CN102971331B - 涂布液、光学部件的制造方法和摄影光学系统 - Google Patents

涂布液、光学部件的制造方法和摄影光学系统 Download PDF

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Publication number
CN102971331B
CN102971331B CN201180030357.9A CN201180030357A CN102971331B CN 102971331 B CN102971331 B CN 102971331B CN 201180030357 A CN201180030357 A CN 201180030357A CN 102971331 B CN102971331 B CN 102971331B
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CN
China
Prior art keywords
fluorine
film
optical
magnesium
coating
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Expired - Fee Related
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CN201180030357.9A
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English (en)
Chinese (zh)
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CN102971331A (zh
Inventor
田中博幸
小林本和
榊原悌互
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Publication of CN102971331A publication Critical patent/CN102971331A/zh
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Expired - Fee Related legal-status Critical Current
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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C33/00—Unsaturated compounds having hydroxy or O-metal groups bound to acyclic carbon atoms
    • C07C33/02—Acyclic alcohols with carbon-to-carbon double bonds
    • C07C33/025—Acyclic alcohols with carbon-to-carbon double bonds with only one double bond
    • C07C33/035—Alkenediols
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00—Compounds containing elements of Groups 2 or 12 of the Periodic Table
    • C07F3/003—Compounds containing elements of Groups 2 or 12 of the Periodic Table without C-Metal linkages
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
    • C07C39/02—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring monocyclic with no unsaturation outside the aromatic ring
    • C07C39/08—Dihydroxy benzenes; Alkylated derivatives thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Paints Or Removers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
CN201180030357.9A 2010-06-24 2011-06-20 涂布液、光学部件的制造方法和摄影光学系统 Expired - Fee Related CN102971331B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-144280 2010-06-24
JP2010144280 2010-06-24
PCT/JP2011/064610 WO2011162400A2 (en) 2010-06-24 2011-06-20 Coating liquid, method for manufacturing optical component, and photographic optical system

Publications (2)

Publication Number Publication Date
CN102971331A CN102971331A (zh) 2013-03-13
CN102971331B true CN102971331B (zh) 2015-11-25

Family

ID=44514911

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180030357.9A Expired - Fee Related CN102971331B (zh) 2010-06-24 2011-06-20 涂布液、光学部件的制造方法和摄影光学系统

Country Status (5)

Country Link
US (1) US9227897B2 (https=)
EP (1) EP2585471A2 (https=)
JP (1) JP5843491B2 (https=)
CN (1) CN102971331B (https=)
WO (1) WO2011162400A2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140147594A1 (en) * 2012-11-27 2014-05-29 Intermolecular Inc. Magnesium Fluoride and Magnesium Oxyfluoride based Anti-Reflection Coatings via Chemical Solution Deposition Processes
JP6768346B2 (ja) * 2016-05-12 2020-10-14 キヤノン株式会社 光学膜
JP6818433B2 (ja) * 2016-05-12 2021-01-20 キヤノン株式会社 トリフルオロ酢酸マグネシウムゾル溶液
JP6961775B2 (ja) * 2016-05-12 2021-11-05 キヤノン株式会社 光学膜
US11332824B2 (en) * 2016-09-13 2022-05-17 Lam Research Corporation Systems and methods for reducing effluent build-up in a pumping exhaust system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4492721A (en) * 1983-05-10 1985-01-08 U.S. Philips Corporation Method of providing magnesium fluoride layers
JP2001031681A (ja) * 1999-07-16 2001-02-06 Noritake Co Ltd 金属有機化合物および金属酸化物膜形成方法
EP1150345A2 (en) * 2000-04-28 2001-10-31 Asm Japan K.K. Fluorine-containing materials and processes
CN1410588A (zh) * 2001-09-20 2003-04-16 新明和工业株式会社 卤素化合物的成膜方法及成膜装置和氟化镁膜
CN1420203A (zh) * 2001-11-15 2003-05-28 旭电化工业株式会社 薄膜的制造方法及化学气相成长用原料
CN1989427A (zh) * 2004-09-16 2007-06-27 尼康股份有限公司 具有非晶质氧化硅结合剂的MgF2光学薄膜与具备该薄膜的光学组件，及该MgF2光学薄膜的制造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5165960A (en) * 1991-07-29 1992-11-24 Ford Motor Company Deposition of magnesium fluoride films
FR2727103B1 (fr) * 1994-11-23 1996-12-27 Kodak Pathe Procede de preparation des halogenures metalliques par voie sol-gel
JP5243221B2 (ja) 2008-12-18 2013-07-24 北越紀州製紙株式会社 多層繊維シート及びその製造方法
EP2325675A2 (en) * 2009-07-30 2011-05-25 Canon Kabushiki Kaisha Method for producing optical film, optical film, and optical component

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4492721A (en) * 1983-05-10 1985-01-08 U.S. Philips Corporation Method of providing magnesium fluoride layers
JP2001031681A (ja) * 1999-07-16 2001-02-06 Noritake Co Ltd 金属有機化合物および金属酸化物膜形成方法
EP1150345A2 (en) * 2000-04-28 2001-10-31 Asm Japan K.K. Fluorine-containing materials and processes
CN1410588A (zh) * 2001-09-20 2003-04-16 新明和工业株式会社 卤素化合物的成膜方法及成膜装置和氟化镁膜
CN1420203A (zh) * 2001-11-15 2003-05-28 旭电化工业株式会社 薄膜的制造方法及化学气相成长用原料
CN1989427A (zh) * 2004-09-16 2007-06-27 尼康股份有限公司 具有非晶质氧化硅结合剂的MgF2光学薄膜与具备该薄膜的光学组件，及该MgF2光学薄膜的制造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Sol-gel processing and characterization of alkaline earth and rare-earth fluoride thin films;Munehiro Tada et al;《J. Mater. Res.》;19981019;第14卷(第4期);第1610-1616 *

Also Published As

Publication number Publication date
WO2011162400A3 (en) 2012-03-01
CN102971331A (zh) 2013-03-13
US9227897B2 (en) 2016-01-05
JP2012025937A (ja) 2012-02-09
JP5843491B2 (ja) 2016-01-13
US20130094090A1 (en) 2013-04-18
WO2011162400A2 (en) 2011-12-29
EP2585471A2 (en) 2013-05-01

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Granted publication date: 20151125