CN102936717A - Compact and efficient cold cathode arc source of quasi diffusion arc - Google Patents
Compact and efficient cold cathode arc source of quasi diffusion arc Download PDFInfo
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- CN102936717A CN102936717A CN2012104443141A CN201210444314A CN102936717A CN 102936717 A CN102936717 A CN 102936717A CN 2012104443141 A CN2012104443141 A CN 2012104443141A CN 201210444314 A CN201210444314 A CN 201210444314A CN 102936717 A CN102936717 A CN 102936717A
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Abstract
The invention relates to the technical field of preparation of films and coatings, particularly to a compact and efficient cold cathode arc source of a quasi diffusion arc. The cold cathode arc source is composed of an arc source head and a control magnetic field group, wherein the arc source head comprises a target, a target base, a target base shielding cover, a target base plate, an arc striking device and a permanent magnet device; the control magnetic field group comprises a flange sleeve, a flange sleeve insulating bush, a dipolar radial rotating magnetic filed generating device, an axial focusing guiding magnetic field generating device, a coaxial focusing magnetic field magnetic yoke and a flange sleeve shielding cover; and the arc source head is connected with the bottom of the flange sleeve through the target base plate to form a whole arc source structure, and connected with a finance through a flange arranged in front of the flange sleeve. Arc spots are distributed on the whole target surface under the comprehensive action of a certain magnetic field intensity and rotary frequency, the power density of the arc spots is reduced, the quasi diffusion arc state is achieved, launch of large grains is reduced, simultaneously, purified high-density plasmas are extracted through the axial focusing guiding magnetic field, and the transmission efficiency is improved.
Description
Technical field
The present invention relates to the films and coatings preparing technical field, specifically a kind of standard of compact efficient diffusion arc cold cathode arc source.
Background technology
The arc ion plating membrane technique is current a kind of advanced person's ion-plating technique, because it is simple in structure, ionization level is high, projectile energy is high, diffraction is good, can realize the series of advantages such as low temperature depositing, arc ion plating (aip) is rapidly developed and obtains widespread use, show very large economic benefit and prospects for commercial application, particularly plate the trace that market segment can be seen arc ion plating everywhere in decoration plating and tool and mould.But oarse-grained injection has caused the film surface pollution, cause the roughness on surface to increase and the gloss of reduction film, decoration and wear-resistant application are brought disadvantageous effect, have a strong impact on the quality of film, cause the coating adhesion reduction and peeling phenomenon occurs, coating is serious inhomogeneous etc.The high ionization level of arc ion plating, the outstanding advantages of low temperature depositing makes it plate the not available advantage of other plated film modes that shows at tool and mould, but the characteristics of arc-over are so that oarse-grained existence becomes the obstruction of tool and mould plating, also become and hinder the bottleneck problem that arc ion plating (aip) more gos deep into widespread use.
At present, use many and the reasonable measure of effect is that magnetic filters, the employing of magnetic filtering technique, although effectively eliminated oarse-grained pollution, but because plasma body is in the loss of transmission course, sedimentation rate is decrease also, the transmission efficiency of plasma body is the highest at present also only has 25%, caused raw-material waste and production efficiency to reduce, the advantage of arc ion plating is exactly that sedimentation rate is fast, this also is this technology in one of reason of industrial circle widespread use, can not lose in order to reduce the part macrobead this outstanding advantage, and this also is that the magnetic filtering technique can not industrialized major reason.Therefore, must be breakthrough try every possible means from the oarse-grained problem of source solution arc ion plating.The prerequisite of electric arc self-maintained discharge is to have to continue a large amount of effective electron emissions, analyze from electron emission mechanism, the prerequisite that a large amount of electron emission occur is to have a large amount of electronics can cross barrier height (work function) between Metal Surface Barrier and the fermi level, this situation occurs under the two states, the one, hot-cathode electric is dispersed, be that the metallic surface has a large amount of high-energy state electronics (greater than work function) to exist, the quantity of high-energy state electronics raises along with the temperature of metal and increases, that is the effect that thermoelectron is dispersed is more obvious; Another is to reduce the work function that surface potential barrier namely reduces electronics, namely improves the electric field strength of cathode surface, and the reduction value of surface potential barrier height increases along with the rising of electric field strength.And near the positive charge density in the space of negative electrode has determined the strength of electric field at negative electrode place, the increase of positive ion electric charge density has promoted the increase of strength of electric field, in the cold cathode situation, in order to form effective electrons diverge, keep arc discharge, the concentrated discharge of electric current is the most effective approach.Concentrate discharge can improve the quantity of high-energy state electronics with the negative electrode local heating to the condition of high temperature on the one hand, can form in the part highdensity positive charge sheath layer on the other hand, improve local strength of electric field, reduce work function, promote a large amount of emissions of electronics.And the general used arc source of arc ion plating is cold cathode arc source, and the behavior of electric arc is moved about fast by cathode surface is many in this arc source, and highly bright cathode spot is controlled.In the cathodic arc spot discharge, only have those temperature the highest (ion bombardment and resistance heat effect), electric field is the strongest, and the Microcell that perhaps work function is minimum could be launched a large amount of electronics, only has the most effective a large amount of electron emission just can keep the existence of arc spot.The motion of the arc spot of therefore observing is actually the movement that arc spot Must Significant Bit is put, and more precisely the movement of the peaked position of positive charge density causes that extinguishing of the formation of new arc spot, old arc spot caused the motion of arc spot.And small-sized just because of arc ion plating cathode spot, power density is very high, thus cathode spot as strong electronics, when gold belongs to former sub-﹑ ion and high speed metallic vapor emissive source, also continuous metal injection macrobead.And this phenomenon generally is that non-existent (power density is low under large-area hot-cathode arc discharge condition, do not reach melted state), only under the discharge scenario of the high power density of part, owing to having formed larger molten bath, under local pressure and ion bombardment effects, just caused oarse-grained injection.
From the generation mechanism of arc ion plating drop as can be known, wish reduces oarse-grained emission, just should avoid the target local superheating to produce large darker arc spot molten bath and local ion bombardment.Therefore, the discharge type that must adopt certain mode to control the motion of arc spot and improve the arc spot, the movement velocity of raising arc spot shortens the arc spot residence time on one point, reduces local power density and high-density ion bombardment.Popular controlled arc ion plating film in the world from the principle, is exactly to add a suitable magnetic field in the arc source, controls and improves cathodic arc spot in the movement velocity of cathode surface.Simultaneously, can be understood as power density is changed into line states (same time period) from the partial points state, local power density and high-density ion bombardment have been reduced, thereby reduce to a certain extent drop amount ﹑ and subtract the small drop sizes ﹑ raising rete life-span, and the evaporation that makes some conventional vacuum arc ion platings (be again free arc ion plating, the arc spot freely moves at cathode surface) can not realize or be difficult to realize becomes a reality.The controlled arc ion plating film is further developing of filtered cathode vacuum arc film, also is the inevitable direction of filtered cathode vacuum arc membrane technique development.
Although controlled arc ion plating can be realized the effective control to the arc spot, the movement locus of restriction arc spot, the minimizing electric arc macrobead of part, but effectively do not improve the discharge type of arc spot, the arc source still is the cold cathode arc source with cathode spot, be a kind of discrete arc source, this arc source is to produce oarse-grained basic reason.Simultaneously, this technology is so that the arc spot is limited in certain position, and long-time etching can form the etching track at target surface, the waste target, and be far from reaching the requirement for preparing meticulous function film.
At present, the international arc source design that also has some dynamic magnetic field control spots movings, such as Ramalingam at patent WO8503954 and US4,673, proposed in 477 a kind of behind target the arc source of rotating permanent magnet, and dynamically change comprise domestic recently incipient the 4th generation the arc source technology, cardinal principle all is that dynamically conversion magnetic field distributes in the locality of target surface, thereby change the peaked distribution of target surface magnetic field transverse component, the dynamic area that enlarges the magnetic field transverse component improves the utilization ratio of target to reach the etch areas that enlarges the arc spot.Dynamic approach is mainly divided electromagnetic type and mechanical type at present, cardinal principle all is that dynamically conversion magnetic field distributes in the locality of target surface, thereby change the peaked distribution of target surface magnetic field transverse component, the dynamic area that enlarges the magnetic field transverse component improves the utilization ratio of target to reach the etch areas that enlarges the arc spot.Wherein, mechanical type is by moving magnet and two kinds of methods of mobile target, and wherein Move Mode is divided into again rotation and moves back and forth dual mode.Dynamic magnetic field can be realized the even etching of arc spot on large-area target simple in structure substantially, but this method often needs to increase complicated electromagnetism or the mechanical controller structure of a cover.Change by transverse component position, magnetic field enlarges the area that the arc spot distributes at target surface, just in order to improve the part target utilization, realize the Large-Area-Uniform plated film and design, fundamentally do not improve the discharge mode of electric arc, the still movement of locality along with the variation of magnetic field position of arc spot, still be the arc spot discharge of current concentration, oarse-grained problem still exists.And the size in magnetic field is in continuous variation, and the movement velocity of arc spot is unstable, also in continuous fluctuation, can not effectively control macrobead, is unfavorable for the homogeneity plated film.All these arc sources all are the cold cathode arc sources with cathode spot, it is a kind of discrete arc source, this arc source is to produce oarse-grained basic reason, can not effectively improve the discharge type of arc spot, and is far from reaching the requirement of the meticulous function film of preparation.
Chinese invention patent (the patent No.: ZL200810010762.4) proposed a kind of arc ion plating apparatus that utilizes rotatingfield control spots moving, place the outer generation device of rotating magnetic field of vacuum chamber to be enclosed within on the flange cover or body of heater pipeline outside the target, by the motion of rotatingfield control arc spot.This patent has broken through traditional static or quasi-static Magnetic Field Design and mechanical dynamic magnetic field mentality of designing, a kind of arc ion plating apparatus of rotatingfield control spots moving of adjustable speed amplitude modulation is provided, in order to discharge type and the job stability that improves the arc spot, the movement locus of control arc spot, improve target etching homogeneity and target utilization, reduce the oarse-grained emission of target.But the arc ion plating apparatus of this patent does not design for the target of concrete size, and suitable field form is not shown, it not is that any rotatingfield form can both effectively be controlled the arc spot that research is found; This invention does not provide the core main points that realize accurate diffusion arc source still by dynamic rotary magnetic field control spots moving; This invention is not carried out innovative design to concrete arc source structure, and the flange that generation device of rotating magnetic field is whole to be enclosed within outside the target puts, and the magnetic field leakage field is serious, and structural volume is huge, and is not compact, is unfavorable for the arrangement of plated film overall design; Most importantly this invention only utilizes the discharge of rotating transverse magnetic field bound arc spot, the transmission of plasma is unfavorable, greatly reduce the transmission efficiency of arc plasma, most plasma containment has caused deposition ununiformity and rate reduction near target surface.
Therefore, the further innovation of the present invention improves traditional arc source structure, and the circular target for diameter 60-150mm has carried out structure design, has proposed a kind of design of standard diffusion arc cold cathode arc source of compact efficient.
Summary of the invention
The object of the present invention is to provide a kind of standard diffusion arc cold cathode arc source that is beneficial to the compact efficient of overall design, in order to discharge type and the job stability that improves the arc spot, improve target etching homogeneity and target utilization, reduce the oarse-grained emission of target, improve the transmission efficiency of plasma body.
Know-why of the present invention is:
The present invention rotates the motion that radial magnetic field is controlled the arc spot by frequency and the two adjustable utmost points of intensity that cover whole target surface, radial magnetic field makes the contrary ampere's rule of arc spot along the vertical radial magnetic field orientation translational motion that falls back, traditional controlled arc source design all is to fall radial magnetic field to be limited in certain scope, by the acute angle rule restriction arc spot translational motion that in certain radial magnetic field scope, falls back, and radially field direction random motion in the target surface certain limit, the arc spot is rapid circular movement in the radial magnetic field ring, this motion has improved the movement velocity of arc spot, reduced the arc spot residence time on one point, to put random motion and become the line distribution, reduced the power density of arc spot, reduced oarse-grained emission, but etching easily forms the etching hole for a long time.And by covering two utmost point radial magnetic fields of whole target surface, then the arc spot is along the vertical radial magnetic field orientation translational motion that falls back, radially field direction random motion, because this radial magnetic field is not limited in certain scope, but cover whole target surface, so the arc spot radially the random motion of field direction also along whole target surface.Simultaneously, the high-frequency rotating of two utmost point radial magnetic fields will be so that the arc spot have also superposeed and has rotatablely moved, so the arc spot is under certain magnetic field intensity and certain rotation frequency comprehensive action, will be so that the arc spot distribute at whole target surface, greatly reduce the power density of arc spot.And the radial magnetic field of rotation can retrain the front plasma body of target surface, the approximately motion of beam electrons and ion, electron density increases greatly before improving target surface, promote interparticle collision, improve ion density and ionization level, further strengthened the bombardment effect of ion pair target surface, but the enhancing of this bombardment effect is distributed in whole target surface, promoted the thermal field electron emission of target surface, improved the effective electron amount, and so that the high power density that the arc spot is a bit concentrated emission (producing oarse-grained reason) changes the thermal field electron emission of the uniform low power density of whole target surface into, realize accurate diffusion arcuation attitude, greatly reduce the emission of particle, improve simultaneously evaporation effect and ionization effect.But therefore the effect of radial magnetic field Constrained plasma body further by the axial focusing guide field of target leading portion, extracts the high density plasma that purifies out, improves its transmission efficiency.
Based on above-mentioned know-why, technical solution of the present invention is:
A kind of standard diffusion arc cold cathode arc source of compact efficient, the standard diffusion arc cold cathode arc source of described compact efficient is provided with two utmost point radial rotary field generator for magnetic, focusing guide field generating unit, target, target base, target base shielding case, flange cover, flange cover shielding case, target chassis, permanent magnet assembly, arc initiation device; Target, target base, target base shielding case, target chassis and permanent magnet assembly form the arc source; Flange cover, flange cover insulation covering, two utmost point radial rotary field generator for magnetic, axial focusing guide field generating unit, coaxial focusing magnetic field yoke and flange cover shielding case formation control magnetic field group; The arc source is connected with flange cover bottom by the target chassis, forms whole arc source structure, is connected with body of heater by the anterior ring flange of flange cover;
The outside of flange cover is provided with flange cover insulation covering, and the outside of flange cover insulation covering is provided with two utmost point rotating transverse magnetic field generating units, axial focusing guide field generating unit, coaxial focusing magnetic field yoke; Be provided with flange jacket water passage in the flange cover, flange cover bottom has flange cover water outlet, the flange cover water-in that communicates with cooling-water duct, and an end of flange jacket water passage arranges the annular flange dish, and the ring flange edge has flange connecting hole;
Target is installed on the target base by connecting thread, and two utmost point radial rotary field generator for magnetic, focusing guide field generating unit enclose and be enclosed within outside the flange cover, with the coaxial placement of target, and protects by insulation covering between the flange cover; Two utmost point radial rotary field generator for magnetic are positioned over around the target, and its center is higher than target material surface, and is position-movable; Focus on the guide field generating unit and be positioned over two utmost point radial rotary field generator for magnetic front ends, coaxial focusing magnetic field yoke is installed in the bottom, and two utmost point radial rotary field generator for magnetic inboards have the groove gap; Flange cover periphery arranges flange cover shielding case, by flange cover shielding case the field generator for magnetic of inside is protected; Target base chassis is nested in outside the target base, carry out seal protection by insulation covering, permanent magnet assembly is installed in target base boring position, be threaded connection with target base bottom, target base periphery arranges target base shielding case, by target base shielding case inside is protected; Be provided with target base cooling-water duct in the target base, target base cooling-water duct communicates with target base water-in, target base water outlet respectively; An arc initiation device open holes is opened near the target position base in target base chassis, and arc initiation device is arranged in the arc initiation device open holes, and an end of arc initiation device is corresponding with target; Target base chassis periphery has target base chassis connecting hole, and target base chassis is connected with the flange cover by target base chassis connecting hole.
The standard diffusion arc cold cathode arc source of described compact efficient, two utmost point radial rotary field generator for magnetic, formed by many pole cores skeleton and enameled wire winding, iron core is overrided to form by the ring-shaped silicon steel sheet of thick 0.35-0.5mm, the iron core inner circle has the groove that embeds winding coil, flute profile has opening, half opening or semi-closed port form, the groove number has 24,36,48,54 or 72, the iron core internal diameter is pressed flange cover size Selection, greater than flange cover external diameter, the iron core external diameter is according to Standard Selection, encloses by insulation covering to be enclosed within flange and to put; The surface of siliconized plate scribbles the high pressure resistant insulation lacquer, and core material adopts cold rolling or hot rolled silicon steel or employing amorphous magnetically permeable material.
The standard diffusion arc cold cathode arc source of described compact efficient, the enameled wire winding coil of two utmost point radial rotary field generator for magnetic adopts polyurethane enamelled copper wire or aluminum steel coiling, connects into symmetrical three-phase coiling by the Dipole magnet field rule; The mode of connection of winding has individual layer, bilayer or single two-layer hybrid, and the mode of connection of winding overhang adopts folded formula or ripple formula, and the end shape of winding adopts chain type, staggered form, concentric type or folded formula; Adopt the double speed winding of the regular distribution of multipole proportion, △/2Y connection for the winding of the above pole core of 36 grooves; Whenever, consisted of by 2 six joint groups, 2 very 60 facies tract salient poles wirings, polarity is opposite between the two-phase; Half coil assembly is wherein oppositely obtained 4 utmost point windings of 120 facies tracts, namely all coils polarity is identical during 4 utmost point, and connects with one road △ shape; Winding leading-out wire is 6, the tapped end line 2U of three-phase, 2V, 2W are vacant does not connect, and power supply enters from 4U, 4V, 4W, produces two utmost point radial magnetic fields;
The enameled wire winding employing phase differential of two utmost point radial rotary field generator for magnetic is 120 ° three phase variable frequency sinusoidal ac source forcing, power frequency and voltage are regulated separately, voltage range is 0-380V, range of frequency is 10-500Hz, by the intensity in voltage-regulation two utmost point radial rotary magnetic fields, regulate the speed of rotation in two utmost point radial rotary magnetic fields by power frequency.
The standard diffusion arc cold cathode arc source of described compact efficient, focus on the guide field generating unit, solenoid by the enameled wire coiling forms, inside and outside the solenoid by insulation protection, focus on the guide field coil by flange cover insulation covering and the insulation protection of flange cover, be positioned over two utmost point radial rotary field generator for magnetic leading portions, its bottom connects an annular core yoke; Focus on the logical direct current of coil in the guide field generating unit, regulate focusing on guide field intensity by size of current.
The standard diffusion arc cold cathode arc source of described compact efficient, the flange cover is made by non-magnetic stainless steel, and the flange cover is hollow structure, logical water coolant protection; Coaxial between two utmost point radial rotary field generator for magnetic, flange cover and the target three, two utmost point radial rotary field generator for magnetic are adjustable in the position that flange puts; Flange cover cross section is monolateral be shaped as L shaped, the intercooling aquaporin is comprised of the coaxial cover that encloses of double-layer stainless steel cylinder, an annular flange dish is welded on intercooling aquaporin top, the ring flange internal diameter is concordant with flange cover internal diameter, external diameter is concordant with the body of heater flange outer diameter, the ring flange edge has 6-8 connecting hole, by connecting hole flange cover integral body is connected with body of heater; Intercooling aquaporin bottom connects the steel flange ring, and the flange ring internal-and external diameter is consistent with the flange cover, has 8 threaded holes bottom the flange ring, and wherein two screw threads of symmetry are through hole, as entery and delivery port, other 6 as arc source connecting hole.
The standard diffusion arc cold cathode arc source of described compact efficient, the target base is the coaxial tubular construction that encloses cover composition hollow of non-magnetic double-layer stainless steel inner core and urceolus, and inner core top is the sealing disk, and the inboard of inner core is the installation site of permanent magnet assembly; Urceolus top is step sealing disk, and bench height is consistent with target connecting thread height, and the step outer shroud has connecting thread, and target is threaded on the target base by step; Step top disk external diameter is consistent with target bottom thread internal diameter, and step bottom annulus external diameter is consistent with the target external diameter, and internal radius is consistent with target bottom thread internal diameter; The urceolus external diameter is consistent with the target external diameter, and target base seal ring recess is arranged on the wall of the outer-rotor, by insulation covering and the assembling of target chassis; Urceolus and inner core intermediate formation target base cooling-water duct, the space is left on inner core top and urceolus top; Target base bottom connects the steel flange ring, and the flange ring internal-and external diameter is consistent with the target base, and flange ring bottom symmetry has two through holes, as intake-outlet; Flange ring bottom welding one terminal is as cathode power connection.
The standard of described compact efficient diffusion arc cold cathode arc source, target base shielding case are one to scribble the stainless steel cylinder of insullac, and welding one annular flange dish in cylinder upper end is installed in shielding case on the target chassis by this ring flange; Shielding case cylinder bottom has three holes with target base paddle hole and power connection correspondence position, the shielding case cylinder has disk in the middle of the bottom, have a threaded hole in the middle of the disk, permanent magnet assembly is connected with this threaded hole by the union lever screw thread, but by the allotment both inside and outside of nut turn-knob, regulate magnitude of field intensity.
The standard of described compact efficient diffusion arc cold cathode arc source, target base chassis periphery has 8 connecting holes, and is corresponding with 8 threaded holes in flange ring bottom, is connected bottom the flange cover in arc source and the controlling magnetic field group by 6 connecting holes wherein; Two other connecting hole overlaps water-in with flange, flange cover water outlet is corresponding, and an arc initiation device open holes is opened near the target position base in target base chassis.
The standard diffusion arc cold cathode arc source of described compact efficient, permanent magnet assembly forms nut by permanent magnet, union lever, and permanent magnet is connected with nut by union lever; Permanent magnet is combined by single or two above high magnetic permeability block materials, and yoke is shaped as disc, annular, Zhui Tai Xing ﹑ is cylindrical or stairstepping; Permanent magnet assembly is connected by the threaded hole of union lever screw thread with target base bottom, but by the allotment both inside and outside of nut turn-knob, regulates magnitude of field intensity, and permanent magnet assembly is positioned in the target base intermediate gaps of target rear end.
The standard diffusion arc cold cathode arc source of described compact efficient, arc initiation device adopts pneumatic machinery striking or high-frequency arc strike device, installs by the arc initiation device open holes on the target base chassis.
The invention has the beneficial effects as follows:
1, the present invention so that the arc spot distributes at whole target surface, reduces the power density of arc spot greatly under certain magnetic field intensity and certain rotation frequency comprehensive action, improve ion density and ionization level, realize accurate diffusion arcuation attitude, greatly reduce the emission of particle, improve simultaneously evaporation effect and ionization effect.Further by the axial focusing guide field of target leading portion, the high density plasma that purifies is extracted out simultaneously, improved its transmission efficiency.
2, the present invention breaks through traditional cold cathode arc source Magnetic Field Design thinking, traditional arc source structure is improved, circular target for diameter 60-150mm, a kind of standard diffusion arc cold cathode arc source of compact efficient is provided, in order to discharge type and the job stability that improves the arc spot, improves target etching homogeneity and target utilization, reduce the oarse-grained emission of target, improve the transmission efficiency of plasma body, be beneficial to overall design, promote the development of instrument plated film and decoration film coating.
Description of drawings
Fig. 1 is the standard diffusion arc cold cathode arc source one-piece construction two-dimensional representation of compact efficient.
Fig. 2 is the standard diffusion arc cold cathode arc source whole interior structure three-dimensional schematic diagram of the compact efficient of not flanged cover shielding case.
Fig. 3 is standard diffusion arc cold cathode arc source two utmost point radial rotary field generator for magnetic of compact efficient and the positional structure vertical view between arc source and the flange.
Fig. 4 (a)-Fig. 4 (b) is two utmost point radial rotary field generator for magnetic structures and cross section Distribution of Magnetic Field schematic diagram.Wherein, Fig. 4 (a) is field generator for magnetic three-dimensional structure and winding displacement distribution schematic diagram; Fig. 4 (b) is cross section, two utmost point radial rotary magnetic field transient distribution of magnetic field schematic diagram.
Fig. 5 is the arc source 3 D stereo sectional view in the standard diffusion arc cold cathode arc source of embodiment 1 compact efficient.
Fig. 6 is the standard diffusion arc cold cathode arc source whole interior structure three-dimensional sectional axonometric drawing of the compact efficient of the not flanged cover shielding case of embodiment 1.
Fig. 7 is the arc source three-dimensional stereo effect figure in the standard diffusion arc cold cathode arc source of embodiment 1 compact efficient.
Fig. 8 (a)-Fig. 8 (b) is the standard diffusion arc cold cathode arc source target base of embodiment 1 compact efficient and the tomograph of target.Wherein, Fig. 8 (a) is the section internal structure; Fig. 8 (b) is contour structures.
Fig. 9 (a)-Fig. 9 (c) is the magnetic field Transient distribution schematic diagram that the axial magnetic field of the permanent magnet of embodiment 2 two utmost points rotation radial magnetic field and target rear end is coupled.Wherein, Fig. 9 (a) is the Transient distribution figure of two utmost points rotation radial magnetic field on the target cross section that does not have the axial magnetic field coupling of target rear end; Fig. 9 (b) is the Transient distribution figure of two utmost points rotations radial magnetic field on the target cross section of sensing target one end of target rear end axial magnetic field of being coupled; Fig. 9 (c) is the Transient distribution figure of two utmost points opposite with Fig. 9 (b) radial magnetic field orientation rotation radial magnetic field on the target cross section of target rear end axial magnetic field of being coupled.
Figure 10 (a)-Figure 10 (d) is the magnetic field Transient distribution schematic diagram of embodiment 3 two utmost points rotation radial magnetic field and the coupling of axial focusing guiding magnetic field.Wherein, Figure 10 (a) is when focusing on the guiding yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic field that points to target one end in the target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (b) is when focusing on the guiding yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic field opposite with Figure 10 (a) radial magnetic field orientation in the target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (c) has when focusing on the guiding yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic field that points to target one end in the target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (d) has when focusing on the guiding yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic field opposite with Figure 10 (c) radial magnetic field orientation in the target cross section and coupled magnetic field at the Transient distribution figure of transmission space;
Figure 11 is that embodiment 4 has configured the compact efficiently accurate ion film coating machine complete machine design sketch that spreads arc cold cathode arc source of 12 covers.
Figure 12 (a)-Figure 12 (b) is the internal effects figure in the standard diffusion arc cold cathode arc source of embodiment 4 compact efficients.Wherein, Figure 12 (a) is stereographic map one (with two utmost point radial rotary field generator for magnetic 12 and axial focusing guide field generating unit 13); Figure 12 (b) is stereographic map two.
Figure 13 (a)-Figure 13 (b) is the external effects figure in the standard diffusion arc cold cathode arc source of embodiment 4 compact efficients.Wherein, Figure 13 (a) is stereographic map one; Figure 13 (b) is stereographic map two.
Among the figure, 1 target; 2 connecting threads; 3 target base insulation coverings; 4 target base chassis; 5 target bases; 6 target base shielding cases; 7 target base cooling-water ducts; 8 flanges cover insulation covering; 9 ring flanges; 10 flange jacket water passages; 11 flanges cover shielding case; 12 2 utmost point radial rotary field generator for magnetic; 13 axial focusing guide field generating units; 14 focusing magnetic field yokes; 15 arc initiation devices; 16 flanges cover water-in; 17 flanges cover water outlet; 18 target base water outlets; 19 target base water-ins; 20 permanent magnet assemblies; 21 flange connecting holes; 22 target base chassis connecting holes; 23 focus on magnetic line of force; 24 arc initiation device open holess; 25 power connections; 26 permanent magnet assembly open holess; 27 generation device of rotating magnetic field groove gaps; 28 target base seal ring recess; 29 flange covers; 30 inner cores; 31 urceolus.
Embodiment
Below by embodiment and accompanying drawing the present invention is described in further detail.
Embodiment 1:
The present invention breaks through traditional cold cathode arc source Magnetic Field Design thinking, and traditional arc source structure is improved, and for the circular target of diameter 60-150mm, provides a kind of standard diffusion arc cold cathode arc source of compact efficient.Fig. 1 is the standard diffusion arc cold cathode arc source one-piece construction two-dimensional representation of compact efficient, and Fig. 2 is the standard diffusion arc cold cathode arc source whole interior structure three-dimensional schematic diagram of the compact efficient of not flanged cover shielding case.As can be seen from Fig., the standard diffusion arc cold cathode arc source of compact efficient is comprised of arc source and controlling magnetic field group, the arc source comprises target 1, target base 5, target base shielding case 6, target chassis 4, arc initiation device 15 and permanent magnet assembly 20, the controlling magnetic field group comprises flange cover 29, flange cover insulation covering 8, two utmost point radial rotary field generator for magnetic 12, axial focusing guide field generating unit 13, coaxial focusing magnetic field yoke 14 and flange cover shielding case 11, the arc source is overlapped 29 bottoms by target chassis 4 and flange and is connected, form whole arc source structure, the ring flange 9 that overlaps 29 front portions by flange is connected with body of heater, and the focusing guide field generating unit in the controlling magnetic field group produces and focuses on magnetic line of force 23.
The outside of flange cover 29 is provided with flange cover insulation covering 8, the outside of flange cover insulation covering 8 is provided with two utmost point rotating transverse magnetic field generating units 12, axial focusing guide field generating unit 13, coaxial focusing magnetic field yoke 14, be provided with flange jacket water path 10 in the flange cover 29, flange overlaps 29 bottoms and has flange cover water outlet 17, the flange cover water-in 16 that communicates with flange jacket water path 10, one end of flange jacket water path 10 arranges annular flange dish 9, and ring flange 9 edges have flange connecting hole 21.
Fig. 3 is standard diffusion arc cold cathode arc source two utmost point radial rotary field generator for magnetic of compact efficient and the positional structure vertical view between arc source and the flange cover.Two utmost point radial rotary field generator for magnetic 12 of the embodiment of the invention 1 are by many magnetic pole (12n, n is integer, n 〉=2) iron core skeleton and enameled wire winding form, and two utmost point radial rotary field generator for magnetic, 12 inboards have groove gap 27, and an end of arc initiation device 15 is corresponding with target 1.(2000～6000H/m) is very high by permeability for iron core, the ring-shaped silicon steel sheet of thick 00.5mm is overrided to form, the iron core inner circle has the groove that embeds winding coil, flute profile is the semi-closed port form, the groove number is 36, and the iron core internal diameter is 182mm, is slightly larger than flange and overlaps 29 external diameters, the iron core external diameter is according to Standard Selection, encloses by insulation covering to be enclosed within on the flange cover 29; The surface of siliconized plate scribbles the high pressure resistant insulation lacquer, and core material adopts cold rolled silicon steel.The enameled wire winding coil of two utmost point radial rotary field generator for magnetic 12 adopts high-strength polyurethane enamel covered wire (QZY-2) coiling, adopts the double speed winding of the regular distribution of multipole proportion, △/2Y connection.Whenever, consisted of by 2 six joint groups, 2 very 60 facies tract salient poles wirings, polarity is opposite between the two-phase; Half coil assembly is wherein oppositely obtained 4 utmost point windings of 120 facies tracts, namely all coils polarity is identical during 4 utmost point, and connects with one road △ shape.Winding leading-out wire is 6, the tapped end line 2U of three-phase, 2V, 2W are vacant does not connect, and power supply enters from 4U, 4V, 4W, produces two utmost point radial magnetic fields.Fig. 4 (a) is field generator for magnetic three-dimensional structure and winding displacement distribution schematic diagram, Fig. 4 (b) is cross section, two utmost point radial rotary magnetic field transient distribution of magnetic field schematic diagram, can find out that magnetic field is two utmost point radial magnetic fields that cover whole target surface fully on the cross section in the middle of two utmost point radial magnetic field generating units 12, the even intensity in this magnetic field, frequency and intensity are adjustable.
The enameled wire winding employing phase differential of two utmost point radial rotary field generator for magnetic 12 is 120 ° three phase variable frequency sinusoidal ac source forcing, power frequency and voltage can be regulated separately, voltage range is 0-380V, range of frequency is 10-500Hz, by the intensity in voltage-regulation two utmost point radial rotary magnetic fields, regulate the speed of rotation in two utmost point radial rotary magnetic fields by power frequency; Variable-frequency power sources is take microprocessor as core; with PWM(pulse-width modulation) mode makes; with active member IGBT modular design, adopted the fabrication techniques such as digital frequency division, D/A conversion, instantaneous values feedback, sinusoidal pulse width modulation, have short circuit, overcurrent, overload, the defencive function such as overheated.
Rotate the motion that radial magnetic field is controlled the arc spot by frequency and the two adjustable utmost points of intensity that cover whole target surface, the radial magnetic field that covers whole target surface makes the contrary ampere's rule of arc spot along the vertical radial magnetic field orientation translational motion that falls back, radially then random motion of field direction, because this radial magnetic field is not limited in the certain limit of target surface, but cover whole target surface, so the arc spot radially the random motion of field direction also along whole target surface.Simultaneously, the high-frequency rotating of two utmost point radial magnetic fields will be so that the arc spot have also superposeed and has rotatablely moved, so the arc spot is under certain magnetic field intensity and certain rotation frequency comprehensive action, will be so that the arc spot distribute at whole target surface, greatly reduce the power density of arc spot.And the radial magnetic field of rotation can retrain the front plasma body of target surface, the approximately motion of beam electrons and ion, electron density increases greatly before improving target surface, promote interparticle collision, improve ion density and ionization level, further strengthened the bombardment effect of ion pair target surface, but the enhancing of this bombardment effect is distributed in whole target surface, promoted the thermal field electron emission of target surface, improved the effective electron amount, and so that the high power density that the arc spot is a bit concentrated emission (producing oarse-grained reason) changes the thermal field electron emission of the uniform low power density of whole target surface into, realize accurate diffusion arcuation attitude, greatly reduce the emission of particle, improve simultaneously evaporation effect and ionization effect.
But the effect of radial magnetic field Constrained plasma body in order further to improve the transmission efficiency of plasma body, by the axial focusing guide field of target leading portion, is extracted the high density plasma that purifies out.Axial focusing guide field generating unit 13 solenoids by the enameled wire coiling form; inside and outside the solenoid by insulation protection; focus on the guide field coil and overlap 29 insulation protections by flange cover insulation covering 8 with flange; be positioned over two utmost point radial rotary field generator for magnetic, 12 leading portions; its bottom can connect an annular high magnetic permeability (2000～6000H/m) iron core coaxial focusing magnetic field yoke 14; avoid axial focusing magnetic field on the impact of rotation radial magnetic field; coil in the axial focusing guide field generating unit 13 leads to direct current, regulates focusing on guide field intensity by size of current.
Fig. 6 is the standard diffusion arc cold cathode arc source whole interior structure three-dimensional sectional axonometric drawing of the compact efficient of the not flanged cover shielding case of embodiment 1.Flange cover 29 is by non-magnetic stainless steel making, and flange cover 29 is hollow structure, logical water coolant protection; Coaxial between two utmost point radial rotary field generator for magnetic 12, flange cover 29 and target 1 three, two utmost point radial rotary field generator for magnetic 12 are adjustable in the position that flange overlaps on 29.Flange overlap 29 cross sections monolateral be shaped as L shaped, spacer flanger jacket water path 10 is comprised of the coaxial cover that encloses of double-layer stainless steel cylinder, an annular flange dish 9 is welded on flange jacket water path 10 top, it is concordant that ring flange 9 internal diameters and flange overlap 29 internal diameters, ring flange 9 external diameters are concordant with the body of heater flange outer diameter, ring flange 9 edges have 6-8 flange connecting hole 21, by flange connecting hole 21 flange cover 29 integral body are connected with body of heater; Flange jacket water path 10 bottom connects a thicker steel flange ring, and it is 29 consistent that flange ring internal-and external diameter and flange overlap, and the flange ring bottom has 8 threaded holes, and wherein two screw threads of symmetry are through hole, as intake-outlet, other 6 as arc source connecting hole.
Fig. 5 is the arc source 3 D stereo sectional view in the standard diffusion arc cold cathode arc source of embodiment 1 compact efficient, Fig. 8 (a)-(b) is the standard diffusion arc cold cathode arc source target base of embodiment 1 compact efficient and the tomograph of target, can find out, target base 5 is non-magnetic double-layer stainless steel cylinder (inner core 30, urceolus 31) the coaxial tubular construction that encloses cover composition hollow, inner core 30 tops are the sealing disk, the inner space of inner core 30 is the installation site of permanent magnet assembly 20, urceolus 31 tops are step sealing disk, bench height is consistent with target 1 connecting thread height, the step outer shroud has connecting thread 2, and target is threaded on the target base 5 by step.Step top disk external diameter is consistent with target 1 bottom thread internal diameter, and step bottom annulus external diameter is consistent with the target external diameter, and internal radius is consistent with target bottom thread internal diameter; Urceolus 31 external diameters are consistent with the target external diameter, and target base seal ring recess 28 is arranged on urceolus 31 walls, by insulation covering and the assembling of target chassis; Urceolus 31 and inner core 30 intermediate formation target base cooling-water ducts 7, certain space is left on inner core 30 tops and urceolus 31 tops, guarantees that current are unimpeded.Target base 5 bottoms connect a thicker steel flange ring, and the flange ring internal-and external diameter is consistent with the target base, and flange ring bottom symmetry has two through holes, as target base water-in 19, target base water outlet 18; Flange ring bottom welding one terminal is as cathode power connection 25.Fig. 7 is the arc source three-dimensional stereo effect figure in the standard diffusion arc cold cathode arc source of embodiment 1 compact efficient, can find out, target base shielding case 6 is one to scribble the stainless steel cylinder of insullac, welding one annular flange dish in cylinder upper end is installed in target base shielding case 6 on the target chassis 4 by this ring flange; The target base water-in 19 of target base shielding case 6 bottom of cylinders and target base 5, target base water outlet 18 and power connection correspondence position have three holes, have one than thick disk in the middle of target base shielding case 6 bottom of cylinders, have a threaded hole in the middle of the disk: permanent magnet assembly open holes 26, permanent magnet assembly 20 is connected with this threaded hole by the union lever screw thread, but by the allotment both inside and outside of nut turn-knob, regulate magnitude of field intensity.Permanent magnet assembly 20 forms nut by permanent magnet, union lever, and permanent magnet is connected with nut by union lever, and permanent magnet is comprised of single disc ndfeb magnet.Permanent magnet assembly 20 is positioned in target 1 rear end target base 5 intermediate gaps, avoids water coolant demagnetization impact.Arc initiation device 15 adopts pneumatic machinery striking or high-frequency arc strike device, installs by the arc initiation device open holes 24 on the target base chassis 4.
The present embodiment 1 compact construction, the plasma body transmission efficiency is high, can substantially realize accurate diffusion arcuation attitude, greatly improve discharge type and the job stability of arc spot, improve target etching homogeneity and target utilization, reduce the oarse-grained emission of target, improve the transmission efficiency of plasma body, be beneficial to simultaneously overall design, be fit to promote, promote the development of instrument plated film and decoration film coating.
Embodiment 2:
The invention provides the embodiment of multiple magnetic Field Coupling, embodiment 2 is the axial magnetic field of traditional target rear end permanent magnet assembly generation and the embodiment of two utmost point radial rotary magnetic Field Couplings, and the axial focusing guide field of two utmost point radial rotary magnetic field leading portions does not participate in coupling.Fig. 9 (a)-Fig. 9 (c) is the magnetic field Transient distribution schematic diagram that the axial magnetic field of the permanent magnet of embodiment 2 two utmost points rotation radial magnetic field and target rear end is coupled, Fig. 9 (a) is the Transient distribution figure of two utmost points rotation radial magnetic field on the target cross section that does not have the axial magnetic field coupling of target rear end, can find out, in the time of inoperative in other magnetic fields, two utmost point radial magnetic fields of target material surface are parallel to target surface fully, form the acute angle that points to target inside with the target edge.The high speed rotating in this two utmost points radial rotary magnetic field can so that the arc spot at whole target surface Uniform Discharge, reduces power density, reduce oarse-grained emission.If but control improper, spots moving excessive velocities, and magneticstrength and speed of rotation are not mated, then the arc spot is easy to go to target outside arc extinguishing, discharges very unstable.In order to improve discharge stability, the present embodiment 2 has adopted the target rear end axial magnetic field of traditional constraint spots moving to carry out magnetic Field Coupling.Fig. 9 (b) is the Transient distribution figure of two utmost points rotations radial magnetic field on the target cross section of sensing target one end of target rear end axial magnetic field of being coupled.Fig. 9 (c) is the Transient distribution figure of two utmost points opposite with Fig. 9 (b) radial magnetic field orientation rotation radial magnetic field on the target cross section of target rear end axial magnetic field of being coupled.Can find out, under certain axial magnetic field intensity, two utmost point radial rotary magnetic fields be distributed with certain variation, magnetic field no longer is the radial magnetic field that is parallel to target surface fully, but form the sharp magnetic field that certain angle is arranged with target, this sharp magnetic field and whole target surface form one towards acute angle, rather than the situation of the sort of two the acute angle directions in picture arch magnetic field, namely target surface has formed the magnetic field, two pole tip angles of rotation.The parallel component of sharp magnetic field still is radial component, so that arc spot edge is perpendicular to radial component direction straight line drawback movement, and simultaneously, under the effect of acute angle rule, the arc spot is when straight line falls away, and the component radially of having superposeed guides the movement tendency of direction, and the arc spot to guide direction at component radially no longer be random motion, but controlled motion, controlled motion has improved controllability and the stability of discharge.Simultaneously, the high-frequency rotating in magnetic field, two pole tip angles, with so that the arc spot of controlled motion has superposeed rotatablely moves, therefore the arc spot is under certain axial magnetic field intensity, certain rotation two utmost point radial magnetic field intensity and certain comprehensive coupling of rotation frequency, will be so that the arc spot distribute at whole target surface, greatly reduce the power density of arc spot, realize accurate diffusion arcuation attitude, greatly reduce the emission of particle, discharge stability has been improved in the magnetic field of coupling simultaneously.
The present embodiment 2 on traditional axial controlling magnetic field basis, two utmost point radial rotary magnetic fields that superposeed, the coupled magnetic field of formation can improve discharge stability when realizing accurate diffusion arcuation attitude.
Embodiment 3:
Although under certain rotation two utmost point radial magnetic field intensity and certain comprehensive coupling of rotation frequency, can realize accurate diffusion arcuation attitude, but the effect of radial magnetic field Constrained plasma body, in order further to improve the transmission efficiency of plasma body, embodiment 3 provides the axial focusing guide field by the target leading portion, the scheme that the high density plasma that purifies is extracted out.Embodiment 3 is that the axial magnetic field that does not have traditional target rear end permanent magnet assembly to produce participates in, the embodiment of two utmost point radial rotary magnetic fields and the coupling of front end axial focusing guide field.This scheme has two kinds of situations, and a kind of is without the situation that focuses on the guiding yoke, and a kind of is that the situation that focuses on the guiding yoke is arranged.Figure 10 (a) is when focusing on the guiding yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic field that points to target one end in the target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (b) is when focusing on the guiding yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic field opposite with Figure 10 (a) radial magnetic field orientation in the target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Wherein Figure 10 (c) has when focusing on the guiding yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic field that points to target one end in the target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (d) has when focusing on the guiding yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic field opposite with Figure 10 (c) radial magnetic field orientation in the target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Can find out, the axial focusing guide field has changed the distribution of magnetic field at transmission space, improved the axial magnetic field intensity of transmission space, namely can realize nonequilibrium accurate diffusion arc coating process, when reducing the emission of discharge energy density minimizing macrobead, reduce the target surface constraint of plasma body, improved efficient and density that plasma body transports to transmission space, and be very effective.Can find out simultaneously, the participation of axial focusing guide field, changed the state of two utmost point radial magnetic fields, what namely form similar embodiment 2 forms the sharp magnetic field of certain acute angle with target surface, and when not focusing on the guiding yoke, the axial focusing guide field can largely affect two utmost point radial magnetic fields, for larger target, even form two wedge angles, so that the track of arc spot acute angle drift motion shortens easy arc extinguishing.And when the guiding of focusing yoke is arranged, axial focusing guide field major part is retrained by yoke, and is less on the impact of target surface two utmost point radial magnetic fields, basically forms the little distortion of acute angle amplitude, and only form the acute angle of a direction, the situation of similar embodiment 2.So both can improve discharge stability, realize diffusion arcuation attitude, can improve the plasma body transmission efficiency again simultaneously.Therefore, this programme embodiment provides a transmission efficiently, stable discharging, the arc source side case of accurate diffusion arcuation attitude.
Embodiment 4:
For industrial plated film production, the stability of product, large-area uniformity, high efficiency all are to consider.And the plasma distribution of independent arc source leading portion all is inhomogeneous, in order to improve plasma uniformity and fraction of coverage, overall design all is that certain rule is arranged to the arrangement in arc source, generally will form cross-distribution.If plasma body window diameter is too little, perhaps the intersection region is not obvious, is difficult to realize the production of industrialization uniform coated, and product percent of pass and homogeneity reduce greatly.This also is that magnetic filters one of reason of can not industrialization producing, and magnetic filter is bulky, is difficult to realize intensive distribution at a body of heater, therefore the plasma body transmission window is narrow, be difficult between the window intersect, easily form the low vacancy district of plasma density, it is unfavorable that plated film is produced.The arc ion plating apparatus that utilizes rotatingfield control spots moving that Chinese invention patent (patent No. ZL200810010762.4) proposes does not provide the core main points that realize accurate diffusion arc source, only utilize the discharge of rotating transverse magnetic field bound arc spot, the transmission of plasma is unfavorable, greatly reduce the transmission efficiency of arc plasma, most plasma containment has caused deposition ununiformity and rate reduction near target surface.Simultaneously, the flange that generation device of rotating magnetic field is whole to be enclosed within outside the target puts, and the magnetic field leakage field is serious, and structural volume is huge, and is not compact, is unfavorable for the arrangement of plated film overall design.
Not only transmit efficiently in accurate diffusion arc provided by the invention source, and compact construction.Figure 11 is that embodiment 4 has configured the compact efficiently accurate ion film coating machine complete machine design sketch that spreads arc cold cathode arc source of 12 covers, Figure 12 (a)-(b) is the internal effects figure in the standard diffusion arc cold cathode arc source of embodiment 4 compact efficients, and Figure 13 (a)-(b) is the external effects figure in the standard diffusion arc cold cathode arc source of embodiment 4 compact efficients.Can find out, can realize intensive arc source distribution on a body of heater, distance is little between the arc source window, has improved plated film space plasma distributing homogeneity, is conducive to large-area coating film.Simultaneously, the standard of compact efficient of the present invention diffusion arc cold cathode arc source structure is reasonable, good looking appearance, and easily installation and debugging can industrial application.
Claims (10)
1. the standard of a compact efficient spreads arc cold cathode arc source, it is characterized in that: the standard diffusion arc cold cathode arc source of described compact efficient is provided with two utmost point radial rotary field generator for magnetic, focusing guide field generating unit, target, target base, target base shielding case, flange cover, flange cover shielding case, target chassis, permanent magnet assembly, arc initiation device; Target, target base, target base shielding case, target chassis and permanent magnet assembly form the arc source; Flange cover, flange cover insulation covering, two utmost point radial rotary field generator for magnetic, axial focusing guide field generating unit, coaxial focusing magnetic field yoke and flange cover shielding case formation control magnetic field group; The arc source is connected with flange cover bottom by the target chassis, forms whole arc source structure, is connected with body of heater by the anterior ring flange of flange cover;
The outside of flange cover is provided with flange cover insulation covering, and the outside of flange cover insulation covering is provided with two utmost point rotating transverse magnetic field generating units, axial focusing guide field generating unit, coaxial focusing magnetic field yoke; Be provided with flange jacket water passage in the flange cover, flange cover bottom has flange cover water outlet, the flange cover water-in that communicates with cooling-water duct, and an end of flange jacket water passage arranges the annular flange dish, and the ring flange edge has flange connecting hole;
Target is installed on the target base by connecting thread, and two utmost point radial rotary field generator for magnetic, focusing guide field generating unit enclose and be enclosed within outside the flange cover, with the coaxial placement of target, and protects by insulation covering between the flange cover; Two utmost point radial rotary field generator for magnetic are positioned over around the target, and its center is higher than target material surface, and is position-movable; Focus on the guide field generating unit and be positioned over two utmost point radial rotary field generator for magnetic front ends, coaxial focusing magnetic field yoke is installed in the bottom, and two utmost point radial rotary field generator for magnetic inboards have the groove gap; Flange cover periphery arranges flange cover shielding case, by flange cover shielding case the field generator for magnetic of inside is protected; Target base chassis is nested in outside the target base, carry out seal protection by insulation covering, permanent magnet assembly is installed in target base boring position, be threaded connection with target base bottom, target base periphery arranges target base shielding case, by target base shielding case inside is protected; Be provided with target base cooling-water duct in the target base, target base cooling-water duct communicates with target base water-in, target base water outlet respectively; An arc initiation device open holes is opened near the target position base in target base chassis, and arc initiation device is arranged in the arc initiation device open holes, and an end of arc initiation device is corresponding with target; Target base chassis periphery has target base chassis connecting hole, and target base chassis is connected with the flange cover by target base chassis connecting hole.
2. the standard according to compact efficient claimed in claim 1 spreads arc cold cathode arc source, it is characterized in that: two utmost point radial rotary field generator for magnetic, formed by many pole cores skeleton and enameled wire winding, iron core is overrided to form by the ring-shaped silicon steel sheet of thick 0.35-0.5mm, the iron core inner circle has the groove that embeds winding coil, flute profile has opening, half opening or semi-closed port form, the groove number has 24,36,48,54 or 72, the iron core internal diameter is pressed flange cover size Selection, greater than flange cover external diameter, the iron core external diameter is according to Standard Selection, encloses by insulation covering to be enclosed within flange and to put; The surface of siliconized plate scribbles the high pressure resistant insulation lacquer, and core material adopts cold rolling or hot rolled silicon steel or employing amorphous magnetically permeable material.
3. the standard according to compact efficient claimed in claim 2 spreads arc cold cathode arc source, it is characterized in that: the enameled wire winding coil of two utmost point radial rotary field generator for magnetic adopts polyurethane enamelled copper wire or aluminum steel coiling, connects into symmetrical three-phase coiling by the Dipole magnet field rule; The mode of connection of winding has individual layer, bilayer or single two-layer hybrid, and the mode of connection of winding overhang adopts folded formula or ripple formula, and the end shape of winding adopts chain type, staggered form, concentric type or folded formula; Adopt the double speed winding of the regular distribution of multipole proportion, △/2Y connection for the winding of the above pole core of 36 grooves; Whenever, consisted of by 2 six joint groups, 2 very 60 facies tract salient poles wirings, polarity is opposite between the two-phase; Half coil assembly is wherein oppositely obtained 4 utmost point windings of 120 facies tracts, namely all coils polarity is identical during 4 utmost point, and connects with one road △ shape; Winding leading-out wire is 6, the tapped end line 2U of three-phase, 2V, 2W are vacant does not connect, and power supply enters from 4U, 4V, 4W, produces two utmost point radial magnetic fields;
The enameled wire winding employing phase differential of two utmost point radial rotary field generator for magnetic is 120 ° three phase variable frequency sinusoidal ac source forcing, power frequency and voltage are regulated separately, voltage range is 0-380V, range of frequency is 10-500Hz, by the intensity in voltage-regulation two utmost point radial rotary magnetic fields, regulate the speed of rotation in two utmost point radial rotary magnetic fields by power frequency.
4. the standard according to compact efficient claimed in claim 1 spreads arc cold cathode arc source, it is characterized in that: focus on the guide field generating unit, solenoid by the enameled wire coiling forms, inside and outside the solenoid by insulation protection, focus on the guide field coil by flange cover insulation covering and the insulation protection of flange cover, be positioned over two utmost point radial rotary field generator for magnetic leading portions, its bottom connects an annular core yoke; Focus on the logical direct current of coil in the guide field generating unit, regulate focusing on guide field intensity by size of current.
5. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: the flange cover is made by non-magnetic stainless steel, and the flange cover is hollow structure, logical water coolant protection; Coaxial between two utmost point radial rotary field generator for magnetic, flange cover and the target three, two utmost point radial rotary field generator for magnetic are adjustable in the position that flange puts; Flange cover cross section is monolateral be shaped as L shaped, the intercooling aquaporin is comprised of the coaxial cover that encloses of double-layer stainless steel cylinder, an annular flange dish is welded on intercooling aquaporin top, the ring flange internal diameter is concordant with flange cover internal diameter, external diameter is concordant with the body of heater flange outer diameter, the ring flange edge has 6-8 connecting hole, by connecting hole flange cover integral body is connected with body of heater; Intercooling aquaporin bottom connects the steel flange ring, and the flange ring internal-and external diameter is consistent with the flange cover, has 8 threaded holes bottom the flange ring, and wherein two screw threads of symmetry are through hole, as entery and delivery port, other 6 as arc source connecting hole.
6. the standard according to compact efficient claimed in claim 1 spreads arc cold cathode arc source, it is characterized in that: the target base is the coaxial tubular construction that encloses cover composition hollow of non-magnetic double-layer stainless steel inner core and urceolus, inner core top is the sealing disk, and the inboard of inner core is the installation site of permanent magnet assembly; Urceolus top is step sealing disk, and bench height is consistent with target connecting thread height, and the step outer shroud has connecting thread, and target is threaded on the target base by step; Step top disk external diameter is consistent with target bottom thread internal diameter, and step bottom annulus external diameter is consistent with the target external diameter, and internal radius is consistent with target bottom thread internal diameter; The urceolus external diameter is consistent with the target external diameter, and target base seal ring recess is arranged on the wall of the outer-rotor, by insulation covering and the assembling of target chassis; Urceolus and inner core intermediate formation target base cooling-water duct, the space is left on inner core top and urceolus top; Target base bottom connects the steel flange ring, and the flange ring internal-and external diameter is consistent with the target base, and flange ring bottom symmetry has two through holes, as intake-outlet; Flange ring bottom welding one terminal is as cathode power connection.
7. the standard according to compact efficient claimed in claim 1 spreads arc cold cathode arc source, it is characterized in that: target base shielding case is one to scribble the stainless steel cylinder of insullac, welding one annular flange dish in cylinder upper end is installed in shielding case on the target chassis by this ring flange; Shielding case cylinder bottom has three holes with target base paddle hole and power connection correspondence position, the shielding case cylinder has disk in the middle of the bottom, have a threaded hole in the middle of the disk, permanent magnet assembly is connected with this threaded hole by the union lever screw thread, but by the allotment both inside and outside of nut turn-knob, regulate magnitude of field intensity.
8. the standard according to compact efficient claimed in claim 1 spreads arc cold cathode arc source, it is characterized in that: target base chassis periphery has 8 connecting holes, corresponding with 8 threaded holes in flange ring bottom, be connected bottom the flange cover in arc source and the controlling magnetic field group by 6 connecting holes wherein; Two other connecting hole overlaps water-in with flange, flange cover water outlet is corresponding, and an arc initiation device open holes is opened near the target position base in target base chassis.
9. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: permanent magnet assembly forms nut by permanent magnet, union lever, and permanent magnet is connected with nut by union lever; Permanent magnet is combined by single or two above high magnetic permeability block materials, and yoke is shaped as disc, annular, Zhui Tai Xing ﹑ is cylindrical or stairstepping; Permanent magnet assembly is connected by the threaded hole of union lever screw thread with target base bottom, but by the allotment both inside and outside of nut turn-knob, regulates magnitude of field intensity, and permanent magnet assembly is positioned in the target base intermediate gaps of target rear end.
10. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: arc initiation device adopts pneumatic machinery striking or high-frequency arc strike device, installs by the arc initiation device open holes on the target base chassis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210444314.1A CN102936717B (en) | 2012-11-08 | 2012-11-08 | Compact and efficient cold cathode arc source of quasi diffusion arc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210444314.1A CN102936717B (en) | 2012-11-08 | 2012-11-08 | Compact and efficient cold cathode arc source of quasi diffusion arc |
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| CN103205711A (en) * | 2013-04-16 | 2013-07-17 | 温州职业技术学院 | Non-equilibrium dynamic arched compatible axial guide magnetic field auxiliary ion-plating device |
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| CN103205711B (en) * | 2013-04-16 | 2015-09-16 | 温州职业技术学院 | The compatible axial guide field assisting ion plating appts of a kind of non-equilibrium dynamic arch |
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| US11926890B2 (en) | 2019-03-15 | 2024-03-12 | Nanofilm Technologies International Limited | Cathode arc source |
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| JP2022525349A (en) * | 2019-03-15 | 2022-05-12 | ナノフィルム テクノロジーズ インターナショナル リミテッド | Improved cathode arc source |
| EP3997965A4 (en) * | 2019-07-11 | 2023-07-19 | Staton S.R.O. | Vacuum arc cathode source of plasma with enhanced magnetic field configuration and method of its operation |
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