CN102879405A - 紧凑型的检测台以及应用该检测台的检测方法 - Google Patents
紧凑型的检测台以及应用该检测台的检测方法 Download PDFInfo
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- CN102879405A CN102879405A CN2012103765646A CN201210376564A CN102879405A CN 102879405 A CN102879405 A CN 102879405A CN 2012103765646 A CN2012103765646 A CN 2012103765646A CN 201210376564 A CN201210376564 A CN 201210376564A CN 102879405 A CN102879405 A CN 102879405A
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104076039A (zh) * | 2014-03-28 | 2014-10-01 | 合波光电通信科技有限公司 | 滤光片外观缺陷自动检测方法 |
CN111562262A (zh) * | 2020-05-27 | 2020-08-21 | 江苏金恒信息科技股份有限公司 | 一种合金分析系统及其复检方法 |
CN112098670A (zh) * | 2019-06-17 | 2020-12-18 | 深圳迈瑞生物医疗电子股份有限公司 | 样本回收方法、样本分析系统及计算机存储介质 |
CN113469472A (zh) * | 2021-09-06 | 2021-10-01 | 中导光电设备股份有限公司 | 一种多显微镜定点拍照路径优化方法 |
CN113673782A (zh) * | 2021-09-06 | 2021-11-19 | 中导光电设备股份有限公司 | 多显微镜扫描拍照路径优化方法和装置 |
Citations (5)
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US20040104139A1 (en) * | 2002-11-29 | 2004-06-03 | Takenori Yoshizawa | Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate |
CN1582393A (zh) * | 2001-11-05 | 2005-02-16 | 奥林巴斯株式会社 | 基板检查装置 |
CN102331429A (zh) * | 2010-07-13 | 2012-01-25 | 奥林巴斯株式会社 | 基板检查装置以及基板检查方法 |
EP2482059A2 (en) * | 2011-02-01 | 2012-08-01 | Kuo Cooper S. K. | Apparatus for optical inspection |
CN202854051U (zh) * | 2012-09-29 | 2013-04-03 | 肇庆中导光电设备有限公司 | 检测台 |
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2012
- 2012-09-29 CN CN201210376564.6A patent/CN102879405B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1582393A (zh) * | 2001-11-05 | 2005-02-16 | 奥林巴斯株式会社 | 基板检查装置 |
US20040104139A1 (en) * | 2002-11-29 | 2004-06-03 | Takenori Yoshizawa | Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate |
CN102331429A (zh) * | 2010-07-13 | 2012-01-25 | 奥林巴斯株式会社 | 基板检查装置以及基板检查方法 |
EP2482059A2 (en) * | 2011-02-01 | 2012-08-01 | Kuo Cooper S. K. | Apparatus for optical inspection |
KR20120089176A (ko) * | 2011-02-01 | 2012-08-09 | 쿠퍼 에스 케이 쿠오 | 광학 검사용 장치 |
CN202854051U (zh) * | 2012-09-29 | 2013-04-03 | 肇庆中导光电设备有限公司 | 检测台 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104076039A (zh) * | 2014-03-28 | 2014-10-01 | 合波光电通信科技有限公司 | 滤光片外观缺陷自动检测方法 |
CN104076039B (zh) * | 2014-03-28 | 2017-05-31 | 合波光电通信科技有限公司 | 滤光片外观缺陷自动检测方法 |
CN112098670A (zh) * | 2019-06-17 | 2020-12-18 | 深圳迈瑞生物医疗电子股份有限公司 | 样本回收方法、样本分析系统及计算机存储介质 |
CN111562262A (zh) * | 2020-05-27 | 2020-08-21 | 江苏金恒信息科技股份有限公司 | 一种合金分析系统及其复检方法 |
CN113469472A (zh) * | 2021-09-06 | 2021-10-01 | 中导光电设备股份有限公司 | 一种多显微镜定点拍照路径优化方法 |
CN113673782A (zh) * | 2021-09-06 | 2021-11-19 | 中导光电设备股份有限公司 | 多显微镜扫描拍照路径优化方法和装置 |
CN113469472B (zh) * | 2021-09-06 | 2022-02-22 | 中导光电设备股份有限公司 | 一种多显微镜定点拍照路径优化方法 |
CN113673782B (zh) * | 2021-09-06 | 2024-02-23 | 中导光电设备股份有限公司 | 多显微镜扫描拍照路径优化方法和装置 |
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Address after: 526238 first floor, two storey and first floor of B building, C industrial complex, Zhaoqing hi tech Zone, Guangdong Patentee after: ZHONGDAO OPTOELECTRONIC EQUIPMENT CO.,LTD. Address before: 526238 first floor, two storey and first floor of B building, C industrial complex, Zhaoqing hi tech Zone, Guangdong Patentee before: In Photoelectric Equipment Co.,Ltd. |
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