CN108060398A - A kind of fuel cell composite Nano coating and its plating method - Google Patents
A kind of fuel cell composite Nano coating and its plating method Download PDFInfo
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- CN108060398A CN108060398A CN201711058729.4A CN201711058729A CN108060398A CN 108060398 A CN108060398 A CN 108060398A CN 201711058729 A CN201711058729 A CN 201711058729A CN 108060398 A CN108060398 A CN 108060398A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
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Abstract
The present invention relates to a kind of fuel cell composite Nano coating and its plating method, which is the amorphous carbon coating for being inlaid with metal carbides, by fuel battery metal polar board surface pre-process, deposition composite Nano coating and etc. be coated with to obtain.Compared with prior art, the present invention can improve ionization level so as to improve the probability of the formation of carbide, ionization level high simultaneously improves bombardment of the particle to basis material, so as to enhance strong film-substrate cohesion and compactness, the defects of Crack prevention, perforation, still there is good electric conductivity simultaneously, disclosure satisfy that the requirement of fuel battery metal pole plate.
Description
Technical field
It is multiple more particularly, to fuel battery metal pole plate carbide-amorphous carbon the present invention relates to field of fuel cell technology
Close nano coating and the method prepared using multi-arc ion coating.
Background technology
Fuel cell be it is a kind of by the chemical energy of fuel be converted into electric energy startup rate is fast, energy conversion efficiency
High, environmental-friendly power generator can be widely applied for the fields such as traffic, electronics, national defence in the near future.Proton exchange
Membrane cell includes electrode.That critical piece pole plate of electrolyte membrance, bipolar plates, gas diffusion layers is fuel cell
One of key component mainly plays support membrane electrode, distribution reaction gas, collected current, separation Oxidizing and Reducing Agents, conduction
Heat, the effect for discharging product water.Fuel cell is run under strong acidic environment, and pH value contains 0.1 between 0~3.5
~1M H2SO4, 1~5ppmF- and other a small amount of ions.Therefore it is required that pole plate has certain intensity, good conduction
Property, corrosion resistance, gas impermeability
Material currently used for pole plate is mainly graphite, metal and C-base composte material.Metal material has good lead
Hot, the higher mechanical strength of conductance, the advantages such as shaping is easy, processing cost is low, therefore fuel battery metal pole plate in recent years
It studies as Main way.But metal polar plate is run under conditions of fuel cell highly acid, high humility, high-temperature, is easily occurred
Corrosion, metal ion degradation cause catalyst poisoning, influence the progress of reaction.In addition, metal polar plate surface can be formed one layer it is blunt
Change film, significantly increase the contact resistance of pole plate and gas diffusion layers, reduce pole plate performance.Therefore, metal polar plate is extensive
Using being maintained as an important research topic to electric conductivity in its corrosion resistance and operational process.
In presently disclosed technology, metal polar plate corrosion resistance and electric conductivity are improved mainly by three kinds of approach：(1) metal polar plate
The change of surface texture ingredient；(2) metal polar plate surface is modified；(3) one or more layers film is plated on metal polar plate surface.At present,
It is heavy using vacuum sputtering coating, vacuum vapor plating, multi-arc ion plating film, chemical vapor deposition, ion implanting and ion auxiliary
The technologies such as product prepare the hot spot that one or more layers protective film is research on metal polar plate surface.Patent publication No. CN102800871A
It discloses and carbon chromium ladder coating is deposited on stainless steel polar plate surface using closed field unbalanced magnetron sputtering technology, by adjusting Cr
The technological parameters such as target, C target currents, argon flow amount and substrate bias adjust ladder Coating composition, and metal polar plate greatly improved
Corrosion resistance, reduce contact resistance.Patent CN103132026A is prepared by cathode arc ion plating in substrates
AlCrN coatings improve the compactness of coating, and it is fewer that this type coating with ion plating is well bonded holiday, but
It is the contact resistance for not reducing matrix.Patent CN101393991A is using the method for ion implanting by copper ion implantation stainless steel
In thin plate, implanted layer is formed in tens nanometer range of Thin Stainless Steel plate surface, reduces metal polar plate volume corrosion electric current density.
Patent CN105047975A is proposed at the surface by being combined in surface deposition continuous insulating layer and discontinuous conductive particle
Science and engineering skill reduces contact resistance while foring fine and close protective layer, and discontinuous conduction particle is to pass through plasma
Made from plasma spray technology.But this kind of film defects are more, without preferably improving pole plate corrosion resistance.
The content of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of fuel cell is compound
Nano coating and the method being coated with using multi-arc ion coating progress coating.
The purpose of the present invention can be achieved through the following technical solutions：
A kind of fuel cell composite Nano coating, to be inlaid with the amorphous carbon coating of metal carbides, amorphous carbon therein
Preferable electric conductivity is provided, carbide provides preferable corrosion resistance, and the thickness of composite Nano coating is 50-100nm.
As preferred embodiment, metal carbides are the nanostructured layers of carbide, include but are not limited to Cr2C3、
TiC、Cr7C3, VC or NbC, since amorphous carbon coating can ensure the relatively low contact resistance in surface, inlayed in this coating such as gold
Belong to carbide such as TiC, good corrosion resistance can be obtained simultaneously, and electric conductivity is also preferable, it is more excellent so as to obtain
Pole plate coating.
A kind of plating method of fuel cell composite Nano coating, using following steps：
(1) fuel battery metal polar board surface pre-processes：The stamped shaping of pole plate, then cleaned, finally use ultrasonic wave
Processing；
(2) composite Nano coating is deposited：Acetylene, methane or butane gas are passed through while argon gas is passed through, pass through multi sphere
In the vacuum chamber of certain vacuum degree, composite Nano coating is deposited on metal polar plate surface using metal targets for ion plating technique.
As preferred embodiment, the metallic target described in step (2) includes titanium target, chromium target, nickel target, niobium target, chromium carbon
Target or titanium carbon target, it is 10 that multi sphere ion plating technology, which controls vacuum degree,-4-10-1Pa, bias amplitude be -100~-500V, metallic target
Target current for 50-100A, partial pressure of ar gas：2×10-1-8×10-1Pa, acetylene, methane or butane partial pressure：1×10-1-4×10- 1Pa, metal polar plate temperature：200-1000 DEG C, sedimentation time is in 10-50min.
The argon gas is passed through in the blow vent close to metallic target, and the acetylene, methane or butane gas are close
It is passed through in the blow vent of metal polar plate, has magnetic control passage between target and metal polar plate, this have the advantage that argon gas connects
Near target material preferably can keep arc light to generate electricity, and maintain plasma, and magnetic control channeling is to reduce due to arc discharge gold
Belong to the macroscopic particles that target material surface splashes, and acetylene, methane or butane be as reaction gas, when metal ion passes through Magnetic filter system
It after system, is collided with acetylene, methane or butane gas, when gas can improve deposition velocity close to pole plate and generate more carbon
Compound.
Metal polar plate is equipped with heating unit, and entire deposition process controlling plate temperature is completed at 200-1000 DEG C in deposition
Blow vent and target current are closed afterwards and bias keeps the temperature-resistant 20-200min of pole plate, are cooled down afterwards in furnace cavity cooling
The water cooling plant opened simultaneously in the stent of fixed metal polar plate radiates.The method is conducive to the formation and painting of carbide
Layer surface kish atomic transformation is carbide.
As preferred embodiment, the thickness of the metal polar plate described in step (1) is 0.05-2mm, and material includes
Stainless steel, aluminium, titanium alloy or magnesium alloy form fluid channel by stamping on the surface of pole plate, clear through deionized-distilled water
After wash clean, it is put into absolute ethyl alcohol, acetone, absolute ethyl alcohol and carries out ultrasonic vibration treatment.
Compared with prior art, the present invention is compound in fuel battery metal polar board surface deposited metal carbide and amorphous carbon
Coating, electric conductivity and corrosion resistance are all significantly increased.Multi sphere ion plating technology is employed, employs the side of electric arc electric discharge
Method, ionization level can reach 90%, and projectile energy improves a lot compared to other deposition techniques, the metal of higher-energy from
Son is conducive to the formation of metal carbides, while the compactness of coating is good, can avoid hole defect, and film layer is former with basal body interface
Son diffusion improves, and strengthens the combination power of matrix and coating, and improves blow vent distribution and improve coating quality, is protected using heating
Temperature obtains higher metal carbides content, while can reduce the sedimentation time of coating using multi-arc ion coating, reduces
Time cost.Metal carbides are embedded in amorphous carbon coating, can effectively improve pole plate corrosion resistance, carbide is simultaneously
With preferable conductive capability.Coating composition is adjusted by adjusting technological parameter, greatly improves the corrosion resistance of metal polar plate
Can, contact resistance is reduced, so as to improve fuel battery performance, the metal polar plate prepared using the present invention disclosure satisfy that fuel cell
Requirement, promote fuel cell industry development.
Description of the drawings
Fig. 1 is the structure diagram of fuel cell composite Nano coating；
Fig. 2 is to carry out the apparatus structure schematic diagram that coating is coated with；
Fig. 3 is to prepare chromium carbide initial contact resistance under different argon gas flows.
In Fig. 1,1- metal carbides, 2- amorphous carbon layers, 3- metal polar plates,
In Fig. 2,21- metal targets, 22- Ar inlets, 23- magnetic filters, 24- reaction gas inlets, 25- metals pole
Plate, 26- heating units, 27- vacuum cavities, 28- adaptations, 29- radio-frequency power supplies.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill to this field
For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made.These belong to the present invention
Protection domain.
Embodiment 1：
Prepare the influence that multi-arc ion coating prepares the TiCx amorphous carbon composite coatings of fuel battery pole board
(1) surface preparation：After stainless steel metal pole plate is respectively washed with aqueous slkali and acid solution, then use deionized water
It cleans up, is then sequentially placed into again in absolute ethyl alcohol, acetone, absolute ethyl alcohol and carries out ultrasonic vibration treatment, remove metal polar plate
Surface and oil contaminant obtains clean metal polar plate；
(2) metal polar plate after cleaning up is put into multi-arc ion coating furnace chamber, be evacuated to less than 3 × 10-5Torr,
Argon gas is filled with, operating air pressure is maintained at 4 × 10-4Torr, metal polar plate substrate bias are -800V, open ion source and carry out ion
Bombardment is to remove matrix passivation layer, and ion plating sputter clean process time is 30min, and pole plate is hung on runing rest, and stent turns
Speed is 4r/min；
(3) the metal polar plate substrate bias of different stoves is controlled into -500V respectively, is passed through argon gas 18sccm, is passed through acetylene
100sccm, it is 80A to open Ti target currents, and controlling base reservoir temperature, operating air pressure remains 0.33Pa, keeps 30min for 200 DEG C,
Deposit to obtain titanium carbide amorphous carbon coating；
(4) target current and blow vent are closed, 200 DEG C of substrate temperature keeps 60min, completes coating and prepares
The thickness of stainless steel metal pole plate is 0.05mm~2mm.The total thickness of metal polar plate surface carbonation titanium amorphous carbon coating
It spends for 150nm.
Embodiment 2：
Multi-arc ion coating prepares the chromium carbide amorphous carbon composite coating of fuel battery pole board
(1) surface preparation：After stainless steel metal pole plate is respectively washed with aqueous slkali and acid solution, then use deionized water
It cleans up, is then sequentially placed into again in absolute ethyl alcohol, acetone, absolute ethyl alcohol and carries out ultrasonic vibration treatment, remove metal polar plate
Surface and oil contaminant obtains clean metal polar plate；
(2) metal polar plate after cleaning up is put into multi-arc ion coating furnace chamber, be evacuated to less than 3 × 10-5Torr,
Argon gas is filled with, operating air pressure is maintained at 4 × 10-4Torr, metal polar plate substrate bias are -800V, open ion source and carry out ion
Bombardment is to remove matrix passivation layer, and ion plating sputter clean process time is 30min, and pole plate is hung on runing rest, and stent turns
Speed is 4r/min；
(3) the metal polar plate substrate bias of different stoves is controlled into -500V respectively, is passed through argon gas 20sccm, is passed through acetylene
100sccm, it is 80A to open Cr target currents, and base reservoir temperature is controlled to keep 30min for 200 DEG C, deposits to obtain the painting of chromium carbide amorphous carbon
Layer；
(4) target current and blow vent are closed, 200 DEG C of substrate temperature keeps 60min, completes coating and prepares
The thickness of stainless steel metal pole plate is 0.05mm~2mm.The total thickness of metal polar plate surface carbonation chromium amorphous carbon coating
It spends and show 3.184m Ω cm for embodiment 2 in its initial resistance of 100nm such as Fig. 32, obtained good conductive coating.
Embodiment 3：
Multi-arc ion coating prepares the chromium carbide amorphous carbon composite coating of fuel battery pole board
(1) surface preparation：After stainless steel metal pole plate is respectively washed with aqueous slkali and acid solution, then use deionized water
It cleans up, is then sequentially placed into again in absolute ethyl alcohol, acetone, absolute ethyl alcohol and carries out ultrasonic vibration treatment, remove metal polar plate
Surface and oil contaminant obtains clean metal polar plate；
(2) metal polar plate after cleaning up is put into multi-arc ion coating furnace chamber, be evacuated to less than 3 × 10-5Torr,
Argon gas is filled with, operating air pressure is maintained at 4 × 10-4Torr, metal polar plate substrate bias are -800V, open ion source and carry out ion
Bombardment is to remove matrix passivation layer, and ion plating sputter clean process time is 30min, and pole plate is hung on runing rest, and stent turns
Speed is 4r/min；
(3) the metal polar plate substrate bias of different stoves is controlled into -500V respectively, is passed through argon gas 30sccm, is passed through acetylene
100sccm, it is 80A to open Cr target currents, and base reservoir temperature is controlled to keep 30min for 200 DEG C, deposits to obtain the painting of chromium carbide amorphous carbon
Layer；
(4) target current and blow vent are closed, 200 DEG C of substrate temperature keeps 60min, completes coating and prepares
The overall thickness of metal polar plate surface carbonation chromium amorphous carbon coating is its initial resistance of 100nm such as 3 institute of embodiment in Fig. 3
It is shown as 1.655m Ω cm2, obtained good conductive coating.
Embodiment 4：
Multi-arc ion coating prepares the chromium carbide amorphous carbon composite coating of fuel battery pole board
Argon flow amount prepares multi-arc ion coating the influence of the chromium carbide amorphous carbon composite coating of fuel battery pole board
(1) surface preparation：After stainless steel metal pole plate is respectively washed with aqueous slkali and acid solution, then use deionized water
It cleans up, is then sequentially placed into again in absolute ethyl alcohol, acetone, absolute ethyl alcohol and carries out ultrasonic vibration treatment, remove metal polar plate
Surface and oil contaminant obtains clean metal polar plate；
(2) metal polar plate after cleaning up is put into multi-arc ion coating furnace chamber, be evacuated to less than 3 × 10-5Torr,
Argon gas is filled with, operating air pressure is maintained at 4 × 10-4Torr, metal polar plate substrate bias are -800V, open ion source and carry out ion
Bombardment is to remove matrix passivation layer, and ion plating sputter clean process time is 30min, and pole plate is hung on runing rest, and stent turns
Speed is 4r/min；
(3) the metal polar plate substrate bias of different stoves is controlled into -500V respectively, is passed through argon gas 40sccm, is passed through acetylene
100sccm, it is 80A to open Cr target currents, and base reservoir temperature is controlled to keep 30min for 200 DEG C, deposits to obtain the painting of chromium carbide amorphous carbon
Layer；
(4) target current and blow vent are closed, 200 DEG C of substrate temperature keeps 60min, completes coating and prepares
The overall thickness of the metal polar plate surface carbonation chromium amorphous carbon coating is real in its initial resistance of 100nm such as Fig. 3
It applies example 4 and show 1.504m Ω cm2, obtained good conductive coating.
Embodiment 5：
Argon flow amount prepares multi-arc ion coating the influence of the chromium carbide amorphous carbon composite coating of fuel battery pole board
(1) surface preparation：After stainless steel metal pole plate is respectively washed with aqueous slkali and acid solution, then use deionized water
It cleans up, is then sequentially placed into again in absolute ethyl alcohol, acetone, absolute ethyl alcohol and carries out ultrasonic vibration treatment, remove metal polar plate
Surface and oil contaminant obtains clean metal polar plate；
(2) metal polar plate after cleaning up is put into multi-arc ion coating furnace chamber, be evacuated to less than 3 × 10-5Torr,
Argon gas is filled with, operating air pressure is maintained at 4 × 10-4Torr, metal polar plate substrate bias are -800V, open ion source and carry out ion
Bombardment is to remove matrix passivation layer, and ion plating sputter clean process time is 30min, and pole plate is hung on runing rest, and stent turns
Speed is 4r/min；
(3) the metal polar plate substrate bias of different stoves is controlled into -500V respectively, is passed through argon gas 200sccm, is passed through acetylene
100sccm, it is 80A to open Cr target currents, and base reservoir temperature is controlled to keep 30min for 200 DEG C, deposits to obtain the painting of chromium carbide amorphous carbon
Layer；
(4) target current and blow vent are closed, 200 DEG C of substrate temperature keeps 60min, completes coating and prepares
The overall thickness of the metal polar plate surface carbonation chromium amorphous carbon coating is real in its initial resistance of 100nm such as Fig. 3
It applies example 5 and show 1.907m Ω cm2。
Embodiment 6
A kind of fuel cell composite Nano coating, structure is as shown in Figure 1, to be inlaid with the amorphous carbon of metal carbides 1
Coating 2 is electroplated on the surface of the metal polar plate 3 of fuel cell.Amorphous carbon therein provides preferable electric conductivity, and carbide carries
For preferable corrosion resistance, the thickness of composite Nano coating is 50nm.
Metal carbides are the nanostructured layers of carbide, and Cr may be employed2C3、TiC、Cr7C3, VC or NbC etc., due to
Amorphous carbon coating can ensure the relatively low contact resistance in surface, and metal carbides are TiC in the present embodiment, are inlayed in this coating
TiC can obtain good corrosion resistance simultaneously, and electric conductivity is also preferable, so as to obtain more excellent pole plate coating.
A kind of plating method of fuel cell composite Nano coating, using following steps：
(1) fuel battery metal polar board surface pre-processes：It is 0.05mm by thickness, material passes through for the metal polar plate of stainless steel
Cross it is stamping the surface of pole plate formed fluid channel, after deionized-distilled water cleans up, be put into absolute ethyl alcohol, acetone,
The stamped shaping of ultrasonic vibration treatment pole plate is carried out in absolute ethyl alcohol, then is cleaned, finally uses ultrasonication；
(2) composite Nano coating is deposited：Acetylene gas is passed through while argon gas is passed through, passes through multi sphere ion plating technology profit
With metal targets in the vacuum chamber of certain vacuum degree, composite Nano coating is deposited on metal polar plate surface, specifically, is used
It is 10 that titanium target controls vacuum degree as metallic target-4Pa, bias amplitude are -100V, and the target current of metallic target is 50A, partial pressure of ar gas：
2×10-1Pa, acetylene partial pressure：1×10-1Pa, 200 DEG C of metal polar plate temperature deposit 50min, close ventilation after deposition is complete
Mouth and target current and bias keep the temperature-resistant 200min of pole plate, and cooling down afterwards, it is fixed golden to be opened while furnace cavity cools down
The water cooling plant belonged in the stent of pole plate radiates.The method is conducive to the formation of carbide and coating surface kish
Atomic transformation is carbide.
It should be noted that argon gas is passed through in the blow vent close to metallic target, acetylene gas is close to metal polar plate
It is passed through in blow vent, has magnetic control passage between target and metal polar plate, this have the advantage that argon gas can close to target
It is preferable to keep arc light power generation, plasma is maintained, magnetic control channeling is to reduce due to arc discharge metal targets surface
Macroscopic particles of splashing, and acetylene, methane or butane (using acetylene in the present embodiment) be as reaction gas, when metal from
After son is by Magnetic filter system, with acetylene, methane or butane gas collide, when gas close to pole plate can improve deposition velocity with
And generate more carbide.The apparatus structure of plating is arranged on metal targets 21 as shown in Fig. 2, including metal targets 21
Neighbouring Ar inlet 22, metal targets 21 are connected by magnetic filter 23 with vacuum cavity 27, in vacuum cavity 27
Metal polar plate 25 is placed, and heating unit 26 is used to heat with controlling reaction temperature metal polar plate 25, in vacuum cavity
Reaction gas inlet 24 is offered on 27, for being passed through the reaction gas such as acetylene, methane or butane, is in addition also associated with adaptation
28 and radio-frequency power supply 29.
Embodiment 7
A kind of fuel cell composite Nano coating, structure is as shown in Figure 1, to be inlaid with the amorphous carbon of metal carbides 1
Coating 2 is electroplated on the surface of the metal polar plate 3 of fuel cell.Amorphous carbon therein provides preferable electric conductivity, and carbide carries
For preferable corrosion resistance, the thickness of composite Nano coating is 100nm.Metal carbides are the nanostructured layers of carbide, can
To use Cr2C3、TiC、Cr7C3, VC or NbC etc., since amorphous carbon coating can ensure the relatively low contact resistance in surface, this reality
It is Cr to apply metal carbides in example2C3。
A kind of plating method of fuel cell composite Nano coating, using following steps：
(1) fuel battery metal polar board surface pre-processes：It is 2mm by thickness, material is passed through for the metal polar plate of magnesium alloy
It is stamping to form fluid channel on the surface of pole plate, after deionized-distilled water cleans up, it is put into absolute ethyl alcohol, acetone, nothing
The stamped shaping of ultrasonic vibration treatment pole plate is carried out in water-ethanol, then is cleaned, finally uses ultrasonication；
(2) composite Nano coating is deposited：Butane gas are passed through while argon gas is passed through, pass through multi sphere ion plating technology profit
With metal targets in the vacuum chamber of certain vacuum degree, composite Nano coating is deposited on metal polar plate surface, specifically, is used
It is 10 that chromium target controls vacuum degree as metallic target-1Pa, bias amplitude are -500V, and the target current of metallic target is 100A, and argon gas divides
Pressure：8×10-1Pa, butane partial pressure：4×10-1Pa, 1000 DEG C of metal polar plate temperature deposit 10min, close after deposition is complete
Blow vent and target current and bias keep the temperature-resistant 20min of pole plate, and cooling down afterwards, it is solid to be opened while furnace cavity cools down
The water cooling plant determined in the stent of metal polar plate radiates.The method is conducive to the formation of carbide and coating surface residual
Metallic atom is changed into carbide.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring the substantive content of the present invention.
Claims (10)
1. a kind of fuel cell composite Nano coating, which is characterized in that the composite Nano coating is to be inlaid with metal carbides
Amorphous carbon coating.
A kind of 2. fuel cell composite Nano coating according to claim 1, which is characterized in that the metal carbides
For the nanostructured layers of carbide, Cr is included but are not limited to2C3、TiC、Cr7C3, VC or NbC.
3. a kind of fuel cell composite Nano coating according to claim 1, which is characterized in that the composite Nano coating
Thickness is 50-100nm.
4. a kind of plating method of fuel cell composite Nano coating, which is characterized in that this method uses following steps：
(1) fuel battery metal polar board surface pre-processes：The stamped shaping of pole plate, then cleaned, finally use ultrasonication；
(2) composite Nano coating is deposited：Acetylene, methane or butane gas are passed through while argon gas is passed through, pass through multi sphere ion
In the vacuum chamber of certain vacuum degree, composite Nano coating is deposited on metal polar plate surface using metal targets for coating technology.
A kind of 5. plating method of fuel cell composite Nano coating according to claim 4, which is characterized in that step
(2) metallic target described in includes titanium target, chromium target, nickel target, niobium target, chromium carbon target or titanium carbon target.
A kind of 6. plating method of fuel cell composite Nano coating according to claim 4, which is characterized in that step
(2) it is 10 that the multi sphere ion plating technology described in, which controls vacuum degree,-4-10-1Pa, bias amplitude be -100~-500V, metallic target
Target current for 50-100A, partial pressure of ar gas：2×10-1-8×10-1Pa, acetylene, methane or butane partial pressure：1×10-1-4×10- 1Pa, metal polar plate temperature：200-1000 DEG C, sedimentation time is in 10-50min.
A kind of 7. plating method of fuel cell composite Nano coating according to claim 4, which is characterized in that step
(2) argon gas described in is passed through in the blow vent close to metallic target, and the acetylene, methane or butane gas are close to metal
It is passed through in the blow vent of pole plate.
A kind of 8. plating method of fuel cell composite Nano coating according to claim 6, which is characterized in that step
(2) stop being passed through gas after completing deposition in, close target current and bias, the temperature-resistant of metal polar plate is kept to continue to stablize
Then 20-200min radiates.
9. the plating method of a kind of fuel cell composite Nano coating according to claim 4, which is characterized in that described
The thickness of metal polar plate is 0.05-2mm, and material includes stainless steel, aluminium, titanium alloy or magnesium alloy.
A kind of 10. plating method of fuel cell composite Nano coating according to claim 4, which is characterized in that step
(1) fluid channel is formed on the surface of pole plate by stamping in, after deionized-distilled water cleans up, is put into anhydrous second
Ultrasonic vibration treatment is carried out in alcohol, acetone, absolute ethyl alcohol.
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| CN114843542A (en) * | 2022-05-16 | 2022-08-02 | 上海交通大学内蒙古研究院 | Preparation method of fuel cell metal polar plate ceramic phase low-temperature nucleation nano coating |
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| CN113097522A (en) * | 2021-03-29 | 2021-07-09 | 纳狮新材料有限公司 | Bipolar plate and method for producing the same |
| CN114843542A (en) * | 2022-05-16 | 2022-08-02 | 上海交通大学内蒙古研究院 | Preparation method of fuel cell metal polar plate ceramic phase low-temperature nucleation nano coating |
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