CN102978622B - 蚀刻装置及蚀刻工艺 - Google Patents
蚀刻装置及蚀刻工艺 Download PDFInfo
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- CN102978622B CN102978622B CN201210457789.4A CN201210457789A CN102978622B CN 102978622 B CN102978622 B CN 102978622B CN 201210457789 A CN201210457789 A CN 201210457789A CN 102978622 B CN102978622 B CN 102978622B
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- Manufacturing Of Printed Circuit Boards (AREA)
- ing And Chemical Polishing (AREA)
Abstract
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Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210457789.4A CN102978622B (zh) | 2012-11-14 | 2012-11-14 | 蚀刻装置及蚀刻工艺 |
Applications Claiming Priority (1)
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CN201210457789.4A CN102978622B (zh) | 2012-11-14 | 2012-11-14 | 蚀刻装置及蚀刻工艺 |
Publications (2)
Publication Number | Publication Date |
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CN102978622A CN102978622A (zh) | 2013-03-20 |
CN102978622B true CN102978622B (zh) | 2014-10-29 |
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CN201210457789.4A Expired - Fee Related CN102978622B (zh) | 2012-11-14 | 2012-11-14 | 蚀刻装置及蚀刻工艺 |
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CN (1) | CN102978622B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103409752B (zh) * | 2013-07-18 | 2015-10-14 | 新奥光伏能源有限公司 | 一种湿法刻蚀设备及湿法刻蚀方法 |
CN104846375A (zh) * | 2015-06-09 | 2015-08-19 | 成都虹华环保科技股份有限公司 | 一种喷吹蚀刻装置 |
CN111556661B (zh) * | 2020-05-22 | 2021-04-23 | 广州冰钫商贸有限公司 | 一种pcb板蚀刻机 |
CN117241483B (zh) * | 2023-10-25 | 2024-04-12 | 广东达源设备科技有限公司 | 用于电路板生产的喷淋装置和方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04312740A (ja) * | 1991-04-10 | 1992-11-04 | Dainippon Printing Co Ltd | シャドウマスクの製造方法 |
JP2009206392A (ja) * | 2008-02-29 | 2009-09-10 | Seiko Epson Corp | 表面処理装置、表面処理方法 |
CN201978840U (zh) * | 2011-03-30 | 2011-09-21 | 中铁一局集团有限公司 | 双块式轨枕模具用脱模剂自动喷淋装置 |
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2012
- 2012-11-14 CN CN201210457789.4A patent/CN102978622B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04312740A (ja) * | 1991-04-10 | 1992-11-04 | Dainippon Printing Co Ltd | シャドウマスクの製造方法 |
JP2009206392A (ja) * | 2008-02-29 | 2009-09-10 | Seiko Epson Corp | 表面処理装置、表面処理方法 |
CN201978840U (zh) * | 2011-03-30 | 2011-09-21 | 中铁一局集团有限公司 | 双块式轨枕模具用脱模剂自动喷淋装置 |
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Publication number | Publication date |
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CN102978622A (zh) | 2013-03-20 |
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: DONGUAN VERY GOOD BOARD EQUIPMENT CO., LTD. Free format text: FORMER OWNER: DONGGUAN WUZHU ELECTRONIC-TECH CO., LTD. Effective date: 20150507 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 523303 DONGGUAN, GUANGDONG PROVINCE TO: 523000 DONGGUAN, GUANGDONG PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20150507 Address after: 523000 Shijie, Dongguan, Liu Zhen Town, No. science and technology road, No. 161 Patentee after: Dongguan Weiligu Circuit Board Equipment Co., Ltd. Address before: 523303 No. 161 middle technology road, Liu Zhen, Shijie Town, Dongguan, Guangdong Patentee before: Dongguan Wuzhu Electronic Technology Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141029 Termination date: 20171114 |
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CF01 | Termination of patent right due to non-payment of annual fee |