CN102796989A - Cathodic arc device for vacuum tool coating - Google Patents
Cathodic arc device for vacuum tool coating Download PDFInfo
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- CN102796989A CN102796989A CN2012102567760A CN201210256776A CN102796989A CN 102796989 A CN102796989 A CN 102796989A CN 2012102567760 A CN2012102567760 A CN 2012102567760A CN 201210256776 A CN201210256776 A CN 201210256776A CN 102796989 A CN102796989 A CN 102796989A
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- electromagnetic coil
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- water seat
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Abstract
The invention discloses a cathodic arc device for a vacuum tool coating. The cathodic arc device comprises a target material and other components, wherein the target material is connected with a cold water seat; an auxiliary anode is fixed on one surface of a flange plate via a support column; a first O-shaped sealing ring is located above the flange plate; an insulation plate is located between the first O-shaped sealing ring and a second O-shaped sealing ring; a screw insulation sleeve is sleeved on a first inner hexagon screw; the cold water seat is fixed on the other surface of the flange plate via the first inner hexagon screw; one end of a wire connection holder is located on the cold water seat; a nut is connected with a second inner hexagon screw; a water nozzle connector is located on one side of an electromagnetic coil; the electromagnetic coil is fixed with the cold water seat via a first cross recess head screw; an electromagnetic coil framework is located above the electromagnetic coil; a protective cover is fixed with the electromagnetic coil framework via a second cross recess head screw; and an arc striking pole is tightly pressed on a pneumatic arc striking mechanism, and located below the target material. The cathodic arc device for the vacuum tool coating disclosed by the invention has a simple structure, and ensures the uniform etching performance of the target material.
Description
Technical field
The present invention relates to the vacuum plating industry, particularly relate to a kind of cathode arc device of vacuum tool plated film.
Background technology
The vacuum cathode electric arc target is of a great variety in the existing market vacuum industry; Complex structure; General vacuum cathode electric arc target device adopts an electric arc and a cathode power, and many pneumatic strikings of employing of device or electromagnetism striking, and permanent magnet is adopted in the target magnetically confined; Permanent magnet use for a long time can cause magnetic to weaken and loss of excitation, causes aura to weaken can not to guarantee the even etching of target.
Summary of the invention
Technical problem to be solved by this invention provides a kind of cathode arc device of vacuum tool plated film, and it is simple in structure, and guarantees the even etching property of target.
The present invention solves above-mentioned technical problem through following technical proposals: a kind of cathode arc device of vacuum tool plated film; It is characterized in that; It comprises target, supplementary anode, pillar stiffener, flanged plate, the first sealing O type circle, insulcrete, the second sealing O type circle, cold water seat, screw insulation covering, first socket head cap screw, junction block, nut, second socket head cap screw, water fittings, the first cross pan head screw, solenoid, electromagnetic coil skeleton, shield cap, the second cross pan head screw, pneumatic striking mechanism, the striking utmost point, and target is connected with the cold water seat, and supplementary anode is fixed on the one side of flanged plate through pillar stiffener; The first sealing O type circle is positioned at the top of flanged plate; Insulcrete is between the first sealing O type circle and the second sealing O type circle, and the screw insulation covering is enclosed within on first socket head cap screw, and the cold water seat is fixed on the another side of flanged plate through first socket head cap screw; One end of junction block is positioned on the cold water seat; Nut is connected with second socket head cap screw, and water fittings is positioned at a side of solenoid, and solenoid is fixed through the first cross pan head screw and cold water seat; Electromagnetic coil skeleton is positioned at the top of solenoid; Shield cap is fixed through the second cross pan head screw and electromagnetic coil skeleton, and the striking utmost point is pressed in the pneumatic striking mechanism, and the striking utmost point is positioned at the below of target.
Preferably, the diameter of said insulcrete is greater than the diameter of the first sealing O type circle and the diameter of the second sealing O type circle.
Positive progressive effect of the present invention is: of the present invention simple in structure, easy to maintenance, and also rete compactness is good, and wear resistance improves, and guarantees the even etching property of target.
Description of drawings
Fig. 1 is the decomposing schematic representation of the cathode arc device of vacuum tool plated film of the present invention.
Fig. 2 is the assembling synoptic diagram of the cathode arc device of vacuum tool plated film of the present invention.
Embodiment
Provide preferred embodiment of the present invention below in conjunction with accompanying drawing, to specify technical scheme of the present invention.
As depicted in figs. 1 and 2; The cathode arc device of vacuum tool plated film of the present invention comprises target 1, supplementary anode 2, pillar stiffener 3, flanged plate 4, the first sealing O type circle 5, insulcrete 6, the second sealing O type circle 7, cold water seat 8, screw insulation covering 9, first socket head cap screw 10, junction block 11, nut 12, second socket head cap screw 13, water fittings 14, the first cross pan head screw 15, solenoid 16, electromagnetic coil skeleton 17, shield cap 18, the second cross pan head screw 19, pneumatic striking mechanism 20, the striking utmost point 21; Target 1 is connected with cold water seat 8; Supplementary anode 2 is fixed on the one side of flanged plate 4 through pillar stiffener 3; The first sealing O type circle 5 is positioned at the top of flanged plate 4; Insulcrete 6 is between the first sealing O type circle 5 and the second sealing O type circle 7, and screw insulation covering 9 is enclosed within on first socket head cap screw 10, and cold water seat 8 is fixed on the another side of flanged plate 4 through first socket head cap screw 10; One end of junction block 11 is positioned on the cold water seat 8; Nut 12 is connected with second socket head cap screw 13, and water fittings 14 is positioned at a side of solenoid 16, and solenoid 16 is fixing with cold water seat 8 through the first cross pan head screw 15; Electromagnetic coil skeleton 17 is positioned at the top of solenoid 16; Shield cap 18 is fixing with electromagnetic coil skeleton 17 through the second cross pan head screw 19, and the striking utmost point 21 is pressed in the pneumatic striking mechanism 20, and the striking utmost point 21 is positioned at the below of target 1.The diameter of insulcrete 6 is greater than the diameter of the first sealing O type circle 5 and the diameter of the second sealing O type circle 7.
Target is the target material of high speed lotus ability particle bombardment, and target is connected with the cold water seat, is convenient to disassembling, assembling and replacing; Supplementary anode is in order to improve by the supplementary anode that is coated with the lip-deep distribution of current of part and uses, and supplementary anode and target insulation are insulated with apparatus casing.Cold water seat and flanged plate are fixedly tightened, and seals at does not have gas and leaks.Pillar stiffener supports supplementary anode, and gap and insulativity that the back guarantees supplementary anode and target are installed.The cold water seat is used to cool off target temperature and sealing-ring temperature.Electric current leads to above the target after through junction block and cold water seat.The better stable arc discharge in the magnetic field of adopting solenoid to produce, the even etching of assurance target.The adjustment striking utmost point is to the target surface spacing, and the striking utmost point contacts well with target surface during striking.The non-sputter face of target with can put one deck graphite paper earlier before the cold water seat is connected, connection compresses, and requires contact surface to fit, purpose is better to the cooling performance of target.
When needing test, under vacuum state, the striking utmost point and cathode surface are at break-make moment arc-over that ignites.Ionization level is high, and ion current density is big, and the ionic current energy is high, and sedimentation rate is fast; Film-substrate cohesion is good, utilizes the solid target, does not have the molten bath; Target can the optional position be installed to guarantee plated film even, can depositing metallic films, alloy film, also can react the synthetic all cpds film (nitride, carbide, oxide compound) of plating; Even can synthesize DLC film, CNx film etc., simple to operate, technology is easy to promote.The present invention can be widely used in the superhard resist of coating cutter, mould, and film system comprises TiN, ZrN etc., and the coating product comprises drill bit, milling cutter, wheel cutter, screw tap, scissors, cutting knife, top, punch die etc.Of the present invention simple in structure, easy to maintenance, and rete compactness is good, and wear resistance improves, and guarantees the even etching property of target.
The foregoing description is as to qualification of the present invention, all any modifications of being done within the scope of the invention, is equal to replacement, improvement etc., all belongs to protection scope of the present invention.
Claims (2)
1. the cathode arc device of a vacuum tool plated film; It is characterized in that; It comprises target, supplementary anode, pillar stiffener, flanged plate, the first sealing O type circle, insulcrete, the second sealing O type circle, cold water seat, screw insulation covering, first socket head cap screw, junction block, nut, second socket head cap screw, water fittings, the first cross pan head screw, solenoid, electromagnetic coil skeleton, shield cap, the second cross pan head screw, pneumatic striking mechanism, the striking utmost point, and target is connected with the cold water seat, and supplementary anode is fixed on the one side of flanged plate through pillar stiffener; The first sealing O type circle is positioned at the top of flanged plate; Insulcrete is between the first sealing O type circle and the second sealing O type circle, and the screw insulation covering is enclosed within on first socket head cap screw, and the cold water seat is fixed on the another side of flanged plate through first socket head cap screw; One end of junction block is positioned on the cold water seat; Nut is connected with second socket head cap screw, and water fittings is positioned at a side of solenoid, and solenoid is fixed through the first cross pan head screw and cold water seat; Electromagnetic coil skeleton is positioned at the top of solenoid; Shield cap is fixed through the second cross pan head screw and electromagnetic coil skeleton, and the striking utmost point is pressed in the pneumatic striking mechanism, and the striking utmost point is positioned at the below of target.
2. the cathode arc device of vacuum tool plated film as claimed in claim 1 is characterized in that, the diameter of said insulcrete is greater than the diameter of the first sealing O type circle and the diameter of the second sealing O type circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102567760A CN102796989A (en) | 2012-07-23 | 2012-07-23 | Cathodic arc device for vacuum tool coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102567760A CN102796989A (en) | 2012-07-23 | 2012-07-23 | Cathodic arc device for vacuum tool coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102796989A true CN102796989A (en) | 2012-11-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012102567760A Pending CN102796989A (en) | 2012-07-23 | 2012-07-23 | Cathodic arc device for vacuum tool coating |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4500409A (en) * | 1983-07-19 | 1985-02-19 | Varian Associates, Inc. | Magnetron sputter coating source for both magnetic and non magnetic target materials |
| CN1055774A (en) * | 1991-06-01 | 1991-10-30 | 中国科学院电工研究所 | Heavy current multi-arc-spot controlled vacuum arc evaporation source |
| CN1103677A (en) * | 1994-09-05 | 1995-06-14 | 北京电炉厂 | Large-area controllable arc evaporating source |
| CN201427990Y (en) * | 2009-06-25 | 2010-03-24 | 深圳市振恒昌实业有限公司 | Novel hot cathodic arc device |
| CN202755049U (en) * | 2012-07-23 | 2013-02-27 | 上海法德机械设备有限公司 | Cathode electric arc device for vacuum tool film coating |
-
2012
- 2012-07-23 CN CN2012102567760A patent/CN102796989A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4500409A (en) * | 1983-07-19 | 1985-02-19 | Varian Associates, Inc. | Magnetron sputter coating source for both magnetic and non magnetic target materials |
| CN1055774A (en) * | 1991-06-01 | 1991-10-30 | 中国科学院电工研究所 | Heavy current multi-arc-spot controlled vacuum arc evaporation source |
| CN1103677A (en) * | 1994-09-05 | 1995-06-14 | 北京电炉厂 | Large-area controllable arc evaporating source |
| CN201427990Y (en) * | 2009-06-25 | 2010-03-24 | 深圳市振恒昌实业有限公司 | Novel hot cathodic arc device |
| CN202755049U (en) * | 2012-07-23 | 2013-02-27 | 上海法德机械设备有限公司 | Cathode electric arc device for vacuum tool film coating |
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Application publication date: 20121128 |