CN202945315U - Efficient dynamically coupled magnetic control arc source device - Google Patents
Efficient dynamically coupled magnetic control arc source device Download PDFInfo
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- CN202945315U CN202945315U CN 201220572749 CN201220572749U CN202945315U CN 202945315 U CN202945315 U CN 202945315U CN 201220572749 CN201220572749 CN 201220572749 CN 201220572749 U CN201220572749 U CN 201220572749U CN 202945315 U CN202945315 U CN 202945315U
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- 230000008878 coupling Effects 0.000 claims abstract description 109
- 238000010168 coupling process Methods 0.000 claims abstract description 109
- 238000005859 coupling reaction Methods 0.000 claims abstract description 109
- 230000003068 static effect Effects 0.000 claims description 68
- 230000002441 reversible effect Effects 0.000 claims description 21
- 230000035699 permeability Effects 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 13
- 230000001105 regulatory effect Effects 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 239000000498 cooling water Substances 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 230000033001 locomotion Effects 0.000 abstract description 36
- 230000005540 biological transmission Effects 0.000 abstract description 31
- 238000007733 ion plating Methods 0.000 abstract description 22
- 238000000034 method Methods 0.000 abstract description 20
- 238000005530 etching Methods 0.000 abstract description 19
- 239000002245 particle Substances 0.000 abstract description 17
- 238000000151 deposition Methods 0.000 abstract description 11
- 239000013077 target material Substances 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 5
- 239000010409 thin film Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 39
- 230000001154 acute effect Effects 0.000 description 26
- 239000000306 component Substances 0.000 description 22
- 230000000694 effects Effects 0.000 description 18
- 239000011248 coating agent Substances 0.000 description 17
- 238000000576 coating method Methods 0.000 description 17
- 238000005516 engineering process Methods 0.000 description 15
- 230000002708 enhancing effect Effects 0.000 description 14
- 230000008859 change Effects 0.000 description 13
- 238000009826 distribution Methods 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 230000008021 deposition Effects 0.000 description 8
- 238000004062 sedimentation Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 6
- 239000011253 protective coating Substances 0.000 description 6
- 238000010891 electric arc Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000001914 filtration Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000000386 athletic effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005426 magnetic field effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 208000024891 symptom Diseases 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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Abstract
The utility model relates to the field of surface protection, and in particular relates to an efficient dynamically coupled magnetic control arc source device which can be used for improving the arc ion plating depositing process. An axial symmetry magnetic field generator of the device is arranged behind a target material and consists of a high-permeability magnet yoke and an electromagnetic coil which is arranged coaxially with the magnet yoke, or a single or more than two permanent magnets matched with the magnet yoke. A focusing and guiding magnetic field generator consists of electromagnetic coils and is coaxially placed in front of the target material. The center of the device is aligned with the target face or slightly higher than the target face. According to the device provided by the utility model, two magnetic field generators are matched in use to form a dynamically distributed coupling magnetic field on the target face so as to improve the discharge form and work stability of arc spots, control the movement locus of the arc spots, improve the etching uniformity of the target material and the utilization of the target material, reduce emission of large particles of the target material, improve the plasma transmission efficiency and prepare high quality thin films.
Description
Technical field
The utility model relates to the surfacecti proteon field, specifically a kind of high-efficiency dynamic coupling magnetic control arc source apparatus that improves deposition technique of arc ion plating.
Background technology
The surface protection coating technology is to improve tool and mould and the important channel in mechanical part quality and work-ing life, and as the PVD technology of one of material surface guard technology, the application facet at modern cutter, mould and mechanical component has obtained very good effect.The PVD technology mainly is divided into vacuum evaporation, magnetron sputtering and three types of ion plating, and in actual applications, high-quality protective coating must have fine and close weave construction, without penetrance pin hole, high rigidity, the characteristics such as firm of being combined with matrix.Vacuum evaporation and magnetron sputtering due to particle energy and ionization level low, cause that rete is loose porous, poor mechanical property, be difficult to obtain good coating and the bonding force between matrix, seriously limited the application of such technology in the protective coating preparation field.The electric arc ion coating plating technology due to simple in structure, ionization level is high, projectile energy is high, diffraction is good, can realize the series of advantages such as low temperature depositing, therefore be rapidly developed and obtain widespread use, especially showing the not available advantage of other coating technologies in tool and mould and mechanical part surfacecti proteon, is the optimised process of present tool and mould and mechanical component protective coating preparation.
But arc ions is plated in for vital some aspect of coating deposition, has also shown the unexistent problem of other plated film form, is to a certain degree hindering further application and the development of this technology.At first be the problem that " macrobead " pollutes, so-called macrobead, to come from the larger neutral particle cluster that arc cathode arc spot constantly produces when target material surface rolls burning, these neutral particle clusters erupt out together with plasma body, just fly at the coatingsurface of deposition growing to cause coatingsurface to pollute.Oarse-grained existence causes the roughness of coatingsurface to increase and reduces the gloss of coating, to decorating and wear-resistant application brings disadvantageous effect, has a strong impact on the quality of coating, cause coating adhesion to reduce and occur peeling off, the serious phenomenon such as inhomogeneous of coating.Why the tool and mould coating technology in external particularly Europe is than domestic do good, except technologic advantage, because well solved the problem of arc-over and spots moving greatly, within oarse-grained size and number are controlled at the scope that the tool and mould coating can accept.Therefore the macrobead problem is very large to the influence on development of ion plating technique, becomes the main topic of later stage development, also becomes and hinders the bottleneck problem that ion plating technique more gos deep into widespread use, and domesticly still do not have good technology to address this problem.Simultaneously, because arc ion plating mainly deposits required coating by the discharge of the cathode spot on target material surface, therefore be a kind of point source, the density of its plasma body can increase along with the distance away from the arc spot and decline to a great extent, the characteristics of dispersing due to plasma body make plasma body at the transmission space skewness simultaneously, thereby have caused the decline of sedimentation rate and the deposition uniformity of coating.And the arc spot easily forms the etching track at target surface in the long shelf depreciation of target surface, causes the inhomogeneous of target etching, and then reduced target utilization and affect the arc spot and discharged.These key technical problems have all limited preparation and the application of arc ion plating (aip) at tool and mould and mechanical manufacturing field High performance protective coating.
At present, relatively thoroughly remove oarse-grained method, in the plasma body transmitting procedure, macrobead to be excluded, i.e. design is blocked shielding (as Chinese invention patent: the device of raising electrical arc ion plating deposition film quality, patent No. ZL200810010062.5), magnetic filtering or substrate is applied certain pulsed bias, by controlling the motion of macroscopic particles, it is filtered out from plasma flow.Although block with the application of magnetic filtering technology and effectively eliminated oarse-grained pollution, but the loss due to plasma body in transmitting procedure, cause the decrease of sedimentation effect and significantly reducing of deposition window, the transmission efficiency of plasma body is the highest at present also only has 25%.And it is worth noting, in these remove oarse-grained method, all must the outer magnetic filter plant of additionalamount, cost has been increased a lot, this is also that this technology is failed in one of reason of industrial circle widespread use.Because macrobead is electronegative with Plasma Interaction in transmitting procedure, therefore adopt the pulsed bias technology also can reduce to a certain extent macrobead, but higher bias voltage also can bring higher coating internal stress, should avoid in practice.Magnetic filters and the pulsed bias technology is the method that in the plasma body transmitting procedure, macrobead is excluded, and is etc. to be used for taking stopgap measures after symptom occurs and the method for not effecting a permanent cure, so is a kind of method of passiveness.
Vacuum arc discharge is the low-voltage, high-current discharge, the behavior of vacuum arc is moved about fast by cathode surface is many, highly bright cathode spot is controlled, the motion of cathode spot has determined the motion of whole electric arc, the vacuum arc discharge is actually a series of arc event, the order of adjacent arcs spot is lighted and is extinguished the motion that has consisted of the arc spot, because it recurs rapidly, to such an extent as to the impression of people's motion electric arc.Small-sized due to arc ion plating cathode spot, power density is very high by (10
16W/m
2), if cathode spot at a position overstand, must cause liquid bath enlarged areas, cause strong macrobead and spray.Therefore solving the more positive way of macrobead problem is the measure that consideration is dealt with problems from the source, the moving Su of Yun that the Fang electricity Xing Shi ﹑ that improves the arc spot improves the arc spot is Shuaied ﹑ and is reduced discharge power ﹑ Zhong the Ji at cathode spot place discharge power is distributed on whole target surface, thereby reduces oarse-grained emission.Simultaneously, in order better to improve the quality of coating and effectively to utilize target, improve discharge stability, must reasonably control the motion of arc spot and the transmission of plasma body.
Due to the physical property of vacuum arc plasma body, additional electromagnetic field is the effective ways that improve the discharge of arc spot, control spots moving and improve the transport property of plasma body.Ion plating arc source is the source of arc plasma discharge, is the core component of ion plating technique, all be unable to do without the design in magnetic field both at home and abroad in the design in ion plating arc source.The circular little arc source of using in the world at present that maximum modal modes have that axial magnetic field controls is (as CN89200444.4, US3,793,179, US3,625,878 etc.), flood circle or the controlled arc of rectangle plane source (as CN1157335A) that the Russian arc source the longitudinal restraint magnetic field of whole target controlled and arch magnetic field are controlled, this is also popular several arc ion plating membrane techniquies both at home and abroad at present.Although the arc spot can be controlled effectively in the motion of target surface near the magnetic field with a location shape that these apply target surface, but according to the motion effects rule of above-mentioned different magnetic field component to the arc spot, the athletic meeting of arc spot under axial magnetic field and arch magnetic field is limited on target surface in certain limit, etching can form obvious etching track at target surface for a long time, be unfavorable for that the target etching is even, caused the target waste.Although and the magnetic field structure in Russian arc source can make the arc spot in whole target surface etching, effectively utilizes target, whole arc source structure is complicated, troublesome poeration, the special shape of target makes the target processing difficulties, and cost is high, and the target size is little, makes a low multiple use.Use in the world the controlled arc of the rectangle plane source that arch magnetic field is more widely controlled, utilize permanent magnet or solenoid to be embedded in the hollow position of yoke, the arch magnetic field that produces a static state on the target material surface of rectangle.This magnetic field can be decomposed into horizontal magnetic field B//and vertical magnetic field B ⊥, the characteristics of motion of " falling to walk " according to the arc spot under transverse magnetic field, B//can order about the arc spot to make circumferential motion on target surface, arch magnetic field and target surface form two angles that point to the arch summit simultaneously, under the effect of " acute angle rule ", the arc spot is limited in certain position, for a long time etching, easily form the etching track at target surface, greatly limited target utilization and affected arc spot discharge stability.
All Magnetic Field Design are all to consider to form certain magnetic field configuration on target surface, utilize the motion of acute angle rule restriction arc spot, utilize transverse component to improve the movement velocity of arc spot.Enlarge as far as possible on the one hand area and the intensity of transverse component, the motion of restriction arc spot on the one hand, it is very difficult reaching satisfied effect.And all Magnetic Field Design are all static or quasi-static, and pattern is fixed, and easily brings the low problem of target utilization, the restriction that very difficult breakthrough affects each other when improving spots moving speed and discharge stability.
If dynamically conversion magnetic field distributes in the locality of target surface, thereby can change the peaked distribution of target surface magnetic field transverse component, enlarge dynamically the area of magnetic field transverse component to reach the etch areas that enlarges the arc spot, improve the utilization ratio of target.Ramalingam is at patent WO8503954 and US4,673, a kind of dynamic Magnetic Field Design thinking has been proposed in 477, can realize the even etching of arc spot on large-area target simple in structure, this method is to change magnetic field in the distribution of target surface by permanent magnet in target mechanical rotation behind, thereby affects the arc spot in the etching position of target surface.But this method need to increase by a complicated mechanical controller structure of cover, and relates to sealing, the problems such as cooling, is difficult to apply.
The utility model content
the purpose of this utility model is to provide a kind of high-efficiency dynamic coupling magnetic control arc source apparatus, it is a kind of innovation, the breakthrough restriction, and the arc ion plating arc source that dynamic magnetic field effective and that be easy to promote is controlled, effectively solve arc ion plating macrobead problem, improve simultaneously transmission efficiency and the coating deposition uniformity of plasma body, solve the problem of arc ion plating point-like emitting source, and raising target utilization, make arc ion plating can reach the requirements of High performance protective coating preparation, become a kind of than more excellent plating process, play a role at each industry field that needs.
Principle of the present utility model is:
As shown in Fig. 1 (a), according to the affect rule of different magnetic field component on spots moving, if form the rotational symmetry divergent magnetic field that points to the target edge on target surface, the abducent trend of the arc spot of promotion is arranged; When magneticstrength was more weak, the arc spot mainly concentrated on the target center motion.Along with the increase of magneticstrength, form the acute angle that points to the target edge due to axisymmetrical magnetic field and target surface, so the arc spot can float to the edge of target in moving process.Along with the increase of magneticstrength, also increasing to the trend of the edge drift expansion of target by the arc spot that the acute angle rule is brought, reach the increase along with magneticstrength, magnetic field can be pushed the arc spot to the edge of target.Simultaneously the transverse component of axisymmetrical magnetic field formed the arc spot at target surface around heterodromous trend, so along with the increase of magneticstrength, the trend that rotatablely moves of arc spot is more and more stronger, the arc spot has superposeed in random motion gradually and has rotatablely moved, simultaneously, spots moving speed is accelerated, and the arc spot attenuates.When magneticstrength was enough large, only at target edge rapid circular movement arc spot line, target surface did not have new arc spot to occur.This magnetic field configuration generally forms on the target of reduced size, therefore for the more general little arc source of industrial application, realize than being easier in this magnetic field, but at present the arc class confining magnetic field in commonly used little arc source is to realize by the permanent magnet of target back, and changes of magnetic field frequency and magneticstrength be controllable adjustment continuously.
If can form dynamic rotational symmetry divergent magnetic field (0-60G variation) at target surface, the arc spot can be the DYNAMIC DISTRIBUTION state of assembling and expanding at whole target surface, can increase substantially the utilization ratio of target.The magnetic field of DYNAMIC DISTRIBUTION has avoided the arc spot long in Local Residence Time simultaneously, has reduced power density, has reduced oarse-grained emission.In order to improve the transmission efficiency of plasma body, arrange one at the plasma body transmission space and focus on guide field, reduce dispersing of plasma body; Should focus on simultaneously the acute angle that axial magnetic field and target surface form the sensing target center, motion that can the bound arc spot is avoided arc extinguishing, as shown in Fig. 1 (b).The rotational symmetry divergent magnetic field forms the acute angle that points to the target edge, the abducent trend of the arc spot of promotion is arranged, focusing magnetic field and target surface form the acute angle that points to target center, Constrained arc spot is in the trend of target center, two kinds of trend dynamic superposes, can control dynamically spots moving, improve arc spot discharge condition.Focusing magnetic field is an axial high-intensity magnetic field, can be so that arc spot refinement division reduces the particle emission.Plasma body is under focusing magnetic field guiding, and stable transmission can strengthen the particle encounter probability of plasma body simultaneously, improves ionization level and ion density.
For larger-size target, the combination of general using permanent magnet or solenoid and yoke can produce a rotational symmetry arch magnetic field, as shown in Fig. 1 (c) on target material surface.Static rotational symmetry arch magnetic field can be limited in the arc spot in the arch field region, form the arc class motion of annular, etching, easily form the etching track at target surface for a long time, greatly limited target utilization and affected arc spot discharge stability, the transmission of plasma body is also inhomogeneous simultaneously.Equally, in order to improve the transmission efficiency of plasma body, the surface plasma transmission space arranges one and focuses on guide field before the arc class of rotational symmetry arch magnetically confined, reduces dispersing of plasma body, should focus on simultaneously the acute angle that axial magnetic field and target surface form the sensing target center.If rotational symmetry arch magneticstrength is constant, realize with permanent magnet or the logical direct current of coil, and focal axis is to the periodical change of guiding magnetic field intensity, different coupled magnetic field situations will be produced, form dynamic coupled magnetic field at target surface and distribute, DYNAMIC DISTRIBUTION is improved arc spot discharge condition along with the variation of coupled magnetic field distribution to make the arc spot, improve the target etching rate and reduce oarse-grained emission, focus on the transmission efficiency that guide field has improved plasma body to a certain extent.
If an intensity constant axial focusing magnetic field is set in the target front, and the intensity periodical change in rotational symmetry arch magnetic field, both couplings can form different Dynamic Coupling Distribution of Magnetic Field, and the discharge of arc spot is changed along with the variation of coupled magnetic field, improve arc spot discharge condition.Plasma body is under the axial focusing introduction by magnetic field of static state, and stable transmission can strengthen simultaneously the particle encounter probability of plasma body, improves ionization level and ion density, improves deposition effect.
Therefore, the utility model is in systematic study and understand in depth on the basis that affects rule of magnetic field on arc spot discharge and motion, has proposed a kind of high-efficiency dynamic coupling magnetic control arc source apparatus.
Based on above-mentioned know-why, technical solutions of the utility model are:
A kind of high-efficiency dynamic coupling magnetic control arc source apparatus, described high-efficiency dynamic coupling magnetic control arc source apparatus is provided with Dynamic Coupling field generator for magnetic, target, target base, and target is installed on the target base; The Dynamic Coupling field generator for magnetic is made of axisymmetrical magnetic field generating unit and focusing guide field generating unit, the axisymmetrical magnetic field generating unit is positioned over the target back, form by the high permeability yoke that is positioned over the target back and with the solenoid of the coaxial placement of yoke, perhaps formed by single or two above permanent magnets cooperation yokes; Focus on the guide field generating unit and be comprised of solenoid, be positioned over the target front, with the coaxial placement of target, center and the target surface of device flush with or slightly higher than target surface; Dynamic Coupling magnetic field is formed by the symmetrical divergent magnetic field stack of dynamic shaft static focus guide field or is formed or formed or formed to guiding magnetic field by the certain focal axis of the periodically variable rotational symmetry arch of intensity magnetic Field Coupling magneticstrength to guiding magnetic field by the certain dynamic focal axis of the symmetrical arch magnetic Field Coupling of static shaft of magneticstrength by the symmetrical divergent magnetic field stack of static shaft dynamic focusing guide field.
Described axisymmetrical magnetic field generating unit forms by the high permeability yoke that is positioned over the target back and with the solenoid of the coaxial placement of yoke, or coordinate yoke to form by single or two above permanent-magnet clusters, yoke is single or two above high permeability block materials combine, and yoke is shaped as the cylindrical or stairstepping of Zhui Tai Xing ﹑; Yoke is positioned over the target stand inside of target back, with the coaxial placement of target; The insulated wire corral is enclosed within around the target base or is positioned over target stand inside, with the coaxial placement of yoke; Yoke is a little more than coil or concordant with coil.
Described axisymmetrical magnetic field position shape is divergent magnetic field, and Dynamic Coupling magnetic field is formed by the symmetrical divergent magnetic field stack of dynamic shaft static focus guide field or formed by the symmetrical divergent magnetic field of the static shaft dynamic focusing guide field that superposes.
Described axisymmetrical magnetic field position shape is arch magnetic field, and Dynamic Coupling magnetic field is formed or formed to guiding magnetic field by the certain focal axis of the periodically variable rotational symmetry arch of intensity magnetic Field Coupling magneticstrength to guiding magnetic field by the certain dynamic focal axis of the symmetrical arch magnetic Field Coupling of static shaft of magneticstrength.
Solenoid in described axisymmetrical magnetic field generating unit is wound on coil rack by enameled wire, and coil is inside and outside by insulation protection, and yoke is made by nickel plating pure iron or the other materials of high magnetic permeability.
Described focusing guide field generating unit is enclosed within on flange between arc source and body of heater, and with the coaxial placement of target, the position that focuses on the guide field generating unit is adjustable, and center and the target surface of device flush with or slightly higher than target surface.
Described focusing guide field generating unit is comprised of the solenoid of enameled wire coiling, inside and outside coil by insulation protection.
Described Dynamic Coupling magnetic field is formed by dynamic shaft symmetric magnetic field stack static focus guide field, the dynamic shaft symmetric magnetic field is produced by the solenoid indirect current in the axisymmetrical magnetic field generating unit, form at target surface the axisymmetrical magnetic field that magneticstrength constantly changes, axisymmetrical magnetic field and target surface intersect and form the angle that points to the target edge or the arch magnetic field configuration that forms bending at target surface; The static focus guide field is produced by the logical direct current of solenoid that focuses in the guide field generating unit, forms with target surface the angle that points to the target surface center, and magneticstrength is controlled by strength of current.
Described Dynamic Coupling magnetic field is formed by static shaft symmetric magnetic field stack dynamic focusing guide field, the static shaft symmetric magnetic field is produced by the logical direct current of the solenoid in the axisymmetrical magnetic field generating unit, magneticstrength is controlled by strength of current, and perhaps single or two above permanent-magnet clusters coordinate yoke to produce; The dynamic focusing guide field is produced by the solenoid indirect current that focuses in the guide field generating unit, forms dynamic magnetic field with the coupling of static shaft symmetric magnetic field.
Described alternating-current form is the adjustable direct current biasing choppy sea of frequency, zigzag wave, half-sine wave, sine wave or other forms of exchange current, and the exchange current voltage amplitude is adjustable, and the bias current voltage amplitude is adjustable.Alternating-current generation power acquisition forms with the synthetic random wave signal generator of numeral and power amplifier, or electric crystal amplification mode, or the PWM pulse width modulation mode is realized.Alternating-current generation power supply can be realized multiple waveforms, realize low-and high-frequency different frequency range variable frequency control.
Described axisymmetrical magnetic field generating unit is regulated separately or common the adjusting with the coil that focuses in the guide field generating unit, collude between the two to or reversible circulation; By regulating shaft symmetric magnetic field generating unit and the intensity that focuses on guide field generating unit coil size of current and regulate dynamic coupled magnetic field, by the frequency of regulating shaft symmetric magnetic field generating unit with the frequency adjustment Dynamic Coupling magnetic field that focuses on guide field generating unit coil exchange current; The current forms of coil is the adjustable direct current biasing choppy sea of frequency, zigzag wave, half-sine wave, sine wave or other forms of exchange current, can realize the multiple control modes to the arc spot.
Described target direct water-cooling or indirect water-cooling, yoke in the rotational symmetry generating unit of direct water-cooling be placed between target foundation cylinder in water coolant or the outer target foundation cylinder of cooling-water duct between, the yoke in the rotational symmetry generating unit of indirect water-cooling is placed between the outer foundation cylinder of cooling-water duct.
Advantage of the present utility model and beneficial effect are:
The utility model high-efficiency dynamic coupling magnetic control arc source apparatus is provided with Dynamic Coupling field generator for magnetic, target, target base, and target is installed on the target base; The Dynamic Coupling field generator for magnetic is made of axisymmetrical magnetic field generating unit and focusing guide field generating unit, the axisymmetrical magnetic field generating unit is positioned over the target back, form by the high permeability yoke that is positioned over the target back and with the solenoid of the coaxial placement of yoke, perhaps formed by single or two above permanent magnets cooperation yokes; Focus on the guide field generating unit and be comprised of solenoid, be positioned over the target front, with the coaxial placement of target, center and the target surface of device flush with or slightly higher than target surface; Dynamic Coupling magnetic field is formed by the symmetrical divergent magnetic field stack of dynamic shaft static focus guide field or is formed or formed or formed to guiding magnetic field by the certain focal axis of the periodically variable rotational symmetry arch of intensity magnetic Field Coupling magneticstrength to guiding magnetic field by the certain dynamic focal axis of the symmetrical arch magnetic Field Coupling of static shaft of magneticstrength by the symmetrical divergent magnetic field stack of static shaft dynamic focusing guide field.The utility model is used in conjunction with by two groups of field generator for magnetic, form the coupled magnetic field of DYNAMIC DISTRIBUTION on target surface, reach the discharge type and the job stability that improve the arc spot, control the movement locus of arc spot, improve target etching homogeneity and target utilization, reduce the oarse-grained emission of target, improve the plasma body transmission efficiency, in order to prepare the purpose of high-quality film.
Description of drawings
Fig. 1 (a)-Fig. 1 (c) is target material surface different magnetic field position shape distribution schematic diagram.Wherein, Fig. 1 (a) is for pointing to the rotational symmetry divergent magnetic field at target edge; Fig. 1 (b) is for pointing to the axial focusing guide field of target center; Fig. 1 (c) is rotational symmetry arch magnetic field.
Fig. 2 is the three-dimensional structure schematic diagram of high-efficiency dynamic coupling magnetic control arc source apparatus.
Fig. 3 is the high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that the reverse dynamic focusing guide field of the symmetrical divergent magnetic field stack of embodiment 1 static shaft forms.
Fig. 4 (a)-Fig. 4 (f) is that embodiment 1 rotational symmetry divergent magnetic field intensity is constant, oppositely focuses on the position shape variation diagram that guide field intensity changes the coupling magnetic line of force that causes from small to large.
Fig. 5 is the high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that the reverse static focus guide field of the symmetrical divergent magnetic field stack of embodiment 2 dynamic shaft forms.
Fig. 6 (a)-Fig. 6 (i) is that the reverse focusing guide field of embodiment 2 intensity is constant, and rotational symmetry divergent magnetic field intensity changes the position shape variation diagram of the coupling magnetic line of force that causes from small to large.
Fig. 7 is the embodiment 3 symmetrical divergent magnetic fields of the dynamic shaft high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that static focus guide field in the same way forms that superpose.
It is constant that Fig. 8 (a)-Fig. 8 (f) is that embodiment 3 focuses on guide field intensity in the same way, and rotational symmetry divergent magnetic field intensity changes the position shape variation diagram of the coupling magnetic line of force that causes from small to large.
Fig. 9 is the embodiment 4 symmetrical divergent magnetic fields of the static shafts high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that dynamic focusing guide field in the same way forms that superpose.
Figure 10 (a)-Figure 10 (f) is that embodiment 4 rotational symmetry divergent magnetic field intensity are constant, focuses in the same way the position shape variation diagram that guide field intensity changes the coupling magnetic line of force that causes from small to large.
Figure 11 (a)-Figure 11 (b) is two kinds of different modes that produce arch magnetic field.Wherein, Figure 11 (a) is by high permeability yoke and the arch magnetic field schematic diagram that is positioned over the inner solenoid generation with the coaxial placement of yoke of target stand; Figure 11 (b) is the arch magnetic field schematic diagram that is directly produced at target surface by single permanent magnet.
Figure 12 is the high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram of the symmetrical reverse dynamic focusing axial lead of arch magnetic Field Coupling of embodiment 5 static shafts magnetic field formation.
Figure 13 (a)-Figure 13 (f) is that embodiment 5 rotational symmetry arch magneticstrengties are constant, oppositely focuses on the position shape variation diagram that guide field intensity changes the coupling magnetic line of force that causes from small to large.
Figure 14 is the symmetrical arch magnetic Field Coupling of the embodiment 6 static shafts high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram of dynamic focusing axial lead magnetic field formation in the same way.
Figure 15 (a)-Figure 15 (e) is that embodiment 6 rotational symmetry arch magneticstrengties are constant, focuses in the same way the position shape variation diagram that guide field intensity changes the coupling magnetic line of force that causes from small to large.
Figure 16 is the high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that the certain reverse focal axis of the embodiment 7 periodically variable rotational symmetry arch of intensity magnetic Field Coupling magneticstrengties forms to guiding magnetic field.
Figure 17 (a)-Figure 17 (e) is that the reverse focusing guide field of embodiment 7 intensity is constant, and rotational symmetry arch magneticstrength changes the position shape variation diagram of the coupling magnetic line of force that causes from small to large.
Figure 18 is the symmetrical arch magnetic Field Coupling of the embodiment 8 dynamic shaft high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram of static focus axial lead magnetic field formation in the same way.
It is constant that Figure 19 (a)-Figure 19 (i) is that embodiment 8 focuses on guide field intensity in the same way, and rotational symmetry arch magneticstrength changes the position shape variation diagram of the coupling magnetic line of force that causes from small to large.
In figure, 1 focuses on guide field; 2 rotational symmetry divergent magnetic fields; 3 small size cylinder targets; 4 focus on the guiding solenoid; 5 rotational symmetry solenoids; 6 yokes; 7 variable-frequency power sourcess; 8 rotational symmetry arch magnetic fields; 9 large size disk targets; 10 focus on the guide field generating unit; 11 rotational symmetry divergent magnetic field generating units; 12 rotational symmetry arch field generator for magnetic.
Embodiment
As Fig. 1-shown in Figure 19, high-efficiency dynamic coupling magnetic control arc source apparatus of the present utility model mainly contains Dynamic Coupling field generator for magnetic (focusing on guide field generating unit 10, rotational symmetry divergent magnetic field generating unit 11 or rotational symmetry arch field generator for magnetic 12), target (small size cylinder target 3, large size disk target 9), target base, target is installed on the target base, and the primary structure of Dynamic Coupling field generator for magnetic is as follows:
1. the utility model Dynamic Coupling field generator for magnetic is made of axisymmetrical magnetic field generating unit (rotational symmetry divergent magnetic field generating unit 11 or rotational symmetry arch field generator for magnetic 12) and focusing guide field generating unit 10, Dynamic Coupling magnetic field is formed by the symmetrical divergent magnetic field 2 stack static focus guide fields 1 of dynamic shaft, perhaps formed by the symmetrical divergent magnetic field 2 stack dynamic focusing guide fields 1 of static shaft, perhaps focusing (axially) guiding magnetic field 1 by the symmetrical arch of the certain static shaft of magneticstrength magnetic field 8 Coupled Dynamic forms, perhaps formed by certain focusing (axially) guiding magnetic field 1 of the periodically variable rotational symmetry arch of intensity magnetic field 8 coupled magnetic field intensity.In the utility model, the rotational symmetry solenoid 5 of axisymmetrical magnetic field generating unit connects the alternating source of direct supply or variable-frequency power sources 7(changeable frequency voltage variable).
2. the utility model axisymmetrical magnetic field generating unit forms by the high permeability that is positioned over the target back (2000-6000H/m) yoke 6 and with the rotational symmetry solenoid 5 of the coaxial placement of yoke, or coordinate yoke to form by single or two above permanent-magnet clusters, yoke is single or two above high permeability block materials combine, and yoke is shaped as the cylindrical or stairstepping of Zhui Tai Xing ﹑; Yoke is positioned over target stand (target base) inside of target back, with the coaxial placement of target; Rotational symmetry solenoid 5 encloses and is enclosed within around the target base or is positioned over target stand inside, with the coaxial placement of yoke; Yoke is a little more than coil or concordant with rotational symmetry solenoid 5.
3. the utility model axisymmetrical magnetic field position shape is divergent magnetic field, and Dynamic Coupling magnetic field is formed by the symmetrical divergent magnetic field stack of dynamic shaft static focus guide field, is perhaps formed by the symmetrical divergent magnetic field of the static shaft dynamic focusing guide field that superposes.
4. the utility model axisymmetrical magnetic field position shape is arch magnetic field, Dynamic Coupling magnetic field is formed to guiding magnetic field by the focal axis of the symmetrical arch of the certain static shaft of magneticstrength magnetic field 8 Coupled Dynamic, is perhaps formed to guiding magnetic field by the periodically variable rotational symmetry arch of the intensity magnetic field 8 certain focal axis of coupled magnetic field intensity.
5. the rotational symmetry solenoid 5 in the utility model axisymmetrical magnetic field generating unit is wound on coil rack by enameled wire, and rotational symmetry solenoid 5 is inside and outside by insulation protection, and yoke is made by nickel plating pure iron or the other materials of high magnetic permeability.
6. on the flange that the utility model focusing guide field generating unit 10 is enclosed between arc source and body of heater, with the coaxial placement of target, the position that focuses on the guide field generating unit is adjustable, and center and the target surface of device flush with or slightly higher than target surface.Focus on guide field generating unit 10 and formed by the focusing guiding solenoid 4 of enameled wire coiling, focus on inside and outside guiding solenoid 4 by insulation protection.
7. the utility model Dynamic Coupling magnetic field is formed by dynamic shaft symmetric magnetic field stack static focus guide field, the dynamic shaft symmetric magnetic field is produced by rotational symmetry solenoid 5 indirect currents in the axisymmetrical magnetic field generating unit, form at target surface the axisymmetrical magnetic field that magneticstrength constantly changes, axisymmetrical magnetic field and target surface intersect and form the angle that points to the target edge or the arch magnetic field configuration that forms bending at target surface; The static focus guide field is produced by the focusing guiding solenoid 4 logical direct currents that focus in guide field generating unit 10, forms with target surface the angle that points to the target surface center, and magneticstrength is controlled by strength of current.
8. the utility model Dynamic Coupling magnetic field is formed by static shaft symmetric magnetic field stack dynamic focusing guide field, the static shaft symmetric magnetic field is produced by the logical direct current of rotational symmetry solenoid 5 in the axisymmetrical magnetic field generating unit, magneticstrength is controlled by strength of current, and perhaps single or two above permanent-magnet clusters coordinate yoke to produce; The dynamic focusing guide field is produced by focusing guiding solenoid 4 indirect currents that focus in the guide field generating unit, forms dynamic magnetic field with the coupling of static shaft symmetric magnetic field.
9. the utility model alternating-current form is the adjustable direct current biasing choppy sea of frequency, zigzag wave, half-sine wave, sine wave or other forms of exchange current, and the exchange current voltage amplitude is adjustable, and the bias current voltage amplitude is adjustable.Alternating-current generation power acquisition forms with the synthetic random wave signal generator of numeral and power amplifier, or electric crystal amplification mode, or the PWM pulse width modulation mode is realized.Alternating-current generation power supply can be realized multiple waveforms, realize low-and high-frequency different frequency range variable frequency control.
10. the utility model axisymmetrical magnetic field generating unit is regulated separately or common the adjusting with the focusing guiding solenoid 4 that focuses in the guide field generating unit, collude between the two to or reversible circulation; By regulating shaft symmetric magnetic field generating unit and the intensity that focuses on guide field generating unit axis SYMMETRIC ELECTROMAGNETIC coil 5 size of current and regulate dynamic coupled magnetic field, by the frequency of regulating shaft symmetric magnetic field generating unit with the frequency adjustment Dynamic Coupling magnetic field that focuses on guide field generating unit coil exchange current; The current forms of coil is the adjustable direct current biasing choppy sea of frequency, zigzag wave, half-sine wave, sine wave or other forms of exchange current, can realize the multiple control modes to the arc spot.
11. the utility model target direct water-cooling or indirect water-cooling, yoke in the rotational symmetry generating unit of direct water-cooling be placed between target foundation cylinder in water coolant or the outer target foundation cylinder of cooling-water duct between, the yoke in the rotational symmetry generating unit of indirect water-cooling is placed between the outer foundation cylinder of cooling-water duct.
Below by embodiment and accompanying drawing, the utility model is described in further detail.
Embodiment 1:
Fig. 3 is the high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that embodiment 1 forms for the reverse dynamic focusing guide field of the symmetrical divergent magnetic field stack of the static shaft of small size target invention.Fig. 2 is the three-dimensional structure schematic diagram of high-efficiency dynamic coupling magnetic control arc source apparatus.The symmetrical divergent magnetic field generating unit 11 of static shaft is 64mm by being positioned over its diameter of small size cylinder target 3() the high permeability taper type yoke 6 of back and forming with the rotational symmetry solenoid 5 of the coaxial placement of yoke, yoke 6 is positioned over the target stand inside of small size cylinder target 3 back, with the 3 coaxial placements of small size cylinder target; Rotational symmetry solenoid 5 encloses and is enclosed within around small size cylinder target 3 bases, with the coaxial placement of yoke 6, yoke 6 is a little more than in rotational symmetry solenoid 5(the present embodiment, and yoke 6 upper surfaces are a little more than rotational symmetry solenoid 5 upper surface 10mm) or concordant with rotational symmetry solenoid 5.The symmetrical divergent magnetic field 2 of static shaft is produced by the logical direct current of rotational symmetry solenoid 5 in rotational symmetry divergent magnetic field generating unit 11, and magneticstrength is controlled by strength of current, regulates the magneticstrength of small size cylinder target 3 and stablizes constant about 30-60G.Dynamic focusing guide field 1 is produced by focusing guiding solenoid 4 indirect currents that focus in guide field generating unit 10, forms dynamic magnetic field with symmetrical divergent magnetic field 2 couplings of static shaft.The alternating-current form be low frequency adjustable (0.01-1kHz) direct current biasing choppy sea or half-sine wave, the exchange current voltage amplitude is adjustable (0-30V), the bias current voltage amplitude is adjustable (0-10V).In the utility model, alternating-current generation power supply can adopt the synthetic random wave signal generator of numeral and power amplifier to form.
Fig. 4 (a)-Fig. 4 (f) is that embodiment 1 rotational symmetry divergent magnetic field intensity is constant, oppositely focuses on the position shape variation diagram that guide field intensity changes the coupling magnetic line of force that causes from small to large.According to the affect rule of different magnetic field component on spots moving, the rotational symmetry divergent magnetic field 2 on small size cylinder target 3 surfaces forms the acute angle that points to small size cylinder target 3 edges, the abducent trend of the arc spot of promotion is arranged, focus on guide field and target surface and form the acute angle that points to small size cylinder target 3 centers, Constrained arc spot is in the trend at small size cylinder target 3 centers, two kinds of trend dynamic superposes can be controlled spots moving dynamically, improve arc spot discharge condition.The present embodiment rotational symmetry divergent magnetic field intensity constant (30-60G fixed value), oppositely dynamic focusing guide field intensity periodically changes from small to large with choppy sea or half-sine wave form, change frequency is adjustable (0.01-1kHz), direct current biasing choppy sea that simultaneously also can be certain or half-sine wave power supply.Can find out from Fig. 4 (a)-Fig. 4 (f), when focusing (axially) guide field 1 was weak, coupled magnetic field and target surface formed the acute angle that points to small size cylinder target 3 edges, promoted the arc spot and moved to small size cylinder target 3 border extended; Along with the enhancing that focuses on (axially) guide field 1, the angle of coupled magnetic field and target surface changes gradually, gradually become by pointing to small size cylinder target 3 edges small size cylinder target 3 centers pointed to, when coupled magnetic field and target surface form the acute angle that points to small size cylinder target 3 centers, the arc spot is to small size cylinder target 3 central motions, two kinds of trend dynamic superposes can be controlled spots moving dynamically, improve arc spot discharge condition.Simultaneously, along with the enhancing that focuses on (axially) guide field 1, also improve gradually the transmission efficiency of plasma body, strengthened the particle encounter probability of plasma body, improved ionization level and ion density.
This embodiment can effectively solve arc ion plating macrobead problem, improve simultaneously transmission efficiency and the coating deposition uniformity of plasma body, solve the problem of arc ion plating point-like emitting source, and raising target utilization, make arc ion plating can reach the requirements of High performance protective coating preparation, become a kind ofly than more excellent plating process, play a role at each industry field that needs.
Embodiment 2:
Fig. 5 is that the utility model embodiment 2 is for the high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram of the reverse static focus guide field formation of the symmetrical divergent magnetic field stack of dynamic shaft of small size target invention.With embodiment 1 similar, difference is that focusing guide field intensity is constant, forms a stable plasma body transmission magnetic field.Can find out from embodiment 1, along with the periodical change that focuses on guide field intensity, formed individual dynamic focusing magnetic field at the plasma body transmission space, although improved the transmission efficiency of plasma body, but easily cause the time domain unstable of plasma body, and high-quality thin film deposition needs stable plasma distribution and transmission, therefore embodiment 2 arranges a magnetic focusing guide field that an axial strength is moderate at the plasma body transmission space, make plasma body can be under the static focus introduction by magnetic field, stable transmission.
The reverse static focus guide field intensity of the present embodiment 2 constant (100-200G fixed value), rotational symmetry divergent magnetic field intensity periodically changes from small to large with choppy sea or half-sine wave form, change frequency is adjustable (0.01-1kHz), direct current biasing choppy sea that simultaneously also can be certain or half-sine wave power supply.Fig. 6 (a)-Fig. 6 (i) is that the reverse focusing guide field of embodiment 2 intensity is constant, and rotational symmetry divergent magnetic field intensity changes the position shape variation diagram of the coupling magnetic line of force that causes from small to large.Can find out, when rotational symmetry divergent magnetic field intensity is weak, the component that focuses on guide field in coupled magnetic field is larger, form with target surface the acute angle that points to target center, the bound arc spot is at the target surface central motion, but this moment, plasma body can transmit efficiently, and stronger axial guide field can strengthen the particle encounter probability of plasma body simultaneously, improve ionization level and ion density, filter to a certain extent macrobead.Along with the enhancing of rotational symmetry divergent magnetic field, the angle of coupled magnetic field and target surface changes gradually, gradually becomes and points to the target edge by pointing to target center, promotes arc class and moves to the target border extended.Simultaneously, along with the enhancing of rotational symmetry divergent magnetic field, the focusing guiding component in coupled magnetic field slightly weakens, but the arc spot to external expansion, has reduced the particle emission at this moment, has improved target etching area.Two kinds of spots moving trend dynamic superposes can be controlled spots moving dynamically, improve arc spot discharge condition.
Embodiment 3:
Fig. 7 is the utility model embodiment 3 for the symmetrical divergent magnetic field of the small size target invention dynamic shaft high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that static focus guide field in the same way forms that superposes.With embodiment 2 similar, the changes of magnetic field mode is also similar, and difference is that the symmetrical divergent magnetic field of dynamic shaft is identical with static focus guide field polarity.Can find out from embodiment 2, if the symmetrical divergent magnetic field of dynamic shaft is opposite with static focus guide field polarity.Along with the enhancing of rotational symmetry divergent magnetic field, the focusing guiding component in coupled magnetic field weakens to some extent, causes to a certain extent the time domain unstable of plasma body.In order further to improve transmission stability and the efficient of plasma body, embodiment 3 plasma body transmission spaces arrange a magnetic focusing guide field that an axial strength is moderate, the symmetrical divergent magnetic field of dynamic shaft is identical with static focus guide field polarity, along with the enhancing of rotational symmetry divergent magnetic field, increase to a certain extent intensity and the guide effect that focuses on guide field.
The present embodiment 3 is static focus guide field intensity constant (100-200G fixed value) in the same way, rotational symmetry divergent magnetic field intensity periodically changes from small to large with choppy sea or half-sine wave form, change frequency is adjustable (0.01-1kHz), direct current biasing choppy sea that simultaneously also can be certain or half-sine wave power supply.It is constant that Fig. 8 (a)-Fig. 8 (f) is that embodiment 3 focuses on guide field intensity in the same way, and rotational symmetry divergent magnetic field intensity changes the position shape variation diagram of the coupling magnetic line of force that causes from small to large.Can find out, when rotational symmetry divergent magnetic field intensity is weak, focus on the acute angle that guide field and target surface form the sensing target center in coupled magnetic field, the bound arc spot is at the target surface central motion.Along with the enhancing of rotational symmetry divergent magnetic field, the angle of coupled magnetic field and target surface changes gradually, gradually becomes and points to the target edge by pointing to target center, promotes arc class and moves to the target border extended.Two kinds of spots moving trend dynamic superposes can be controlled spots moving dynamically, improve arc spot discharge condition.Simultaneously, along with the enhancing of rotational symmetry divergent magnetic field, the focusing guiding component in coupled magnetic field strengthens, and the axial guide field of enhancing can strengthen the particle encounter probability of plasma body, improves ionization level and ion density, filters to a certain extent macrobead.Therefore embodiment 3 along with the periodical change of rotational symmetry divergent magnetic field intensity, can make arc spot extension movement from inside to outside, and the ecto-entad contractile motion improves the movement velocity of arc spot simultaneously, reduces the particle emission, improves target etching area.Along with rotational symmetry divergent magnetic field intensity periodically changes, plasma body still can transmit efficiently, keeps efficient laser propagation effect, improves sedimentation effect and quality.
Embodiment 4:
Fig. 9 is the utility model embodiment 4 for the symmetrical divergent magnetic field of the small size target invention static shaft high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that dynamic focusing guide field in the same way forms that superposes.With embodiment 1 similar, the changes of magnetic field mode is also similar, and difference is that the symmetrical divergent magnetic field of dynamic shaft is identical with static focus guide field polarity.
The present embodiment rotational symmetry divergent magnetic field intensity constant (30-60G fixed value), dynamic focusing guide field intensity periodically changes from small to large with choppy sea or half-sine wave form in the same way, change frequency is adjustable (0.01-1kHz), direct current biasing choppy sea that simultaneously also can be certain or half-sine wave power supply.Figure 10 (a)-Figure 10 (f) is that embodiment 4 rotational symmetry divergent magnetic field intensity are constant, focuses in the same way the position shape variation diagram that guide field intensity changes the coupling magnetic line of force that causes from small to large.Can find out, focus on (axially) guide field 1 a little less than in, coupled magnetic field and target surface form the acute angle at strong sensing target edge, the acute angle angle is very little, under stronger rotational symmetry divergent magnetic field effect, the arc spot that is brought by the acute angle rule is very large to the trend of the edge drift expansion of target.along with the enhancing that focuses on (axially) guide field 1, the angle of coupled magnetic field and target surface changes slightly, although still keeping pointing to the acute angle at target edge, but the angle of acute angle increases gradually, approach vertical, therefore the axial magnetic field component is increasing, and transverse component weakens, the arc spot to the trend of target border extended motion more and more a little less than, the arc spot target surface around heterodromous trend also more and more a little less than, and strong axial magnetic field is more and more stronger to the effect of arc spot, under the effect of strong axial magnetic field, the controllable rotating extension movement of arc spot gradually becomes random motion fast.The further division that strong axial magnetic field might be brought the arc spot subtracts less granular emission.Embodiment 4 is along with the enhancing that focuses on (axially) guide field 1, focusing guiding component in coupled magnetic field strengthens, the axial guide field that strengthens can strengthen the particle encounter probability of plasma body, improves ionization level and ion density, filters to a certain extent macrobead.Embodiment 4 compares embodiment 1, and the time domain unstable of plasma body transmission is little, and the axial guide field that strengthens in the same way can so that plasma body keeps efficient laser propagation effect, improve sedimentation effect and quality.
Embodiment 5:
Embodiment 1-embodiment 4 is the high-efficiency dynamic coupling magnetic control arc source apparatus for small size target invention, and for larger-size target, the magnetic field of target back easily forms arch magnetic field at target surface.Figure 11 (a)-Figure 11 (b) is two kinds of different modes that produce arch magnetic field.Wherein, Figure 11 (a) is that yoke is a little more than coil or concordant with coil by high permeability yoke and the arch magnetic field schematic diagram that is positioned over the inner solenoid generation with the coaxial placement of yoke of target stand; Figure 11 (b) is the arch magnetic field schematic diagram that is directly produced at target surface by single permanent magnet.
Figure 12 is the high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram of the symmetrical reverse dynamic focusing axial lead of arch magnetic Field Coupling of the utility model embodiment 5 static shafts magnetic field formation.Rotational symmetry arch field generator for magnetic 12 is 150mm by being positioned over its diameter of large size disk target 9() the high permeability cylindricality yoke of back 6 and forming with the rotational symmetry solenoid 5 of the coaxial placement of yoke, yoke 6 is positioned over the target stand inside of large size disk target 9 back, with the 9 coaxial placements of large size disk target; Rotational symmetry solenoid 5 encloses in target stand inside and is enclosed within around large size disk target 9, with the coaxial placement of yoke 6.Rotational symmetry arch magnetic field 8 is produced by the logical direct current of rotational symmetry solenoid 5 in rotational symmetry arch field generator for magnetic 12, and magneticstrength is controlled by strength of current, regulates the magneticstrength of large size disk target 9 and stablizes constant about 60-100G.Dynamic focusing guide field 1 is produced by focusing guiding solenoid 4 indirect currents that focus in guide field generating unit 10, forms dynamic magnetic field with symmetrical arch field generator for magnetic 12 couplings of static shaft.
The present embodiment rotational symmetry arch magneticstrength constant (60-100G fixed value), the logical direct current of available permanent magnet or coil is realized, oppositely dynamic focusing guide field intensity periodically changes from small to large with choppy sea or half-sine wave form, change frequency is adjustable (0.01-1kHz), direct current biasing choppy sea that simultaneously also can be certain or half-sine wave power supply.Figure 13 (a)-Figure 13 (f) is that embodiment 5 rotational symmetry arch magneticstrengties are constant, oppositely focuses on the position shape variation diagram that guide field intensity changes the coupling magnetic line of force that causes from small to large.Can find out, when focusing guide field intensity is weak, coupled magnetic field is in target surface formation rotational symmetry arch magnetic field, the summit in arch magnetic field is near large size disk target 9 edges, arch magnetic field can be limited in the arc spot in the arch field region (near the target edge), forms the arc class motion of annular.The axial component in rotational symmetry arch magnetic field can make plasma body keep certain transmission efficiency.Along with the increase of reverse focal axis to guiding magnetic field intensity, move to large size disk target 9 centers gradually on the summit in arch magnetic field, makes the restriction range that rotatablely moves of arc class move to large size disk target 9 centers gradually.When focusing on the guide field strength increase to a certain extent the time, coupled magnetic field loses the arch pattern, form to point to the acute angle at large size disk target 9 centers with target surface, further improved the restraint force of arc class, make arc class assemble to large size disk target 9 centers.Oppositely focal axis periodically changes to guiding magnetic field, make the arc spot in whole target surface spiral scan campaign, improved the utilization ratio of target, this and the popular dynamic controlled arc of rectangle source effect is similar in the world, but the utility model has more function and use pattern.Simultaneously, along with the increase of reverse focal axis to guiding magnetic field intensity, improved the component of axial magnetic field, make charged particle move to the matrix direction, improved the transmission efficiency of plasma body, made Dynamic Coupling magnetic controlled ion plating technique become a kind of nonequilibrium sedimentation model.
Embodiment 6:
Figure 14 is the symmetrical arch magnetic Field Coupling of the utility model embodiment 6 static shafts high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram of dynamic focusing axial lead magnetic field formation in the same way.With embodiment 5 similar, the changes of magnetic field mode is also similar, and difference is that the symmetrical arch of dynamic shaft magnetic field is identical with static focus guide field polarity.
Figure 15 (a)-Figure 15 (e) is that embodiment 6 rotational symmetry arch magneticstrengties are constant, focuses in the same way the position shape variation diagram that guide field intensity changes the coupling magnetic line of force that causes from small to large.With embodiment 5, focus on guide field intensity weak in, coupled magnetic field forms rotational symmetry arch magnetic field at target surface, the summit in arch magnetic field is near the target edge, arch magnetic field can be limited in the arc spot in the arch field region (near the target edge), forms the arc class motion of annular.But along with the increase of reverse focal axis to guiding magnetic field intensity, coupled magnetic field loses the arch pattern at target surface, form with target surface the acute angle that points to the target edge, further improved arc class to the trend of target border extended, make the range of movement of arc spot be confined to be unfavorable for the target etching near the target edge.Although improved the transmission efficiency of plasma body to the increase of guiding magnetic field intensity along with reverse focal axis, due to the arc spot discharge range of limitation, lower target utilization, in practice, embodiment 6 is sedimentation models that a kind of needs are avoided.
Embodiment 7:
Figure 16 is the high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram that the certain reverse focal axis of the utility model embodiment 7 periodically variable rotational symmetry arch of intensity magnetic Field Coupling magneticstrengties forms to guiding magnetic field.With embodiment 5 similar, difference is that focusing guide field intensity is constant, forms a stable plasma body transmission magnetic field, has avoided the time domain unstable of plasma body.The reverse static focus guide field intensity of the present embodiment 7 constant (100-200G fixed value), rotational symmetry arch magneticstrength periodically changes from small to large with choppy sea or half-sine wave form, change frequency is adjustable (0.01-1kHz), direct current biasing choppy sea that simultaneously also can be certain or half-sine wave power supply.
Figure 17 (a)-Figure 17 (e) is that the reverse focusing guide field of embodiment 7 intensity is constant, and rotational symmetry arch magneticstrength changes the position shape variation diagram of the coupling magnetic line of force that causes from small to large.Can find out, when the intensity in rotational symmetry arch magnetic field is weak, Distribution of Magnetic Field situation and embodiment 2 rotational symmetry divergent magnetic field intensity are similar in the time of weak, the component that focuses on guide field in coupled magnetic field is larger, form with target surface the acute angle that points to target center, the bound arc spot is at the target surface central motion, but this moment, plasma body can transmit efficiently, stronger axial guide field can strengthen the particle encounter probability of plasma body simultaneously, improve ionization level and ion density, filter to a certain extent macrobead.Increase along with rotational symmetry arch magneticstrength, coupled magnetic field forms rotational symmetry arch magnetic field configuration gradually at target surface, simultaneously, the summit in arch magnetic field is close to the target edge gradually, arch magnetic field can be limited in the arc spot in the arch field region, therefore, the arc spot is along with the variation of coupled magnetic field, gradually to the target border extended.With embodiment 5, focal axis periodically changes to guiding magnetic field in the same way, makes equally the arc spot in whole target surface spiral scan campaign, improves the utilization ratio of target.Simultaneously, along with the enhancing of rotational symmetry divergent magnetic field, the focusing guiding component in coupled magnetic field slightly weakens, but the arc spot to external expansion, has reduced the particle emission at this moment, has improved target etching area.Two kinds of spots moving trend dynamic superposes can be controlled spots moving dynamically, improve arc spot discharge condition, and this sedimentation model is also a kind of coupled mode that is worthy to be popularized.
Embodiment 8:
Figure 18 is the symmetrical arch magnetic Field Coupling of the utility model embodiment 8 dynamic shaft high-efficiency dynamic coupling magnetic control arc source apparatus schematic diagram of static focus axial lead magnetic field formation in the same way.With embodiment 7 similar, the changes of magnetic field mode is also similar, and difference is that the symmetrical arch of dynamic shaft magnetic field is identical with static focus guide field polarity.
It is constant that Figure 19 (a)-Figure 19 (i) is that embodiment 8 focuses on guide field intensity in the same way, and rotational symmetry arch magneticstrength changes the position shape variation diagram of the coupling magnetic line of force that causes from small to large.Can find out, when focusing (axially) guide field 1 is weak, the component that focuses on guide field in coupled magnetic field is larger, form with target surface the acute angle that points to target center, the bound arc spot is at the target surface central motion, but this moment, plasma body can transmit efficiently, and this situation is similar to Example 7.Difference is, enhancing along with rotational symmetry arch magnetic field, coupled magnetic field does not form closed rotational symmetry arch magnetic field configuration gradually at target surface, formed on the contrary symmetrical sharp magnetic field position shape of dispersing, this sharp magnetic field and target surface form two acute angles, similar magnetic field and the target surface angle state that only has the focusing guide field to exist of this situation, sharp magnetic field is in once circular symmetric distribution of target surface, two acute angles under the effect of acute angle rule bound arc class in the motion of the central zone of sharp magnetic field, the effect in the similar arch of this situation magnetic field.Along with the enhancing that focuses on (axially) guide field 1, the center of sharp magnetic field is close to the target edge gradually, and therefore, the arc spot is along with the variation of coupled magnetic field, gradually to the target border extended.With embodiment 7, rotational symmetry arch magnetic field periodically changes in the same way, makes equally the arc spot in whole target surface spiral scan campaign, controls dynamically spots moving, improves arc spot discharge condition, improves the utilization ratio of target.
Can find out simultaneously, along with the variation in rotational symmetry arch magnetic field, focus on guide field and change not quite, can keep the high efficiency of transmission of plasma stability.Embodiment 8 compares embodiment 7, and the space time stability of plasma body transmission is better, is the better non-equilibrium arc ion plating pattern of a kind of net effect.
Claims (10)
1. high-efficiency dynamic coupling magnetic control arc source apparatus, is characterized in that, described high-efficiency dynamic coupling magnetic control arc source apparatus is provided with Dynamic Coupling field generator for magnetic, target, target base, and target is installed on the target base; The Dynamic Coupling field generator for magnetic is made of axisymmetrical magnetic field generating unit and focusing guide field generating unit, the axisymmetrical magnetic field generating unit is positioned over the target back, form by the high permeability yoke that is positioned over the target back and with the solenoid of the coaxial placement of yoke, perhaps formed by single or two above permanent magnets cooperation yokes; Focus on the guide field generating unit and be comprised of solenoid, be positioned over the target front, with the coaxial placement of target, center and the target surface of device flush with or slightly higher than target surface; Dynamic Coupling magnetic field is formed by the symmetrical divergent magnetic field stack of dynamic shaft static focus guide field or is formed or formed or formed to guiding magnetic field by the certain focal axis of the periodically variable rotational symmetry arch of intensity magnetic Field Coupling magneticstrength to guiding magnetic field by the certain dynamic focal axis of the symmetrical arch magnetic Field Coupling of static shaft of magneticstrength by the symmetrical divergent magnetic field stack of static shaft dynamic focusing guide field.
2. according to high-efficiency dynamic claimed in claim 1 coupling magnetic control arc source apparatus, it is characterized in that, yoke is single or two above high permeability block materials combine, and yoke is shaped as the cylindrical or stairstepping of Zhui Tai Xing ﹑; Yoke is positioned over the target stand inside of target back, with the coaxial placement of target; The insulated wire corral is enclosed within around the target base or is positioned over target stand inside, with the coaxial placement of yoke; Yoke is a little more than coil or concordant with coil.
3. according to high-efficiency dynamic coupling magnetic control arc source apparatus claimed in claim 2, it is characterized in that, axisymmetrical magnetic field position shape is divergent magnetic field, and Dynamic Coupling magnetic field is formed by the symmetrical divergent magnetic field stack of dynamic shaft static focus guide field or formed by the symmetrical divergent magnetic field of the static shaft dynamic focusing guide field that superposes; Perhaps, axisymmetrical magnetic field position shape is arch magnetic field, and Dynamic Coupling magnetic field is formed or formed to guiding magnetic field by the certain focal axis of the periodically variable rotational symmetry arch of intensity magnetic Field Coupling magneticstrength to guiding magnetic field by the certain dynamic focal axis of the symmetrical arch magnetic Field Coupling of static shaft of magneticstrength.
4. according to high-efficiency dynamic claimed in claim 1 coupling magnetic control arc source apparatus, it is characterized in that, focus on the guide field generating unit and be enclosed within on flange between arc source and body of heater, the position that focuses on the guide field generating unit is adjustable.
5. according to claim 1,2 or 4 described high-efficiency dynamic coupling magnetic control arc source apparatus, it is characterized in that, solenoid in the axisymmetrical magnetic field generating unit is wound on coil rack by enameled wire, and coil is inside and outside by insulation protection, and yoke is made by the nickel plating pure iron of high magnetic permeability; Focus on the guide field generating unit and formed by the solenoid of enameled wire coiling, inside and outside coil by insulation protection.
6. according to high-efficiency dynamic coupling magnetic control arc source apparatus claimed in claim 1, it is characterized in that, Dynamic Coupling magnetic field is formed by dynamic shaft symmetric magnetic field stack static focus guide field, the dynamic shaft symmetric magnetic field is produced by the solenoid indirect current in the axisymmetrical magnetic field generating unit, form at target surface the axisymmetrical magnetic field that magneticstrength constantly changes, axisymmetrical magnetic field and target surface intersect and form the angle that points to the target edge or the arch magnetic field configuration that forms bending at target surface; The static focus guide field is produced by the logical direct current of solenoid that focuses in the guide field generating unit, forms with target surface the angle that points to the target surface center, and magneticstrength is controlled by strength of current.
7. according to high-efficiency dynamic coupling magnetic control arc source apparatus claimed in claim 1, it is characterized in that, Dynamic Coupling magnetic field is formed by static shaft symmetric magnetic field stack dynamic focusing guide field, the static shaft symmetric magnetic field is produced by the logical direct current of the solenoid in the axisymmetrical magnetic field generating unit, magneticstrength is controlled by strength of current, and perhaps single or two above permanent-magnet clusters coordinate yoke to produce; The dynamic focusing guide field is produced by the solenoid indirect current that focuses in the guide field generating unit, forms dynamic magnetic field with the symmetrical divergent magnetic field coupling of static shaft.
8. according to the described high-efficiency dynamic coupling of claim 6 or 7 magnetic control arc source apparatus, it is characterized in that, the alternating-current form is adjustable direct current biasing choppy sea, zigzag wave, half-sine wave or sine wave of frequency, and the exchange current voltage amplitude is adjustable, and the bias current voltage amplitude is adjustable; Alternating-current generation power acquisition uses the synthetic random wave signal generator of numeral and power amplifier to form, or electric crystal amplification mode, or the realization of PWM pulse width modulation mode, and alternating-current generation power supply is realized multiple waveforms, realized low-and high-frequency different frequency range variable frequency control.
9. according to the described high-efficiency dynamic of claim 6 or 7 coupling magnetic control arc source apparatus, it is characterized in that, the axisymmetrical magnetic field generating unit is regulated separately or common the adjusting with the coil that focuses in the guide field generating unit, collude between the two to or reversible circulation; By regulating shaft symmetric magnetic field generating unit and the intensity that focuses on guide field generating unit coil size of current and regulate dynamic coupled magnetic field, by the frequency of regulating shaft symmetric magnetic field generating unit with the frequency adjustment Dynamic Coupling magnetic field that focuses on guide field generating unit coil exchange current; The current forms of coil is adjustable direct current biasing choppy sea, zigzag wave, half-sine wave or sine wave of frequency, realizes the multiple control modes to the arc spot.
10. according to high-efficiency dynamic coupling magnetic control arc source apparatus claimed in claim 1, it is characterized in that, target direct water-cooling or indirect water-cooling, yoke in the rotational symmetry generating unit of direct water-cooling be placed between target foundation cylinder in water coolant or the outer target foundation cylinder of cooling-water duct between, the yoke in the rotational symmetry generating unit of indirect water-cooling is placed between the outer foundation cylinder of cooling-water duct.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220572749 CN202945315U (en) | 2012-11-02 | 2012-11-02 | Efficient dynamically coupled magnetic control arc source device |
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| CN 201220572749 CN202945315U (en) | 2012-11-02 | 2012-11-02 | Efficient dynamically coupled magnetic control arc source device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953035A (en) * | 2012-11-02 | 2013-03-06 | 温州职业技术学院 | Multi-mode atternation coupling magnetic field assisted electrical arc ion plating deposition arc source apparatus |
| CN103540900A (en) * | 2013-10-22 | 2014-01-29 | 中国科学院金属研究所 | Magnetic control arc ion plating composite depositing process and magnetic control arc ion plating composite depositing device |
| CN107245700A (en) * | 2017-05-16 | 2017-10-13 | 东北大学 | A kind of arc spot control device of ion plating and control method |
| CN109055900A (en) * | 2018-09-17 | 2018-12-21 | 中国科学院宁波材料技术与工程研究所 | A kind of composition target and deposition method for cathodic arc deposition |
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2012
- 2012-11-02 CN CN 201220572749 patent/CN202945315U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953035A (en) * | 2012-11-02 | 2013-03-06 | 温州职业技术学院 | Multi-mode atternation coupling magnetic field assisted electrical arc ion plating deposition arc source apparatus |
| CN103540900A (en) * | 2013-10-22 | 2014-01-29 | 中国科学院金属研究所 | Magnetic control arc ion plating composite depositing process and magnetic control arc ion plating composite depositing device |
| CN103540900B (en) * | 2013-10-22 | 2016-01-13 | 中国科学院金属研究所 | A kind of magnetron arc ion plating composite deposition technique and deposition apparatus |
| CN107245700A (en) * | 2017-05-16 | 2017-10-13 | 东北大学 | A kind of arc spot control device of ion plating and control method |
| CN107245700B (en) * | 2017-05-16 | 2019-07-05 | 东北大学 | A kind of arc spot control device of ion plating and control method |
| CN109055900A (en) * | 2018-09-17 | 2018-12-21 | 中国科学院宁波材料技术与工程研究所 | A kind of composition target and deposition method for cathodic arc deposition |
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