CN102936717B - Compact and efficient cold cathode arc source of quasi diffusion arc - Google Patents
Compact and efficient cold cathode arc source of quasi diffusion arc Download PDFInfo
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Abstract
The invention relates to the technical field of preparation of films and coatings, particularly to a compact and efficient cold cathode arc source of a quasi diffusion arc. The cold cathode arc source is composed of an arc source head and a control magnetic field group, wherein the arc source head comprises a target, a target base, a target base shielding cover, a target base plate, an arc striking device and a permanent magnet device; the control magnetic field group comprises a flange sleeve, a flange sleeve insulating bush, a dipolar radial rotating magnetic filed generating device, an axial focusing guiding magnetic field generating device, a coaxial focusing magnetic field magnetic yoke and a flange sleeve shielding cover; and the arc source head is connected with the bottom of the flange sleeve through the target base plate to form a whole arc source structure, and connected with a finance through a flange arranged in front of the flange sleeve. Arc spots are distributed on the whole target surface under the comprehensive action of a certain magnetic field intensity and rotary frequency, the power density of the arc spots is reduced, the quasi diffusion arc state is achieved, launch of large grains is reduced, simultaneously, purified high-density plasmas are extracted through the axial focusing guiding magnetic field, and the transmission efficiency is improved.
Description
Technical field
The present invention relates to films and coatings preparing technical field, specifically a kind of standard of compact efficient diffusion arc cold cathode arc source.
Background technology
Arc ion plating membrane technique is current a kind of advanced person's ion-plating technique, because it is simple in structure, ionization level is high, projectile energy is high, diffraction is good, can realize the series of advantages such as low temperature depositing, arc ion plating (aip) is rapidly developed and obtains widespread use, show very large economic benefit and prospects for commercial application, particularly plate market segment and can see the trace of arc ion plating everywhere decorating plating and tool and mould.But oarse-grained injection has caused film surface pollution, cause surperficial roughness to increase and the gloss of reduction film, decoration and wear-resistant application are brought to disadvantageous effect, have a strong impact on the quality of film, cause coating adhesion to reduce and occur peeling phenomenon, coating is serious inhomogeneous etc.The high ionization level of arc ion plating, the outstanding advantages of low temperature depositing makes it plate at tool and mould the not available advantage of other plated film modes that shows, but the feature of arc-over makes oarse-grained existence become the obstruction of tool and mould plating, also become the bottleneck problem that hinders arc ion plating (aip) and more go deep into widespread use.
At present, many and the reasonable measure of effect of application is that magnetic filters, the employing of magnetic filtering technique, although effectively eliminated oarse-grained pollution, but because plasma body is in the loss of transmitting procedure, sedimentation rate also significantly reduces, the transmission efficiency of plasma body is the highest at present also only has 25%, cause raw-material waste and production efficiency to reduce, the advantage of arc ion plating is exactly that sedimentation rate is fast, this is also this technology in one of reason of industrial circle widespread use, can not lose this outstanding advantage in order to reduce part macrobead, this is also that magnetic filtering technique can not industrialized major reason.Therefore, must be breakthrough try every possible means from the oarse-grained problem of source solution arc ion plating.The prerequisite of electric arc self-maintained discharge is to have to continue a large amount of effective electron transmittings, analyze from electron emission mechanism, the prerequisite that a large amount of electron emission occur is to have a large amount of electronics can cross the barrier height (work function) between Metal Surface Barrier and fermi level, this situation occurs under two states, the one, hot-cathode electric is dispersed, be that metallic surface has a large amount of high-energy state electronics (being greater than work function) to exist, the quantity of high-energy state electronics is along with the temperature of metal raises and increases, that is the effect that thermoelectron is dispersed is more obvious; Another is the work function that reduction surface potential barrier reduces electronics, improves the electric field strength of cathode surface, and the reduction value of surface potential barrier height increases along with the rising of electric field strength.And near the positive charge density in the space of negative electrode has determined the strength of electric field at negative electrode place, the increase of positive ion electric charge density has promoted the increase of strength of electric field, in cold cathode situation, in order to form effective electrons diverge, maintain arc discharge, the concentrated electric discharge of electric current is the most effective approach.Concentrate electric discharge can, by negative electrode local heating to the condition of high temperature, improve the quantity of high-energy state electronics on the one hand, can form in part on the other hand highdensity positive charge sheath layer, improve local strength of electric field, reduce work function, promote a large amount of transmittings of electronics.And general arc ion plating arc source used is cold cathode arc source, in this arc source, the behavior of electric arc is moved about fast by cathode surface is many, and highly bright cathode spot is controlled.In cathodic arc spot electric discharge, only have those temperature the highest (ion bombardment and resistance heat effect), electric field is the strongest, or the minimum Microcell of work function could launch a large amount of electronics, only has the most effective a large amount of electron emission just can maintain the existence of arc spot.The motion of the arc spot of therefore observing is actually the movement that arc spot Must Significant Bit is put, and more precisely the movement of the peaked position of positive charge density causes that extinguishing of the formation of new arc spot, old arc spot caused the motion of arc spot.And small-sized just because of arc ion plating cathode spot, power density is very high, thus cathode spot at the electronics as strong, when gold belongs to former sub-﹑ ion and high speed metallic vapor emissive source, also continuous metal injection macrobead.And this phenomenon is generally that non-existent (power density is low under large-area hot-cathode arc discharge condition, do not reach melted state), only under the discharge scenario of local high power density, owing to having formed larger molten bath, under local pressure and ion bombardment effects, just cause oarse-grained injection.
From the generation mechanism of arc ion plating drop, wish reduces oarse-grained transmitting, just should avoid target local superheating to produce large darker arc spot molten bath and local ion bombardment.Therefore, must adopt the motion of certain mode control arc spot and improve the discharge type of arc spot, improve the movement velocity of arc spot, shorten the arc spot residence time on one point, reduce local power density and high-density ion bombardment.Popular controlled arc ion plating film in the world from the principle, adds a suitable magnetic field exactly on arc source, controls and improves the movement velocity of cathodic arc spot at cathode surface.Simultaneously, can be understood as power density is changed into line states (same time period) from partial points state, local power density and high-density ion bombardment are reduced, thereby reduce to a certain extent drop amount ﹑ and subtract the small drop sizes ﹑ raising rete life-span, and make some conventional vacuum arc ion platings (be again free arc ion plating, arc spot freely moves at cathode surface) can not realize or be difficult to realize evaporation become a reality.Controlled arc ion plating film is further developing of filtered cathode vacuum arc film, is also the inevitable direction of filtered cathode vacuum arc membrane technique development.
Although controlled arc ion plating can be realized the effective control to arc spot, the movement locus of restriction arc spot, the minimizing electric arc macrobead of part, but effectively do not improve the discharge type of arc spot, arc source is still the cold cathode arc source with cathode spot, be a kind of discrete arc source, this arc source is to produce oarse-grained basic reason.Meanwhile, this technology makes arc spot be limited in certain position, and long-time etching can form etching track at target surface, waste target, and be far from reaching the requirement of preparing meticulous function film.
At present, the international arc source design that also has some dynamic magnetic field control spots movings, if Ramalingam is at patent WO8503954 and US4,673, in 477, proposed a kind of after target the arc source of rotating permanent magnet, and dynamically change comprise domestic recently incipient the 4th generation arc source technology, cardinal principle is all dynamically to convert magnetic field to distribute in the locality of target surface, thereby change the peaked distribution of target surface magnetic field transverse component, the dynamic area that expands magnetic field transverse component, to reach the etch areas that expands arc spot, improves the utilization ratio of target.Dynamic approach is mainly divided electromagnetic type and mechanical type at present, cardinal principle is all dynamically to convert magnetic field to distribute in the locality of target surface, thereby change the peaked distribution of target surface magnetic field transverse component, the dynamic area that expands magnetic field transverse component, to reach the etch areas that expands arc spot, improves the utilization ratio of target.Wherein, mechanical type is by moving magnet and two kinds of methods of mobile target, and wherein Move Mode is divided into again rotation and moves back and forth two kinds of modes.Dynamic magnetic field can be realized the even etching of arc spot on large-area target simple in structure substantially, but this method often needs to increase electromagnetism or the mechanical controller structure of a set of complexity.Change by transverse component position, magnetic field expands the area that arc spot distributes on target surface, just in order to improve part target utilization, realize Large-Area-Uniform plated film and design, fundamentally do not improve the discharge mode of electric arc, the still movement of locality along with the variation of magnetic field position of arc spot, be still the arc spot electric discharge of current concentration, oarse-grained problem still exists.And the size in magnetic field is in continuous variation, the movement velocity of arc spot is unstable, also in continuous fluctuation, can not effectively control macrobead, is unfavorable for homogeneity plated film.All these arc sources are all the cold cathode arc sources with cathode spot, it is a kind of discrete arc source, this arc source is to produce oarse-grained basic reason, can not effectively improve the discharge type of arc spot, and is far from reaching the requirement of the meticulous function film of preparation.
Chinese invention patent (patent No.: ZL200810010762.4) has proposed a kind of arc ion plating apparatus that utilizes rotatingfield control spots moving, being placed in generation device of rotating magnetic field outside vacuum chamber is enclosed within on flange cover or body of heater pipeline outside target, by the motion of rotatingfield control arc spot.This patent has broken through traditional static or quasi-static Magnetic Field Design and mechanical dynamic magnetic field mentality of designing, a kind of arc ion plating apparatus of rotatingfield control spots moving of adjustable speed amplitude modulation is provided, in order to improve discharge type and the job stability of arc spot, control the movement locus of arc spot, improve target etching homogeneity and target utilization, reduce the oarse-grained transmitting of target.But the arc ion plating apparatus of this patent does not design for the target of concrete size, and suitable field form is not shown, it not is that any rotatingfield form can effectively be controlled arc spot that research is found; This invention is still controlled spots moving by dynamic rotary magnetic field, does not provide the core main points that realize accurate diffusion arc source; This invention is not carried out innovative design to concrete arc source structure, and generation device of rotating magnetic field is whole to be enclosed within around the flange outside target and to put, and magnetic field leakage field is serious, and structural volume is huge, not compact, is unfavorable for the arrangement of plated film overall design; Most importantly this invention only utilizes the electric discharge of rotating transverse magnetic field bound arc spot, the transmission of plasma is unfavorable, greatly reduce the transmission efficiency of arc plasma, most plasma containment, near target surface, has caused deposition ununiformity and rate reduction.
Therefore, the further innovation of the present invention, improves traditional arc source structure, for the circular target of diameter 60-150mm, has carried out structure design, has proposed a kind of design of standard diffusion arc cold cathode arc source of compact efficient.
Summary of the invention
The object of the present invention is to provide a kind of standard diffusion arc cold cathode arc source of the compact efficient that is beneficial to overall design, in order to improve discharge type and the job stability of arc spot, improve target etching homogeneity and target utilization, reduce the oarse-grained transmitting of target, improve the transmission efficiency of plasma body.
Know-why of the present invention is:
The present invention is by covering the frequency of whole target surface and the motion that the two adjustable utmost points of intensity rotate radial magnetic field control arc spots, radial magnetic field makes the arc spot translational motion that falls back against ampere's rule along vertical radial magnetic field orientation, traditional controlled arc source design is all to fall radial magnetic field to be limited in certain scope, by the acute angle rule restriction arc spot translational motion that falls back within the scope of certain radial magnetic field, and radially field direction random motion in target surface certain limit, arc spot is rapid circular movement in radial magnetic field ring, this motion has improved the movement velocity of arc spot, reduce the arc spot residence time on one point, a random motion is become to line to distribute, reduce the power density of arc spot, reduce oarse-grained transmitting, but etching easily forms etching hole for a long time.And by covering two utmost point radial magnetic fields of whole target surface, arc spot is along the vertical radial magnetic field orientation translational motion that falls back, radially field direction random motion, because this radial magnetic field is not limited in certain scope, but cover whole target surface, therefore arc spot radially the random motion of field direction also along whole target surface.Meanwhile, the high-frequency rotating of two utmost point radial magnetic fields, will make arc spot also superpose and rotatablely move, and therefore arc spot, under certain magnetic field intensity and certain rotation frequency comprehensive action, will make arc spot distribute at whole target surface, greatly reduce the power density of arc spot.And the radial magnetic field of rotation can retrain the front plasma body of target surface, the motion of about beam electrons and ion, before improving target surface, electron density increases greatly, promote interparticle collision, improve ion density and ionization level, further strengthen the bombardment effect of ion pair target surface, but the enhancing of this bombardment effect is distributed in whole target surface, promote the thermal field electron emission of target surface, improve effective electron amount, and make any concentrated high power density transmitting (producing oarse-grained reason) of arc spot change the thermal field electron emission of the uniform low power density of whole target surface into, realize accurate diffusion arcuation state, greatly reduce the transmitting of particle, improve evaporation effect and ionization effect simultaneously.But the effect of radial magnetic field Constrained plasma body, therefore, further by the axial focusing guide field of target leading portion, extracts the high density plasma purifying out, improves its transmission efficiency.
Based on above-mentioned know-why, technical solution of the present invention is:
A standard diffusion arc cold cathode arc source for compact efficient, the standard diffusion arc cold cathode arc source of described compact efficient is provided with two utmost point radial rotary field generator for magnetic, focusing guide field generating unit, target, target base, target base shielding case, flange cover, flange cover shielding case, target chassis, permanent magnet assembly, arc initiation device; Target, target base, target base shielding case, target chassis and permanent magnet assembly form arc source; Flange cover, flange cover insulation covering, two utmost point radial rotary field generator for magnetic, axial focusing guide field generating unit, coaxial focusing magnetic field yoke and flange cover shielding case formation control magnetic field group; Arc source is connected with flange cover bottom by target chassis, forms overall arc source structure, overlaps anterior ring flange be connected with body of heater by flange;
The outside of flange cover is provided with flange cover insulation covering, and the outside of flange cover insulation covering is provided with two utmost point radial rotary field generator for magnetic, axial focusing guide field generating unit, coaxial focusing magnetic field yoke; In flange cover, be provided with flange jacket water passage, flange cover bottom has the flange cover water outlet, the flange cover water-in that communicate with cooling-water duct, and one end of flange jacket water passage arranges annular flange dish, and ring flange edge has flange connecting hole;
Target is installed on target base by connecting thread, and two utmost point radial rotary field generator for magnetic, focusing guide field generating unit enclose and be enclosed within outside flange cover, coaxially place, and protect by insulation covering between flange cover with target; Two utmost point radial rotary field generator for magnetic are positioned over around target, and its center is higher than target material surface, position-movable; Focus on guide field generating unit and be positioned over two utmost point radial rotary field generator for magnetic front ends, coaxial focusing magnetic field yoke is installed in bottom, and two utmost point radial rotary field generator for magnetic inner sides have groove gap; Flange cover periphery arranges flange cover shielding case, overlaps shielding case inner field generator for magnetic is protected by flange; Target base chassis is nested in outside target base, carry out seal protection by insulation covering, permanent magnet assembly is arranged on target base boring position, be threaded connection with target base bottom, target base periphery arranges target base shielding case, by target base shielding case, inside is protected; In target base, be provided with target base cooling-water duct, target base cooling-water duct communicates with target base water-in, target base water outlet respectively; An arc initiation device open holes is opened near target position base in target base chassis, and arc initiation device is arranged in arc initiation device open holes, and one end of arc initiation device is corresponding with target; Target base chassis periphery has target base chassis connecting hole, and target base chassis is connected with flange cover by target base chassis connecting hole.
The standard diffusion arc cold cathode arc source of described compact efficient, two utmost point radial rotary field generator for magnetic, formed by many pole cores skeleton and enameled wire winding, iron core is overrided to form by the ring-shaped silicon steel sheet of thick 0.35-0.5mm, iron core inner circle has the groove that embeds winding coil, flute profile has opening, half opening or semi-closed port form, groove number has 24,36,48,54 or 72, iron core internal diameter is pressed flange cover size Selection, be greater than flange cover external diameter, iron core external diameter is according to Standard Selection, enclosed and is enclosed within flange and puts by insulation covering; The surface of siliconized plate scribbles high pressure resistant insulation paint, and core material adopts cold rolling or hot rolled silicon steel or employing amorphous magnetically permeable material.
The standard diffusion arc cold cathode arc source of described compact efficient, the enameled wire winding coil of two utmost point radial rotary field generator for magnetic adopts polyurethane enamelled copper wire or aluminum steel coiling, connects into symmetrical three-phase coiling by Dipole magnet field rule; The mode of connection of winding has individual layer, bilayer or single two-layer hybrid, and the mode of connection of winding overhang adopts folded formula or ripple formula, and the end shape of winding adopts chain type, staggered form, concentric type or folded formula; Adopt the double speed winding of the regular distribution of multipole proportion, △/2Y connection for the winding of the above pole core of 36 groove; Often formed by 2 six joint groups, 2 very 60 facies tract salient poles wirings, between two-phase, polarity is contrary; Half coil assembly wherein is oppositely obtained to 4 utmost point windings of 120 facies tracts, all coils polarity is identical when 4 utmost point, and Bing Yong mono-road △ shape connects; Winding leading-out wire is 6, the tapped end line 2U of three-phase, 2V, 2W are vacant does not connect, and power supply enters from 4U, 4V, 4W, produces two utmost point radial magnetic fields;
The enameled wire winding employing phase differential of two utmost point radial rotary field generator for magnetic is the three phase variable frequency sinusoidal ac source forcing of 120 °, power frequency and voltage regulate separately, voltage range is 0-380V, range of frequency is 10-500Hz, by the intensity in voltage-regulation two utmost point radial rotary magnetic fields, regulate the speed of rotation in two utmost point radial rotary magnetic fields by power frequency.
The standard diffusion arc cold cathode arc source of described compact efficient, focus on guide field generating unit, solenoid by enameled wire coiling forms, inside and outside solenoid by insulation protection, focus on guide field coil and overlap insulation covering and the insulation protection of flange cover by flange, be positioned over two utmost point radial rotary field generator for magnetic leading portions, its bottom connects an annular core yoke; Focus on the logical direct current of coil in guide field generating unit, regulate and focus on guide field intensity by size of current.
The standard diffusion arc cold cathode arc source of described compact efficient, flange cover is made by non-magnetic stainless steel, and flange cover is hollow structure, logical water coolant protection; Two utmost point radial rotary field generator for magnetic, flange overlap between target three coaxial, and the position that two utmost point radial rotary field generator for magnetic put at flange is adjustable; Flange cover cross section is monolateral be shaped as L shaped, intercooling aquaporin coaxially encloses cover by double-layer stainless steel cylinder and forms, an annular flange dish is welded on intercooling aquaporin top, ring flange internal diameter is concordant with flange cover internal diameter, external diameter is concordant with body of heater flange outer diameter, ring flange edge has 6-8 connecting hole, by connecting hole, flange cover entirety is connected with body of heater; Intercooling aquaporin bottom connects steel flange ring, and flange ring internal-and external diameter is consistent with flange cover, has 8 threaded holes bottom flange ring, and wherein two screw threads of symmetry are through hole, as entery and delivery port, other 6 as arc source connecting hole.
The standard diffusion arc cold cathode arc source of described compact efficient, target base is the tubular construction that non-magnetic double-layer stainless steel inner core and urceolus coaxially enclose cover composition hollow, inner core top is sealing disk, the installation site that the inner side of inner core is permanent magnet assembly; Urceolus top is step sealing disk, and bench height is consistent with target connecting thread height, and step outer shroud has connecting thread, and target is threaded on target base by step; Step top disk external diameter is consistent with target bottom thread internal diameter, and step bottom annulus external diameter is consistent with target external diameter, and internal radius is consistent with target bottom thread internal diameter; Urceolus external diameter is consistent with target external diameter, has target base seal ring recess on wall of the outer-rotor, by insulation covering and the assembling of target chassis; Urceolus and inner core intermediate formation target base cooling-water duct, space is left on inner core top and urceolus top; Target base bottom connects steel flange ring, and flange ring internal-and external diameter is consistent with target base, and flange ring bottom symmetry has two through holes, as intake-outlet; Flange ring bottom welding one terminal, as cathode power connection.
The standard diffusion arc cold cathode arc source of described compact efficient, target base shielding case is one to scribble the stainless steel cylinder of insullac, an annular flange dish is welded in cylinder upper end, by this ring flange, shielding case is arranged on target chassis; Shielding case cylinder bottom has three holes with target base paddle hole and power connection correspondence position, shielding case cylinder has disk in the middle of bottom, in the middle of disk, have a threaded hole, permanent magnet assembly is connected with this threaded hole by union lever screw thread, can allotment both inside and outside by nut turn-knob, regulate magnitude of field intensity.
The standard diffusion arc cold cathode arc source of described compact efficient, target base chassis periphery has 8 connecting holes, corresponding with 8 threaded holes in flange ring bottom, is connected bottom arc source and flange cover in controlling magnetic field group by 6 connecting holes wherein; Two other connecting hole overlaps water-in with flange, flange cover water outlet is corresponding, and an arc initiation device open holes is opened near target position base in target base chassis.
The standard diffusion arc cold cathode arc source of described compact efficient, permanent magnet assembly forms nut by permanent magnet, union lever, and permanent magnet is connected with nut by union lever; Permanent magnet is combined by single or more than two high magnetic permeability block materials, and yoke is shaped as the cylindrical or stairstepping of disc, annular, Zhui Tai Xing ﹑; Permanent magnet assembly is connected by the threaded hole of union lever screw thread and target base bottom, can allotment both inside and outside by nut turn-knob, and adjusting magnitude of field intensity, permanent magnet assembly is positioned in the target base intermediate gaps of target rear end.
The standard diffusion arc cold cathode arc source of described compact efficient, arc initiation device adopts pneumatic machinery striking or high-frequency arc strike device, installs by the arc initiation device open holes on target base chassis.
The invention has the beneficial effects as follows:
1, the present invention, under certain magnetic field intensity and certain rotation frequency comprehensive action, makes arc spot distribute at whole target surface, greatly reduces the power density of arc spot, improve ion density and ionization level, realize accurate diffusion arcuation state, greatly reduce the transmitting of particle, improve evaporation effect and ionization effect simultaneously.Further by the axial focusing guide field of target leading portion, the high density plasma purifying is extracted out simultaneously, improved its transmission efficiency.
2, the present invention breaks through traditional cold cathode arc source Magnetic Field Design thinking, traditional arc source structure is improved, for the circular target of diameter 60-150mm, a kind of standard diffusion arc cold cathode arc source of compact efficient is provided, in order to improve discharge type and the job stability of arc spot, improves target etching homogeneity and target utilization, reduce the oarse-grained transmitting of target, the transmission efficiency that improves plasma body, is beneficial to overall design, promotes the development of instrument plated film and decoration film coating.
Brief description of the drawings
Fig. 1 is the standard diffusion arc cold cathode arc source one-piece construction two-dimensional representation of compact efficient.
Fig. 2 is the standard diffusion arc cold cathode arc source whole interior structure three-dimensional schematic diagram of the compact efficient of not flanged cover shielding case.
Fig. 3 is that the standard of compact efficient spreads the positional structure vertical view between arc cold cathode arc source two utmost point radial rotary field generator for magnetic and arc source and flange.
Fig. 4 (a)-Fig. 4 (b) is two utmost point radial rotary field generator for magnetic structures and cross section Distribution of Magnetic Field schematic diagram.Wherein, Fig. 4 (a) is field generator for magnetic three-dimensional structure and winding displacement distribution schematic diagram; Fig. 4 (b) is two cross section, utmost point radial rotary magnetic field transient distribution of magnetic field schematic diagram.
Fig. 5 is the arc source 3 D stereo sectional view in the standard diffusion arc cold cathode arc source of embodiment 1 compact efficient.
Fig. 6 is the standard diffusion arc cold cathode arc source whole interior structure three-dimensional sectional axonometric drawing of the compact efficient of the not flanged cover shielding case of embodiment 1.
Fig. 7 is the arc source three-dimensional stereo effect figure in the standard diffusion arc cold cathode arc source of embodiment 1 compact efficient.
Fig. 8 (a)-Fig. 8 (b) is the standard diffusion arc cold cathode arc source target base of embodiment 1 compact efficient and the tomograph of target.Wherein, Fig. 8 (a) is section internal structure; Fig. 8 (b) is contour structures.
Fig. 9 (a)-Fig. 9 (c) is the magnetic field Transient distribution schematic diagram of the axial magnetic field coupling of the permanent magnet of embodiment 2 two utmost point rotation radial magnetic fields and target rear end.Wherein, Fig. 9 (a) is the two Transient distribution figures of utmost point rotation radial magnetic field on target cross section that there is no the axial magnetic field coupling of target rear end; Fig. 9 (b) is the two Transient distribution figures of utmost points rotations radial magnetic field on target cross section of sensing target one end of target rear end axial magnetic field of being coupled; Fig. 9 (c) is contrary with Fig. 9 (b) radial magnetic field orientation two Transient distribution figures of utmost points rotation radial magnetic field on target cross section of target rear end axial magnetic field of being coupled.
Figure 10 (a)-Figure 10 (d) is the magnetic field Transient distribution schematic diagram of embodiment 3 two utmost point rotation radial magnetic fields and the coupling of axial focusing guiding magnetic field.Wherein, Figure 10 (a) is without focusing on guiding when yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic fields that point to target one end in target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (b) is while guiding yoke without focusing, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic fields contrary with Figure 10 (a) radial magnetic field orientation in target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (c) has the guiding of focusing when yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic fields that point to target one end in target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (d) is while having the guiding of focusing yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic fields contrary with Figure 10 (c) radial magnetic field orientation in target cross section and coupled magnetic field at the Transient distribution figure of transmission space;
Figure 11 is the ion film coating machine complete machine design sketch that embodiment 4 has configured the compact accurate diffusion efficiently of 12 covers arc cold cathode arc source.
Figure 12 (a)-Figure 12 (b) is the internal effects figure in the standard diffusion arc cold cathode arc source of embodiment 4 compact efficients.Wherein, Figure 12 (a) is stereographic map one (with two utmost point radial rotary field generator for magnetic 12 and axial focusing guide field generating unit 13); Figure 12 (b) is stereographic map two.
Figure 13 (a)-Figure 13 (b) is the external effects figure in the standard diffusion arc cold cathode arc source of embodiment 4 compact efficients.Wherein, Figure 13 (a) is stereographic map one; Figure 13 (b) is stereographic map two.
In figure, 1 target; 2 connecting threads; 3 target base insulation coverings; 4 target base chassis; 5 target bases; 6 target base shielding cases; 7 target base cooling-water ducts; 8 flange cover insulation coverings; 9 ring flanges; 10 flange jacket water passages; 11 flange cover shielding cases; 12 2 utmost point radial rotary field generator for magnetic; 13 axial focusing guide field generating units; 14 focusing magnetic field yokes; 15 arc initiation devices; 16 flange cover water-ins; 17 flange cover water outlets; 18 target base water outlets; 19 target base water-ins; 20 permanent magnet assemblies; 21 flange connecting holes; 22 target base chassis connecting holes; 23 focus on magnetic line of force; 24 arc initiation device open holess; 25 power connections; 26 permanent magnet assembly open holess; 27 generation device of rotating magnetic field groove gaps; 28 target base seal ring recess; 29 flange covers; 30 inner cores; 31 urceolus.
Embodiment
Below by embodiment and accompanying drawing, the present invention is described in further detail.
Embodiment 1:
The present invention breaks through traditional cold cathode arc source Magnetic Field Design thinking, and traditional arc source structure is improved, and for the circular target of diameter 60-150mm, provides a kind of standard diffusion arc cold cathode arc source of compact efficient.Fig. 1 is the standard diffusion arc cold cathode arc source one-piece construction two-dimensional representation of compact efficient, and Fig. 2 is the standard diffusion arc cold cathode arc source whole interior structure three-dimensional schematic diagram of the compact efficient of not flanged cover shielding case.As can be seen from Fig., the standard diffusion You Hu source, arc cold cathode arc source of compact efficient and controlling magnetic field group composition, arc source comprises target 1, target base 5, target base shielding case 6, target chassis 4, arc initiation device 15 and permanent magnet assembly 20, controlling magnetic field group comprises flange cover 29, flange cover insulation covering 8, two utmost point radial rotary field generator for magnetic 12, axial focusing guide field generating unit 13, coaxial focusing magnetic field yoke 14 and flange cover shielding case 11, arc source is overlapped 29 bottoms by target chassis 4 and flange and is connected, form overall arc source structure, the ring flange 9 that overlaps 29 front portions by flange is connected with body of heater, focusing guide field generating unit in controlling magnetic field group produces and focuses on magnetic line of force 23.
The outside of flange cover 29 is provided with flange cover insulation covering 8, the outside of flange cover insulation covering 8 is provided with two utmost point radial rotary field generator for magnetic 12, axial focusing guide field generating unit 13, coaxial focusing magnetic field yoke 14, in flange cover 29, be provided with flange jacket water path 10, flange overlaps 29 bottoms and has the flange cover water outlet 17, the flange cover water-in 16 that communicate with flange jacket water path 10, one end of flange jacket water path 10 arranges annular flange dish 9, and ring flange 9 edges have flange connecting hole 21.
Fig. 3 is that the standard of compact efficient spreads the positional structure vertical view between arc cold cathode arc source two utmost point radial rotary field generator for magnetic and arc source and flange cover.Two utmost point radial rotary field generator for magnetic 12 of the embodiment of the present invention 1 are by many magnetic pole (12n, n is integer, n >=2) iron core skeleton and enameled wire winding composition, two utmost point radial rotary field generator for magnetic 12 inner sides have groove gap 27, and one end of arc initiation device 15 is corresponding with target 1.Iron core is very high by permeability (2000～6000H/m), the ring-shaped silicon steel sheet of thick 00.5mm is overrided to form, iron core inner circle has the groove that embeds winding coil, flute profile is semi-closed port form, groove number is 36, and iron core internal diameter is 182mm, is slightly larger than flange and overlaps 29 external diameters, iron core external diameter, according to Standard Selection, is enclosed and is enclosed within on flange cover 29 by insulation covering; The surface of siliconized plate scribbles high pressure resistant insulation paint, and core material adopts cold rolled silicon steel.The enameled wire winding coil of two utmost point radial rotary field generator for magnetic 12 adopts high-strength polyurethane enamel covered wire (QZY-2) coiling, adopts the double speed winding of the regular distribution of multipole proportion, △/2Y connection.Often formed by 2 six joint groups, 2 very 60 facies tract salient poles wirings, between two-phase, polarity is contrary; Half coil assembly wherein is oppositely obtained to 4 utmost point windings of 120 facies tracts, all coils polarity is identical when 4 utmost point, and Bing Yong mono-road △ shape connects.Winding leading-out wire is 6, the tapped end line 2U of three-phase, 2V, 2W are vacant does not connect, and power supply enters from 4U, 4V, 4W, produces two utmost point radial magnetic fields.Fig. 4 (a) is field generator for magnetic three-dimensional structure and winding displacement distribution schematic diagram, Fig. 4 (b) is two cross section, utmost point radial rotary magnetic field transient distribution of magnetic field schematic diagram, can find out that on the cross section in the middle of two utmost point radial magnetic field generating units 12, magnetic field is two utmost point radial magnetic fields that cover whole target surface completely, the even intensity in this magnetic field, frequency and intensity are adjustable.
The enameled wire winding employing phase differential of two utmost point radial rotary field generator for magnetic 12 is the three phase variable frequency sinusoidal ac source forcing of 120 °, power frequency and voltage can regulate separately, voltage range is 0-380V, range of frequency is 10-500Hz, by the intensity in voltage-regulation two utmost point radial rotary magnetic fields, regulate the speed of rotation in two utmost point radial rotary magnetic fields by power frequency; Variable-frequency power sources is taking microprocessor as core; with PWM(pulse-width modulation) mode makes; by active member IGBT modular design, adopt the fabrication techniques such as digital frequency division, D/A conversion, instantaneous values feedback, sinusoidal pulse width modulation, there is short circuit, overcurrent, overload, the defencive function such as overheated.
By covering the frequency of whole target surface and the motion that the two adjustable utmost points of intensity rotate radial magnetic field control arc spots, the radial magnetic field that covers whole target surface makes the arc spot translational motion that falls back against ampere's rule along vertical radial magnetic field orientation, radially random motion of field direction, because this radial magnetic field is not limited in the certain limit of target surface, but cover whole target surface, therefore arc spot radially the random motion of field direction also along whole target surface.Meanwhile, the high-frequency rotating of two utmost point radial magnetic fields, will make arc spot also superpose and rotatablely move, and therefore arc spot, under certain magnetic field intensity and certain rotation frequency comprehensive action, will make arc spot distribute at whole target surface, greatly reduce the power density of arc spot.And the radial magnetic field of rotation can retrain the front plasma body of target surface, the motion of about beam electrons and ion, before improving target surface, electron density increases greatly, promote interparticle collision, improve ion density and ionization level, further strengthen the bombardment effect of ion pair target surface, but the enhancing of this bombardment effect is distributed in whole target surface, promote the thermal field electron emission of target surface, improve effective electron amount, and make any concentrated high power density transmitting (producing oarse-grained reason) of arc spot change the thermal field electron emission of the uniform low power density of whole target surface into, realize accurate diffusion arcuation state, greatly reduce the transmitting of particle, improve evaporation effect and ionization effect simultaneously.
But the effect of radial magnetic field Constrained plasma body, in order further to improve the transmission efficiency of plasma body, by the axial focusing guide field of target leading portion, extracts the high density plasma purifying out.Axial focusing guide field generating unit 13 is made up of the solenoid of enameled wire coiling, inside and outside solenoid by insulation protection, focusing guide field coil overlaps insulation covering 8 by flange and overlaps 29 insulation protections with flange, be positioned over two utmost point radial rotary field generator for magnetic 12 leading portions, its bottom can connect the iron core coaxial focusing magnetic field yoke 14 of an annular high magnetic permeability (2000～6000H/m), avoid the impact of axial focusing magnetic field on rotation radial magnetic field, the logical direct current of coil in axial focusing guide field generating unit 13, regulate and focus on guide field intensity by size of current.
Fig. 6 is the standard diffusion arc cold cathode arc source whole interior structure three-dimensional sectional axonometric drawing of the compact efficient of the not flanged cover shielding case of embodiment 1.Flange cover 29 is made by non-magnetic stainless steel, and flange cover 29 is hollow structure, logical water coolant protection; Coaxial between two utmost point radial rotary field generator for magnetic 12, flange cover 29 and target 1 three, it is adjustable that two utmost point radial rotary field generator for magnetic 12 overlap position on 29 at flange.Flange overlap 29 cross sections monolateral be shaped as L shaped, spacer flanger jacket water path 10 coaxially encloses cover by double-layer stainless steel cylinder and forms, an annular flange dish 9 is welded on flange jacket water path 10 top, it is concordant that ring flange 9 internal diameters and flange overlap 29 internal diameters, ring flange 9 external diameters are concordant with body of heater flange outer diameter, ring flange 9 edges have 6-8 flange connecting hole 21, by flange connecting hole 21, flange cover 29 entirety are connected with body of heater; Flange jacket water path 10 bottom connects a thicker steel flange ring, and it is 29 consistent that flange ring internal-and external diameter and flange overlap, and flange ring bottom has 8 threaded holes, and wherein two screw threads of symmetry are through hole, as intake-outlet, other 6 as arc source connecting hole.
Fig. 5 is the arc source 3 D stereo sectional view in the standard diffusion arc cold cathode arc source of embodiment 1 compact efficient, Fig. 8 (a)-(b) is the standard diffusion arc cold cathode arc source target base of embodiment 1 compact efficient and the tomograph of target, can find out, target base 5 is non-magnetic double-layer stainless steel cylinder (inner core 30, urceolus 31) coaxially enclose and overlap the tubular construction that forms hollow, inner core 30 tops are sealing disk, the inner space of inner core 30 is the installation site of permanent magnet assembly 20, urceolus 31 tops are step sealing disk, bench height is consistent with target 1 connecting thread height, step outer shroud has connecting thread 2, target is threaded on target base 5 by step.Step top disk external diameter is consistent with target 1 bottom thread internal diameter, and step bottom annulus external diameter is consistent with target external diameter, and internal radius is consistent with target bottom thread internal diameter; Urceolus 31 external diameters are consistent with target external diameter, have target base seal ring recess 28 on urceolus 31 walls, by insulation covering and the assembling of target chassis; Urceolus 31 and inner core 30 intermediate formation target base cooling-water ducts 7, certain space is left on inner core 30 tops and urceolus 31 tops, ensures that current are unimpeded.Target base 5 bottoms connect a thicker steel flange ring, and flange ring internal-and external diameter is consistent with target base, and flange ring bottom symmetry has two through holes, as target base water-in 19, target base water outlet 18; Flange ring bottom welding one terminal, as cathode power connection 25.Fig. 7 is the arc source three-dimensional stereo effect figure in the standard diffusion arc cold cathode arc source of embodiment 1 compact efficient, can find out, target base shielding case 6 is one to scribble the stainless steel cylinder of insullac, an annular flange dish is welded in cylinder upper end, by this ring flange, target base shielding case 6 is arranged on target chassis 4; Target base water-in 19, target base water outlet 18 and the power connection correspondence position of target base shielding case 6 bottom of cylinders and target base 5 have three holes, in the middle of target base shielding case 6 bottom of cylinders, have one compared with thick disk, in the middle of disk, have a threaded hole: permanent magnet assembly open holes 26, permanent magnet assembly 20 is connected with this threaded hole by union lever screw thread, can allotment both inside and outside by nut turn-knob, regulate magnitude of field intensity.Permanent magnet assembly 20 forms nut by permanent magnet, union lever, and permanent magnet is connected with nut by union lever, and permanent magnet is made up of single disc ndfeb magnet.Permanent magnet assembly 20 is positioned in target 1 rear end target base 5 intermediate gaps, avoids water coolant demagnetization impact.Arc initiation device 15 adopts pneumatic machinery striking or high-frequency arc strike device, installs by the arc initiation device open holes 24 on target base chassis 4.
The present embodiment 1 compact construction, plasma body transmission efficiency is high, can substantially realize accurate diffusion arcuation state, greatly improve discharge type and the job stability of arc spot, improve target etching homogeneity and target utilization, reduce the oarse-grained transmitting of target, improve the transmission efficiency of plasma body, be beneficial to overall design simultaneously, be applicable to promoting, promote the development of instrument plated film and decoration film coating.
Embodiment 2:
The invention provides the embodiment of multiple magnetic Field Coupling, embodiment 2 is the axial magnetic field of traditional target rear end permanent magnet assembly generation and the embodiment of two utmost point radial rotary magnetic Field Couplings, and the axial focusing guide field of two utmost point radial rotary magnetic field leading portions does not participate in coupling.Fig. 9 (a)-Fig. 9 (c) is the magnetic field Transient distribution schematic diagram of the axial magnetic field coupling of the permanent magnet of embodiment 2 two utmost point rotation radial magnetic fields and target rear end, Fig. 9 (a) is the two Transient distribution figures of utmost point rotation radial magnetic field on target cross section that there is no the axial magnetic field coupling of target rear end, can find out, inoperative in other magnetic fields time, two utmost point radial magnetic fields of target material surface are parallel to target surface completely, form with target edge the acute angle that points to target inside.The high speed rotating in this two utmost points radial rotary magnetic field can make arc spot at whole target surface Uniform Discharge, reduces power density, reduces oarse-grained transmitting.If but control improper, spots moving excessive velocities, and magneticstrength and speed of rotation are not mated, arc spot is easy to go to target outside arc extinguishing, discharges very unstable.In order to improve discharge stability, the present embodiment 2 has adopted the target rear end axial magnetic field of traditional constraint spots moving to carry out magnetic Field Coupling.Fig. 9 (b) is the two Transient distribution figures of utmost points rotations radial magnetic field on target cross section of sensing target one end of target rear end axial magnetic field of being coupled.Fig. 9 (c) is contrary with Fig. 9 (b) radial magnetic field orientation two Transient distribution figures of utmost points rotation radial magnetic field on target cross section of target rear end axial magnetic field of being coupled.Can find out, under certain axial magnetic field intensity, two utmost point radial rotary magnetic fields be distributed with certain variation, magnetic field is no longer the radial magnetic field that is parallel to target surface completely, but form the sharp magnetic field that has certain angle with target, this sharp magnetic field and whole target surface form one towards acute angle, instead of the situation of that two the acute angle directions in picture arch magnetic field, target surface has formed two utmost point sharp magnetic fields of rotation.The parallel component of sharp magnetic field is still radial component, make arc spot edge perpendicular to radial component direction straight line drawback movement, and simultaneously, under the effect of acute angle rule, arc spot is when straight line falls away, and the component radially of having superposeed guides the movement tendency of direction, and arc spot to guide direction at component be radially no longer random motion, but controlled motion, controlled motion has improved controllability and the stability of electric discharge.Simultaneously, the high-frequency rotating of two utmost point sharp magnetic fields, the arc spot that makes controlled motion has been superposeed and rotatablely moved, therefore arc spot is under certain axial magnetic field intensity, certain rotation two utmost point radial magnetic field intensity and certain comprehensive coupling of rotation frequency, to make arc spot distribute at whole target surface, greatly reduce the power density of arc spot, realize accurate diffusion arcuation state, greatly reduce the transmitting of particle, discharge stability has been improved in the magnetic field of coupling simultaneously.
The present embodiment 2 on traditional axial controlling magnetic field basis, two utmost point radial rotary magnetic fields that superposeed, the coupled magnetic field of formation can improve discharge stability in realizing accurate diffusion arcuation state.
Embodiment 3:
Although under certain rotation two utmost point radial magnetic field intensity and certain comprehensive coupling of rotation frequency, can realize accurate diffusion arcuation state, but the effect of radial magnetic field Constrained plasma body, in order further to improve the transmission efficiency of plasma body, embodiment 3 provides by the axial focusing guide field of target leading portion, the scheme that the high density plasma purifying is extracted out.Embodiment 3 does not have the axial magnetic field that traditional target rear end permanent magnet assembly produces to participate in, the embodiment of two utmost point radial rotary magnetic fields and the coupling of front end axial focusing guide field.This scheme has two kinds of situations, and a kind of is without the situation that focuses on guiding yoke, and a kind of is to have the situation that focuses on guiding yoke.Figure 10 (a) is without focusing on guiding when yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic fields that point to target one end in target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (b) is while guiding yoke without focusing, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic fields contrary with Figure 10 (a) radial magnetic field orientation in target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Wherein Figure 10 (c) has the guiding of focusing when yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic fields that point to target one end in target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Figure 10 (d) is while having the guiding of focusing yoke, under certain axial focusing guide field intensity, two utmost points rotation radial magnetic fields contrary with Figure 10 (c) radial magnetic field orientation in target cross section and coupled magnetic field at the Transient distribution figure of transmission space; Can find out, axial focusing guide field has changed the distribution of magnetic field at transmission space, improve the axial magnetic field intensity of transmission space, can realize nonequilibrium accurate diffusion arc coating process, in reducing the transmitting of discharge energy density minimizing macrobead, reduce the target surface constraint of plasma body, improved efficiency and density that plasma body transports to transmission space, and be very effective.Can find out simultaneously, the participation of axial focusing guide field, change the state of two utmost point radial magnetic fields, what form similar embodiment 2 forms the sharp magnetic field of certain acute angle with target surface, and in not focusing on guiding yoke, axial focusing guide field can largely affect two utmost point radial magnetic fields, for larger target, even form two wedge angles, the track of arc spot acute angle drift motion is shortened, easily arc extinguishing.And in having the guiding of focusing yoke, axial focusing guide field major part is retrained by yoke, less on the impact of target surface two utmost point radial magnetic fields, substantially forms the little distortion of acute angle amplitude, and only form the acute angle of a direction, the situation of similar embodiment 2.So both can improve discharge stability, realize diffusion arcuation state, can improve again plasma body transmission efficiency simultaneously.Therefore, this programme embodiment provides a transmission efficiently, stable discharging, the arc source side case of accurate diffusion arcuation state.
Embodiment 4:
Produce for industrial plated film, the stability of product, large-area uniformity, high efficiency are all to consider.And the plasma distribution of independent arc source leading portion is all inhomogeneous, in order to improve plasma uniformity and fraction of coverage, overall design is all to have certain rule to the arrangement in arc source, generally will form cross-distribution.If plasma body window diameter is too little, or intersection region is not obvious, is difficult to realize industrialization uniform coated and produces, and conforming product rate and homogeneity reduce greatly.This is also that magnetic filters one of reason of can not industrialization producing, and magnetic filter is bulky, is difficult to realize intensive distribution at a body of heater, therefore plasma body transmission window is narrow, between window, be difficult to intersect, easily form the vacancy district that plasma density is low, it is unfavorable that plated film is produced.The arc ion plating apparatus that utilizes rotatingfield control spots moving that Chinese invention patent (patent No. ZL200810010762.4) proposes does not provide the core main points that realize accurate diffusion arc source, only utilize the electric discharge of rotating transverse magnetic field bound arc spot, the transmission of plasma is unfavorable, greatly reduce the transmission efficiency of arc plasma, most plasma containment, near target surface, has caused deposition ununiformity and rate reduction.Meanwhile, generation device of rotating magnetic field is whole to be enclosed within around the flange outside target and to put, and magnetic field leakage field is serious, and structural volume is huge, not compact, is unfavorable for the arrangement of plated film overall design.
Not only transmit efficiently in accurate diffusion provided by the invention arc source, and compact construction.Figure 11 is the ion film coating machine complete machine design sketch that embodiment 4 has configured the compact accurate diffusion efficiently of 12 covers arc cold cathode arc source, Figure 12 (a)-(b) is the internal effects figure in the standard diffusion arc cold cathode arc source of embodiment 4 compact efficients, and Figure 13 (a)-(b) is the external effects figure in the standard diffusion arc cold cathode arc source of embodiment 4 compact efficients.Can find out, on a body of heater, can realize intensive arc source distribution, between arc source window, distance is little, has improved plated film space plasma distributing homogeneity, is conducive to large-area coating film.Meanwhile, the standard diffusion arc cold cathode arc source structure of compact efficient of the present invention is reasonable, good looking appearance, and easily installation and debugging, can industrial application.
Claims (10)
1. the standard of a compact efficient diffusion arc cold cathode arc source, is characterized in that: the standard diffusion arc cold cathode arc source of described compact efficient is provided with two utmost point radial rotary field generator for magnetic, focusing guide field generating unit, target, target base, target base shielding case, flange cover, flange cover shielding case, target chassis, permanent magnet assembly, arc initiation device; Target, target base, target base shielding case, target chassis and permanent magnet assembly form arc source; Flange cover, flange cover insulation covering, two utmost point radial rotary field generator for magnetic, axial focusing guide field generating unit, coaxial focusing magnetic field yoke and flange cover shielding case formation control magnetic field group; Arc source is connected with flange cover bottom by target chassis, forms overall arc source structure, overlaps anterior ring flange be connected with body of heater by flange;
The outside of flange cover is provided with flange cover insulation covering, and the outside of flange cover insulation covering is provided with two utmost point radial rotary field generator for magnetic, axial focusing guide field generating unit, coaxial focusing magnetic field yoke; In flange cover, be provided with flange jacket water passage, flange cover bottom has the flange cover water outlet, the flange cover water-in that communicate with cooling-water duct, and one end of flange jacket water passage arranges annular flange dish, and ring flange edge has flange connecting hole;
Target is installed on target base by connecting thread, and two utmost point radial rotary field generator for magnetic, focusing guide field generating unit enclose and be enclosed within outside flange cover, coaxially place, and protect by insulation covering between flange cover with target; Two utmost point radial rotary field generator for magnetic are positioned over around target, and its center is higher than target material surface, position-movable; Focus on guide field generating unit and be positioned over two utmost point radial rotary field generator for magnetic front ends, coaxial focusing magnetic field yoke is installed in bottom, and two utmost point radial rotary field generator for magnetic inner sides have groove gap; Flange cover periphery arranges flange cover shielding case, overlaps shielding case inner field generator for magnetic is protected by flange; Target base chassis is nested in outside target base, carry out seal protection by insulation covering, permanent magnet assembly is arranged on target base boring position, be threaded connection with target base bottom, target base periphery arranges target base shielding case, by target base shielding case, inside is protected; In target base, be provided with target base cooling-water duct, target base cooling-water duct communicates with target base water-in, target base water outlet respectively; An arc initiation device open holes is opened near target position base in target base chassis, and arc initiation device is arranged in arc initiation device open holes, and one end of arc initiation device is corresponding with target; Target base chassis periphery has target base chassis connecting hole, and target base chassis is connected with flange cover by target base chassis connecting hole.
2. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: two utmost point radial rotary field generator for magnetic, formed by many pole cores skeleton and enameled wire winding, iron core is overrided to form by the ring-shaped silicon steel sheet of thick 0.35-0.5mm, iron core inner circle has the groove that embeds winding coil, flute profile has opening, half opening or semi-closed port form, groove number has 24,36,48,54 or 72, iron core internal diameter is pressed flange cover size Selection, be greater than flange cover external diameter, iron core external diameter is according to Standard Selection, enclosed and is enclosed within flange and puts by insulation covering; The surface of siliconized plate scribbles high pressure resistant insulation paint, and core material adopts cold rolling or hot rolled silicon steel or employing amorphous magnetically permeable material.
3. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 2, it is characterized in that: the enameled wire winding coil of two utmost point radial rotary field generator for magnetic adopts polyurethane enamelled copper wire or aluminum steel coiling, connects into symmetrical three-phase coiling by Dipole magnet field rule; The mode of connection of winding has individual layer, bilayer or single two-layer hybrid, and the mode of connection of winding overhang adopts folded formula or ripple formula, and the end shape of winding adopts chain type, staggered form, concentric type or folded formula; Adopt the double speed winding of the regular distribution of multipole proportion, △/2Y connection for the winding of the above pole core of 36 groove; Often formed by 2 six joint groups, 2 very 60 facies tract salient poles wirings, between two-phase, polarity is contrary; Half coil assembly wherein is oppositely obtained to 4 utmost point windings of 120 facies tracts, all coils polarity is identical when 4 utmost point, and Bing Yong mono-road △ shape connects; Winding leading-out wire is 6, the tapped end line 2U of three-phase, 2V, 2W are vacant does not connect, and power supply enters from 4U, 4V, 4W, produces two utmost point radial magnetic fields;
The enameled wire winding employing phase differential of two utmost point radial rotary field generator for magnetic is the three phase variable frequency sinusoidal ac source forcing of 120 °, power frequency and voltage regulate separately, voltage range is 0-380V, range of frequency is 10-500Hz, by the intensity in voltage-regulation two utmost point radial rotary magnetic fields, regulate the speed of rotation in two utmost point radial rotary magnetic fields by power frequency.
4. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: focus on guide field generating unit, solenoid by enameled wire coiling forms, inside and outside solenoid by insulation protection, focus on guide field coil and overlap insulation covering and the insulation protection of flange cover by flange, be positioned over two utmost point radial rotary field generator for magnetic leading portions, its bottom connects an annular core yoke; Focus on the logical direct current of coil in guide field generating unit, regulate and focus on guide field intensity by size of current.
5. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: flange cover is made by non-magnetic stainless steel, flange cover is hollow structure, logical water coolant protection; Two utmost point radial rotary field generator for magnetic, flange overlap between target three coaxial, and the position that two utmost point radial rotary field generator for magnetic put at flange is adjustable; Flange cover cross section is monolateral be shaped as L shaped, intercooling aquaporin coaxially encloses cover by double-layer stainless steel cylinder and forms, an annular flange dish is welded on intercooling aquaporin top, ring flange internal diameter is concordant with flange cover internal diameter, external diameter is concordant with body of heater flange outer diameter, ring flange edge has 6-8 connecting hole, by connecting hole, flange cover entirety is connected with body of heater; Intercooling aquaporin bottom connects steel flange ring, and flange ring internal-and external diameter is consistent with flange cover, has 8 threaded holes bottom flange ring, and wherein two screw threads of symmetry are through hole, as entery and delivery port, other 6 as arc source connecting hole.
6. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: target base is the tubular construction that non-magnetic double-layer stainless steel inner core and urceolus coaxially enclose cover composition hollow, inner core top is sealing disk, the installation site that the inner side of inner core is permanent magnet assembly; Urceolus top is step sealing disk, and bench height is consistent with target connecting thread height, and step outer shroud has connecting thread, and target is threaded on target base by step; Step top disk external diameter is consistent with target bottom thread internal diameter, and step bottom annulus external diameter is consistent with target external diameter, and internal radius is consistent with target bottom thread internal diameter; Urceolus external diameter is consistent with target external diameter, has target base seal ring recess on wall of the outer-rotor, by insulation covering and the assembling of target chassis; Urceolus and inner core intermediate formation target base cooling-water duct, space is left on inner core top and urceolus top; Target base bottom connects steel flange ring, and flange ring internal-and external diameter is consistent with target base, and flange ring bottom symmetry has two through holes, as intake-outlet; Flange ring bottom welding one terminal, as cathode power connection.
7. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: target base shielding case is one to scribble the stainless steel cylinder of insullac, an annular flange dish is welded in cylinder upper end, by this ring flange, shielding case is arranged on target chassis; Shielding case cylinder bottom has three holes with target base paddle hole and power connection correspondence position, shielding case cylinder has disk in the middle of bottom, in the middle of disk, have a threaded hole, permanent magnet assembly is connected with this threaded hole by union lever screw thread, can allotment both inside and outside by nut turn-knob, regulate magnitude of field intensity.
8. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: target base chassis periphery has 8 connecting holes, corresponding with 8 threaded holes in flange ring bottom, be connected bottom arc source and flange cover in controlling magnetic field group by 6 connecting holes wherein; Two other connecting hole overlaps water-in with flange, flange cover water outlet is corresponding, and an arc initiation device open holes is opened near target position base in target base chassis.
9. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: permanent magnet assembly forms nut by permanent magnet, union lever, permanent magnet is connected with nut by union lever; Permanent magnet is combined by single or more than two high magnetic permeability block materials, and yoke is shaped as the cylindrical or stairstepping of disc, annular, Zhui Tai Xing ﹑; Permanent magnet assembly is connected by the threaded hole of union lever screw thread and target base bottom, can allotment both inside and outside by nut turn-knob, and adjusting magnitude of field intensity, permanent magnet assembly is positioned in the target base intermediate gaps of target rear end.
10. according to the standard diffusion arc cold cathode arc source of compact efficient claimed in claim 1, it is characterized in that: arc initiation device adopts pneumatic machinery striking or high-frequency arc strike device, install by the arc initiation device open holes on target base chassis.
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| CN106644177A (en) * | 2017-01-06 | 2017-05-10 | 北京工业大学 | Method for measuring AC welding arc heat output |
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| CN1029568C (en) * | 1991-06-01 | 1995-08-23 | 中国科学院电工研究所 | Heavy current multi-arc-spot controlled vacuum arc evaporation source |
| GB0715879D0 (en) * | 2007-08-15 | 2007-09-26 | Gencoa Ltd | Low impedance plasma |
| CN101358328A (en) * | 2007-12-28 | 2009-02-04 | 中国科学院金属研究所 | Arc source of dynamic controlled arc ion plating |
| CN202945317U (en) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | Bipolar rotating coupling magnetic field auxiliary quasi diffusion arc cold cathode ion plating device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106644177A (en) * | 2017-01-06 | 2017-05-10 | 北京工业大学 | Method for measuring AC welding arc heat output |
| CN106644177B (en) * | 2017-01-06 | 2019-04-05 | 北京工业大学 | A method of measurement AC welding electric arc heat output |
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