JP5831425B2 - Solar cell inspection equipment - Google Patents

Description

  The present invention relates to a solar cell inspection apparatus that inspects a solar cell after formation of an antireflection film, for example.

  In the production process of solar cells, inspection of defects in the shape of solar cells, defects on the surface, or internal defects is performed.

  In Patent Document 1, laser light is emitted to a semiconductor wafer by a laser light source, an optical image reflected on the surface of the semiconductor wafer is picked up by an image pickup device, and image data of the semiconductor wafer picked up by a defect detection unit is used. A defect inspection apparatus that inspects defects existing on the surface of a semiconductor wafer by extracting defects is disclosed.

  Further, Patent Document 2 discloses an infrared inspection apparatus that irradiates a semiconductor wafer with infrared light from an infrared light source and images the infrared light transmitted through the semiconductor wafer with an infrared camera. This infrared inspection apparatus is configured to detect microcracks inside a semiconductor wafer by utilizing the fact that infrared transmission states are different between an abnormal portion such as a crack and a polycrystalline silicon substrate portion.

JP 2002-122552 A JP 2006-351669 A

  In the manufacturing process of the solar battery cell, the solar battery cell is inspected after the antireflection film is formed. And the printing and baking of an electrode are performed with respect to the photovoltaic cell judged to be non-defective by the test | inspection. This solar cell inspection includes shape defect inspection for inspecting defects such as cracks and chips generated near the edge of the solar cell, particles on the solar cell, pinholes in the antireflection film, reflection There are non-uniformity in the thickness of the protective film, surface defect inspection for inspecting surface defects such as patterns after electrode generation, and internal defect inspection for inspecting internal defects such as microcracks generated inside the solar battery cell.

  Here, at the time of the shape defect inspection described above, imaging is performed by illuminating visible light from the back side of the solar battery cell. Moreover, at the time of the surface defect inspection mentioned above, it image | photographs by illuminating visible light from the surface side of a photovoltaic cell. Furthermore, at the time of the above-described internal defect inspection, infrared light that has been transmitted through the solar cell by irradiating infrared rays from the back side of the solar cell is photographed.

  Conventionally, an inspection apparatus that inspects a shape and a surface state and an inspection apparatus that inspects a microcrack are configured as separate apparatuses because the wavelengths of illumination light to be used are different. For this reason, in order to perform the inspection of the shape using visible light or the inspection of the surface condition, and the inspection of micro cracks using infrared light, a plurality of devices are required, so the inspection is costly. In addition, there is a problem that not only the area occupied by the apparatus increases, but also the inspection takes time.

  This invention was made in order to solve the said subject, and the test | inspection apparatus of the photovoltaic cell which can perform the test | inspection using infrared light, and the test | inspection using visible light by a single apparatus. The purpose is to provide.

  The invention according to claim 1 is a solar cell inspection device that inspects solar cells, the first light irradiation unit irradiating infrared light toward the first surface of the solar cells, and A directivity changing member that directs the irradiation direction of infrared light emitted from the first light irradiation unit toward the edge direction of the solar battery cell, and infrared light whose directivity has been changed by the directivity changing member can pass therethrough. A diffuse reflector having a frame-like shape in which a small opening is formed, the size of the opening is smaller than the size of the first light irradiator, and the size of the outer periphery is larger than that of the solar battery cell, and the diffuse reflector A second light irradiating unit that irradiates visible light with respect to the first light irradiating unit, and the solar cell is moved from the first surface side to the second surface side opposite to the first surface. Irradiated from the first measurement unit that measures the transmitted infrared light and the second light irradiation unit. A second measuring unit that measures visible light transmitted from the first surface side to the second surface side in the vicinity of an edge of the solar battery cell after being reflected by the diffuse reflector; and the first measuring unit. Based on the measured infrared light image, an internal defect determination unit that determines an internal defect of the solar cell, and an edge of the solar cell based on the visible light image measured by the second measurement unit And a shape defect determination unit for determining a defect in the shape near the edge.

  Invention of Claim 2 is further provided with the 3rd light irradiation part which irradiates visible light with respect to the 2nd surface of the said photovoltaic cell in invention of Claim 1, The said internal defect determination part is An image of visible light measured by the second measuring unit and an image of infrared light measured by the first measuring unit irradiated from the third light irradiating unit and reflected by the second surface of the solar cell. Are compared to determine the internal defects of the solar battery cell.

  According to a third aspect of the present invention, in the second aspect of the present invention, the visible light emitted from the third light irradiation unit is blue light.

  Invention of Claim 4 is irradiated from the 4th light irradiation part which irradiates visible light with respect to the 2nd surface of the said photovoltaic cell in the invention of Claim 1, and the said 4th light irradiation part. And a surface defect measuring unit that measures defects on the surface of the solar cell based on an image of visible light obtained by measuring the visible light reflected by the second surface of the solar cell by the second measuring unit.

  The invention according to claim 5 is the invention according to claim 4, wherein the visible light emitted from the fourth light irradiation unit is red light.

  The invention according to claim 6 is the invention according to claim 5, wherein the visible light emitted from the fourth light irradiator includes green light and blue light in addition to red light, and the second measurement. The film thickness of the antireflection film formed on the surface of the solar battery cell is measured based on the visible light image measured by the unit.

  The invention according to claim 7 is the invention according to claim 1, wherein the solar cell is irradiated from the first light irradiating unit from the first surface side to the second surface opposite to the first surface. Infrared light transmitted to the side is guided to the first measurement unit, and is irradiated from the second light irradiation unit and reflected by the diffuse reflection plate, and then the vicinity of the edge of the solar battery cell from the first surface side. A beam splitter that guides visible light transmitted to the second surface side to the second measurement unit;

  According to the first aspect of the present invention, it is possible to execute the internal defect inspection using infrared light and the shape defect inspection using visible light by a single device. At this time, by the action of the frame-shaped diffuse reflector, the infrared light from the edge of the solar cell is prevented from wrapping around, enabling the inspection of internal defects throughout the solar cell, and the visible light to the solar cell. It is possible to suitably irradiate the vicinity of the edge of the cell.

  According to the invention described in claim 2, by comparing the reflected image by visible light and the transmitted image by infrared light, the crystal grain boundary and the microcrack of the solar battery cell can be identified, and the solar battery It becomes possible to more accurately determine the defects inside the cell.

  According to the third aspect of the present invention, it is possible to recognize the reflected image at high speed and accurately with blue light.

  According to the invention described in claim 4, the internal defect inspection, the shape defect inspection, and the surface defect inspection can be performed by a single apparatus, and the cost and time required for the inspection can be minimized. It becomes.

  According to the fifth aspect of the present invention, the surface defect inspection can be performed without being affected by the crystal grain boundary of the solar battery cell by the red light.

  According to invention of Claim 6, it becomes possible to measure the film thickness of the anti-reflective film formed in the surface of the photovoltaic cell.

  According to the seventh aspect of the present invention, the apparatus can be easily adjusted, and the infrared light image measured by the first measuring unit and the visible light image measured by the second measuring unit can be adjusted. The accuracy can be improved.

1 is a schematic diagram of a solar cell inspection apparatus according to the present invention. It is a schematic diagram which shows the 1st light irradiation part 11, the 2nd light irradiation part 12, and the 3rd light irradiation part 13 with the photovoltaic cell 100 grade | etc.,. FIG. 4 is a plan view showing a positional relationship among the solar battery cell 100, the first light irradiation unit 11, the diffuse reflector 22 and the second light irradiation unit 12. It is a block diagram which shows the control system of the inspection apparatus of the photovoltaic cell concerning this invention. 3 is a schematic diagram showing an infrared transmission image of solar battery cell 100. FIG. FIG. 3 is a schematic diagram showing a blue light reflection image of solar battery cell 100.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram of a solar cell inspection apparatus according to the present invention.

  This solar cell inspection apparatus is for inspecting a solar cell 100 having an antireflection film formed on the surface thereof in the previous film formation step, and the back surface (first surface) of the solar cell 100. As a directivity changing member that directs the irradiation direction of the infrared light emitted from the first light irradiation unit 11 toward the edge direction of the solar battery cell 100, the first light irradiation unit 11 that emits infrared light toward A diffuse reflector 22 having a frame-like shape formed with an opening 23 through which infrared light whose directivity is changed by the Fresnel lens 21 can be passed, and the diffuse reflector 22 A second light irradiating unit 12 that irradiates red light of visible light, a third light irradiating unit 13 that irradiates blue light of visible light to the surface (second surface) of the solar battery cell, Visible light (red light) against the surface of the solar cell The fourth light irradiating unit 14 for irradiating blue light and green light), the first CCD camera 31 for observing infrared light, the second CCD camera 32 for observing visible light, and the solar cell 100 on the back surface. Infrared light transmitted from the side toward the surface side is reflected and guided to the first CCD camera 31, and visible light reflected by the surface of the solar battery cell 100 and visible light that has passed near the edge of the solar battery cell 100 are reflected. And a beam splitter 33 including a dichroic mirror that passes through and is guided to the second CCD camera 32.

  As shown in this figure, the fourth light irradiation unit 14 includes a blue light source 41 that emits blue light having a wavelength of about 470 nm, a green light source 42 that emits green light having a wavelength of about 525 nm, and a wavelength thereof. A red light source 43 that emits red light of about 640 nm and a dome-shaped reflective diffusion plate 44 that covers the upper part of the solar battery cell 100 and irradiates the surface of the solar battery cell 100 with uniform light intensity are provided. The blue light source 41, the green light source 42, and the red light source 43 are arranged at equal intervals on the circumference in a plane parallel to the solar battery cell 100. An opening 45 is formed above the reflective diffusion plate 44.

  In the fourth light irradiation unit 14, when the blue light source 41 is turned on, the blue light is reflected by the reflective diffusion plate 44, and then the entire surface of the solar battery cell 100 is uniformly irradiated. Further, when the green light source 42 is turned on, the green light is reflected by the reflective diffusion plate 44, and then the entire surface of the solar battery cell 100 is irradiated uniformly. Further, when the red light source 43 is turned on, the red light is reflected by the reflective diffusion plate 44 and then the entire surface of the solar cell 100 is irradiated uniformly.

  FIG. 2 is a schematic diagram showing the above-described first light irradiation unit 11, second light irradiation unit 12, and third light irradiation unit 13 together with the solar battery cell 100 and the like.

  The first light irradiation unit 11 includes a plurality of LED elements 51 that emit infrared light arranged in a region facing the solar battery cell 100. A Fresnel lens 21 is disposed on the upper surface of the first light irradiation unit 11 to direct the irradiation direction of the infrared light emitted from each LED element 51 in the first light irradiation unit 11 toward the edge of the solar battery cell 100. Has been. A frame-shaped diffuse reflector 22 is disposed above the Fresnel lens 21. The diffuse reflector 22 has a frame shape in which an opening 23 through which infrared light from the Fresnel lens 21 can pass is formed, and each LED in the first light irradiation unit 11 is in a region other than the opening 23. The infrared light emitted from the element 51 is blocked. The upper surface of the diffusive reflecting plate 22 is a light diffusing surface that diffuses the light applied thereto.

  The second light irradiation unit 12 includes a plurality of LED elements 52 that emit red light having a wavelength of about 640 nm arranged in a row so as to face the diffusion reflection plate 22 above the frame-like diffusion reflection plate 22. The red light emitted from each LED element 52 in the second light irradiating unit 12 is irradiated and diffused on the surface of the diffuse reflector 22 and is irradiated near the edge of the solar battery cell 100.

  The third light irradiation unit 13 includes a plurality of LED elements 53 that are arranged obliquely above the solar battery cell 100 and emit blue light having a wavelength of about 470 nm. Blue light emitted from each LED element 53 in the third light irradiation unit 13 is irradiated to the entire surface of the solar battery cell 100.

  FIG. 3 is a plan view showing an arrangement relationship among the solar battery cell 100, the first light irradiation unit 11, the diffuse reflector 22, and the second light irradiation unit 12.

  As shown in this figure, the 1st light irradiation part 11, the Fresnel lens 21, and the photovoltaic cell 100 are carrying out the mutually similar rectangular shape, and the size of the 1st light irradiation part 11 and the Fresnel lens 21 is as follows. It is slightly smaller than the size of the solar battery cell 100. In addition, the diffuse reflection plate 22 has a size of the opening 23 smaller than the size of the first light irradiation unit 11 and the Fresnel lens 21 and a size of the outer peripheral part larger than that of the solar battery cell 100. And the 2nd light irradiation part 12 is arrange | positioned so that the diffused reflection board 22 may be surrounded.

  FIG. 4 is a block diagram showing a control system of the solar cell inspection apparatus according to the present invention.

  This solar cell inspection device is a computer having a storage device such as a CPU that executes logical operations, a ROM that stores an operation program necessary for controlling the device, and a RAM that temporarily stores data during control. And a control unit 60 that controls the entire apparatus. The control unit 60 is connected to the first light irradiation unit 11, the second light irradiation unit 12, the third light irradiation unit 13, the fourth light irradiation unit 14, the first CCD camera 31, and the second CCD camera 32 described above. .

  The control unit 60 includes an image of visible light obtained by measuring the blue light irradiated from the third light irradiation unit 13 and reflected from the surface of the solar battery cell 100 by the second CCD camera 32, and the solar light irradiated from the first light irradiation unit 11. By comparing the infrared light transmitted through the battery cell 100 with an image of the infrared light measured by the first CCD camera 31, an internal defect determination unit 61 that determines a defect inside the solar battery cell 100 is provided. In addition, the control unit 60 is visible light obtained by measuring, with the second CCD camera 32, red light that has been irradiated from the second light irradiation unit 12, reflected by the diffuse reflector 22, and passed near the edge of the solar battery cell 100. A shape defect determination unit 62 that determines a shape defect near the edge of the solar battery cell 100 based on the image of FIG. In addition, the control unit 60 has the surface of the solar battery cell 100 based on the visible light image obtained by measuring the red light irradiated from the fourth light irradiation unit 14 and reflected by the surface of the solar battery cell 100 with the second CCD camera 32. The surface defect determination part 63 which measures the defect of this is provided. Further, the control unit 60 is based on an image of visible light obtained by measuring the red light, the green light, and the blue light reflected by the surface of the solar battery cell 100 irradiated from the fourth light irradiation unit 14 with the second CCD camera 32. And a film thickness measuring unit 64 for measuring the film thickness of the antireflection film formed on the surface of the solar battery cell.

  When the inspection of the solar battery cell 100 is performed in the solar cell inspection apparatus having the above-described configuration, the solar battery cell 100 is transported to the inspection position as shown in FIG. 1 by a transport mechanism (not shown). . In this state, irradiation of infrared light to the entire back surface of the solar battery cell 100 by the first light irradiation unit 11 and the vicinity of the edge of the solar battery cell 100 through the diffuse reflector 22 by the second light irradiation unit 12 The irradiation of red light on the surface, the irradiation of blue light to the entire surface of the solar cell 100 by the third light irradiation unit 13, and the blue light and green on the entire surface of the solar cell 100 by the fourth light irradiation unit 14 Irradiation of light and red light is sequentially performed, and infrared light reflected by the beam splitter 33 is observed by the first CCD camera 31, and visible light passing through the beam splitter 33 is observed by the second CCD camera 32, respectively. To do. Thereby, as will be described later, internal defect determination, shape defect determination, surface defect determination, and measurement of the thickness of the antireflection film in the solar battery cell 100 are executed.

  The second CCD camera 32 emits an image of red light emitted from the second light irradiation unit 12 and passed near the edge of the solar battery cell 100 and reflected from the surface of the solar battery cell 100 emitted from the third light irradiation unit 13. The reflected image of blue light and the reflected image of visible light emitted from the fourth light irradiation unit 14 and reflected by the surface of the solar battery cell 100 are measured. In this case, the control unit 60 sequentially turns on the blue light source 41, the green light source 42, and the red light source 43 of the second light irradiation unit 12, the third light irradiation unit 13, and the fourth light irradiation unit 14 and turns them on. In this manner, various types of data are identified and acquired by controlling the image capture by the second CCD camera 32 in synchronization with the image data.

  The above-described internal defect determination is executed as follows. That is, the infrared light emitted from each LED element 51 of the first light irradiation unit 11 is directed to the edge direction of the solar battery cell 100 by the Fresnel lens 21, and the irradiation region is framed. The back surface of the solar battery cell 100 is irradiated by being limited by the diffuse reflector 22 having the shape of In this case, the irradiation region of the infrared light irradiated from the first light irradiation unit 11 on the solar battery cell 100 is adjusted so that the shape of the opening 23 in the diffusive reflector 22 is appropriate. It is possible to accurately match the entire back surface of 100. And this infrared light is made into the direction which goes to the outer side of the photovoltaic cell 100 about the directivity. Accordingly, it is possible to prevent the infrared light irradiated near the edge of the solar battery cell 100 from flowing from the edge of the solar battery cell 100 to the surface side. For this reason, when this infrared transmission image is imaged by the first CCD camera 31, it is possible to accurately recognize the image near the edge of the solar battery cell 100.

  That is, when the infrared light irradiated to the vicinity of the edge of the solar battery cell 100 wraps around from the edge of the solar battery cell 100 to the surface side, when this infrared transmission image is photographed by the first CCD camera 31 In addition, there is a problem that an image near the edge of the solar battery cell 100 cannot be recognized due to halation or the like. For this reason, a countermeasure to weaken the intensity of the infrared light irradiated near the edge of the solar battery cell 100 is also conceivable. However, when such a countermeasure is taken, the first light irradiating unit 11 starts the solar battery cell. There arises a problem that the infrared light irradiated to 100 does not transmit from the back side to the front side of the corresponding battery cell. For this reason, in the solar cell inspection apparatus according to the present invention, the infrared light applied to the solar cell 100 is set to have a directivity toward the outside of the solar cell 100 by the Fresnel lens 21, and a frame shape. By appropriately managing the irradiation area by the diffuse reflection plate 22 having the shape of the above, occurrence of the problem due to the wraparound of the infrared light described above is prevented.

  FIG. 5 is a schematic diagram showing an infrared transmission image of the solar battery cell 100 photographed in this way.

  As shown in this figure, the microcrack 103 is shown in the infrared transmission image of the solar battery cell 100. On the other hand, since the solar battery cell 100 is composed of a large number of crystal grains 101, the crystal grain boundary 102 is also reflected in the infrared transmission image. For this reason, it may be difficult to distinguish between the crystal grain boundaries 102 and the microcracks 103. In order to cope with such a problem, in this solar cell inspection apparatus, a configuration in which the microcracks 103 are accurately extracted and recognized using the reflected image of the blue light emitted from the third light irradiation unit 13 is recognized. Is adopted.

  FIG. 6 is a schematic diagram showing a blue light reflection image of the solar battery cell 100.

  When the surface of the solar battery cell 100 is irradiated with blue light from each LED element 53 of the third light irradiation unit 13 and the reflected image is measured, as shown in FIG. The grain boundary 102 is projected. Therefore, it is possible to accurately determine the presence or absence of internal defects such as the microcracks 103 by comparing the infrared transmission image of the solar battery cell 100 shown in FIG. 5 with the reflected image of blue light shown in FIG. It becomes. The internal defect determination unit 61 in the control unit 60 shown in FIG. 4 determines the internal defect of the solar battery cell 100 by comparing the transmission image using infrared light and the reflection image using visible light.

  In addition, when determining the defect inside the photovoltaic cell 100, the blue light is used especially in the visible light, and the crystal grains are used in a short time by using the strong blue light. This is because the field 102 can be clearly displayed.

  Further, the shape defect determination described above is executed as follows. That is, the red light emitted from each LED element 52 of the second light irradiation unit 12 is reflected and diffused by the diffusive reflecting plate 22, and then passes near the edge of the solar battery cell 100. By measuring this red light with the second CCD camera 32, it becomes possible to inspect defects having a shape such as a crack or a chip generated near the edge of the solar battery cell 100. This shape defect determination is executed by the shape defect determination unit 62 in the control unit 60 shown in FIG.

  At this time, when the red light irradiated to the vicinity of the edge of the solar battery cell 100 wraps around from the edge of the solar battery cell 100 to the surface side, the image near the edge of the solar battery cell 100 is caused by halation or the like. The problem of being unable to recognize occurs. For this reason, at the time of determining the shape defect, the occurrence of such a problem is prevented by setting the intensity of the red light irradiated from the second light irradiation unit 12 to an intensity that does not cause halation. At this time, when the intensity of the red light emitted from each LED element 52 of the second light irradiation unit 12 is made small, the image of these LED elements 52 is recognized by the second CCD camera 32 as it is. There is. However, in the solar cell inspection apparatus according to the present invention, the red light emitted from the second light irradiation unit 12 is diffused and reflected by the diffuse reflector 22 and then irradiated to the vicinity of the edge of the solar cell 100. Therefore, it is possible to effectively prevent the occurrence of such a problem.

  Further, the above-described surface defect determination is executed as follows. That is, red light is emitted from the red light source 43 in the fourth light irradiation unit 14, and the red light is reflected by the reflection-type diffusion plate 44 so as to uniformly irradiate the entire surface of the solar battery cell 100. And it becomes possible to test | inspect the surface defect of the photovoltaic cell 100 by image | photographing the red light reflected on the surface of the photovoltaic cell 100 with the 2nd CCD camera 32. FIG. This surface defect determination is executed by the surface defect determination unit 63 in the control unit 60 shown in FIG.

  In addition, when determining the defect of the surface of the photovoltaic cell 100, especially the red light is utilized among visible lights, when the surface defect is determined, the photovoltaic cell 100 is displayed on the reflected image of visible light. This is for preventing the crystal grain boundary 102 from being projected.

  Furthermore, the film thickness measurement described above is performed as follows. That is, the blue light source 41, the green light source 42, and the red light source 43 in the fourth light irradiation unit 14 are sequentially turned on, and the reflected image of the solar battery cell 100 by the blue light and the reflection of the solar battery cell 100 by the green light. An image and a reflected image of the solar battery cell 100 with red light are obtained. Then, the film thickness of the antireflection film is calculated based on the relative intensity ratio (spectrum) of the three reflection images thus obtained. This film thickness measurement is executed by the film thickness measuring unit 64 in the control unit 60 shown in FIG.

  In the embodiment described above, the internal defect determination, the shape defect determination, the surface defect determination, and the film thickness measurement are performed by a single device. Therefore, the area occupied by the apparatus can be reduced, and the time required for the inspection can be shortened. However, the surface defect determination and the film thickness measurement may be performed by different apparatuses.

  In the above-described embodiment, the infrared light transmitted through the solar battery cell 100 from the back surface side to the front surface side is reflected and guided to the first CCD camera 31, and the visible light reflected from the surface of the solar battery cell 100 is reflected. In addition, by using a beam splitter 33 formed of a dichroic mirror that allows visible light that has passed through the vicinity of the edge of the solar battery cell 100 to be guided to the second CCD camera 32, a corresponding CCD for infrared light and visible light on the same axis. Guides to the camera. However, infrared light and visible light may be guided to corresponding CCD cameras along different axes.

  Further, in the above-described embodiment, the third light irradiation unit is used to more accurately determine the presence / absence of internal defects such as the microcracks 103 by comparing the infrared transmission image of the solar battery cell 100 with the reflected image of blue light. 13 is used to irradiate the surface of the solar battery cell 100 with blue light. However, you may make it abbreviate | omit the 3rd light irradiation part 13 by obtaining the reflective image by the blue light of the photovoltaic cell 100 using the blue light from the blue light source 41 in the 4th light irradiation part 14. FIG.

DESCRIPTION OF SYMBOLS 11 1st light irradiation part 12 2nd light irradiation part 13 3rd light irradiation part 14 4th light irradiation part 21 Fresnel lens 22 Diffuse reflector 23 Opening part 31 1st CCD camera 32 2nd CCD camera 33 Beam splitter 41 Blue light source 42 Green Light source 43 Red light source 44 Reflective diffuser 45 Opening 51 LED element 52 LED element 53 LED element 60 Control unit 61 Internal defect determination unit 62 Shape defect determination unit 63 Surface defect determination unit 64 Film thickness measurement unit 100 Solar cell 101 Crystal Grain 102 Grain boundary 103 Microcrack

Claims (7)

A solar cell inspection device for inspecting solar cells,
A first light irradiation unit that irradiates infrared light toward the first surface of the solar battery cell;
A directivity changing member that directs the irradiation direction of the infrared light irradiated from the first light irradiation unit toward the edge direction of the solar cell;
An opening through which infrared light whose directivity has been changed by the directivity changing member is formed is formed, the size of the opening is smaller than the size of the first light irradiation unit, and the size of the outer peripheral part is the solar cell. A diffuse reflector having a frame shape larger than the cell;
A second light irradiation unit for irradiating visible light to the diffuse reflector;
A first measurement unit that measures infrared light irradiated from the first light irradiation unit and transmitted through the solar cell from the first surface side to the second surface side opposite to the first surface;
A second method for measuring visible light that has been irradiated from the second light irradiation unit and reflected by the diffuse reflector and then transmitted from the first surface side to the second surface side near the edge of the solar battery cell. A measuring section;
Based on the infrared light image measured by the first measurement unit, an internal defect determination unit that determines an internal defect of the solar battery cell;
Based on the visible light image measured by the second measurement unit, a shape defect determination unit that determines a shape defect near the edge of the solar battery cell;
A solar cell inspection apparatus comprising: In the inspection apparatus of the photovoltaic cell according to claim 1,
A third light irradiating unit for irradiating the second surface of the solar battery cell with visible light;
The internal defect determination unit includes a visible light image obtained by measuring the visible light irradiated from the third light irradiation unit and reflected by the second surface of the solar battery cell with the second measurement unit, and the first measurement unit. A solar cell inspection device that determines defects inside the solar cell by comparing the measured infrared light image. In the inspection apparatus of the photovoltaic cell according to claim 2,
The visible light irradiated from the third light irradiation unit is a blue cell inspection device. In the inspection apparatus of the photovoltaic cell according to claim 1,
A fourth light irradiation unit for irradiating visible light to the second surface of the solar battery cell;
Based on the visible light image obtained by measuring the visible light irradiated from the fourth light irradiation unit and reflected by the second surface of the solar cell by the second measurement unit, the surface defect of the solar cell is measured. A surface defect measurement unit;
A solar cell inspection apparatus further comprising: In the inspection apparatus of the photovoltaic cell according to claim 4,
The visible light irradiated from the fourth light irradiation unit is a solar cell inspection device that is red light. In the inspection apparatus of the photovoltaic cell according to claim 5,
Visible light emitted from the fourth light irradiation unit includes green light and blue light in addition to red light,
A solar cell inspection apparatus that measures the film thickness of an antireflection film formed on the surface of a solar cell based on an image of visible light measured by the second measurement unit. In the inspection apparatus of the photovoltaic cell according to claim 1,
Infrared light irradiated from the first light irradiation unit and transmitted through the solar cell from the first surface side to the second surface side opposite to the first surface is guided to the first measurement unit, and Visible light transmitted from the first surface side to the second surface side near the edge of the solar cell after being irradiated from the second light irradiation unit and reflected by the diffuse reflector is guided to the second measurement unit. A solar cell inspection apparatus including a beam splitter.

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