CN106129422B - Improve the densification of fuel battery metal double polar plate overlay coating and corrosion resistant method - Google Patents
Improve the densification of fuel battery metal double polar plate overlay coating and corrosion resistant method Download PDFInfo
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- CN106129422B CN106129422B CN201610645062.7A CN201610645062A CN106129422B CN 106129422 B CN106129422 B CN 106129422B CN 201610645062 A CN201610645062 A CN 201610645062A CN 106129422 B CN106129422 B CN 106129422B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/88—Processes of manufacture
- H01M4/8875—Methods for shaping the electrode into free-standing bodies, like sheets, films or grids, e.g. moulding, hot-pressing, casting without support, extrusion without support
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
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Abstract
The present invention relates to the densification of fuel battery metal double polar plate overlay coating and corrosion resistant method is improved, coated metal polar plate is set to plating and is handled, is included the following steps：(1) noble gas ion bombardment is utilized to change compactness of electroplating and crystalline structure；(2) utilize noble metal to the small hole defect selective deposition of coating surface；(3) be passed through the relatively active gas of chemical property and initial coating in conjunction with and reduce surface energy, complete the processing to battery metal bi-polar plate overlay coating.Compared with prior art, the present invention further improves the corrosion resistance of fuel battery pole board by improving the compactness of coating.
Description
Technical field
The invention belongs to field of fuel cell technology, are plated more particularly, to a kind of raising fuel battery metal double polar plate surface
Layer densification and corrosion resistant method.
Background technology
It is in short supply with the energy, more and more paid attention to by the new energy technology of representative of Hydrogen Energy.Proton exchange membrane
Fuel cell (Proton Exchange Membrane Fuel Cell, PEMFC) can be without burning and directly by hydrogen
In chemical energy be changed into electric energy, energy conversion efficiency is not limited by Carnot cycle, and the generating efficiency of battery pack is reachable
50% or more, exclusive product is water, very friendly to environment.PEMFC operating temperatures are low, start speed soon, long working life, are
Ideal mobile power and independent power supply device, have in fields such as the vehicles, electronic product, national defense and military and stationary electric power plants
It is widely applied foreground.
Bipolar plates are one of critical components of Proton Exchange Membrane Fuel Cells, account for pile volume 80%, quality 70%
With the 29% of cost.Bipolar plates play the effects that providing gas reaction place, collected current, support membrane electrode, water management.It is bipolar
Plate material should have good electric conductivity, stronger corrosion resistance, higher mechanical strength and low cost.Graphite and stone
There is black based composites lower contact resistance and stronger corrosion resistance to be applied to fuel battery pole board, but due to stone
Ink material mechanical strength is poor, is difficult to high-volume processing limits its extensive use.Metal material good conductivity, antivibration kinetic force
By force, it is suitble to stamping mass production, is the main direction of development of fuel battery metal pole plate.However, metal polar plate is strong
Acid, high temperature, high humidity fuel cell operating conditions in corrode, corrode metal ion pollution catalyst, reduce proton exchange
Film conducting power seriously affects the service life of fuel cell.Meanwhile metal polar plate is easy to form protectiveness in acidic environment
Passivating film increases the contact resistance of pole plate and gas diffusion layers, reduces the output performance of fuel cell.Therefore, metal pole is improved
The corrosion resistance and reduction contact resistance of plate are the widely applied Main ways of metal polar plate.
Pass through the modes such as physical vapour deposition (PVD), chemical vapor deposition, ion plating, chemical plating or plating on metal polar plate surface
Prepare the hot spot that protective coating is recent domestic research.No matter which kind of plated film mode is used, it is complete in coating process
Cheng Hou, be bound in film layer existing defects, such as pothole, pin hole, particulate matter, the defects of leaking metallic substrates.Therefore to film layer into
The certain aftertreatment technologies of row have good effect to the compactness and corrosion resistance hair that improve coating.Chinese patent
CN105047975A is proposed by the surface treatment work that surface deposits continuous insulating layer and discontinuous conductive particle is combined
Skill reduces contact resistance while foring fine and close protective layer, and discontinuous conduction particle is by plasma thermal jet
Made from painting technology.The patent does not account for the pore defect of objective reality in insulating layer.Chinese patent
CN201310643380.6 proposes a kind of pore-free processing method of fuel battery metal double polar plate plate surface modifying layer, processing side
Method is first to be placed in the bipolar plate of stainless steel for completing plated film in air, then by bipolar plate of stainless steel in the appearance full of inert gas
It heats and keeps in device, be that micro-porous area oxidation reaction formation oxide layer fills up micropore.This method can carry to a certain extent
The corrosion resistance of high polar board surface, but in some adverse circumstances, only the corrosion resistance of oxide layer is leaned on to be not enough to substantially carry
The service life of high pole plate.
Invention content
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide one kind by improving coating
Compactness improve fuel battery pole board corrosion resistance method.
The purpose of the present invention can be achieved through the following technical solutions：
The densification of fuel battery metal double polar plate overlay coating and corrosion resistant method are improved, coated metal pole is set to plating
Plate is handled, and is included the following steps：
(1) noble gas ion bombardment is utilized to change compactness of electroplating and crystalline structure；
(2) utilize noble metal to the small hole defect selective deposition of coating surface；
(3) be passed through the relatively active gas of chemical property and initial coating in conjunction with and reduce surface energy, complete battery pair gold
Belong to the processing of bipolar plate surfaces coating.
Step (1) specifically uses following steps：Plating is set coated metal polar plate to be placed in the furnace chamber of ion source, is passed through
Plating is set coated metal polar plate and is placed in the furnace chamber of ion source by rare gas, is passed through rare gas, and control flow is
10sccm~200sccm, it is 600V~3000V then to control ion source voltage, and cavity temperature rises to 60~300 DEG C, controls stove
The pressure of chamber is 5 × 10-4~8 × 10-3Torr handles 5min~200min.
The rare gas is He, Ne, Ar, Kr or Xe.
The ion source is Electron cyclotron resonance ion source, Kaufman ion source or anode layer ion source.
For the coating of initial crystal habit, obtained after bombardment the equiax crystal converted by tree-shaped brilliant, column crystal or
Amorphousness.Promote the interatomic electronics hybrid form of coating and bond energy hair for the coating of initial amorphousness, after bombardment
Changing is changed into fine and close accumulation form by loose accumulation form.
Control bias is -80~-200V in step (2), and the pressure for controlling furnace chamber is 5 × 10-4~8 × 10-3Torr, control
Argon flow amount processed is 10sccm~60sccm, and control noble metal target material power density is 3~30W/cm2, sedimentation time be 5~
180s.The noble metal is gold, silver or platinum group metal.The excellent corrosion resistance of these elements, biasing electric field and charge exist
Narrow zone and tip aggregation under the action of, above-mentioned atom will selective deposition in the higher hole defect of activation energy, most
End form fills up the highly corrosion resistant coating being combined at initial coating with small hole noble metal.
Step (3) specifically uses following steps：Utilize the plasma pair after the active gas of chemical property or its ionization
Surface carry out Oxidation Doping processing, control gas flow be 5sccm~30sccm, ion source voltage control for -600V~-
2000V deposits 5min~200min.
The relatively active gas of the chemical property is O2、H2、F2、N2、CH4Or SiH4。
When being metal class for initial coating, the gas with oxidisability can be passivated overlay coating defect.To first
Beginning coating is the carbons coating such as diamond-like or class graphite, is passed through the gas atom of carbon main group, original suspension key mapping and distortion
Carbon-carbon bond is occupied by other atoms, forms complete and orderly bonding structure corrosion-resistant coating.
Step (1), (2), (3) also use individually or are combined with each other, replace, reuse.
The stainless steel materials such as 304,316,316L or aluminium, titanium alloy may be used in pole plate made of the stainless steel punching press used
Or aluminium alloy.Initial coating can be corrosion resistant conductive polymer coating, amorphous with good corrosion resistance and electric conductivity
Graphite linings, or the coat of metal etc. of the passivation section in fuel cell operating conditions (pH=2~5) range, are post-processed
Initial thickness of coating be 100nm~10 μm.
Compared with prior art, the present invention has the following advantages：
(1) present invention in traditional thin film preparation process or at the end of be added high-energy ion bombardment the step of, disturb
The spontaneity of metallic crystal or amorphous in growth course estimates grain size from unit or corrosion resistance analyzes the densification of coating
Property has obtained larger raising.
(2) present invention has fully considered objective reality tiny holes defect in the coating for no matter using which kind of technique to obtain,
The small hole defect of coating surface can be selected with the noble metal in widely applied various thin film preparation processes by proposing
Property deposition, be passed through the relatively active gas particle of chemical property and initial coating in conjunction with and the method that reduces surface energy.
(3) present invention has fully considered the cost of manufacture of fuel cell, does not make on a large scale on stainless steel base surface
With noble metal coating, only microdefect hole is filled up using the corrosion resistance of noble metal to improve the corrosion-resistant of coating
Property, it is of low cost, it is readily produced.
Description of the drawings
Fig. 1 is crystal habit change schematic diagram in the metal that noble gas ion bombardment is brought in the present invention；
Fig. 2 is precious metal atom in the present invention in the fine hole selective deposition schematic diagram of coating surface；
Fig. 3 is to be passed through oxidative plasma gas to passivation of metal surfaces schematic diagram in the present invention.
In figure, 1- metal polar plates, the 2- column crystal coats of metal, 3- ion bombardment crystal grain thinning coating, 4- precious metal atoms,
5- precious metal atoms sedimentary at cavity blemish, 6- coat of metal passivation layers.
Specific implementation mode
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with technical solution of the present invention
Premised on implemented, give detailed embodiment and specific operating process, but protection scope of the present invention is not limited to
Following embodiments.
Implement basic scheme
(1) metal polar plate pre-processes：Stainless steel metal pole plate after ultrasonic cleaning is put into non-balance magnetically controlled sputter ion
It plating in furnace chamber, is evacuated to 3 × 10-5torr or hereinafter, be filled with argon gas, operating air pressure is maintained at 0.1Pa~10Pa, and bias is-
100~-600V carries out ion bombardment and removes passivation layer, and ion plating sputter clean process time is 5~180min, and sample is hung over
On runing rest, 2~4r/min of carrier velocity.
(2) thin-film material customary preparation methods, including PVD, CVD, PECVD etc. are utilized.Obtain original metal or class graphite
Conductive coating.
(3) ion source bombardment is carried out to coating, bias keeps -60~-300V, is passed through rare gas, flow is big according to furnace chamber
Small decision, 10sccm~200sccm improve ion source voltage to 600V~2000V, improve cavity temperature to 60~300 Celsius
Degree, the metal polar plate 1 handled set the column crystal coat of metal 2 to be formed through rare as shown in Figure 1, being plated on metal polar plate 1
Ion bombardment crystal grain thinning coating 3 is obtained after gas bombardment.
(4) pore defect is selectively deposited using precious metal atom, bias is maintained at -80~-200V, noble metal
Atom mostly uses Au, Pt etc., and sedimentation time is 5~180s, and for structure as shown in Fig. 2, at the pore defect of coating, noble metal is former
4 deposition of son forms precious metal atom sedimentary 5 at cavity blemish.
(5) Oxidation Doping processing is carried out to surface using the plasma after the active gas of chemical property and its ionization,
Biasing selected -60V~-200V, ion source voltage selection -600V~-2000V, gas flow is by doping concentration and cavity size
It determines, generally 5sccm~30sccm, sedimentation time is 5min~200min, as shown in figure 3, forming metal-plated in upper surface
Layer passivation layer 6.
Embodiment 1
(1) the stainless steel metal bipolar plates after ultrasonic cleaning are put into non-balance magnetically controlled sputter ion plating furnace chamber, are taken out true
Sky is filled with argon gas to 3 × 10-5torr, and operating air pressure is maintained at 4 × 10-4torr, and bias is -500V, carries out ion bombardment and goes
Except passivation layer, ion plating sputter clean process time is 30min, and sample is hung on runing rest, carrier velocity 4r/min.
(2) bias holding -100V opens Ti target currents, and electric current progressively increases to 5A by 0A, is deposited on metal polar plate surface
Ti layers, sedimentation time 15min, operating air pressure maintains 0.1Pa.
(3) pole plate after Ti layers of deposited metal is put into vacuum anode layer ion source furnace chamber, is passed through 100sccm argon gas work
For the ion source of bombardment, the voltage that improves ion source is 1800V and cavity temperature to increase ion energy, and process carries out 10min,
Operating air pressure maintains 0.15Pa.
(4) step (2)~(3) are repeated and form 200nm or so dense microcrystalline Ti bottoms, excellent anti-corrosion performance, profit three times
Corrosion electric current density is measured down to 1.5E-7A/cm with tablet corrosion pond2。
Embodiment 2
(1) the stainless steel metal bipolar plates after ultrasonic cleaning are put into non-balance magnetically controlled sputter ion plating furnace chamber, are taken out true
Sky is filled with argon gas to 3 × 10-5torr, and operating air pressure is maintained at 4 × 10-4torr, and bias is -500V, carries out ion bombardment and goes
Except passivation layer, ion plating sputter clean process time is 30min, and sample is hung on runing rest, carrier velocity 4r/min.
(2) bias holding -80V opens Cr target currents, and electric current progressively increases to 6A by 0A, is deposited on metal polar plate surface
Cr layers, sedimentation time 5min, operating air pressure maintains 0.1Pa.
(3) pole plate after Cr layers of deposited metal is put into vacuum anode layer ion source furnace chamber, is passed through 100sccm argon gas work
For the ion source of bombardment, the voltage that improves ion source is 1800V and cavity temperature to increase ion energy, and process carries out 5min,
Operating air pressure maintains 0.15Pa.
(4) step (2)~(3) are repeated and forms 100nm or so dense microcrystalline Cr bottoms three times, greatly improve Cr layers and C layers
Between binding force.
Embodiment 3
(1) the stainless steel metal bipolar plates after ultrasonic cleaning are put into non-balance magnetically controlled sputter ion plating furnace chamber, are taken out true
Sky is filled with argon gas to 3 × 10-5torr, and operating air pressure is maintained at 4 × 10-4torr, and bias is -500V, carries out ion bombardment and goes
Except passivation layer, ion plating sputter clean process time is 30min, and sample is hung on runing rest, carrier velocity 4r/min.
(2) bias holding -100V opens Ti target currents, and electric current progressively increases to 5A by 0A, is deposited on metal polar plate surface
Ti layers, sedimentation time 15min, operating air pressure maintains 0.1Pa.
(3) pole plate after Ti layers of deposited metal is put into vacuum anode layer ion source furnace chamber, is passed through 100sccm argon gas work
For the ion source of bombardment, the voltage that improves ion source is 1800V and cavity temperature to increase ion energy, and process carries out 10min,
Operating air pressure maintains 0.15Pa.
(4) step (2)~(3) are repeated and form 200nm or so dense microcrystalline Ti bottoms, excellent anti-corrosion performance, profit three times
Corrosion electric current density is measured down to 1.5E-7A/cm with tablet corrosion pond2。
(5) on the basis of Ti layers of deposition compact, surface is sputtered using Au targets, bias -200V, gold target electric current
4A, sputtering time 60s, operating air pressure maintain 0.1Pa, to Ti layers of small hole selective deposition, further increase pole plate table
The corrosion resistance and electric conductivity in face.
Embodiment 4
(1) the stainless steel metal bipolar plates after ultrasonic cleaning are put into non-balance magnetically controlled sputter ion plating furnace chamber, are taken out true
Sky is filled with argon gas to 3 × 10-5torr, and operating air pressure is maintained at 4 × 10-4torr, and bias is -500V, carries out ion bombardment and goes
Except passivation layer, ion plating sputter clean process time is 30min, and sample is hung on runing rest, carrier velocity 4r/min.
(2) bias holding -80V opens Cr target currents, and electric current progressively increases to 6A by 0A, is deposited on metal polar plate surface
Cr layers, sedimentation time 5min, operating air pressure maintains 0.1Pa.
(3) pole plate after Cr layers of deposited metal is put into vacuum anode layer ion source furnace chamber, is passed through 100sccm argon gas work
For the ion source of bombardment, the voltage that improves ion source is 1800V and cavity temperature to increase ion energy, and process carries out 5min,
Operating air pressure maintains 0.15Pa.
(4) step (2)~(3) are repeated and forms 100nm or so dense microcrystalline Cr bottoms three times, greatly improve Cr layers and C layers
Between binding force.
(5) the metal polar plate surface for obtaining fine and close Cr bottoms is deposited into amorphous amorphous graphitic carbon, bias -80V, carbon target electricity
4A is flowed, 80min is deposited, obtains the carbon-coating of thickness about 300nm, operating air pressure maintains 0.1Pa.
(6) it is passed through SiH in vacuum furnace chamber4Gas is generated by the voltage between cathode and furnace chamber and is ionized, bias -100V,
30min is handled in silane ambient, obtains the graphite coating of doping Si, and microcosmic upper bonding structure becomes complete and orderly, improves
The oxidation resistance of carbon film.
Embodiment 5
(1) use acetylene gas as carbon using the method for PECVD as substrate in the NiTa of deposition on glass 100nm
Source forms the a-C of 100nm in glass/NiTa substrates:H films, hydrogen atom percentage composition is 30%~40%.
(2) Kaufman ion source (Commonwealth Scientific, Alexandria, VA) is utilized to generate 500eV's
Argon ion operating air pressure is in 2E-4tor, bombardment time 4min.
(3) Bonding Type that film layer different-thickness is measured after bombarding finds that sp3 Bonding Types significantly reduce in film layer, film
Layer electric conductivity increases.
Embodiment 6
The densification of fuel battery metal double polar plate overlay coating and corrosion resistant method are improved, coated metal pole is set to plating
Plate is handled, and is included the following steps：
(1) plating is set coated metal polar plate to be placed in the furnace chamber of ion source, is passed through rare gas He, plating is equipped with plating
The metal polar plate of layer is placed in the furnace chamber of ion source, is passed through rare gas, and control flow is 10sccm, then controls ion source electricity
Pressure is 600V, and cavity temperature rises to 60 DEG C, and the pressure for controlling furnace chamber is 5 × 10-4Torr handles 5min, utilizes noble gas ion
Bombardment changes compactness of electroplating and crystalline structure, for the coating of initial crystal habit, is obtained after bombardment by tree-shaped brilliant, column
The equiax crystal or amorphousness that crystalline substance conversion obtains.For the coating of initial amorphousness, promote coating interatomic after bombardment
Electronics hybrid form and bond energy change, and are changed into fine and close accumulation form by loose accumulation form；
(2) utilize gold particle to the small hole defect selective deposition of coating surface, control bias is -80V, controls furnace chamber
Pressure be 5 × 10-4Torr, control argon flow amount are 10sccm, and control noble metal target material power density is 3W/cm2, when deposition
Between be 5s, due to the excellent corrosion resistance of gold element, biasing electric field and charge under the action of narrow zone and tip are assembled,
Above-mentioned atom will selective deposition in the higher hole defect of activation energy, ultimately form initial coating and the expensive gold of small hole
Category fills up the highly corrosion resistant coating being combined；
(3) O is utilized2To surface carry out Oxidation Doping processing, control gas flow be 5sccm, ion source voltage control be-
600V deposits 5min, by be passed through the relatively active gas of chemical property and initial coating in conjunction with by reduce surface energy, completion pair
The processing of battery metal bi-polar plate overlay coating, the gas with oxidisability can be passivated overlay coating defect.To initial
Coating is the carbons coating such as diamond-like or class graphite, is passed through the carbon-of the gas atom of carbon main group, original suspension key mapping and distortion
Carbon key is occupied by other atoms, forms complete and orderly bonding structure corrosion-resistant coating.
Embodiment 7
The densification of fuel battery metal double polar plate overlay coating and corrosion resistant method are improved, coated metal pole is set to plating
Plate is handled, and plating, which is mainly set coated metal polar plate, is placed in the furnace chamber of ion source, is passed through rare gas Ar, will plate
If coated metal polar plate is placed in the furnace chamber of ion source, it is passed through rare gas, control flow is 200sccm, is then controlled
Ion source voltage is 3000V, and cavity temperature rises to 300 DEG C, and the pressure for controlling furnace chamber is 8 × 10-3Torr handles 200min.
In the present embodiment, the metallic plate used is using pole plate made of 304 stainless steel punching presses.Initial coating can be corrosion resistant
The conductive polymer coating of erosion, thickness 100nm.
Embodiment 8
The densification of fuel battery metal double polar plate overlay coating and corrosion resistant method are improved, coated metal pole is set to plating
Plate is handled, and is included the following steps：
Using platinum particles to the small hole defect selective deposition of coating surface, control bias is -200V, controls furnace chamber
Pressure is 8 × 10-3Torr, control argon flow amount are 60sccm, and control noble metal target material power density is 30W/cm2, when deposition
Between be 5s, due to the excellent corrosion resistance of platinum element, biasing electric field and charge under the action of narrow zone and tip are assembled,
Above-mentioned atom will selective deposition in the higher hole defect of activation energy, ultimately form initial coating and the expensive gold of small hole
Category fills up the highly corrosion resistant coating being combined；
(3) CH is utilized4Oxidation Doping processing is carried out to surface, control gas flow is 30sccm, ion source voltage control
For -2000V, deposit 200min, by be passed through the relatively active gas of chemical property and initial coating in conjunction with by reduce surface energy,
The processing to battery metal bi-polar plate overlay coating is completed, the gas with oxidisability can be passivated overlay coating defect.
It is the carbons coating such as diamond-like or class graphite to initial coating, is passed through the gas atom of carbon main group, original suspension key mapping and torsion
Bent carbon-carbon bond is occupied by other atoms, forms complete and orderly bonding structure corrosion-resistant coating.
In the present embodiment, the metallic plate used is using pole plate made of 316 stainless steel punching presses.Initial coating can be corrosion resistant
The conductive polymer coating of erosion, 10 μm of thickness.
Claims (3)
1. improving the densification of fuel battery metal double polar plate overlay coating and corrosion resistant method, which is characterized in that this method is to plating
If coated metal polar plate is handled, include the following steps：
(1) it utilizes noble gas ion bombardment to change compactness of electroplating and crystalline structure, specifically uses following steps：Plating is equipped with
The metal polar plate of coating is placed in the furnace chamber of ion source, is passed through rare gas, and control flow is 10sccm~200sccm, then
Control ion source voltage is 600V~3000V, and cavity temperature rises to 60~300 DEG C, and the pressure for controlling furnace chamber is 5 × 10-4~8 ×
10-3Torr handles 5min~200min；
(2) it is -80~-200V, stove to coating surface small hole defect selective deposition control bias to utilize noble metal
The pressure of chamber is 5 × 10-4~8 × 10-3Torr, argon flow amount are 10sccm~60sccm, and noble metal target material power density is 3
~30W/cm2, sedimentation time is 5~180s, and the noble metal is gold, silver or platinum group metal；
(3) be passed through the relatively active gas of chemical property and initial coating in conjunction with and reduce surface energy, complete double to battery metal
The processing of polar board surface coating specifically uses following steps：Utilize the plasma after the active gas of chemical property or its ionization
Body to surface carry out Oxidation Doping processing, control gas flow be 5sccm~30sccm, ion source voltage control for -600V~-
2000V, deposits 5min~200min, and the relatively active gas of the chemical property is O2、H2、F2、CH4Or SiH4。
2. raising fuel battery metal double polar plate overlay coating densification according to claim 1 and corrosion resistant method,
It is characterized in that, the rare gas is He, Ne, Ar, Kr or Xe.
3. raising fuel battery metal double polar plate overlay coating densification according to claim 1 and corrosion resistant method,
It is characterized in that, ion source is Electron cyclotron resonance ion source, Kaufman ion source or anode layer ion source.
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