CN206447933U - A kind of alloy material vacuum sputtering film plating machine - Google Patents
A kind of alloy material vacuum sputtering film plating machine Download PDFInfo
- Publication number
- CN206447933U CN206447933U CN201720030416.7U CN201720030416U CN206447933U CN 206447933 U CN206447933 U CN 206447933U CN 201720030416 U CN201720030416 U CN 201720030416U CN 206447933 U CN206447933 U CN 206447933U
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- China
- Prior art keywords
- plated film
- alloy material
- cavity
- vacuum sputtering
- plating machine
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Abstract
The utility model discloses a kind of alloy material vacuum sputtering film plating machine, including coating machine openend, plated film cavity and plated film drive end unit, connected between the coating machine openend and plated film cavity by connection member, connected between the plated film cavity and plated film drive end unit by connection member, rubber seal is provided between the coating machine openend and plated film cavity, rubber seal is provided between the plated film cavity and plated film drive end unit, the annular inside surface of the plated film cavity is equipped with sputtering target material, the inner side of the central closing of the plated film cavity is provided with Anti-splash ring, the Anti-splash ring inner surface is equipped with rubber seal.The utility model discloses a kind of coating apparatus suitable for various materials, make coating film thickness more uniform, quick, be easy to the disassembly and assembly of coating tool, prevent because abrasion causes the abrasion of film plating layer when extracting.
Description
Technical field
The utility model is related to a kind of coating machine, and in particular to a kind of alloy material vacuum sputtering film plating machine.
Background technology
Vacuum coating equipment mainly carries out plated film under higher vacuum, and the material of plating is target, and plated film is carried out to part,
Target in traditional coating machine is all aligned in coating machine, not only reduces inner space, and cause coating film thickness not
Uniformly, and in the market some coating machines are integral type, it is not easy to remove and install, and plated device is all insertion coating machine
It is interior, when plated extract plated device after film when, abrasion is easily caused to film plating layer, while the sealing and coating effects of coating machine
It is bad, the more difficult control of area of plated film part, so in the market needs a kind of new coating machine device of exploitation.
Utility model content
In view of the deficienciess of the prior art, the utility model provides a kind of Alloy material vacuum sputter coating
Machine, installation easy to disassemble, improves coating effects.
To achieve these goals, the utility model is to realize by the following technical solutions：
A kind of alloy material vacuum sputtering film plating machine, including coating machine openend, plated film cavity and plated film drive end unit, it is described
Connected between coating machine openend and plated film cavity by connection member, by even between the plated film cavity and plated film drive end unit
Relay part is connected, and rubber seal, the plated film cavity and coating machine are provided between the coating machine openend and plated film cavity
Rubber seal is provided between afterbody, the annular inside surface of the plated film cavity is equipped with sputtering target material, the plated film cavity
The inner side of central closing is provided with Anti-splash ring, and the Anti-splash ring inner surface is equipped with rubber seal.
Further, the coating machine openend includes axle envelope, axle envelope insulated connecting piece, sputtering baffle plate one, end flange one
With insulating pad one, the axle envelope inside is provided with sealing ring, connected between the axle envelope and end flange one by connection member,
Sealing ring is provided between the axle envelope and end flange one, rubber seal is provided between the end flange one and insulating pad one
Circle.
Further, the plated film cavity includes Anti-splash ring, sputtering target material, cooling jacket, magnet assembly and shell, described
The length of Anti-splash ring is the 1/4~1/3 of sputtering target material length, and the magnet assembly is equidistantly arranged in shell by matrix
On surface.
Further, the plated film drive end unit includes sputtering baffle plate two, insulating pad two, end flange two, the end method
Orchid two is provided with functional interface and bleeding point, and the functional interface is located at the both sides of bleeding point, the insulating pad two and end
Sealing ring is provided between flange two.
Further, described connection member is bolt, bayonet lock or key.
Further, the making material of the shell is stainless steel.
Further, the material of the sputtering target material is metal material, non-metallic material or alloy material.
Further, condensed water or condensing gas are provided with the cooling jacket.
Further, the making material of the axle envelope is Teflom Insulation Material.
The beneficial effects of the utility model：The utility model is simple in construction, it is adaptable to which property is wide, easy to disassemble to install, convenient
The lower plated film parts of installation and removal, prevent the abrasion of plated film parts film plating layer, improve the uniformity of film plating layer, are easy to pair
The control of coating film area, realizes and carries out plated film to single controlled sputtering source non-alloyed material, improves hardness, the machine of plating membrane module
Tool characteristic, corrosion resistance, have been effectively ensured the air-tightness in plated film cavity.
Brief description of the drawings
Fig. 1 is a kind of internal structure profile of alloy material vacuum sputtering film plating machine of the utility model.
Embodiment
To be easy to understand technological means, creation characteristic, reached purpose and effect of the utility model realization, below
With reference to embodiment, the utility model is expanded on further.
A kind of alloy material vacuum sputtering film plating machine, including coating machine openend 100, plated film cavity 200 and plated film tail
Portion 300, is connected between the coating machine openend 100 and plated film cavity 200 by connection member, the He of plated film cavity 200
Connected between plated film drive end unit 300 by connection member, rubber is provided between the coating machine openend 100 and plated film cavity 200
Glue sealing ring, is provided with rubber seal, the ring of the plated film cavity 200 between the plated film cavity 200 and plated film drive end unit 300
Shape inner surface is equipped with sputtering target material 202, and the inner side of the central closing of the plated film cavity 200 is provided with Anti-splash ring 201, institute
State the inner surface of Anti-splash ring 201 and be equipped with rubber seal, described connection member is bolt, bayonet lock or key, the sputtering
The material of target 202 is metal material, non-metallic material or alloy material.
The coating machine openend 100 includes axle envelope 101, axle envelope insulated connecting piece 102, sputtering baffle plate 1, end method
Orchid one 104 and insulating pad 1, the inside of axle envelope 101 is provided with sealing ring, the axle envelope 101 and end flange 1 it
Between connected by connection member, between the axle envelope 101 and end flange 1 be provided with sealing ring, the end flange 1
Rubber seal is provided between insulating pad 1, the making material of the axle envelope 101 is Teflom Insulation Material.
The plated film cavity 200 includes Anti-splash ring 201, sputtering target material 202, cooling jacket 203, the and of magnet assembly 204
Shell 205, the length of the Anti-splash ring 201 is the 1/4~1/3 of the length of sputtering target material 202, and the magnet assembly 204 presses square
Battle array is equidistantly arranged on the inner surface of shell 205, and the making material of the shell 205 is stainless steel, the cooling water
Condensed water or condensing gas are provided with set 203.
The plated film drive end unit 300 includes sputtering baffle plate 2 301, insulating pad 2 302, end flange 2 303, the end
Portion's flange 2 303 is provided with functional interface 304 and bleeding point 305, and the functional interface 304 is located at the both sides of bleeding point 305, institute
State and sealing ring is provided between insulating pad 2 302 and end flange 2 303.
In concrete operations, as shown in figure 1, the metal, rod-shaped parts 1 of cleaning are firstly fixed on into coating machine openend 100
Socket in, install axle envelope 101 and axle envelope insulated connecting piece 102, and put sealing ring, install sputtering baffle plate 1, end
Portion's flange 1 and insulating pad 1, put rubber close by the coating machine openend 100 for securing metal, rod-shaped parts 1
Seal, metal, rod-shaped parts 1 are inserted in the Anti-splash ring 201 of plated film cavity 200, the rubber of the inner side of Anti-splash ring 201 laying
Cushion rubber ensure that the air-tightness of plated film inside cavity, adjust the coating film area of metal, rod-shaped parts 1, then be connected using bolt
The coating machine openend 100 for being mounted with metal, rod-shaped parts 1 is fixed on plated film cavity 200 by relay part, by plated film tail
End flange 2 303, sputtering baffle plate 2 301 and the insulating pad 2 302 in portion 300 utilize bolted connection with plated film cavity 200
Part is fixedly mounted, and is provided with rubber seal between insulating pad 2 302 and end flange 2 303, in insulating pad 2 302
Rubber seal is provided between plated film cavity 200.
After the utility model device is installed, the functional interface 304 or bleeding point of the rear end of plated film drive end unit 300 are utilized
Vacuumized in 305 pairs of plated film cavitys 200, the air pressure inside plated film cavity 200 is extracted into 1 × 10-2Below Pa, then interface
304 or bleeding point 305 be filled with argon gas into plated film cavity 200, and by the control of controlled sputtering source air pressure inside in 10 ~ 20Pa models
Enclose, apply 200V ~ 300V negative voltage on part using direct current or the pulse power, using plasma glow discharge to bar
The surface of shape metallic element 1 carries out plasma clean, and scavenging period 5 ~ 10 minutes is plated using controlled sputtering source on rod member surface
Corrosion resisting alloy coating processed, according to the different degrees of anticorrosion needs of part, coating can take different alloy materials, pass through
The form of sputtering realizes the anti-corrosion protection to part, and described controlled sputtering source is by sputtering target material 202, end flange one
104th, end flange 2 303, axle envelope insulated connecting piece 102, Anti-splash ring 201, cooling jacket 203, magnet assembly 204, sputtering
Baffle plate 2 301, insulating pad 2 302 and insulating pad 1 are constituted.
End flange 1, end flange 2 303 pass through rubber seal and insulating pad 1, insulating pad two
The sputtering space of the 302 tubular space formation closings for including cooling jacket 203 and sputtering target material 202.
During sputter coating, sputtering target material 202, cooling jacket 203 and magnet assembly 204 are collectively forming negative electrode, end
Flange 1, end flange 2 303 realize electricity absolutely as anode by insulating pad 1, insulating pad 2 302 and negative electrode
Edge, pending metal, rod-shaped parts 1 are fixed on the axis of controlled sputtering source by axle envelope insulated connecting piece 102, due to axle
Envelope insulated connecting piece 102 uses insulating materials, such as polytetrafluoroethylene (PTFE), pending metal, rod-shaped parts 1 and magnetron sputtering
The negative electrode and anode in source are remained electrically isolated from, such electric structure setting, it is ensured that between a cathode and an anode formed etc. from
Daughter region of discharge, pending metal, rod-shaped parts 1 need the region of plated film to be completely submerged in plasma discharge
Within, due to the negative electrode and the electric insulation of anode of pending metal, rod-shaped parts 1 and controlled sputtering source, can meet etc. from
Daughter cleaning and sputter procedure apply the requirement of back bias voltage for pending metal, rod-shaped parts 1.
General principle of the present utility model and principal character has been shown and described above.The technical staff of the industry should
Solution, the utility model is not restricted to the described embodiments, and simply illustrating described in above-described embodiment and specification, this practicality was new
The principle of type, on the premise of the utility model spirit and scope are not departed from, the utility model also has various changes and modifications,
These changes and improvements are both fallen within the range of claimed the utility model.
Claims (9)
1. a kind of alloy material vacuum sputtering film plating machine, it is characterised in that：Including coating machine openend（100）, plated film cavity
（200）With plated film drive end unit（300）, the coating machine openend（100）With plated film cavity（200）Between connected by connection member
Connect, the plated film cavity（200）With plated film drive end unit（300）Between connected by connection member, the coating machine openend
（100）With plated film cavity（200）Between be provided with rubber seal, the plated film cavity（200）With plated film drive end unit（300）Between
Provided with rubber seal, the plated film cavity（200）Annular inside surface be equipped with sputtering target material（202）, the plated film cavity
（200）Central closing inner side be provided with Anti-splash ring（201）, the Anti-splash ring（201）Inner surface is equipped with rubber
Sealing ring.
2. a kind of alloy material vacuum sputtering film plating machine according to claim 1, it is characterised in that：The coating machine opening
End（100）Including axle envelope（101）, axle envelope insulated connecting piece（102）, sputtering baffle plate one（103）, end flange one（104）With it is exhausted
Edge backing plate one（105）, the axle envelope（101）Inside is provided with sealing ring, the axle envelope（101）With end flange one（104）Between
Connected by connection member, the axle envelope（101）With end flange one（104）Between be provided with sealing ring, the end flange one
（104）With insulating pad one（105）Between be provided with rubber seal.
3. a kind of alloy material vacuum sputtering film plating machine according to claim 1, it is characterised in that：The plated film cavity
（200）Including Anti-splash ring（201）, sputtering target material（202）, cooling jacket（203）, magnet assembly（204）And shell（205）,
The Anti-splash ring（201）Length be sputtering target material（202）The 1/4~1/3 of length, the magnet assembly（204）By matrix
Equidistantly it is arranged in shell（205）Inner surface on.
4. a kind of alloy material vacuum sputtering film plating machine according to claim 1, it is characterised in that：The plated film drive end unit
（300）Including sputtering baffle plate two（301）, insulating pad two（302）, end flange two（303）, the end flange two（303）
It is provided with functional interface（304）And bleeding point（305）, the functional interface（304）Positioned at bleeding point（305）Both sides, it is described
Insulating pad two（302）With end flange two（303）Between be provided with sealing ring.
5. a kind of alloy material vacuum sputtering film plating machine according to claim 1, it is characterised in that：Described connection member
For bolt, bayonet lock or key.
6. a kind of alloy material vacuum sputtering film plating machine according to claim 3, it is characterised in that：The shell（205）
Making material be stainless steel.
7. a kind of alloy material vacuum sputtering film plating machine according to claim 1 or 3, it is characterised in that：The sputtering target
Material（202）Material be metal material, non-metallic material or alloy material.
8. a kind of alloy material vacuum sputtering film plating machine according to claim 3, it is characterised in that：The cooling jacket
（203）It is interior to be provided with condensed water or condensing gas.
9. a kind of alloy material vacuum sputtering film plating machine according to claim 2, it is characterised in that：The axle envelope（101）
Making material be Teflom Insulation Material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720030416.7U CN206447933U (en) | 2017-01-12 | 2017-01-12 | A kind of alloy material vacuum sputtering film plating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720030416.7U CN206447933U (en) | 2017-01-12 | 2017-01-12 | A kind of alloy material vacuum sputtering film plating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206447933U true CN206447933U (en) | 2017-08-29 |
Family
ID=59671370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720030416.7U Expired - Fee Related CN206447933U (en) | 2017-01-12 | 2017-01-12 | A kind of alloy material vacuum sputtering film plating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206447933U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107620050A (en) * | 2017-11-02 | 2018-01-23 | 安徽普威达真空科技有限公司 | Vacuum coater and film plating process for metal, rod-shaped piece surface |
-
2017
- 2017-01-12 CN CN201720030416.7U patent/CN206447933U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107620050A (en) * | 2017-11-02 | 2018-01-23 | 安徽普威达真空科技有限公司 | Vacuum coater and film plating process for metal, rod-shaped piece surface |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170829 Termination date: 20210112 |