TWI560442B - Apparatus for checking solar cell - Google Patents

Apparatus for checking solar cell

Info

Publication number
TWI560442B
TWI560442B TW101119340A TW101119340A TWI560442B TW I560442 B TWI560442 B TW I560442B TW 101119340 A TW101119340 A TW 101119340A TW 101119340 A TW101119340 A TW 101119340A TW I560442 B TWI560442 B TW I560442B
Authority
TW
Taiwan
Prior art keywords
solar cell
checking solar
checking
cell
solar
Prior art date
Application number
TW101119340A
Other languages
Chinese (zh)
Other versions
TW201312101A (en
Inventor
Yoshio Takami
Toyoyuki Hashimoto
Dai Kitahara
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of TW201312101A publication Critical patent/TW201312101A/en
Application granted granted Critical
Publication of TWI560442B publication Critical patent/TWI560442B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
TW101119340A 2011-09-06 2012-05-30 Apparatus for checking solar cell TWI560442B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011193465A JP5824984B2 (en) 2011-09-06 2011-09-06 Solar cell inspection equipment

Publications (2)

Publication Number Publication Date
TW201312101A TW201312101A (en) 2013-03-16
TWI560442B true TWI560442B (en) 2016-12-01

Family

ID=47710818

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101119340A TWI560442B (en) 2011-09-06 2012-05-30 Apparatus for checking solar cell

Country Status (4)

Country Link
JP (1) JP5824984B2 (en)
CN (1) CN102983089A (en)
DE (1) DE102012010406A1 (en)
TW (1) TWI560442B (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6142655B2 (en) * 2013-05-09 2017-06-07 株式会社島津製作所 Appearance inspection apparatus and appearance inspection method
JP6160255B2 (en) * 2013-05-30 2017-07-12 株式会社島津製作所 Solar cell inspection device and image position correction method for solar cell inspection device
TWI489098B (en) * 2014-03-11 2015-06-21 Utechzone Co Ltd Defect detection method and defect detection device
US10018565B2 (en) * 2015-05-04 2018-07-10 Semilab Semiconductor Physics Laboratory Co., Ltd. Micro photoluminescence imaging with optical filtering
JP6620322B2 (en) * 2016-01-29 2019-12-18 京都電機器株式会社 Lighting device
DE102016011497B4 (en) 2016-09-21 2019-01-24 Mühlbauer Gmbh & Co. Kg Optical inspection device and optical inspection method with visible and infrared light for semiconductor devices
CN107991032B (en) * 2017-11-26 2021-02-23 中山硕泰新能源技术有限公司 Lithium battery incoming material detection device
CN108389966A (en) * 2018-02-11 2018-08-10 苏州协鑫纳米科技有限公司 Prevent the method and system of solar cell short circuit
IL278347B2 (en) * 2018-05-04 2024-04-01 Siemens Healthcare Diagnostics Inc Illumination unit with multiple light sources for generating a uniform illumination spot
KR102251936B1 (en) * 2018-05-24 2021-05-14 (주)쎄미시스코 Defect inspection system and method in chamber
KR102284260B1 (en) * 2019-11-19 2021-08-04 성균관대학교산학협력단 Spectral measurement apparatus for estimating characteristic of solar panel
CN112666168B (en) * 2020-12-29 2022-08-05 尚越光电科技股份有限公司 Rapid detection system for roll-to-roll surface of stainless steel substrate of CIGS battery piece
JP7282961B1 (en) * 2022-07-28 2023-05-29 株式会社東芝 PHOTOELECTRIC CONVERSION DEVICE INSPECTION DEVICE, PHOTOELECTRIC CONVERSION DEVICE MANUFACTURING DEVICE, PHOTOELECTRIC CONVERSION DEVICE MANUFACTURING METHOD
JP7461444B1 (en) 2022-11-21 2024-04-03 ハマダレクテック株式会社 Automatic wafer film type determination system and automatic wafer sorting device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007294604A (en) * 2006-04-24 2007-11-08 Tokyo Seimitsu Co Ltd Device and method for inspecting external appearance
TWI306165B (en) * 2006-10-17 2009-02-11 Machvision Inc Adjustable illumination apparatus and aoi system using the same
TW200935047A (en) * 2008-01-16 2009-08-16 Orbotech Ltd Apparatus and method for inspection
CN101581671A (en) * 2009-06-12 2009-11-18 3i系统公司 Solar cell silicon chip detecting system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119444A (en) * 1985-11-20 1987-05-30 Fujitsu Ltd Pattern inspector
JPH03218045A (en) * 1990-01-23 1991-09-25 Nec Corp Solar cell inspecting equipment
JP2002122552A (en) 2000-10-12 2002-04-26 Sony Corp Defect inspection device and method
DE102004029212B4 (en) * 2004-06-16 2006-07-13 Leica Microsystems Semiconductor Gmbh Apparatus and method for optical inspection and / or transmitted light inspection of microstructures in the IR
JP2006351669A (en) 2005-06-14 2006-12-28 Mitsubishi Electric Corp Infrared inspection device and infrared inspection method, and method of manufacturing semiconductor wafer
US7554656B2 (en) * 2005-10-06 2009-06-30 Kla-Tencor Technologies Corp. Methods and systems for inspection of a wafer
JP2010034133A (en) 2008-07-25 2010-02-12 Just:Kk Crack detecting device for polycrystalline silicon wafer
EP2367286B1 (en) 2010-03-12 2013-02-20 Harman Becker Automotive Systems GmbH Automatic correction of loudness level in audio signals

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007294604A (en) * 2006-04-24 2007-11-08 Tokyo Seimitsu Co Ltd Device and method for inspecting external appearance
TWI306165B (en) * 2006-10-17 2009-02-11 Machvision Inc Adjustable illumination apparatus and aoi system using the same
TW200935047A (en) * 2008-01-16 2009-08-16 Orbotech Ltd Apparatus and method for inspection
CN101581671A (en) * 2009-06-12 2009-11-18 3i系统公司 Solar cell silicon chip detecting system

Also Published As

Publication number Publication date
CN102983089A (en) 2013-03-20
JP5824984B2 (en) 2015-12-02
TW201312101A (en) 2013-03-16
DE102012010406A1 (en) 2013-03-07
JP2013053973A (en) 2013-03-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees