar battery cell testing fixture of new structure, technical problem to be solved is to be the described problem that solves, and has studied and has made the device of taking reflected image, become one with the device of taking the transmission image.At first, construct a following photographing optical system, the wave-length coverage (470nm-1100nm) till this photographing optical system can take and cover from visible light to infrared light to reflected image and transmission image.Yet, the optical lens (lens) of the wave-length coverage of covering till from visible light to infrared light can have been realized and also existing the sale technically, but because the market demand is few, therefore, this optical lens is very expensive lens (400,000 yen), and the testing fixture that is difficult to be taken seriously the solar battery cell 2 of cost performance adopts.And in fact, the wave-length coverage till even optical lens covers from visible light to infrared light, the focal position of infrared light is different from the best focal point between the focal position of visible light, when the shooting from the transmission image transits to the shooting of reflected image, must again focus, or must dynamically adjust aperture.In addition, need the time transit to the shooting of reflected image from the shooting of transmission image till, therefore, can't within the extremely short time, (for example below 2 seconds) finish to check.
Therefore find in identical position, simultaneously reflected image and transmission image are taken, used beam splitter (beam splitter) that transmitted light image and reflection image are separated (perhaps wavelength being selected the filter (filter) that reflects).And the high CCD camera (for example 5M (2456 * 2058) pixel (pixel)) of the resolution of inspection usefulness that find to use the crack that needs resolution, aperture, damaged or electrode, with the CCD camera (for example 0.4M (768 * 494) pixel) of the low cheapness of the resolution of the thickness inspection usefulness that does not require resolution.
Another object of the present invention is to, overcome the defective that existing inspection method exists, and a kind of solar battery cell testing fixture of new structure is provided, technical problem to be solved is that it can in identical position, be taken reflected image and transmission image simultaneously.
The object of the invention to solve the technical problems realizes by the following technical solutions.A kind of solar battery cell testing fixture of proposing according to the present invention is comprising the first irradiation section, to the first surface irradiation visible light of the semiconductor crystal wafer of writing board shape; The first shoot part receives the described visible light that described semiconductor crystal wafer reflects, and whereby, obtains the reflected image of described semiconductor crystal wafer; The second irradiation section, to second irradiation infrared light of the described first surface described semiconductor crystal wafer in opposite directions of described semiconductor crystal wafer; The second shoot part receives the described infrared light that sees through described semiconductor crystal wafer, whereby, obtains the transmission image of described semiconductor crystal wafer; And detection unit, based on described reflected image and described transmission image, judge whether described semiconductor crystal wafer exists defective, above-mentioned solar battery cell testing fixture is characterised in that: comprise the beam splitter that is configured between described the first shoot part and described the second shoot part, the light that described beam splitter is set wavelength with deficiency guides to the first shoot part, and the light that will set more than the wavelength guides to the second shoot part.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid solar battery cell testing fixture, the resolution of described the second shoot part is higher than the resolution of described the first shoot part.
Aforesaid solar battery cell testing fixture, described the first irradiation section comprises blue-light source, green light source and red light source, described the second irradiation section comprises infrared light supply.
Aforesaid solar battery cell testing fixture, described semiconductor crystal wafer are solar battery cell, and described detection unit judges whether described semiconductor crystal wafer exists at least a defective that is selected from thickness, crack, electrode inspection, the damaged and blemish.
The object of the invention to solve the technical problems also realizes by the following technical solutions.A kind of solar battery cell testing fixture of proposing according to the present invention is comprising the first irradiation section, to the first surface irradiation visible light of the semiconductor crystal wafer of writing board shape; The first shoot part receives the described visible light that described semiconductor crystal wafer reflects, and whereby, obtains the reflected image of described semiconductor crystal wafer; The second irradiation section, to second irradiation infrared light of the described first surface described semiconductor crystal wafer in opposite directions of described semiconductor crystal wafer; The second shoot part receives the described infrared light that sees through described semiconductor crystal wafer, whereby, obtains the transmission image of described semiconductor crystal wafer; And detection unit, based on described reflected image and described transmission image, judge whether described semiconductor crystal wafer exists defective, above-mentioned solar battery cell testing fixture is characterised in that: the place ahead at the sensitive surface of described the first shoot part disposes the first filter, this first filter makes less than first set the light transmission of wavelength, and the first light of setting more than the wavelength is reflected, the place ahead at the sensitive surface of described the second shoot part disposes the second filter, this second filter makes second to set the above light transmission of wavelength, and the light that less than second is set wavelength reflects.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid solar battery cell testing fixture, it is characterized in that: comprise the half-reflecting mirror that is configured between described the first shoot part and described the second shoot part, described half-reflecting mirror guides to described the first shoot part with the light of a part, and remaining light is guided to described the second shoot part.
Aforesaid solar battery cell testing fixture, described the first setting wavelength is to set the longer wavelength of wavelength than described second.
Aforesaid solar battery cell testing fixture, the resolution of described the second shoot part is higher than the resolution of described the first shoot part.
Aforesaid solar battery cell testing fixture, described the first irradiation section comprises blue-light source, green light source and red light source, described the second irradiation section comprises infrared light supply.
Aforesaid solar battery cell testing fixture, described semiconductor crystal wafer are solar battery cell, and described detection unit judges whether described semiconductor crystal wafer exists at least a defective that is selected from thickness, crack, electrode inspection, the damaged and blemish.
The present invention compared with prior art has obvious advantage and beneficial effect.By above technical scheme as can be known, main technical content of the present invention is as follows: the solar battery cell testing fixture comprises: to the first irradiation section of the first surface irradiation visible light of the semiconductor crystal wafer of writing board shape; Receive the visible light that described semiconductor crystal wafer reflects, whereby, obtain the first shoot part of the reflected image of described semiconductor crystal wafer; To with the second irradiation section of second irradiation infrared light of the first surface described semiconductor crystal wafer in opposite directions of described semiconductor crystal wafer; Receive the infrared light that sees through described semiconductor crystal wafer, whereby, obtain the second shoot part of the transmission image of described semiconductor crystal wafer; And based on described reflected image and transmission image, judge whether described semiconductor crystal wafer exists the detection unit of defective.Above-mentioned solar battery cell testing fixture comprises the beam splitter that is configured between described the first shoot part and described the second shoot part, the light that described beam splitter is set wavelength with deficiency guides to the first shoot part, and the light that will set more than the wavelength guides to the second shoot part.According to solar battery cell testing fixture of the present invention, the first irradiation section is to the first surface irradiation visible light of semiconductor crystal wafer, and the second irradiation section is to second irradiation infrared light of semiconductor crystal wafer.That is, irradiate simultaneously visible light and infrared light.Then, the light that beam splitter is set wavelength with deficiency guides to the first shoot part, and the light that will set more than the wavelength guides to the second shoot part.Whereby, the first shoot part is taken the image of semiconductor crystal wafer and the light of setting more than the wavelength is not detected.On the other hand, the second shoot part is taken the image of semiconductor crystal wafer and the light of deficiency not being set wavelength detects.In addition, solar battery cell testing fixture of the present invention comprises: to the first irradiation section of the first surface irradiation visible light of the semiconductor crystal wafer of writing board shape; Receive the visible light that described semiconductor crystal wafer reflects, whereby, obtain the first shoot part of the reflected image of described semiconductor crystal wafer; To with the second irradiation section of second irradiation infrared light of the first surface described semiconductor crystal wafer in opposite directions of described semiconductor crystal wafer; Receive the infrared light that sees through described semiconductor crystal wafer, whereby, obtain the second shoot part of the transmission image of described semiconductor crystal wafer; And based on described reflected image and transmission image, judge whether described semiconductor crystal wafer exists the detection unit of defective.Above-mentioned solar battery cell testing fixture: the place ahead at the sensitive surface of described the first shoot part disposes the first filter, and this first filter makes less than first set the light transmission of wavelength, and the first light of setting more than the wavelength is reflected; The place ahead at the sensitive surface of described the second shoot part disposes the second filter, and this second filter makes second to set the above light transmission of wavelength, and the light that less than second is set wavelength reflects.
By technique scheme, solar battery cell testing fixture of the present invention has following advantages and beneficial effect at least:
As mentioned above, according to solar battery cell testing fixture of the present invention, in the place ahead of the sensitive surface of each shoot part, dispose respectively wavelength is selected the filter that reflects, therefore, can in identical position, simultaneously reflected image and transmission image be taken.
In addition, in described invention, also can comprise the half-reflecting mirror (half mirror) that is configured between described the first shoot part and described the second shoot part, described half-reflecting mirror guides to the first shoot part with the light of a part, and remaining light is guided to the second shoot part.
In addition, in described invention, described first sets wavelength also can be than the longer wavelength of described the second setting wavelength.
In addition, in described invention, the resolution of described the second shoot part also can be higher than the resolution of described the first shoot part.
According to solar battery cell testing fixture of the present invention, for fracture, aperture or damaged the inspection, utilize high-resolution the second shoot part to take, for thickness is checked, utilize the first shoot part of low resolution to take, therefore, embody cost advantage.
And in described invention, described the first irradiation section also can comprise blue-light source, green light source and red light source, and described the second irradiation section also can comprise infrared light supply.
In addition, in described invention, described semiconductor die fenestra can be solar battery cell, and described detection unit can judge also whether described semiconductor crystal wafer exists at least a defective that is selected from thickness, crack, electrode inspection, the damaged and blemish.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, and for above and other objects of the present invention, feature and advantage can be become apparent, below especially exemplified by preferred embodiment, and the cooperation accompanying drawing, be described in detail as follows.
Description of drawings
Fig. 1 is the summary pie graph of an example of the solar battery cell testing fixture of expression the first execution mode of the present invention.
Fig. 2 is the stereogram of an example of expression solar battery cell.
Fig. 3 (a), Fig. 3 (b) are the tables of an example of the inspection item of expression solar battery cell.
Fig. 4 is the flow chart in order to inspection method is described.
Fig. 5 is the summary pie graph of an example of the solar battery cell testing fixture of expression the second execution mode of the present invention.
Fig. 6 is the flow chart in order to inspection method is described.
Fig. 7 is the summary pie graph of an example of the previous crack detecting device of expression.
1,101: the solar battery cell testing fixture
2: solar battery cell (semiconductor crystal wafer)
4: the first irradiation sections
4a: blue-light source
4b: green light source
4c: red light source
4d: reflection-type diffuser plate
5,105: the first ccd sensor camera/ccd sensor/first shoot parts
6,106: the second irradiation sections
7,107: the second ccd sensor camera/ccd sensor/second shoot parts
10: filming apparatus
11: beam splitter
20,120: computer
21,121:CPU (control part)
21a, 121a: conveyance drive division
21b, 121b: light source drive part
21c, 121c: image obtaining section
21d, 121d: detection unit
111: the second filters
112: the first filters
S101-S103, S103 ', S104, S105, S105 ', S106, S107, S107 ', S108, S 109, S109 ', S110, S 111, S111 ', S112-S115, S201-S203, S203 ', S204, S205, S205 ', S206, S207, S207 ', S208, S209, S209 ', S210-S213: step
X, Y, Z: direction
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, its embodiment of solar battery cell testing fixture, structure, feature and effect thereof to foundation the present invention proposes are described in detail as follows.
The＜the first execution mode 〉
Fig. 1 is that expression the first execution mode of the present invention is the summary pie graph of an example of solar battery cell testing fixture.Moreover, the part identical with above-mentioned crack detecting device 201 enclosed identical symbol.
Solar battery cell testing fixture 1 comprises: the wafer conveying unit (not shown) of solar battery cell 2 being carried out conveyance; Be arranged at the filming apparatus 10 in the way of wafer conveying unit; And the computer 20 that whole solar battery cell testing fixture 1 is controlled.In addition, filming apparatus 10 comprises the framework of case shape, has in this framework inside: from the first irradiation section 4 of the top irradiation light of the solar battery cell 2 of conveyance; The first ccd sensor camera (the first shoot part) 5 that solar battery cell 2 is taken; The second irradiation section 6 from the irradiated light of solar battery cell 2; The second ccd sensor camera (the second shoot part) 7 that solar battery cell 2 is taken; And be configured in beam splitter 11 between the first ccd sensor camera 5 and the second ccd sensor camera 7.
Moreover, will be made as directions X with the right that ground is level, will be level with ground and the direction vertical with directions X is made as Y-direction, will be made as the Z direction perpendicular to the upper direction of directions X and Y-direction.
At first, the conduct among the present invention is checked that the solar battery cell 2 of object describes.Fig. 2 is the stereogram of an example of expression solar battery cell 2.
The size of solar battery cell 2 is that the square and thickness of 156mm is 180 μ m degree, and this solar battery cell 2 is writing board shape roughly, uses the semiconductor crystal wafer of silicon metal (comprising polysilicon, monocrystalline silicon) system as substrate.
Moreover described solar battery cell also can be solar battery cell, the solar battery cell after the cleaning, formation superficial makings (texture) solar battery cell, the solar battery cell after the formation anti-reflective film and the solar battery cell that attaches surperficial finger electrode (finger electrode) afterwards of substrate cut state.Yet, forming backplate (aluminium) afterwards, infrared light can't see through, and therefore, in the case, from the surface irradiation infrared light, uses the image that comes from the backplate reflection.
The inspection item of the solar battery cell 2 that then, solar battery cell testing fixture 1 is checked describes.Fig. 3 is the table of the inspection item of expression solar battery cell.Fig. 3 (a) is that expression is as the table of an example of the inspection item of the solar battery cell 2 of the first execution mode.
(1) thickness
Shine respectively the various light of three kinds of colors (blue (Blue), green (Green), and red (Red)) to the upper surface (first surface, surface) of solar battery cell 2, utilization is disposed at the ccd sensor 5,7 of the upper surface side of solar battery cell 2, receive respectively the various light that the upper surface of solar battery cell 2 reflects, obtain three reflected images, whereby, come thickness is calculated based on the relative intensity ratio (spectrum (spectrum)) of acquired three reflected images.
Moreover, also can obtain in advance blueness (Blue) or the reflected intensity of green (Green) and the correlation of thickness, and make calibration curve (calibration curve), according to the B of each pixel or fixing pixel region, G intensity and with reference to calibration curve, obtain Thickness Variation, and film thickness distribution.
(2) crack
Lower surface (second, the back side) irradiation infrared light (900nm-1100nm) to solar battery cell 2, utilization is disposed at the ccd sensor 7 of the upper surface side of solar battery cell 2, receive the infrared light that sees through solar battery cell 2, obtain the transmission image, whereby, based on acquired transmission image, judge whether the inside of solar battery cell 2 exists the crack.
(3) electrode inspection
Shine the light of red (Red) to the upper surface of solar battery cell 2, utilization is disposed at the ccd sensor 7 of the upper surface side of solar battery cell 2, the light of the redness (Red) that the upper surface of reception solar battery cell 2 reflects, obtain reflected image, whereby, based on acquired reflected image, determine whether to have electrode.
(4) damaged
Lower surface irradiation white light to solar battery cell 2, utilization is disposed at the ccd sensor 5 of the upper surface side of solar battery cell 2, receive the white light by solar battery cell 2, the image that passes through of end is emphasized in acquisition, whereby, by image, judge whether solar battery cell 2 exists damaged based on acquired.
(5) blemish
Shine the light of red (Red) to the upper surface of solar battery cell 2, utilization is disposed at the ccd sensor 7 of the upper surface side of solar battery cell 2, the light of the redness (Red) that the upper surface of reception solar battery cell 2 reflects, obtain reflected image, whereby, based on acquired reflected image, determine whether to have blemish.
Herein, the formation of solar battery cell testing fixture 1 described.
The first irradiation section 4 comprises: blue-light source 4a, the light of ejaculation 470nm; Green light source 4b, the light of ejaculation 525nm; Red light source 4c, the light of ejaculation 660nm; And dome-shaped reflection-type diffuser plate 4d, come the upper surface of solar battery cell 2 is thrown light in order to the luminous intensity of utilizing homogeneous.Moreover blue-light source 4a, green light source 4b and red light source 4c separate and equally spaced are configured on the identical circumference on the XY face.And the first irradiation section 4 is configured in the top of solar battery cell 2.
Whereby, if penetrate the light of 470nm, then after the light reflection type diffuser plate 4d of the 470nm reflection, to-Z direction the upper surface of solar battery cell 2 is shone.In addition, if penetrate the light of 525nm, then after the light reflection type diffuser plate 4d of the 525nm reflection, to-Z direction the upper surface of solar battery cell 2 is shone.And, if penetrate the light of 660nm, then after the light reflection type diffuser plate 4d of the 660nm reflection, to-Z direction the upper surface of solar battery cell 2 is shone.
The second irradiation section 6 comprises: penetrate the near infrared light of 970nm infrared tube, with the white light source that penetrates white light.And the second irradiation section 6 is configured in the bottom of solar battery cell 2.Whereby, if penetrate the infrared light of 970nm, then the infrared light of 970nm shines to the lower surface of Z direction to solar battery cell 2.In addition, if penetrate white light, then white light shines to the lower surface of Z direction to solar battery cell 2.
The first shoot part 5 is CCD cameras of 0.4M (768 * 494) pixel.And the first shoot part 5 is so that the sensitive surface of the first shoot part 5 towards the mode of right-hand (Y-direction), is configured in the top of solar battery cell 2.
The second shoot part 7 is CCD cameras of 5M (2456 * 2058) pixel.And, the second shoot part 7 be so that the sensitive surface of the second shoot part 7 towards the below mode of (Z direction), be configured in the top of solar battery cell 2.
Beam splitter 11 is writing board shape, the light of not enough 600nm (setting wavelength) is reflected, and make the above light transmission of 600nm.And, beam splitter 11 is arranged on the top (Z direction) of solar battery cell 2, and be to dispose in such a way, namely, the light of not enough 600nm is reflected to left (Y-direction), this light is guided to the sensitive surface of the first shoot part 5, and make the above light of 600nm to the transmission of Z direction, this light is guided to the sensitive surface of the second shoot part 7.
According to aforesaid solar battery cell testing fixture 1, if the light of 470nm penetrates from blue-light source 4a to-Z direction, then the upper surface of solar battery cell 2 to the light of the 470nm of Z direction reflection by beam splitter 11 reflections after, received by the sensitive surface of the first shoot part 5.That is, utilize the first shoot part 5 to take the formed reflected image of light of 470nm.In addition, if the light of 525nm penetrates from green light source 4b to-Z direction, then the upper surface of solar battery cell 2 to the light of the 525nm of Z direction reflection by beam splitter 11 reflections after, received by the sensitive surface of the first shoot part 5.That is, utilize the first shoot part 5 to take the formed reflected image of light of 525nm.And, if white light penetrates from the white light source of the second irradiation section 6 to the Z direction, then to the part of Z direction by the white light of solar battery cell 2 by after beam splitter 11 reflections, received by the sensitive surface of the first shoot part 5.That is, utilize the first shoot part 5 to take the formed image that passes through of a part of white light.
In addition, if the light of 660nm penetrates from red light source 4c to-Z direction, then at the upper surface of solar battery cell 2 after the light transmission beam splitter 11 of the 660nm of Z direction reflection, received by the sensitive surface of the second shoot part 7.That is, utilize the second shoot part 7 to take the formed reflected image of light of 660nm.And if the near infrared light of 970nm penetrates from the infrared light supply of the second irradiation section 6 to the Z direction, the near infrared light that then sees through the 970nm of solar battery cell 2 to the Z direction sees through after the beam splitter 11, is received by the sensitive surface of the second shoot part 7.That is, utilize the second shoot part 7 to take the formed transmission image of infrared light of 970nm.
Computer 20 comprises central processing unit (Central Processing Unit, CPU) (control part) 21, and binding has memory (memory) (not shown), monitor (monitor) (not shown) and operating portion (not shown).If blockization ground describes the processing capacity of CPU21, then CPU21 comprises: the conveyance drive division 21a that the running of the rotation of pair roller and stopping to be controlled with rotary speed; The light source drive part 21b that the first irradiation section 4 and the second irradiation section 6 are controlled; The image obtaining section 21c that the first shoot part 5 and the second shoot part 7 are controlled; And based on reflected image and transmission image, judge whether solar battery cell 2 exists the detection unit 21d of defective.
Then, following inspection method is described, this inspection method is to utilize solar battery cell testing fixture 1, successively solar battery cell 2 is taken.Fig. 4 is the flow chart in order to inspection method is described.
At first, in the processing of step (step) S101, number parameter (parameter) N=1 of the number of expression solar battery cell 2.
Then, in the processing of step S102, conveyance drive division 21a is configured in solar battery cell 2 position of the regulation in the filming apparatus 10 from left to towards right (directions X) conveyance solar battery cell 2.Then, conveyance drive division 21a will stop (Stop) signal (the OK signal is finished, taken in solar battery cell setting (set)) and be exported.
Then, in the processing of step S103, light source drive part 21b begin from blue-light source 4a irradiate 470nm light ().Then, in the processing of step S104, image obtaining section 21c utilizes the first shoot part 5 to take the formed reflected image of light of 470nm, in the processing of step S103 ', stops to irradiate the light of 470nm.At this moment, the processing of the processing of implementation step S103-step S103 ' in 0.1 second.
On the other hand, in the processing of the processing of execution in step S103-step S103 ', in the processing of step S105, light source drive part 21b begins to irradiate from red light source 4c the light of 660nm.Then, in the processing of step S106, image obtaining section 21c utilizes the second shoot part 7 to take the formed reflected image of light of 660nm, in the processing of step S105 ', stops to irradiate the light of 660nm.At this moment, the processing of the processing of implementation step S105-step S105 ' in 0.1 second.That is, in 0.1 second, obtain 470nm the formed reflected image of light, with these two images of the formed reflected image of light of 660nm.
Then, in the processing of step S107, light source drive part 21b begins to irradiate from green light source 4b the light of 525nm.Then, in the processing of step S108, image obtaining section 21c utilizes the first shoot part 5 to take the formed reflected image of light of 525nm, in the processing of step S107 ', stops to irradiate the light of 525nm.At this moment, the processing of the processing of implementation step S107-step S107 ' in 0.1 second.
On the other hand, in the processing of the processing of execution in step S107-step S107 ', in the processing of step S109, light source drive part 21b begins to irradiate from the infrared light supply of the second irradiation section 6 infrared light of 970nm.Then, in the processing of step S110, image obtaining section 21c utilizes the second shoot part 7 to take the formed transmission image of infrared light of 970nm, in the processing of step S109 ', stops to irradiate the light of 970nm.At this moment, the processing of the processing of implementation step S109-step S109 ' in 0.1 second.That is, in 0.1 second, obtain 525nm the formed reflected image of light, with these two images of the formed transmission image of infrared light of 970nm.
Then, in the processing of step S111, light source drive part 21b begins to irradiate white light from the white light source of the second irradiation section 6.Then, in the processing of step S112, it is formed by image (transmission image) that image obtaining section 21c utilizes the first shoot part 5 to take white light, in the processing of step S111 ', the irradiation of white light stopped.At this moment, the processing of the processing of implementation step S111-step S111 ' in 0.1 second.Then, in that to have taken white light formed by after the image, image obtaining section 21c will take settling signal and be exported.
Then, in the processing of step S113, judge whether N equals Nmax.When being judged to be N and being not equal to Nmax, in the processing of step S114, be made as N=N+1.Then, in the processing of step S115, conveyance drive division 21a is from left to the solar battery cell 2 towards right (directions X) conveyance N-1, the position of the solar battery cell 2 of this N-1 regulation in the filming apparatus 10 removed, and be back to the processing of step S102.
On the other hand, when being judged to be N=Nmax, process ends.
As mentioned above, according to solar battery cell testing fixture 1, comprise beam splitter 11, this beam splitter 11 guides to the first shoot part 5 with the light of not enough 600nm, and the light more than the 600nm is guided to the second shoot part 7, therefore, can be in identical position, simultaneously reflected image and transmission image are taken, and can in 0.3 second, a solar battery cell 2 be checked.In addition, for fracture, aperture or damaged the inspection, utilize high-resolution the second shoot part 7 to take, for thickness is checked, utilize the first shoot part 5 of low resolution to take, therefore, reflect cost advantage.
The＜the second execution mode 〉
Fig. 5 is that expression the second execution mode of the present invention is the summary pie graph of an example of solar battery cell testing fixture.Moreover, the part identical with described solar battery cell testing fixture 1 enclosed identical symbol.
Solar battery cell testing fixture 101 comprises: the wafer conveying unit (not shown) of solar battery cell 2 being carried out conveyance; Be arranged at the filming apparatus 10 in the way of wafer conveying unit; And the computer 120 that whole solar battery cell testing fixture 101 is controlled.In addition, filming apparatus 10 comprises the framework of case shape, has in this framework inside: from the first irradiation section 4 of the top irradiation light of the solar battery cell 2 of conveyance; The first ccd sensor camera 105 that solar battery cell 2 is taken; The second irradiation section 106 from the irradiated light of solar battery cell 2; The second ccd sensor camera 107 that solar battery cell 2 is taken; Be configured in first filter 112 in the place ahead of the sensitive surface of the first ccd sensor camera 105; And second filter 111 in the place ahead that is configured in the sensitive surface of the second ccd sensor camera 107.
The inspection item of the solar battery cell 2 that then, solar battery cell testing fixture 101 is checked describes.Fig. 3 (b) is the table of an example of the inspection item of expression solar battery cell 2.
(1 ') thickness
Shine respectively the various light of three kinds of colors (blue (Blue), green (Green), and red (Red)) to the upper surface (first surface, surface) of solar battery cell 2, utilization is disposed at the ccd sensor 105 of the upper surface side of solar battery cell 2, receive respectively the various light that the upper surface of solar battery cell 2 reflects, obtain three reflected images, whereby, come thickness is calculated based on the relative intensity ratio (spectrum) of acquired three reflected images.
(2) crack
Lower surface (second, the back side) irradiation infrared light (900nm-1100nm) to solar battery cell 2, utilization is disposed at the ccd sensor 107 of the upper surface side of solar battery cell 2, receive the infrared light that sees through solar battery cell 2, obtain the transmission image, whereby, based on acquired transmission image, judge whether the inside of solar battery cell 2 exists the crack.
(3) electrode inspection
Shine the light of red (Red) to the upper surface of solar battery cell 2, utilization is disposed at the ccd sensor 107 of the upper surface side of solar battery cell 2, the light of the redness (Red) that the upper surface of reception solar battery cell 2 reflects, obtain reflected image, whereby, based on acquired reflected image, determine whether to have electrode.
(4 ') are damaged
Shine the light of red (Red) to the upper surface of solar battery cell 2, utilization is disposed at the ccd sensor 107 of the upper surface side of solar battery cell 2, the light of the redness (Red) that the upper surface of reception solar battery cell 2 reflects, obtain reflected image, whereby, based on acquired reflected image, judge whether solar battery cell 2 exists damaged.
(5) blemish
Shine the light of red (Red) to the upper surface of solar battery cell 2, utilization is disposed at the ccd sensor 107 of the upper surface side of solar battery cell 2, the light of the redness (Red) that the upper surface of reception solar battery cell 2 reflects, obtain reflected image, whereby, based on acquired reflected image, determine whether to have blemish.
Herein, the formation of solar battery cell testing fixture 101 described.
The second irradiation section 106 comprises infrared tube, and this infrared tube penetrates the infrared light of 970nm.And the second irradiation section 106 is configured in the bottom of solar battery cell 2.Whereby, if penetrate the infrared light of 970nm, then the infrared light of 970nm shines to the lower surface of Z direction to solar battery cell 2.
The first shoot part 105 is CCD cameras of 0.4M (768 * 494) pixel.And, the first shoot part 105 be so that the sensitive surface of the first shoot part 105 towards the below mode of (Z direction), be configured in the top of solar battery cell 2.In addition, dispose the first filter 112 in the place ahead (Z direction) of the sensitive surface of the first shoot part 105, the above light of 112 couples of 700nm of this first filter (first sets wavelength) reflects, and makes the light transmission of not enough 700nm.
The second shoot part 107 is CCD cameras of 5M (2456 * 2058) pixel.And, the second shoot part 107 be so that the sensitive surface of the second shoot part 107 towards the below mode of (Z direction), be configured in the top of solar battery cell 2.In addition, dispose the second filter 111 in the place ahead (Z direction) of the sensitive surface of the second shoot part 107, the light of 111 couples of not enough 600nm of this second filter (second sets wavelength) reflects, and makes the above light transmission of 600nm.Moreover the first shoot part 105 and the second shoot part 107 are adjacent to configuration.
According to aforesaid solar battery cell testing fixture 101, if the light of 660nm penetrates from red light source 4c to-Z direction, then at the upper surface of solar battery cell 2 after light transmission the first filter 112 and the second filter 111 of the 660nm of Z direction reflection, by the sensitive surface reception of sensitive surface and second shoot part 107 of the first shoot part 105.That is, utilize the first shoot part 105 and the second shoot part 107 to take the formed reflected image of light of 660nm.
In addition, if the light of 470nm penetrates from blue-light source 4a to-Z direction, then at the upper surface of solar battery cell 2 after light transmission the first filter 112 of the 470nm of Z direction reflection, received by the sensitive surface of the first shoot part 105.That is, utilize the first shoot part 105 to take the formed reflected image of light of 470nm.And, if the light of 525nm penetrates from green light source 4b to-Z direction, then at the upper surface of solar battery cell 2 after light transmission the first filter 112 of the 525nm of Z direction reflection, received by the sensitive surface of the first shoot part 105.That is, utilize the first shoot part 105 to take the formed reflected image of light of 525nm.
And if the near infrared light that makes 970nm penetrates to the Z direction from the infrared light supply of the second irradiation section 106, the near infrared light that then sees through the 970nm of solar battery cell 2 to the Z direction sees through after the second filter 111, is received by the sensitive surface of the second shoot part 107.That is, utilize the second shoot part 107 to take the formed transmission image of infrared light of 970nm.
Then, following inspection method is described, this inspection method is to utilize solar battery cell testing fixture 101, successively solar battery cell 2 is taken.Fig. 6 is the flow chart in order to inspection method is described.
At first, in the processing of step S201, the number Parameter N of the number of expression solar battery cell 2=1.
Then, in the processing of step S202, conveyance drive division 121a is configured in solar battery cell 2 position of the regulation in the filming apparatus 10 from left to towards right (directions X) conveyance solar battery cell 2.Then, conveyance drive division 121a will stop (Stop) signal (the OK signal is finished, taken in solar battery cell setting (set)) and be exported.
Then, in the processing of step S203, light source drive part 121b begins to irradiate from red light source 4c the light of 660nm.Then, in the processing of step S204, image obtaining section 121c utilizes the first shoot part 105 and the second shoot part 107 to take the formed reflected image of light of 660nm, in the processing of step S203 ', the irradiation of 660nm is stopped.At this moment, the processing of the processing of implementation step S203-step S203 ' in 0.1 second.That is, in 0.1 second, utilize the first shoot part 105 and the second shoot part 107, obtain the formed reflected image of light of 660nm.Moreover shown in Fig. 3 (b), the image of obtaining for red light source 4c and by the first shoot part 105 is used for the thickness inspection, and the image of being obtained by the second shoot part 107 is used for electrode inspection, damaged, and the inspection of blemish.
Then, in the processing of step S205, light source drive part 121b begins to irradiate from blue-light source 4a the light of 470nm.Then, in the processing of step S206, image obtaining section 121c utilizes the first shoot part 105 to take the formed reflected image of light of 470nm, in the processing of step S205 ', stops to irradiate the light of 470nm.At this moment, the processing of the processing of implementation step S205-step S205 ' in 0.1 second.
Then, in the processing of step S207, light source drive part 121b begins to irradiate from green light source 4b the light of 525nm.Then, in the processing of step S208, image obtaining section 121c utilizes the first shoot part 105 to take the formed reflected image of light of 525nm, in the processing of step S207 ', stops to irradiate the light of 525nm.At this moment, the processing of the processing of implementation step S207-step S207 ' in 0.1 second.
On the other hand, in the processing of execution in step S205-step S208, in the processing of step S209, light source drive part 121b begins to irradiate from infrared light supply 206 infrared light of 970nm.Then, in the processing of step S210, image obtaining section 121c utilizes the second shoot part 107 to take the formed transmission image of infrared light of 970nm, in the processing of step S209 ', stops to irradiate the light of 970nm.At this moment, the processing of the processing of implementation step S209-step S209 ' in 0.2 second.That is, in 0.2 second, obtain the formed reflected image of light of 470nm, the formed reflected image of light of 525nm and these three images of the formed transmission image of infrared light of 970nm.Then, after the formed transmission image of the infrared light of having taken 970nm, image obtaining section 121c will take settling signal and be exported.
Then, in the processing of step S211, judge whether N equals Nmax.When being judged to be N and being not equal to Nmax, in the processing of step S212, be made as N=N+1.Then, in the processing of step S213, conveyance drive division 121a is from left to the solar battery cell 2 towards right (directions X) conveyance N-1, the position of the solar battery cell 2 of this N-1 regulation in the filming apparatus 10 removed, and be back to the processing of step S202.
On the other hand, when being judged to be N=Nmax, process ends.
As mentioned above, according to solar battery cell testing fixture 101, the place ahead at the sensitive surface of the first shoot part 105 disposes the first filter 112, the above light of 112 couples of 700nm of this first filter reflects, and make the light transmission of not enough 700nm, the place ahead at the sensitive surface of the second shoot part 107 disposes the second filter 111, the light of 111 couples of not enough 600nm of this second filter reflects, and make the above light transmission of 600nm, therefore, can be in identical position, simultaneously reflected image and transmission image are taken, the shooting time of the required infrared transmission image of sensitivity is prolonged, and can in 0.3 second, a solar battery cell 2 be checked.In addition, for fracture, aperture or damaged the inspection, utilize high-resolution the second shoot part 107 to take, for thickness is checked, utilize the first shoot part 105 of low resolution to take, therefore, reflect cost advantage.
＜other execution modes 〉
(1) in aforesaid solar battery cell testing fixture 1, comprises the first shoot part 5 and the second shoot part 7 these two shoot parts, but also can comprise three shoot parts.
(2) in aforesaid solar battery cell testing fixture 1, the first shoot part 5 grades are the CCD camera of 0.4M (768 * 494) pixel, but shoot part also can be ccd line sensor, complementary metal oxide semiconductors (CMOS) (Complementary Metal Oxide Semiconductor, CMOS) camera or color camera.
(3) in aforesaid solar battery cell testing fixture 1, the first irradiation section 4 comprises: the green light source 4b of the light of the blue-light source 4a of the light of ejaculation 470nm, ejaculation 525nm and the red light source 4c that penetrates the light of 660nm, but also can comprise: the infrared light supply of the red light source of the light of the blue-light source of the light of ejaculation 470nm, the green light source that penetrates the light of 525nm, ejaculation 660nm and the infrared light of ejaculation 970nm.
(4) in aforesaid solar battery cell testing fixture 101, the first shoot part 105 and the second shoot part 107 are adjacent to configuration, but the sensitive surface that the first shoot part 105 also can make first count take the photograph section 105 disposes towards the mode of right-hand (Y-direction), the mode of (Z direction) disposes the second shoot part 107 so that the sensitive surface of the second shoot part 107 is towards the below, and the light that half-reflecting mirror is configured to 50% reflects to left (Y-direction), this light of 50% is guided to the sensitive surface of the first shoot part 105, and make 50% light to the transmission of Z direction, this light of 50% is guided to the sensitive surface of the second shoot part 107.
[utilizability on the industry]
The present invention can be used in solar battery cell testing fixture etc.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, although the present invention discloses as above with preferred embodiment, yet be not to limit the present invention, any those skilled in the art, within not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be not break away from the technical solution of the present invention content, any simple modification that foundation technical spirit of the present invention is done above embodiment, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (10)
1. solar battery cell testing fixture is characterized in that comprising:
The first irradiation section is to the first surface irradiation visible light of the semiconductor crystal wafer of writing board shape;
The first shoot part receives the described visible light that described semiconductor crystal wafer reflects, and whereby, obtains the reflected image of described semiconductor crystal wafer;
The second irradiation section, to second irradiation infrared light of the described first surface described semiconductor crystal wafer in opposite directions of described semiconductor crystal wafer;
The second shoot part receives the described infrared light that sees through described semiconductor crystal wafer, whereby, obtains the transmission image of described semiconductor crystal wafer; And
Detection unit based on described reflected image and described transmission image, judges whether described semiconductor crystal wafer exists defective, and above-mentioned solar battery cell testing fixture is characterised in that:
Comprise the beam splitter that is configured between described the first shoot part and described the second shoot part,
The light that described beam splitter is set wavelength with deficiency guides to the first shoot part, and the light that will set more than the wavelength guides to the second shoot part.
2. solar battery cell testing fixture according to claim 1 is characterized in that:
The resolution of described the second shoot part is higher than the resolution of described the first shoot part.
3. solar battery cell testing fixture according to claim 1 and 2 is characterized in that:
Described the first irradiation section comprises blue-light source, green light source and red light source,
Described the second irradiation section comprises infrared light supply.
4. solar battery cell testing fixture according to claim 1 and 2 is characterized in that:
Described semiconductor crystal wafer is solar battery cell,
Described detection unit judges whether described semiconductor crystal wafer exists at least a defective that is selected from thickness, crack, electrode inspection, the damaged and blemish.
5. solar battery cell testing fixture is characterized in that comprising:
The first irradiation section is to the first surface irradiation visible light of the semiconductor crystal wafer of writing board shape;
The first shoot part receives the described visible light that described semiconductor crystal wafer reflects, and whereby, obtains the reflected image of described semiconductor crystal wafer;
The second irradiation section, to second irradiation infrared light of the described first surface described semiconductor crystal wafer in opposite directions of described semiconductor crystal wafer;
The second shoot part receives the described infrared light that sees through described semiconductor crystal wafer, whereby, obtains the transmission image of described semiconductor crystal wafer; And
Detection unit based on described reflected image and described transmission image, judges whether described semiconductor crystal wafer exists defective, and above-mentioned solar battery cell testing fixture is characterised in that:
The place ahead at the sensitive surface of described the first shoot part disposes the first filter, and this first filter makes less than first set the light transmission of wavelength, and the first light of setting more than the wavelength is reflected,
The place ahead at the sensitive surface of described the second shoot part disposes the second filter, and this second filter makes second to set the above light transmission of wavelength, and the light that less than second is set wavelength reflects.
6. solar battery cell testing fixture according to claim 5 is characterized in that:
Comprise the half-reflecting mirror that is configured between described the first shoot part and described the second shoot part,
Described half-reflecting mirror guides to described the first shoot part with the light of a part, and remaining light is guided to described the second shoot part.
7. it is characterized in that according to claim 5 or 6 described solar battery cell testing fixtures:
Described the first setting wavelength is to set the longer wavelength of wavelength than described second.
8. it is characterized in that according to claim 5 or 6 described solar battery cell testing fixtures:
The resolution of described the second shoot part is higher than the resolution of described the first shoot part.
9. it is characterized in that according to claim 5 or 6 described solar battery cell testing fixtures:
Described the first irradiation section comprises blue-light source, green light source and red light source,
Described the second irradiation section comprises infrared light supply.
10. it is characterized in that according to claim 5 or 6 described solar battery cell testing fixtures:
Described semiconductor crystal wafer is solar battery cell,
Described detection unit judges whether described semiconductor crystal wafer exists at least a defective that is selected from thickness, crack, electrode inspection, the damaged and blemish.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-193465 | 2011-09-06 | ||
| JP2011193465A JP5824984B2 (en) | 2011-09-06 | 2011-09-06 | Solar cell inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102983089A true CN102983089A (en) | 2013-03-20 |
Family
ID=47710818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012101841560A Pending CN102983089A (en) | 2011-09-06 | 2012-05-29 | Solar battery unit inspection device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5824984B2 (en) |
| CN (1) | CN102983089A (en) |
| DE (1) | DE102012010406A1 (en) |
| TW (1) | TWI560442B (en) |
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| CN108389966A (en) * | 2018-02-11 | 2018-08-10 | 苏州协鑫纳米科技有限公司 | Prevent the method and system of solar cell short circuit |
| CN110530870A (en) * | 2018-05-24 | 2019-12-03 | 塞米西斯科株式会社 | The system and method for defect are checked in cavity |
| CN112666168A (en) * | 2020-12-29 | 2021-04-16 | 尚越光电科技股份有限公司 | Rapid detection system for roll-to-roll surface of stainless steel substrate of CIGS battery piece |
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| JP6781985B2 (en) * | 2016-08-31 | 2020-11-11 | 国立研究開発法人産業技術総合研究所 | Solar cell evaluation method and evaluation device and solar cell evaluation program |
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| CA3099111C (en) * | 2018-05-04 | 2023-08-22 | Siemens Healthcare Diagnostics Inc. | Illumination unit with multiple light sources for generating a uniform illumination spot |
| US11340284B2 (en) * | 2019-07-23 | 2022-05-24 | Kla Corporation | Combined transmitted and reflected light imaging of internal cracks in semiconductor devices |
| KR102284260B1 (en) * | 2019-11-19 | 2021-08-04 | 성균관대학교산학협력단 | Spectral measurement apparatus for estimating characteristic of solar panel |
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| CN107991032B (en) * | 2017-11-26 | 2021-02-23 | 中山硕泰新能源技术有限公司 | Lithium battery incoming material detection device |
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| CN110530870A (en) * | 2018-05-24 | 2019-12-03 | 塞米西斯科株式会社 | The system and method for defect are checked in cavity |
| CN112666168A (en) * | 2020-12-29 | 2021-04-16 | 尚越光电科技股份有限公司 | Rapid detection system for roll-to-roll surface of stainless steel substrate of CIGS battery piece |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5824984B2 (en) | 2015-12-02 |
| DE102012010406A1 (en) | 2013-03-07 |
| TW201312101A (en) | 2013-03-16 |
| TWI560442B (en) | 2016-12-01 |
| JP2013053973A (en) | 2013-03-21 |
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