CN1029568C - Heavy current multi-arc-spot controlled vacuum arc evaporation source - Google Patents
Heavy current multi-arc-spot controlled vacuum arc evaporation source Download PDFInfo
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- CN1029568C CN1029568C CN 91103541 CN91103541A CN1029568C CN 1029568 C CN1029568 C CN 1029568C CN 91103541 CN91103541 CN 91103541 CN 91103541 A CN91103541 A CN 91103541A CN 1029568 C CN1029568 C CN 1029568C
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Abstract
The present invention belongs to thin film deposition equipment which is a core component of a vacuum arc ion plating machine. An electromagnetic coil magnetic field is used for controlling the trajectory and the speed of arc spots on a cathode surface so as to obviously reduce molten metal drops transmitted by an evaporator source and enhance the quality of a plating film. When the evaporator source works under large arc current above 200A and a magnetic field matched with the large arc current, an arc root can be split into a plurality of small arc spots performing multi-trace rotation on almost the whole cathode surface, which enables the cathode surface to be eroded uniformly and the deposition rate of the plating film to be enhanced by 2 to 3 times. An annular cathode evaporator source is used, and the addition of a transverse magnetic field makes the rotation speed of the arc spots higher. Thus, the molten metal drops transmitted by the evaporator source can be basically eliminated, and the utilization rate of cathode materials is higher.
Description
The heavy current multi-arc-spot controlled vacuum arc evaporation source that the present invention proposes belongs to film deposition equipment.It is the core component in the filtered cathode vacuum arc film machine.
This steered vacuum arc evaporation source is applied to ion-plating technique, can on various materials, plate the layer of metal nitride, metallic carbide, metal oxide and carbonitride ganoine thin film, or complex alloy thin film, with the performances such as wear-resisting, corrosion-resistant, high temperature oxidation resisting that improve material surface; Also can be in order to plating surface decoration film or other functional film.
The filtered cathode vacuum arc film is current a kind of advanced person's a ion-plating technique.This technology is the localized hyperthermia of the vacuum arc arc spot that relies in the vacuum film coating chamber to be produced, make cathode material flash evaporation and ionization as the target utmost point, produce the degree of ionization height and the big plasma body of ion energy, on workpiece, add negative potential, can be under the lower condition of workpiece Heating temperature, on workpiece surface, plate one deck hardness height, dense structure and the various ganoine thin films of strong adhesion.
The free vacuum arc evaporation source of people's original adoption, promptly the arc spot of vacuum arc is random motion on cathode surface, its shortcoming is to produce the curing metal drop easily on workpiece to be plated.U.S. S.Ramalingam in 1985 proposes to adopt and improves arc spot speed of rotation to suppress the notion of molten drop, has played the effect that suppresses molten drop.Yet the arc spot is rotated on cathode surface, can make the ablation of cathode surface very inhomogeneous.Round solving the contradiction that suppresses between molten drop and the raising cathode surface ablation homogeneity, the steered vacuum arc evaporation source of several different structure forms was proposed once in the world.
People such as the S.Ramalingam of U.S. Minnesota university have proposed the controlled arc evaporation source that the circular cathode of scanning is united in a kind of mechanic-magnetic field in the United States Patent (USP) 4839011 of United States Patent (USP) 4673477 in 1987 and 1989.Be with the magnetic field of permanent magnet that is placed on cathode bottom, make cathodic arc spot on cathode surface, do the circular trace motion, and permanent magnet is done eccentric rotation under negative electrode, to reach the purpose of arc spot comprehensive scanning on negative electrode.
The C.F.Morrison of U.S. Vac-Tec Systems company has proposed a kind of steered vacuum arc evaporation source that adopts pulse control type coil magnet and rectangular cathode structure in United States Patent (USP) 4724058 in 1988.Adopt the pulse power that magneticfield coil is powered, to produce pulsed magnetic field.In the time of pulse action, the arc spot moves along a certain closed path at cathode surface; In pulse unemployed time, the arc spot still is free movement on cathode surface.Make that in each recurrence interval the free movement on cathode surface of arc spot scans towards a certain definite closed path, control to realize the lip-deep spots moving of anticathode.
The S.Ramalingam of the U.S. has proposed the steered vacuum arc evaporation source of a kind of resultant field and thick cathode construction again in international monopoly WO089/01699 in 1989.The resultant field of this evaporation source is to adopt a main field coil, and an auxiliary magnetic field coil, perhaps the resultant field that is made up by a solenoid and permanent magnet; Negative electrode then adopts the thick negative electrode of the monometallic of a circle, or overlaps a hollow cathode in the circular cathode outside, or embeds the composite cathode of other metal on circular cathode, in order to the plating poly alloy film.Rely on the galvanic current of regulating winding to control the movement locus of arc spot on cathode surface.
In addition, (the Surface and Coatings Technol.39/40 such as E.Erturk of Germany Interatom company, 1989) also having proposed permanent magnet scan control arc spot track with straight-line displacement, also is the controlled arc evaporation source that scanning is united in a similar above-mentioned mechanic-magnetic field.
In above-mentioned several steered vacuum arc evaporation sources, the controlled arc evaporation source of mechanical rotation permanent magnet and circular cathode structure can play the effect that suppresses molten drop to a certain extent, the cathode burning corrosion homogeneity that also can acquire a certain degree, yet the structure more complicated of these several evaporation sources, working reliability and less stable are unsuitable for using on industrial production.The steered vacuum arc evaporation source of pulse control type coil magnet and rectangular cathode structure, its spots moving speed is not high, can not play the effect that suppresses molten drop effectively; The ablation homogeneity of cathode surface is also undesirable, has influenced the raising of cathode material utilization ratio, and this can make the cost of making and change negative electrode improve concerning the rectangular large area negative electrode, has offset the superiority that adopts large area cathode to be applied to produce.
The steered vacuum arc evaporation source of resultant field that in WO/01699, proposes and thick cathode construction, rely on the electric current in the coil, the movement locus of arc spot on cathode surface can be controlled in principle, the ablation homogeneity that the evaporation source molten drop produced and improved cathode surface can be suppressed.But this evaporation source adopts resultant field, the structure more complicated, and in this patent, to adopt diameter be 200-300mm(or bigger except that mentioning negative electrode) data, not have to propose can be for the concrete structure of this steered vacuum arc evaporation source of enforcement and the operating parameter example of any other reference.
Up to the present, the various steered vacuum arc evaporation sources that proposed, though aspect minimizing or basically eliminate molten drop and raising cathode surface ablation homogeneity, obtained certain effect, yet the shortcoming that still has following two aspects: (1) evaporation source all is to be based upon on the basis of single arc spot rotary work, thereby working current is still smaller, though suppressed the generation of molten drop, but some decline of coated film deposition speed that brings because of the rotation of arc spot is under some influence plated film production efficiency; (2) evaporation source structure more complicated, cost of manufacture height, motion credibility also can be under some influence.In view of above-mentioned 2 points, still be difficult to replace the free arc evaporation source that is adopted in the existing commercial ion film coating machine.
Purpose of the present invention just provides a kind of practical on industrial production, the novel heavy current multi-arc-spot controlled vacuum arc evaporation source that can replace free arc evaporation source, this evaporation source, compare to have with free arc evaporation source on the one hand and can reduce or basically eliminate molten drop and the advantage that improves the coated film deposition rate, compare with other type evaporation source on the other hand, have again simple in structure, cost of manufacture is low, control flexibly, good operation stability, widely used advantage.Can practical application on industrial production.
The evaporation source that the present invention proposes is by the lip-deep Distribution of Magnetic Field of control cathode, reaches movement velocity and the track of control arc spot on cathode surface.Specifically adopt the magnetic coil of adjustable current to produce transverse magnetic field and longitudinal magnetic field component on cathode surface, transverse magnetic field wherein makes cathodic arc spot fast rotational on cathode surface, and longitudinal magnetic field then makes the centre focus of cathodic arc spot to cathode surface.This evaporation source low current (＜100A) and downfield down during operation, very weak to the reactive force of arc spot owing to magnetic field, evaporation source can move under free conditions at the arc, its characteristic and free arc evaporation source are identical.Big flame current (〉=150A) and be complementary with it when moving high-intensity magnetic field under, big electric current arc root will be split into several little arc spots, simultaneously because the raising of flame current, focussing force is strengthened, several arc spots will so not only suppress molten drop almost making multiple mark fast rotational on the whole cathode surface, have improved coating quality, and along with the enhancing of flame current and the raising of degree of ionization, coated film deposition speed also is significantly improved.
Describe characteristics of the present invention and embodiment in detail below in conjunction with accompanying drawing.
Accompanying drawing 1 is the basic structure synoptic diagram of heavy current multi-arc-spot controlled vacuum arc evaporation source of the present invention.
Wherein (1) is that ignition anode (2) is the high-temperature insulation shield ring
(3) be that negative electrode (4) is water-tight lid
(5) be that coil rack (6a) is last magnetic guiding loop
Be that lower magnetic guiding loop (7) is a shadow pole (6b)
(8) be that ignition anode support bar (9) is a cathode pressuring plate
(10) be that detachable cathode flange (11) is a solenoid
(12) be that negative electrode cylindrical shell (13) is the shadow pole studdle
(14) be that main support rod (15) is the high-temperature insulation shielding slab
(16) be that insulated enclosure flange (17) is the cathode block flange
(18) be that vitrified pipe (19) is a screw
(20) be that magnetic conductive cylinder (21) is the magnetic conduction conducting rod
(22) be that packing ring (23) is a sealing-ring
(24) be that conducting strip (25) is a screw
(26) be that water-cooled tube (27) is the limbers
(28) be the water-cooled cavity
Accompanying drawing 2 is the composite cathode of the evaporation source of the present invention when being used for plating poly alloy, in order to replace the negative electrode (3) in the accompanying drawing 1.
Wherein (46) are that screw (47) is the high-temperature insulation lid
(48) be that composite cathode (49) is an embedding groove
Accompanying drawing 3 is the structural representation of evaporation source of the present invention when negative electrode is hollow cathode.
Wherein (1) is that ignition anode (2) is the high-temperature insulation shield ring
Be that last magnetic guiding loop (6d) is a lower magnetic guiding loop (6c)
(7) be that stabilising arc shadow pole (8) is the ignition anode support bar
Be that cathode pressuring plate (10a) is detachable cathode flange (9a)
Be that solenoid (12a) is the negative electrode cylindrical shell (11a)
Be that shadow pole support bar (14a) is a main support rod (13a)
Be that high-temperature insulation shielding slab (16a) is the insulated enclosure flange (15a)
Be that cathode block flange (22a) is a pad (17a)
Be that sealing-ring (24a) is a conducting strip (23a)
Be that screw (26a) is a water-cooled tube (25a)
(30) be trip bolt for high-temperature insulation lid (31)
(32) be that push bolt (33) is the magnetic conduction packing ring
(34) be that magnetic conduction end cap (35) is a hollow cathode
(36) be that magnetic conduction conducting rod (37) is the negative electrode stay
(38) be that locking screw (39) is the negative electrode exterior seal ring
(40) be that negative electrode inner seal ring (41) is an end cover
As shown in Figure 1, heavy current multi-arc-spot controlled vacuum arc evaporation source provided by the invention is made up of main arc power source, negative electrode, the magnetic circuit that contains solenoid, water-cooled and ignition anode, it is characterized in that main arc power source is 〉=high-current supply of 150A; Solenoid is the solenoid of adjustable current; The magnetic circuit that contains solenoid is made up of solenoid (11) and the magnetic conduction conducting rod of being made by magnetically permeable material (21), magnetic conductive cylinder (20), cathode block flange (17), negative electrode cylindrical shell (12), detachable cathode flange (10), cathode pressuring plate (9), lower magnetic guiding loop (6b), last magnetic guiding loop (6a) and negative electrode (3), negative electrode (3) is a circular cathode, available titanium metal is made, also available other metals or electro-conductive material are made, and its diameter is 60-150mm; The solenoid (11) that is wound on the coil rack (5) is enclosed within magnetic conductive cylinder (20) periphery, the upper end is placed with water-tight lid (4), be positioned at negative electrode cylindrical shell (12) inside, negative electrode cylindrical shell (12) lower surface and cathode block flange (17) join, the upper end is placed with negative electrode (3), cathode block flange (17) inside be provided with negative electrode cylindrical shell (12) in the water-cooled cavity (28) that communicates of two limbers (27), the bottom has and the vertical blind hole of end face, the water-cooled tube (26) that communicates with water-cooled cavity (28) is housed in the blind hole, shadow pole (7) point that the anticathode of being made by magnetic conduction or non-magnet material (3) plays insulating effect is welded on the magnetic guiding loop (6a), and be fixed on the main support rod (14) by three shadow pole studdles (13), main support rod (14) by screw retention on the insulated enclosure flanged plate (16) that is positioned at cathode block flange (17) upper surface, tapped lower magnetic guiding loop (6b) and be with externally threaded magnetic guiding loop (6a) threaded connection of going up, high-temperature insulation shield ring (2) is embedded in the magnetic guiding loop (6a), be with magnetic conduction conducting rod (21) in the endoporus of the endoporus of magnetic conductive cylinder (20) and cathode flange (17), and with nut with magnetic conductive cylinder (20), solenoid (11), water-tight lid (4) is fixed in the negative electrode cylindrical shell (12) on the cathode block flange (17), simultaneously, also with packing ring (22), sealing-ring (23), conducting strip (24) is fixed on the lower end of magnetic conduction conducting rod (21).
In Fig. 1, the negative electrode diameter is 60-150mm.This evaporation source is with cathode block flange (17) and insulated enclosure flange (16), pass through pressing plate, crimping is sealed on the joint flange of band sealing-ring of vacuum film coating chamber (joint flange of do not draw among the figure pressing plate and vacuum film coating chamber), whole negative electrode is insulated to coating chamber, and the above part of isolated flange (16), can within a short period of time, be extracted into 6.7 * 10
-3The vacuum that handkerchief is above, and can regulate the interior gaseous tension of coating chamber by micro-air inlet adjustment valve (not drawing among the figure).By the high-temperature insulation shielding slab (15) that high temperature insulating material is made,, avoid insulated enclosure flange (16) to go to pot in order to the high temperature of protection coating chamber.Cathode block flange (17) is made by magnetically permeable material.In cathode block flange (17), be provided with negative electrode cylindrical shell (12) in the water-cooled cavity (28) that communicates of two limbers (27); overheated in order to prevent flange; protect sealing-ring to avoid simultaneously because of overheated and rotten; cathode block flange (17) bottom has and the vertical blind hole of end face, and the water-cooled tube (26) that communicates with water-cooled cavity (28) is housed in the blind hole.The negative electrode of being made by monometallic or alloy (3) adopts direct water-cooling, water coolant enters water-cooled cavity (28) by water-cooled tube (26), after the water inlet in thick negative electrode cylindrical shell (12) in two limbers (27), behind the bottom surface cooling negative electrode through negative electrode (3), flow out through another limbers (27) again, through water-cooled cavity (28), flow out from another water-cooled tube (26) (not marking the figure) again.The magnetic circuit of evaporation source is made up of solenoid (11), negative electrode (3) and conducting magnetic component.Conducting magnetic component comprises magnetic conduction conducting rod (21), magnetic conductive cylinder (20), cathode block flange (17), negative electrode cylindrical shell (12), detachable cathode flange (10), cathode pressuring plate (9), goes up magnetic guiding loop (6a), lower magnetic guiding loop (6b).Solenoid (11) is wound on the coil rack (5), and be enclosed within the periphery of magnetic conductive cylinder (20) together, water-tight lid (4) is stamped in the upper end, be positioned at the inside of negative electrode cylindrical shell (12), negative electrode cylindrical shell (12) lower end and cathode block flange (17) join, be placed with negative electrode (3) on the upper surface, negative electrode (3) diameter is 60-150mm, negative electrode (3) compresses and is sealed on the negative electrode cylindrical shell (12) by cathode pressuring plate (9), the detachable cathode flange (10) of band screw thread, screw thread is fixed on the negative electrode cylindrical shell (12), install after installing insulated enclosure flange (16) and high-temperature insulation shielding slab (15).The magnetic flux of control cathode spots moving, through cathode block flange (17), negative electrode cylindrical shell (12), dismountable cathode flange (10), the air gap of cathode pressuring plate (9) between dismountable cathode flange (10) and cathode pressuring plate (9) to lower magnetic guiding loop (6b) and last magnetic guiding loop (6a), again through negative electrode (3) and to magnetic conduction conducting rod (21) and magnetic conductive cylinder (20), and with cathode block flange (17) closure.The stabilising arc of being made by magnetic conduction or non-magnet material is welded on the magnetic guiding loop (6a) with shadow pole (7) point, and anticathode (3) is an insulating.Shadow pole (7) is fixed on the main support rod (14) by 3 shadow pole studdles (13), main support rod (14) then by screw retention on insulated enclosure flanged plate (16), tapped lower magnetic guiding loop (6b) and be with externally threaded magnetic guiding loop (6a) threaded connection of going up, after negative electrode (3) shortens through ablating, can rotate shadow pole support bar (13) and lower magnetic guiding loop (6b) again, to keep the relative height of shadow pole (7) and negative electrode (3).
The present invention adopts the shadow pole (7) of band gap and the stabilising arc method that embed type high-temperature insulation shield ring (2) combines; last magnetic guiding loop (6a) the stabilising arc effect of having held concurrently; under the dual function of insulating shadow pole (7) and high-temperature insulation shield ring (2); the operation stability of evaporation source is obviously improved; and high-temperature insulation shield ring (2) is embedded in the magnetic guiding loop (6a), and the high-temperature insulation shield ring of being made by the frangible material with protection (2) exempts from damage.The another kind of form of magnetic guiding loop is formed by upper and lower magnetic guiding loop (6c) with (6d).Ignition anode (1) is fixed on the ignition anode support bar (8) by trip bolt.Ignition anode support bar (8) can directly be fixed on the movable position of electro-magnet or pneumatic element (not marking among the figure), and the inflation of energising, outage or pneumatic element by electro-magnet, venting make its upper and lower moving, to reach the purpose of contacting ignition arc.Flame current is drawn by conducting strip (24).Water-tight lid (4) and magnetic conduction conducting rod (21) that solenoid (11) is made by non-magnet material the sealing of water are finished, and the water seal material of its middle and lower part is rigid water seal.In addition, in Fig. 1, (18) are vitrified pipe, and (19) are the screw of fixed electromagnet or pneumatic element, and (25) are the screw of Motionless electromagnetic coil (11) outlet line socket.
Heavy current multi-arc-spot controlled vacuum arc evaporation source proposed by the invention, reliable operation, flexible operation can be 10
-3Handkerchief steady running under number air pressure of handkerchiefs and the 50-250A.After electro-magnet or pneumatic element striking, can by regulating solenoid current and flame current size, select proper running parameters according to different plated film requirements, can satisfy different plated film requirements.
Fig. 2 is the composite cathode of plating poly alloy with the steered vacuum arc evaporation source.In Fig. 2, by negative electrode (3), change composite cathode (48) into as Fig. 2 with the big electric current multi-arc-spot of Fig. 1 controlled arc evaporation source, can do of the test of each alloying constituent to multicomponent alloy coatings performance impact.The composite cathode of Fig. 2 (48) is equivalent to the centre portions of Fig. 1 negative electrode 3 is removed, and becomes the cup-shaped composite cathode of the recessed heart of heavy wall (48).Have uniform distribution on the heavy wall and the little embedding groove (49) of width, embed the sheet material of making by the metal or alloy that will add composition in the embedding groove (49).Inlay good after simple sharp processing and can be contained on the big electric current multi-arc-spot controlled arc evaporation source as Fig. 1, do the research and the test of multicomponent alloy performance.
Among Fig. 2, high-temperature insulation lid (47) is in order to stabilising arc.Fixedly the material of the screw (46) of high-temperature insulation lid (47) is identical with the base mateiral of this composite cathode (48).In order to regulate the height of high-temperature insulation lid (47), itself and the composite cathode (48) of having ablated are complementary, can finish by the screw (46) of precession or replacing high-temperature insulation lid (47).
With the agent structure of heavy current multi-arc-spot controlled vacuum arc evaporation source, change above-mentioned composite cathode as Fig. 2, study the influence of each alloying constituent, very simple and quick.Can smelt earlier and gold copper-base alloy,, embed in the heavy wall of negative electrode (48), not only can embed a kind of material, also can embed several of differing materials, can draw the test-results of various alloying constituent influences easily as long as a small amount of flaky metallic material is arranged.Because the ablation amount is little, same negative electrode (48) can use repeatedly repeatedly, carries out different research and test.This kind method is compared with using magnetron sputtering coating method, and the character of research multicomponent alloy coatings is more convenient.Because the thickness of magnetron sputtering target in 20 millimeters, is difficult for embedding other metallic substance mostly, more difficult repeatedly use.
The negative electrode of heavy current multi-arc-spot controlled vacuum arc evaporation source provided by the invention can adopt hollow cathode, and accompanying drawing 3 is the evaporation source structural representations when its negative electrode is hollow cathode, is applicable to the plated film object that requires basically eliminate to solidify drop.This heavy current multi-arc-spot controlled vacuum arc evaporation source is made up of main arc power source, hollow cathode and the magnetic circuit that contains solenoid, its main arc power source, magnetic circuit and above-mentioned evaporation source are basic identical, the different hollow cathodes (35) that are with above-mentioned evaporation source are the thick cylinder shape, make by metallic substance to be evaporated, the upper surface is annular generating surface, drive vacuum arc arc spot fast rotational on cathode surface by energising solenoid and magnetic circuit at the transverse magnetic field that produces on the cathode vaporation face, evaporation and ionization cathode material produce ion and reach the purpose of vacuum plating.Be the hollow cathode (35) of thick cylinder shape and put the negative electrode stay (37) and the locking screw (38) that are positioned at hollow cathode (35) lower end in cathode tube (12a) fixing, the height of hollow cathode (35) in cathode tube (12a) regulated by locking screw (38).Solenoid (11a) is enclosed within on the magnetic conduction electric pole (36), be placed in hollow cathode (35) inner chamber, hollow cathode (35) internal surface vacuum-sealing, pressured tight bolt (32), the end cover (41) that is positioned over the magnetic conduction end cap (34) of hollow cathode inner top side portion and made by non-magnet material is compressed, make negative electrode inner seal ring (40) be crimped on the inwall of hollow cathode (35); By the pressure between cathode pressuring plate (9a) and the detachable cathode flange (10a), exterior seal ring (39) is crimped on the outside surface of hollow cathode (35), realize the inside and outside vacuum-sealing of hollow cathode (35).High-temperature insulation lid (30) is fixed on the push bolt (32) by trip bolt (31).The desirable 60-250mm of negative electrode external diameter.The magnetic circuit of this evaporation source requires to increase transverse field strength as far as possible, to improve the speed of rotation of arc spot.Solenoid (11a) adopts direct water-cooling, to improve the current density by coil.Magnetic circuit is made up of cathode block flange (17), negative electrode cylindrical shell (12a), detachable cathode flange (10a), cathode pressuring plate (9a), lower magnetic guiding loop (6d), last magnetic guiding loop (6c), magnetic conduction end cap (34), magnetic conduction packing ring (33), magnetic conduction conducting rod (36) and push bolt (32).These parts are made by magnetically permeable material.In order to prevent that hollow cathode (35) from moving up under hydraulic pressure and vacuum pressure reduction dual function, two screw holes are arranged at hollow cathode (35) bottom, precession locking screw (38), and the hollow cathode (35) of this tight screw with lock (38) revolved an angle, be pressed in the hole of negative electrode stay (37).Negative electrode stay (37) is two arrow gauges, does not influence the circulation of water coolant very much.After hollow cathode (35) ablation shortens, can or change locking screw (38) by turn, promote hollow cathode (35) to suitable height, make the operation of evaporation source often be in best working order.High-temperature insulation lid (30) is fixed on the push bolt (32) by trip bolt (31), and trip bolt (31) is identical with the material of hollow cathode (35).The effect of other parts and manufactured materials are identical with the heavy current multi-arc-spot controlled vacuum arc evaporation source of Fig. 1.
Main feature and the effect of the steered vacuum arc evaporation source that the present invention proposes are summarized as follows:
(1) heavy current multi-arc-spot controlled vacuum arc evaporation source of the present invention's proposition is a kind of The evaporation source of big electric current multi-arc-spot, can under a plurality of arc spot states of rotation, carry out work by the big arc current with 〉=150 amperes, make arc evaporation source when improving the cathode burning corrosion uniformity and reducing molten drop, has high coated film deposition speed, thereby can reduce the plated film time, improve ion film plating productivity ratio. For example, the coated film deposition speed when this controlled arc evaporation source moves under 200A, than the high 2-3 of sedimentation rate of free arc evaporation source doubly, and the density of film plating layer, hardness and adhesive force also have raising.
(2) the controlled arc evaporation source of the ring-type cathode structure of the present invention's proposition, its magnetic structure is conducive to increase substantially transverse field strength, make the at faster speed rotation on cathode surface of arc spot, make the molten drop elimination, thereby satisfied the specific (special) requirements in this respect of some film plating layer. Simultaneously, the negative electrode of loop configuration can also make the negative electrode end face ablate more fully; Can adopt long thick-wall tube to make negative electrode, make the utilization rate of cathode material higher.
(3) heavy current multi-arc-spot controlled vacuum arc evaporation source of the present invention's proposition adopts single dc coil magnet and circle or ring-type cathode structure, it is simple in structure, easy to make that this evaporation source is had, the characteristics that cost of manufacture is cheap are convenient to practical application on producing.
(4) heavy current multi-arc-spot controlled vacuum arc evaporation source that proposes of the present invention is the stabilising arc method that adopts the high-temperature insulation shield ring of the shadow pole of band gap and embed type to combine; not only improved the operation stability of evaporation source; and because the high-temperature insulation shield ring is embedded in the middle of the firm magnetic guiding loop; the high-temperature insulation body of frangible is protected; obviously reduce the consumption of expensive high temperature insulating material again, reduced the manufacturing cost of evaporation source.
Claims (4)
1, a kind of heavy current multi-arc-spot controlled vacuum arc evaporation source is made up of main arc power source, negative electrode, the magnetic circuit that contains solenoid, water-cooled and ignition anode, it is characterized in that main arc power source is 〉=high-current supply of 150A; Solenoid is the solenoid (11) of adjustable current; Contain magnetic conduction conducting rod (21), magnetic conductive cylinder (20), cathode block flange (17), negative electrode cylindrical shell (12), detachable cathode flange (10), cathode pressuring plate (9), lower magnetic guiding loop (6b) that the magnetic circuit of solenoid made by solenoid (11) and magnetically permeable material, go up magnetic guiding loop (6a) and negative electrode (3) is formed, negative electrode (3) is a circular cathode, available titanium metal is made, also available other metals or electro-conductive material are made, and its diameter is 60-150mm; The solenoid (11) that is wound on the coil rack (5) is enclosed within magnetic conductive cylinder (20) periphery, the upper end is placed with water-tight lid (4), be positioned at negative electrode cylindrical shell (12) inside, negative electrode cylindrical shell (12) lower surface and cathode block flange (17) join, the upper end is placed with negative electrode (3), cathode block flange (17) inside be provided with negative electrode cylindrical shell (12) in the water-cooled cavity (28) that communicates of two limbers (27), the bottom has and the vertical blind hole of end face, the water-cooled tube (26) that communicates with water-cooled cavity (28) is housed in the blind hole, shadow pole (7) point that the anticathode of being made by magnetic conduction or non-magnet material (3) plays insulating effect is welded on the magnetic guiding loop (6a), and be fixed on the main support rod (14) by three shadow pole studdles (13), main support rod (14) by screw retention on the insulated enclosure flanged plate (16) that is positioned at cathode block flange (17) upper surface, tapped lower magnetic guiding loop (6b) and be with externally threaded magnetic guiding loop (6a) threaded connection of going up, high-temperature insulation shield ring (2) is embedded in the magnetic guiding loop (6a); Be with magnetic conduction conducting rod (21) in the endoporus of the endoporus of magnetic conductive cylinder (20) and cathode flange (17), and with nut magnetic conductive cylinder (20), solenoid (11), water-tight lid (4) are fixed in the negative electrode cylindrical shell (12) on the cathode block flange (17), packing ring (22), sealing-ring (23), conducting strip (24) are fixed on the lower end of magnetic conduction conducting rod (21).
2, by the described heavy current multi-arc-spot controlled vacuum arc evaporation source of claim 1, it is characterized in that the composite cathode (48) of described negative electrode for using for plating poly alloy, this composite cathode is that recessed heart heavy wall is cup-shaped, have the little embedding groove of uniform distribution width (49) on the heavy wall, embed the sheet material that the metal or alloy will add composition is made in the groove.
3, a kind of heavy current multi-arc-spot controlled vacuum arc evaporation source, by main arc power source, negative electrode, the magnetic circuit that contains solenoid, water-cooled and ignition anode are formed, it is characterized in that main arc power source is 〉=high-current supply of 150A, solenoid is the solenoid of adjustable current, the magnetic circuit that contains solenoid is by solenoid (11a), cathode block flange (17a), negative electrode cylindrical shell (12a), detachable cathode flange (10a), cathode pressuring plate (9a), lower magnetic guiding loop (6d), last magnetic guiding loop (6c), magnetic conduction end cap (34), magnetic conduction packing ring (33), magnetic conduction conducting rod (36) and push bolt (32) are formed, these parts are made by magnetically permeable material, the hollow cathode (35) that is the thick cylinder shape is made by metallic substance to be evaporated, hollow cathode (35) is placed in the cathode tube (12a), the negative electrode stay (37) and the locking screw (38) that are positioned at hollow cathode (35) lower end in the cathode tube (12a) are fixing by being placed on, solenoid (11a) is enclosed within and is placed on the magnetic conduction conducting rod (36) in hollow cathode (35) inner chamber, the endoporus of cathode block flange (17a) is passed in magnetic conduction conducting rod (36) bottom, and by pad (22a), sealing-ring (23a), and nut seal and fixing, the fixing lower end of magnetic conduction conducting rod (36) down of conducting strip (24a), hollow cathode (35) internal surface vacuum-sealing, push bolt (32) will be positioned over the magnetic conduction end cap (34) of hollow cathode (35) inner top side portion and the end cover (41) made by non-magnet material compresses, negative electrode inner seal ring (40) is crimped on the inwall of hollow cathode (35), cathode pressuring plate (9a) and detachable cathode flange (10a) are crimped on hollow cathode (35) outside surface with exterior seal ring (39), high-temperature insulation lid (30) is fixed and clamped by trip bolt (31) on the bolt (32), shadow pole (7) point is welded on the magnetic guiding loop (6c), and be fixed on the main support rod (14a) by three shadow pole support bars (13a), main support rod (14a) by screw retention on the insulated enclosure flange (16a) that is positioned at cathode block flange (17a) upper surface, tapped lower magnetic guiding loop (6d) and be with externally threaded magnetic guiding loop (6c) threaded connection of going up, high-temperature insulation shield ring (2) is embedded in the magnetic guiding loop (6c).
4,, it is characterized in that the stabilising arc structure is that the shadow pole (7) of band gap combines with the high-temperature insulation shield ring (2) of embed type by claim 1 or 2 or 3 described heavy current multi-arc-spot controlled vacuum arc evaporation sources.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91103541 CN1029568C (en) | 1991-06-01 | 1991-06-01 | Heavy current multi-arc-spot controlled vacuum arc evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91103541 CN1029568C (en) | 1991-06-01 | 1991-06-01 | Heavy current multi-arc-spot controlled vacuum arc evaporation source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1055774A CN1055774A (en) | 1991-10-30 |
| CN1029568C true CN1029568C (en) | 1995-08-23 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91103541 Expired - Fee Related CN1029568C (en) | 1991-06-01 | 1991-06-01 | Heavy current multi-arc-spot controlled vacuum arc evaporation source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1029568C (en) |
Cited By (1)
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|---|---|---|---|---|
| CN102936717A (en) * | 2012-11-08 | 2013-02-20 | 温州职业技术学院 | Compact and efficient cold cathode arc source of quasi diffusion arc |
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| CN101363116B (en) * | 2008-03-26 | 2010-06-09 | 中国科学院金属研究所 | Multi-mode programmable modulated arc ion plating apparatus controlled by rotary lateral magnetic field |
| CN102296274B (en) * | 2011-08-18 | 2013-11-27 | 北京镨玛泰克真空科技有限公司 | Shielding device for cathode arc metal ion source |
| CN102796989A (en) * | 2012-07-23 | 2012-11-28 | 上海法德机械设备有限公司 | Cathodic arc device for vacuum tool coating |
| CN104046942B (en) * | 2013-03-12 | 2016-09-14 | 中国兵器工业第五九研究所 | A kind of preparation method of metal tantalum coating |
| CN109267018B (en) * | 2017-07-18 | 2021-12-17 | 平高集团有限公司 | Rapid plasma coating method and device |
| CN107385397B (en) * | 2017-07-24 | 2019-07-05 | 东北大学 | A kind of intelligence arc source |
| WO2019038811A1 (en) * | 2017-08-21 | 2019-02-28 | 堺ディスプレイプロダクト株式会社 | Vapor deposition apparatus, vapor deposition method, and method for producing organic el display device |
| CN108193174B (en) * | 2018-01-04 | 2019-09-24 | 陕西理工大学 | The high vacuum electric arc arc stabilizer and sputtering method of heavy caliber truncated cone-shaped target |
| CN108039112B (en) * | 2018-01-05 | 2023-07-07 | 辽宁科技大学 | Hydraulic electromagnetic reversing valve demonstration teaching aid adopting organic glass valve body |
| CN115074678B (en) * | 2022-06-20 | 2023-05-16 | 肇庆市科润真空设备有限公司 | Multi-arc target mechanism for continuous coating of stainless steel sheet and PVD coating device |
-
1991
- 1991-06-01 CN CN 91103541 patent/CN1029568C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102936717A (en) * | 2012-11-08 | 2013-02-20 | 温州职业技术学院 | Compact and efficient cold cathode arc source of quasi diffusion arc |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1055774A (en) | 1991-10-30 |
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