TWI489098B - Defect detection method and defect detection device - Google Patents

Defect detection method and defect detection device Download PDF

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TWI489098B
TWI489098B TW103108386A TW103108386A TWI489098B TW I489098 B TWI489098 B TW I489098B TW 103108386 A TW103108386 A TW 103108386A TW 103108386 A TW103108386 A TW 103108386A TW I489098 B TWI489098 B TW I489098B
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light
image
brightness
time interval
image capturing
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TW103108386A
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TW201534896A (en
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Utechzone Co Ltd
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缺陷檢測方法及缺陷檢測裝置Defect detection method and defect detecting device

本發明是有關於一種檢測方法,特別是指一種檢測電路缺陷的缺陷檢測方法及缺陷檢測裝置。The present invention relates to a detecting method, and more particularly to a defect detecting method and a defect detecting device for detecting a circuit defect.

參見圖1所示,現有一種缺陷檢測方法用以檢測一電路板,例如一形成有觸控電路的玻璃面板上的電路缺陷。且由於觸控電路所包含的金屬線路及ITO線路對光有不同的反射率,因此現有的缺陷檢測方法會針對玻璃面板上的一部分區域,先以對於金屬線路有較佳反射率的第一種光L1照射,並取得該區域的一第一影像(影像1),再以對於ITO線路有較佳反射率的第二種光L2照射,以取得同一區域的一第二影像(影像2),依此,循序掃描玻璃面板的全部區域,以分別取得各個區域在第一種光L1及第二種光L2照射下的影像1、2、3...,並將在第一種光L1照射下取得的該等影像1、3、5...組合在一起,即為整個玻璃面板在第一種光10照射下的完整影像,且將在第二種光L2照射下取得的該等影像2、4、6…組合在一起,即為整個玻璃面板在第二種光20照射下的完整影像。Referring to FIG. 1, a conventional defect detecting method is used to detect a circuit board, such as a circuit defect on a glass panel on which a touch circuit is formed. Moreover, since the metal circuit and the ITO line included in the touch circuit have different reflectances to light, the existing defect detection method will be directed to a part of the glass panel, firstly having the first reflectance for the metal line. The light L1 is irradiated, and a first image (image 1) of the region is obtained, and then the second light L2 having a better reflectance for the ITO line is irradiated to obtain a second image (image 2) of the same region. Accordingly, all areas of the glass panel are sequentially scanned to respectively obtain images 1, 2, 3, . . . under the illumination of the first light L1 and the second light L2, and the first light L1 is irradiated. The images 1, 3, 5, which are obtained below are combined, that is, the complete image of the entire glass panel under the illumination of the first light 10, and the images obtained under the illumination of the second light L2 2, 4, 6... are combined to form a complete image of the entire glass panel under the illumination of the second light 20.

然後,即可從該等影像1、3、5…組成的完整影 像中檢測金屬線路的缺陷,並從該等影像2、4、6…組成的完整影像中檢測ITO線路的缺陷。Then, you can complete the complete image from the images 1, 3, 5... The defect of the metal line is detected in the image, and the defect of the ITO line is detected from the complete image composed of the images 2, 4, 6 .

然而,如圖1所示,由於產生第一種光L1的第一發光單元11與產生第二種光L2的第二發光單元12被開啟時,皆需要經過一段充電時間TU才會達到預設亮度而完全點亮,且其被關閉時,亦需要經過一段放電時間TD才會完全熄滅。因此,若影像1、3、5...的取像時間t1涵蓋第一發光單元11的充電時間TU及放電時間TD,且影像2、4、6...的取像時間t2亦涵蓋第二發光單元12的充電時間TU及放電時間TD,則影像1、3、5...及影像2、4、6...的頭尾部分將因第一種光L1及第二種光L2在充電時間TU及放電時間TD的亮度不足,或是產生第一種光L1及第二種光L2之光混雜現象,而不能清楚顯現所拍攝的內容。However, as shown in FIG. 1, since the first light emitting unit 11 that generates the first light L1 and the second light emitting unit 12 that generates the second light L2 are turned on, it takes a period of charging time TU to reach the preset. When the brightness is completely lit, and it is turned off, it also needs to pass a period of discharge time TD to be completely extinguished. Therefore, if the image capturing time t1 of the images 1, 3, 5, ... covers the charging time TU and the discharging time TD of the first light emitting unit 11, and the image capturing time t2 of the images 2, 4, 6, ... also covers the The charging time TU and the discharging time TD of the two light emitting units 12, the head and tail portions of the images 1, 3, 5, ... and the images 2, 4, 6... will be due to the first light L1 and the second light L2 The brightness of the charging time TU and the discharging time TD is insufficient, or the light mixing phenomenon of the first light L1 and the second light L2 is generated, and the captured content cannot be clearly displayed.

因此,本發明的目的在於提供一種能使所取得的待測物的影像清楚顯現待測物的內容之缺陷檢測方法及缺陷檢測裝置。Accordingly, it is an object of the present invention to provide a defect detecting method and a defect detecting device which enable the image of the object to be tested to clearly show the contents of the object to be tested.

於是,本發明一種缺陷檢測方法,用以取得一待測物的影像以對其進行缺陷檢測,並包括:提供一燈源,使交替發出一第一種光及一第二種光;當該燈源發出該第一種光時,以一控制器控制一取像單元,使在該第一種光的亮度維持在一第一預設亮度的至少一半以上的一第一時間區間,取得該待測物的一第一影像;及當該燈源發出該第二種光時,以該控制器控制該取像單元,使在該第 二種光的亮度維持在一第二預設亮度的至少一半以上的一第二時間區間,取得該待測物的一第二影像。Therefore, a defect detecting method of the present invention is for obtaining an image of a test object for defect detection, and comprising: providing a light source to alternately emit a first light and a second light; When the first source of light is emitted by the light source, the image capturing unit is controlled by a controller to obtain the first time interval in which the brightness of the first light is maintained at least half of the first predetermined brightness. a first image of the object to be tested; and when the light source emits the second light, the controller controls the image capturing unit to enable The brightness of the two kinds of light is maintained in a second time interval of at least half of the second predetermined brightness to obtain a second image of the object to be tested.

再者,本發明實現上述方法的一種缺陷檢測裝置,用以取得一待測物的影像以對其進行缺陷檢測,並包括一燈源、一取像單元及一控制器;該燈源交替發出一第一種光及一第二種光;該取像單元用以取得該待測物的一影像;該控制器與該取像單元電耦接,並在該燈源發出該第一種光時,控制該取像單元在該第一種光的亮度維持在一第一預設亮度的至少一半以上的一第一時間區間,取得該待測物的一第一影像,且在該燈源發出該第二種光時,控制該取像單元在該第二種光的亮度維持在一第二預設亮度的至少一半以上的一第二時間區間,取得該待測物的一第二影像。Furthermore, the invention provides a defect detecting device for implementing the above method, which is used for obtaining an image of a test object for defect detection, and includes a light source, an image capturing unit and a controller; the light source is alternately emitted a first light and a second light; the image capturing unit is configured to obtain an image of the object to be tested; the controller is electrically coupled to the image capturing unit, and emits the first light at the light source And controlling the image capturing unit to obtain a first image of the object to be tested, and acquiring the first image in the first time interval in which the brightness of the first light is maintained at least half of the first predetermined brightness. When the second light is emitted, controlling the image capturing unit to obtain a second image of the object to be tested while maintaining a brightness of the second light at least a half of a second predetermined brightness .

較佳地,該控制器還控制該取像單元在該第一時間區間與該第二時間區間之間的一第三時間區間停止取像,或取得該待測物的一第三影像。Preferably, the controller further controls the image capturing unit to stop capturing the image in a third time interval between the first time interval and the second time interval, or obtain a third image of the object to be tested.

較佳地,該燈源包含一發出該第一種光的第一發光單元及一發出該第二種光的第二發光單元。Preferably, the light source comprises a first light emitting unit that emits the first light and a second light emitting unit that emits the second light.

較佳地,該第一發光單元被關閉,使得該第一種光的亮度下降至該第一預設亮度的一半以下時,該控制器即控制該第二發光單元被開啟,且該第二發光單元被關閉,使得該第二種光的亮度下降至該第二預設亮度的一半以下時,該控制器即控制該第一發光單元被開啟,藉此縮短該第三時間區間。Preferably, the first lighting unit is turned off, so that when the brightness of the first type of light falls below half of the first predetermined brightness, the controller controls the second lighting unit to be turned on, and the second When the light emitting unit is turned off, such that the brightness of the second light falls below half of the second predetermined brightness, the controller controls the first light emitting unit to be turned on, thereby shortening the third time interval.

較佳地,該第一種光與該第二種光的顏色相同但強度不同,或者該第一種光與該第二種光的顏色不同。Preferably, the first light and the second light are of the same color but different in intensity, or the first light is different from the second light.

較佳地,該取像單元被控制在該第一種光的亮度維持在該第一預設亮度的百分之九十以上的該第一時間區間取像,且該取像單元被控制在該第二種光的亮度維持在該第二預設亮度的百分之九十以上的該第二時間區間取像。Preferably, the image capturing unit is controlled to take image in the first time interval in which the brightness of the first light is maintained at more than 90% of the first predetermined brightness, and the image capturing unit is controlled at The brightness of the second light is maintained in the second time interval of more than ninety percent of the second predetermined brightness.

本發明藉由將取像單元的取像時間控制在第一種光的亮度維持在第一預設亮度的至少一半以上的第一時間區間,以及控制取像單元的取像時間在第二種光的亮度維持在第二預設亮度的至少一半以上的第二時間區間,使取像單元在第一種光及第二種光的亮度至少維持在百分之五十以上時取像,而解決了先前技術中取得的影像的頭尾端因亮度不足而無法清楚呈現的問題。The present invention controls the image capturing time of the image capturing unit to be maintained in a first time interval in which the brightness of the first light is maintained at least half of the first predetermined brightness, and controls the image capturing time of the image capturing unit in the second The brightness of the light is maintained in a second time interval of at least half of the second predetermined brightness, so that the image capturing unit takes an image when the brightness of the first light and the second light is maintained at least 50% or more. The problem that the head end of the image obtained in the prior art cannot be clearly presented due to insufficient brightness is solved.

1‧‧‧燈源1‧‧‧Light source

2‧‧‧取像單元2‧‧‧Image capture unit

3‧‧‧控制器3‧‧‧ Controller

11‧‧‧第一發光單元11‧‧‧First lighting unit

12‧‧‧第二發光單元12‧‧‧second lighting unit

T1‧‧‧第一時間區間T1‧‧‧ first time interval

T2‧‧‧第二時間區間T2‧‧‧ second time interval

T3‧‧‧第三時間區間T3‧‧‧ third time interval

TU‧‧‧充電時間TU‧‧‧Charging time

TD‧‧‧放電時間TD‧‧‧ discharge time

L1‧‧‧第一種光L1‧‧‧ first light

L2‧‧‧第二種光L2‧‧‧second light

S1~S3‧‧‧步驟S1~S3‧‧‧ steps

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1顯示習知一種缺陷檢測方法取得待測物的影像的示意圖;圖2顯示本發明缺陷檢測方法的一較佳實施例的流程圖;圖3顯示本發明缺陷檢測裝置的一較佳實施例的電路方塊圖;圖4顯示本實施例在第一時間區間T1及第二時間區間 T2取得待測物的影像的示意圖;圖5顯示本實施例的第一種光及第二種光的波形示意圖;圖6顯示本實施例在第一時間區間T1與第二時間區間T2之間的第三時間區間T3取得待測物的影像的示意圖;及圖7顯示本實施例的第三時間區間T3可以被縮短的示意圖。Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: FIG. 1 shows a schematic diagram of a conventional defect detecting method for obtaining an image of a test object; FIG. 2 shows a defect detecting method of the present invention. FIG. 3 is a circuit block diagram of a preferred embodiment of the defect detecting device of the present invention; FIG. 4 shows the first time interval T1 and the second time interval of the present embodiment. T2 obtains a schematic diagram of an image of the object to be tested; FIG. 5 shows a waveform diagram of the first light and the second light of the embodiment; FIG. 6 shows the first time interval T1 and the second time interval T2 of the present embodiment. A schematic diagram of the image of the object to be tested is obtained in the third time interval T3; and FIG. 7 shows a schematic diagram in which the third time interval T3 of the embodiment can be shortened.

參見圖2及3所示,是本發明缺陷檢測方法的一較佳實施例,其使用一缺陷檢測裝置100取得一待測物(圖未示)的影像,以對其進行缺陷檢測。缺陷檢測裝置100主要包括一燈源1、一取像單元2及一與燈源1及取像單元2電耦接的控制器3。Referring to Figures 2 and 3, a preferred embodiment of the defect detecting method of the present invention uses a defect detecting device 100 to obtain an image of a test object (not shown) for defect detection. The defect detecting device 100 mainly includes a light source 1, an image capturing unit 2, and a controller 3 electrically coupled to the light source 1 and the image capturing unit 2.

由於要取得待測物的清楚影像,需要提供一定的亮度,且在本實例中,是以檢測例如一形成有觸控電路的玻璃面板(待測物)上的電路缺陷為例,而由於觸控電路所包含的金屬線路及ITO線路對光的反射率的差別很大,無法以同一種光進行檢測。因此,首先,如圖2的步驟S1所示,燈源1會以一預設頻率交替地發出一第一種光L1及一第二種光L2,即所謂的閃頻(stroboflash),其波形交替週期如圖4所示。因此燈源1包含一發出第一種光L1的第一發光單元11及一發出第二種光L2的第二發光單元12,其中第一種光L1對於金屬線路有較佳的反射率,第二種光 L2則對於ITO線路有較佳的反射率。例如第一種光L1與第二種光L2是顏色相同但強度不同的光,或者,第一種光L1與第二種光L2是不同顏色的光。In order to obtain a clear image of the object to be tested, it is necessary to provide a certain brightness, and in this example, to detect, for example, a circuit defect on a glass panel (subject to be tested) on which a touch circuit is formed, The metal lines and ITO lines included in the control circuit have a large difference in reflectance of light, and cannot be detected by the same light. Therefore, first, as shown in step S1 of FIG. 2, the light source 1 alternately emits a first light L1 and a second light L2 at a predetermined frequency, that is, a so-called stroboflash, the waveform thereof The alternating cycle is shown in Figure 4. Therefore, the light source 1 includes a first light emitting unit 11 that emits the first light L1 and a second light emitting unit 12 that emits the second light L2, wherein the first light L1 has a better reflectivity for the metal line, Two kinds of light L2 has better reflectivity for ITO lines. For example, the first light L1 and the second light L2 are light of the same color but different in intensity, or the first light L1 and the second light L2 are light of different colors.

當然,若是待測物包含由三種或三種以上的材料構成的線路,且這三種或三種以上的線路對光的反射率的差別很大時,則需以三種或三種以上不同的光(強度不同或顏色不同)分次對待測物進行取像。Of course, if the object to be tested contains a line composed of three or more materials, and the difference in reflectance of the three or more lines is large, three or more different lights (intensities are required) Or the color is different) The object to be measured is taken separately.

取像單元2在本實施例是一採用CCD或CMOS的影像感測器,用以取得待測物的一影像。且本實施例的取像單元2是一長條形的影像感測器陣列,且燈源1與取像單元2設置在一起並同時移動,類似掃描器,取像單元2以循序移動方式於待測物上方從頭到尾依序掃描待測物,以逐次取得待測物的每一部分的影像,進一步來說,其較佳地係以線掃描(Line scan)進行取像,且取像單元2的掃描(取像)頻率與燈源1的預設頻率相同。惟前述線掃描僅為舉例,本發明並非以此為限。In this embodiment, the image capturing unit 2 is a CCD or CMOS image sensor for acquiring an image of the object to be tested. The image capturing unit 2 of the embodiment is an elongated image sensor array, and the light source 1 and the image capturing unit 2 are disposed together and moved at the same time, similar to the scanner, and the image capturing unit 2 is sequentially moved. The object to be tested is sequentially scanned from top to bottom to obtain images of each part of the object to be tested, and further, it is preferably taken by line scan, and the image capturing unit The scanning (taking) frequency of 2 is the same as the preset frequency of the light source 1. However, the foregoing line scan is only an example, and the present invention is not limited thereto.

且如圖5所示,由於產生第一種光L1的第一發光單元11與產生第二種光L2的第二發光單元12被開啟時,皆需要經過一段充電時間TU,才會達到預設亮度而完全點亮,且其被關閉時,亦需要經過一段放電時間TD才會完全熄滅。As shown in FIG. 5, since the first light emitting unit 11 that generates the first light L1 and the second light emitting unit 12 that generates the second light L2 are turned on, it takes a period of charging time TU to reach the preset. When the brightness is completely lit, and it is turned off, it also needs to pass a period of discharge time TD to be completely extinguished.

因此,為使取得的影像的頭尾部分不致因第一種光L1及第二種光L2在充電時間TU及放電時間TD區間內亮度不足而無法清楚呈現,如圖2的步驟S2及圖4所示 ,當取像單元2依序掃描待測物時,控制器3在燈源1每次發出第一種光L1時,控制取像單元2在第一種光L1的亮度達到一第一預設亮度的至少一半以上的一第一時間區間T1,取得待測物在第一種光L1之下的一第一影像,即影像1、3、5、...。Therefore, in order to prevent the head and tail portions of the obtained image from being insufficiently displayed due to insufficient brightness of the first light L1 and the second light L2 in the charging time TU and the discharging time TD interval, step S2 and FIG. 4 of FIG. 2 are omitted. Shown When the image capturing unit 2 sequentially scans the object to be tested, the controller 3 controls the brightness of the first light L1 of the image capturing unit 2 to reach a first preset each time the light source 1 emits the first light L1. A first time interval T1 of at least half of the brightness obtains a first image of the object under the first light L1, that is, images 1, 3, 5, .

且如圖2的步驟S3所示,控制器3會在燈源1每次發出第二種光L2時,控制取像單元2在第二種光L2的亮度達到一第二預設亮度的至少一半以上的一第二時間區間T2,取得待測物在第二種光L2之下的一第二影像,即影像2、4、6...。藉此,控制取像單元2在第一種光L1及第二種光L2的亮度至少維持在百分之五十以上時取像,以解決先前技術中取得的影像的頭尾端因亮度不足而無法清楚呈現的問題。As shown in step S3 of FIG. 2, the controller 3 controls the image capturing unit 2 to achieve at least a second predetermined brightness of the second light L2 when the light source 1 emits the second light L2. More than half of the second time interval T2 obtains a second image of the object under the second light L2, that is, images 2, 4, 6, . Thereby, the image capturing unit 2 is controlled to take images when the brightness of the first light L1 and the second light L2 is maintained at least 50% or more, so as to solve the problem that the head and tail ends of the image obtained in the prior art are insufficient in brightness. It is impossible to clearly present the problem.

其中當第一種光L1與第二種光L2是顏色相同但強度不同的光時,第一預設亮度(對金屬線路有較佳反射率)小於第二預設亮度(對ITO線路有較佳反射率),而若第一種光L1與第二種光L2是不同顏色的光時,第一預設亮度(針對金屬線路)則可以視實際應用需求而與第二預設亮度(針對ITO線路)相同或不同。且若第一種光L1與第二種光L2是顏色相同但強度不同的光時,亦可以只使用單一發光單元交替發出不同強度的光。When the first light L1 and the second light L2 are light of the same color but different in intensity, the first preset brightness (the preferred reflectance to the metal line) is smaller than the second preset brightness (for the ITO line) Good reflectance), and if the first light L1 and the second light L2 are different colors of light, the first preset brightness (for metal lines) can be compared with the second preset brightness according to actual application requirements (for ITO lines) are the same or different. Further, if the first light L1 and the second light L2 are light of the same color but different in intensity, it is also possible to alternately emit light of different intensities using only a single light-emitting unit.

且較佳地,在本實施例中,取像單元2是在第一種光L1的亮度維持在(或達到)第一預設亮度的百分之九十以上的第一時間區間T1對待測物進行取像(拍攝),並且 是在第二種光L2的亮度維持在(或達到)第二預設亮度的百分之九十以上的第二時間區間T2對待測物進行取像,但在第一時間區間T1與第二時間區間T2之間的一第三時間區間T3(包括第一種光L1的放電時間TD及第二種光L2的充電時間TU,或者包括第一種光L1的充電時間TU及第二種光L2的放電時間TD)不進行取像。藉此,使取像單元2的取像時間完全避開第一種光L1及第二種光L2的充電時間TU及放電時間TD區間,而解決了先前技術中取得的影像的頭尾端無法清楚呈現的問題,並使取得的影像的頭尾端與影像的中間部分具有幾乎相同的影像品質。Preferably, in the embodiment, the image capturing unit 2 is to be measured in the first time interval T1 when the brightness of the first light L1 is maintained at (or reaches) 90% of the first predetermined brightness. Taking images (photographing), and The object to be measured is imaged in a second time interval T2 in which the brightness of the second light L2 is maintained at (or reaches) 90% of the second predetermined brightness, but in the first time interval T1 and the second time interval a third time interval T3 between the time interval T2 (including the discharge time TD of the first light L1 and the charging time TU of the second light L2, or the charging time TU and the second light including the first light L1) The discharge time TD of L2 is not taken. Thereby, the imaging time of the image capturing unit 2 is completely avoided by the charging time TU and the discharging time TD interval of the first light L1 and the second light L2, thereby solving the problem that the head and tail ends of the image obtained in the prior art cannot be Clearly present the problem and have almost the same image quality at the head and tail of the resulting image and the middle portion of the image.

最後,在後續處理中,再將在第一種光L1照射下取得的該等影像1、3、5…組合在一起,即為整個待測物(玻璃面板)在第一種光L1照射下的完整影像,且將在第二種光L2照射下取得的該等影像2、4、6…組合在一起,即為整個待測物(玻璃面板)在第二種光20照射下的完整影像。Finally, in the subsequent processing, the images 1, 3, 5, ... obtained under the illumination of the first light L1 are combined, that is, the entire object to be tested (glass panel) is irradiated under the first light L1. a complete image, and the images 2, 4, 6... obtained under the illumination of the second light L2 are combined, that is, the complete image of the entire object to be tested (glass panel) under the illumination of the second light 20 .

然後,即可從該等影像1、3、5…組成的完整影像中檢測金屬線路的缺陷,並從該等影像2、4、6…組成的完整影像中檢測ITO線路的缺陷。Then, the defects of the metal line can be detected from the complete image composed of the images 1, 3, 5, ..., and the defects of the ITO line are detected from the complete image composed of the images 2, 4, 6 .

再參見圖6所示,本實施例的另一實施態樣是控制器3控制取像單元2連續取像,亦即控制取像單元2除了在第一種光L1的第一時間區間T1及第二種光L2的第二時間區間T2取像外,亦在第一時間區間T1與第二時間區間T2之間的第三時間區間T3取像,因此在此實施方式 下,取像單元2會依序取得影像1、2、3…,所以取像單元2的掃描(取像)頻率會是燈源1的預設頻率的兩倍。Referring to FIG. 6 again, another embodiment of the present embodiment is that the controller 3 controls the image capturing unit 2 to continuously take images, that is, control the image capturing unit 2 except for the first time interval T1 of the first type of light L1. The second time interval T2 of the second light L2 is taken out of the image, and is also taken in the third time interval T3 between the first time interval T1 and the second time interval T2, so in this embodiment Next, the image capturing unit 2 sequentially acquires the images 1, 2, 3, . . . , so the scanning (taking) frequency of the image capturing unit 2 is twice the preset frequency of the light source 1.

然後,在後續處理中,會將在每一個第一時間區間T1取得的影像1、5、…組合在一起,形成待測物(玻璃面板)在第一種光L1照射下的一完整影像,並將在每一個第二時間區間T2取得的影像3、7、…組合在一起,形成待測物(玻璃面板)在第二種光L2照射下的一完整影像,而在每一個第三時間區間T3取得的影像2、4、6…則棄置不用。Then, in the subsequent processing, the images 1, 5, ... obtained in each of the first time intervals T1 are combined to form a complete image of the object (glass panel) under the illumination of the first light L1. And combining the images 3, 7, and ... obtained in each of the second time intervals T2 to form a complete image of the object to be tested (glass panel) under the illumination of the second light L2, and at each third time The images 2, 4, 6... obtained in the interval T3 are discarded.

再參見圖7所示,本實施例的控制器3還與燈源1電耦接,並在第一發光單元11被關閉,使得第一種光L1的亮度下降至第一預設亮度的一半以下時,控制器3即控制第二發光單元12被開啟,並且在第二發光單元12被關閉,使得第二種光L2的亮度下降至第二預設亮度的一半以下時,控制器3即控制第一發光單元11被開啟,藉此使第一種光L1的放電時間TD與第二種光L2的充電時間TU重疊,以及使第二種光L2的放電時間TD與第一種光L1的充電時間TU重疊,以縮短第三時間區間T3,進而提升取像單元2的掃描(取像)效率。Referring again to FIG. 7, the controller 3 of the present embodiment is further electrically coupled to the light source 1 and is turned off at the first light emitting unit 11, so that the brightness of the first light L1 is lowered to half of the first predetermined brightness. In the following, the controller 3 controls the second lighting unit 12 to be turned on, and when the second lighting unit 12 is turned off, so that the brightness of the second light L2 falls below half of the second predetermined brightness, the controller 3 Controlling that the first light emitting unit 11 is turned on, thereby overlapping the discharge time TD of the first light L1 with the charging time TU of the second light L2, and making the discharge time TD of the second light L2 and the first light L1 The charging time TU overlaps to shorten the third time interval T3, thereby improving the scanning (taking) efficiency of the image capturing unit 2.

綜上所述,上述實施例藉由將取像單元2的取像時間控制在第一種光L1的亮度維持在第一預設亮度的至少一半以上,例如百分之九十以上的第一時間區間,以及控制取像單元的取像時間在第二種光L2的亮度維持在第二預設亮度的至少一半以上,以如百分之九十以上的第二時 間區間,使取像單元2在第一種光L1及第二種光L2的亮度至少維持在百分之五十以上時取像,而解決了先前技術中取得的影像的頭尾端因亮度不足而無法清楚呈現的問題,達到本發明的功效與目的。In summary, the above embodiment maintains the brightness of the first type of light L1 at least half of the first predetermined brightness by controlling the image capturing time of the image capturing unit 2, for example, the first of 90% or more. The time interval, and the image capturing time of the control image taking unit are maintained at at least half of the second predetermined brightness in the second light L2, for example, a second time of more than 90% The interval is such that the image capturing unit 2 takes an image when the brightness of the first light L1 and the second light L2 is maintained at least 50% or more, thereby solving the brightness of the head and tail of the image obtained in the prior art. The problem that is insufficient and cannot be clearly presented achieves the efficacy and purpose of the present invention.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the patent application scope and patent specification content of the present invention, All remain within the scope of the invention patent.

S1~S3‧‧‧步驟S1~S3‧‧‧ steps

Claims (10)

一種缺陷檢測方法,用以取得一待測物的影像以對其進行缺陷檢測,並包括:提供一燈源,使交替發出一第一種光及一第二種光;當該燈源發出該第一種光時,以一控制器控制一取像單元,在該第一種光的亮度維持在一第一預設亮度的至少一半以上的一第一時間區間時,取得該待測物的一第一影像;及當該燈源發出該第二種光時,以該控制器控制該取像單元,在該第二種光的亮度維持在一第二預設亮度的至少一半以上的一第二時間區間時,取得該待測物的一第二影像。A defect detecting method for obtaining an image of a test object for detecting a defect thereof, comprising: providing a light source to alternately emit a first light and a second light; when the light source sends out In the first type of light, an image capturing unit is controlled by a controller, and when the brightness of the first light is maintained at a first time interval of at least half of the first predetermined brightness, the object to be tested is obtained. a first image; and when the light source emits the second light, the controller controls the image capturing unit to maintain a brightness of the second light at least half of a second predetermined brightness In the second time interval, a second image of the object to be tested is obtained. 如請求項1所述的缺陷檢測方法,其中該控制器還控制該取像單元在該第一時間區間與該第二時間區間之間的一第三時間區間停止取像,或取得該待測物的一第三影像。The defect detecting method of claim 1, wherein the controller further controls the image capturing unit to stop capturing the image in a third time interval between the first time interval and the second time interval, or obtain the to-be-tested a third image of the object. 如請求項2所述的缺陷檢測方法,其中該燈源包含一發出該第一種光的第一發光單元及一發出該第二種光的第二發光單元。The defect detecting method of claim 2, wherein the light source comprises a first light emitting unit that emits the first light and a second light emitting unit that emits the second light. 如請求項3所述的缺陷檢測方法,其中當該第一發光單元被關閉,使得該第一種光的亮度下降至該第一預設亮度的一半以下時,該控制器即控制該第二發光單元被開啟,且當該第二發光單元被關閉,使得該第二種光 的亮度下降至該第二預設亮度的一半以下時,該控制器即控制該第一發光單元被開啟,藉此縮短該第三時間區間。The defect detecting method of claim 3, wherein the controller controls the second when the first lighting unit is turned off such that the brightness of the first type of light falls below half of the first predetermined brightness The light emitting unit is turned on, and when the second light emitting unit is turned off, the second light is turned on The controller controls the first lighting unit to be turned on when the brightness falls below half of the second predetermined brightness, thereby shortening the third time interval. 如請求項1所述的缺陷檢測方法,其中該取像單元被控制在該第一種光的亮度維持在該第一預設亮度的百分之九十以上的該第一時間區間取像,且該取像單元被控制在該第二種光的亮度維持在該第二預設亮度的百分之九十以上的該第二時間區間取像。The defect detecting method of claim 1, wherein the image capturing unit is controlled to take image in the first time interval in which the brightness of the first light is maintained at more than 90% of the first predetermined brightness. And the image capturing unit is controlled to take image in the second time interval in which the brightness of the second light is maintained at more than ninety percent of the second predetermined brightness. 一種缺陷檢測裝置,用以取得一待測物的影像以對其進行缺陷檢測,並包括:一燈源,交替發出一第一種光及一第二種光;一取像單元,用以取得該待測物的一影像;及一控制器,與該取像單元電耦接,並在該燈源發出該第一種光時,控制該取像單元在該第一種光的亮度維持在一第一預設亮度的至少一半以上的一第一時間區間,取得該待測物的一第一影像,且在該燈源發出該第二種光時,控制該取像單元在該第二種光的亮度維持在一第二預設亮度的至少一半以上的一第二時間區間,取得該待測物的一第二影像。A defect detecting device is configured to obtain an image of a test object for defect detection, and includes: a light source alternately emitting a first light and a second light; and an image capturing unit for obtaining An image of the object to be tested; and a controller electrically coupled to the image capturing unit, and controlling the brightness of the image capturing unit to be maintained at the first light when the light source emits the first light Acquiring a first image of the object to be tested at a first time interval of at least half of the first predetermined brightness, and controlling the image capturing unit at the second when the light source emits the second light The brightness of the light is maintained in a second time interval of at least half of the second predetermined brightness to obtain a second image of the object to be tested. 如請求項6所述的缺陷檢測裝置,其中該控制器還控制該取像單元在該第一時間區間與該第二時間區間之間的一第三時間區間停止取像,或取得該待測物的一第三影像。The defect detecting device of claim 6, wherein the controller further controls the image capturing unit to stop capturing the image in a third time interval between the first time interval and the second time interval, or obtain the to-be-tested a third image of the object. 如請求項7所述的缺陷檢測裝置,其中該燈源包含一發 出該第一種光的第一發光單元及一發出該第二種光的第二發光單元。The defect detecting device of claim 7, wherein the light source comprises a hair a first light emitting unit of the first light and a second light emitting unit emitting the second light. 如請求項8所述的缺陷檢測裝置,其中該第一發光單元被關閉,使得該第一種光的亮度下降至該第一預設亮度的一半以下時,該控制器即控制該第二發光單元被開啟,且該第二發光單元被關閉,使得該第二種光的亮度下降至該第二預設亮度的一半以下時,該控制器即控制該第一發光單元被開啟,藉此縮短該第三時間區間。The defect detecting device of claim 8, wherein the first lighting unit is turned off, such that when the brightness of the first type of light falls below half of the first predetermined brightness, the controller controls the second lighting When the unit is turned on, and the second light emitting unit is turned off, such that the brightness of the second light falls below half of the second predetermined brightness, the controller controls the first light emitting unit to be turned on, thereby shortening The third time interval. 如請求項6所述的缺陷檢測裝置,其中該取像單元被控制在該第一種光的亮度維持在該第一預設亮度的百分之九十以上的該第一時間區間取像,且該取像單元被控制在該第二種光的亮度維持在該第二預設亮度的百分之九十以上的該第二時間區間取像。The defect detecting device of claim 6, wherein the image capturing unit is controlled to capture the first time interval in which the brightness of the first type of light is maintained at more than ninety percent of the first predetermined brightness. And the image capturing unit is controlled to take image in the second time interval in which the brightness of the second light is maintained at more than ninety percent of the second predetermined brightness.
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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106556494A (en) * 2015-09-30 2017-04-05 鸿富锦精密工业(武汉)有限公司 Water-leakage detecting system and leakage detection method
CN109991166B (en) * 2019-03-19 2021-08-03 深圳市派科斯科技有限公司 Equipment for detecting product appearance defects and combined light source device and method thereof
CN112763511B (en) * 2020-12-24 2022-07-29 深圳市华星光电半导体显示技术有限公司 Method for detecting line defect of display panel
CN116794064B (en) * 2023-08-25 2023-11-14 霍克视觉科技(苏州)有限公司 Defect detection method applied to monocrystalline silicon round bar

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101051129A (en) * 2006-04-06 2007-10-10 三星电子株式会社 Liquid crystal display apparatus
US20100189339A1 (en) * 2009-01-13 2010-07-29 Semiconductor Technologies & Instruments Pte Ltd System and method for inspecting a wafer
CN101796381A (en) * 2007-08-30 2010-08-04 日本碍子株式会社 Method for inspecting defect of material to be inspected
JP2013053973A (en) * 2011-09-06 2013-03-21 Shimadzu Corp Solar battery cell test equipment
TW201324645A (en) * 2009-01-13 2013-06-16 Semiconductor Tech & Instr Inc System and method for inspecting a wafer (4)
TW201403055A (en) * 2012-07-11 2014-01-16 Inventec Solar Energy Corp Chip detection system and method thereof

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1055589C (en) * 1996-01-10 2000-08-16 浙江大学 CCD quick frequency changing high-speed television camera method and system
CN1303396C (en) * 2003-11-28 2007-03-07 天津大学 Micro-electromechanical system testing device and method based on micro-interference technique
CN2698097Y (en) * 2004-05-12 2005-05-11 上海恒尚自动化设备有限公司 On-line circle optical projection detection device for tobacco industry
CN1710388A (en) * 2004-06-17 2005-12-21 史铁林 3-D measuring apparatus for dynamic property and reliability of microelectromechanic system
CN2901728Y (en) * 2006-01-16 2007-05-16 田果成 Camera capable of output driving LED strobescopic signal
CN101296541B (en) * 2008-06-12 2012-04-18 上海宝康电子控制工程有限公司 Frequency-flashing light source control device
CN101764959A (en) * 2008-12-25 2010-06-30 昆山锐芯微电子有限公司 Image pickup system and image processing method
SG163442A1 (en) * 2009-01-13 2010-08-30 Semiconductor Technologies & Instruments System and method for inspecting a wafer
CN101813994B (en) * 2010-04-16 2012-03-14 华映视讯(吴江)有限公司 Touch position identifying method
JP5846768B2 (en) * 2011-06-07 2016-01-20 株式会社ディスコ Processing equipment
CN102780845A (en) * 2012-06-14 2012-11-14 清华大学 Light source alternate strobe synchronous camera shooting method and vision detection system
CN103442486B (en) * 2013-08-26 2015-06-10 南京工程学院 High-luminance LED strobe lamp
CN104399980B (en) * 2014-12-02 2016-05-18 东北林业大学 Measure and control device and the investigating method thereof of the molten drop course of injection that declines as required based on image processing

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101051129A (en) * 2006-04-06 2007-10-10 三星电子株式会社 Liquid crystal display apparatus
CN101796381A (en) * 2007-08-30 2010-08-04 日本碍子株式会社 Method for inspecting defect of material to be inspected
US20100189339A1 (en) * 2009-01-13 2010-07-29 Semiconductor Technologies & Instruments Pte Ltd System and method for inspecting a wafer
TW201324645A (en) * 2009-01-13 2013-06-16 Semiconductor Tech & Instr Inc System and method for inspecting a wafer (4)
JP2013053973A (en) * 2011-09-06 2013-03-21 Shimadzu Corp Solar battery cell test equipment
TW201403055A (en) * 2012-07-11 2014-01-16 Inventec Solar Energy Corp Chip detection system and method thereof

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