CN102848303B - 半导体晶片的加工方法、加工装置以及半导体晶片 - Google Patents
半导体晶片的加工方法、加工装置以及半导体晶片 Download PDFInfo
- Publication number
- CN102848303B CN102848303B CN201210069407.0A CN201210069407A CN102848303B CN 102848303 B CN102848303 B CN 102848303B CN 201210069407 A CN201210069407 A CN 201210069407A CN 102848303 B CN102848303 B CN 102848303B
- Authority
- CN
- China
- Prior art keywords
- semiconductor wafer
- emery wheel
- processing method
- grinding
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 101
- 238000003672 processing method Methods 0.000 title claims abstract description 27
- 235000012431 wafers Nutrition 0.000 claims description 86
- 229910001651 emery Inorganic materials 0.000 claims description 75
- 230000003746 surface roughness Effects 0.000 claims description 17
- 238000005299 abrasion Methods 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 14
- 239000000758 substrate Substances 0.000 abstract 1
- 238000005336 cracking Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000007670 refining Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003442 weekly effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP146049/2011 | 2011-06-30 | ||
JP2011146049A JP2013012690A (ja) | 2011-06-30 | 2011-06-30 | 半導体ウエハの加工方法及び加工装置、並びに、半導体ウエハ |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102848303A CN102848303A (zh) | 2013-01-02 |
CN102848303B true CN102848303B (zh) | 2015-07-15 |
Family
ID=47389760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210069407.0A Active CN102848303B (zh) | 2011-06-30 | 2012-03-15 | 半导体晶片的加工方法、加工装置以及半导体晶片 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8790995B2 (zh) |
JP (1) | JP2013012690A (zh) |
CN (1) | CN102848303B (zh) |
TW (1) | TWI498959B (zh) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6194210B2 (ja) * | 2013-09-05 | 2017-09-06 | 株式会社ディスコ | 研削ホイール及びウエーハの加工方法 |
JP6159639B2 (ja) * | 2013-10-08 | 2017-07-05 | 株式会社ディスコ | 研削装置 |
US9589880B2 (en) * | 2013-10-09 | 2017-03-07 | Infineon Technologies Ag | Method for processing a wafer and wafer structure |
WO2015079489A1 (ja) * | 2013-11-26 | 2015-06-04 | 三菱電機株式会社 | 半導体装置の製造方法 |
US9984888B2 (en) * | 2014-08-13 | 2018-05-29 | Newport Fab, Llc | Method of fabricating a semiconductor wafer including a through substrate via (TSV) and a stepped support ring on a back side of the wafer |
DE112014007049B4 (de) * | 2014-10-10 | 2024-08-22 | Rohm Co., Ltd. | Verfahren zur Fertigung einer Halbleitervorrichtung |
WO2016207940A1 (ja) * | 2015-06-22 | 2016-12-29 | オリンパス株式会社 | 内視鏡用撮像装置 |
US10147645B2 (en) * | 2015-09-22 | 2018-12-04 | Nxp Usa, Inc. | Wafer level chip scale package with encapsulant |
US9905525B1 (en) * | 2016-08-18 | 2018-02-27 | Semiconductor Components Industries, Llc | Semiconductor wafer and method of ball drop on thin wafer with edge support ring |
JP6723892B2 (ja) * | 2016-10-03 | 2020-07-15 | 株式会社ディスコ | ウエーハの加工方法 |
KR102594342B1 (ko) * | 2018-03-12 | 2023-10-26 | 도쿄엘렉트론가부시키가이샤 | 기판의 휨 수정 방법, 컴퓨터 기억 매체 및 기판 휨 수정 장치 |
JP7089136B2 (ja) * | 2018-03-22 | 2022-06-22 | 株式会社デンソー | ウエーハの研削方法 |
CN111195852B (zh) * | 2018-11-19 | 2021-11-23 | 江苏鲁汶仪器有限公司 | 平行于器件侧壁方向抛光密集器件侧壁的装置及方法 |
CN110010458B (zh) * | 2019-04-01 | 2021-08-27 | 徐州鑫晶半导体科技有限公司 | 控制半导体晶圆片表面形貌的方法和半导体晶片 |
US20210013176A1 (en) * | 2019-07-09 | 2021-01-14 | Semiconductor Components Industries, Llc | Pre-stacking mechanical strength enhancement of power device structures |
JP2022133007A (ja) * | 2021-03-01 | 2022-09-13 | 株式会社ディスコ | 被加工物の研削方法 |
TWI818416B (zh) * | 2021-03-24 | 2023-10-11 | 環球晶圓股份有限公司 | 晶圓 |
US11837632B2 (en) | 2021-03-24 | 2023-12-05 | Globalwafers Co., Ltd. | Wafer |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1700424A (zh) * | 2004-05-20 | 2005-11-23 | 株式会社瑞萨科技 | 半导体器件的制造方法 |
TW200848214A (en) * | 2007-06-05 | 2008-12-16 | Asahi Diamond Ind | Cup-like grinding stone for grinding rear surface of semiconductor wafer and grinding method thereof |
CN101673679A (zh) * | 2008-09-08 | 2010-03-17 | 半导体元件工业有限责任公司 | 薄型半导体晶片和减薄半导体晶片的方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6162702A (en) | 1999-06-17 | 2000-12-19 | Intersil Corporation | Self-supported ultra thin silicon wafer process |
SG126885A1 (en) | 2005-04-27 | 2006-11-29 | Disco Corp | Semiconductor wafer and processing method for same |
JP5390740B2 (ja) | 2005-04-27 | 2014-01-15 | 株式会社ディスコ | ウェーハの加工方法 |
JP4791774B2 (ja) | 2005-07-25 | 2011-10-12 | 株式会社ディスコ | ウェーハの加工方法及び研削装置 |
JP5081643B2 (ja) * | 2008-01-23 | 2012-11-28 | 株式会社ディスコ | ウエーハの加工方法 |
JP5338490B2 (ja) | 2009-06-05 | 2013-11-13 | 三菱電機株式会社 | 半導体装置の製造方法 |
-
2011
- 2011-06-30 JP JP2011146049A patent/JP2013012690A/ja not_active Withdrawn
-
2012
- 2012-03-09 TW TW101108160A patent/TWI498959B/zh active
- 2012-03-15 CN CN201210069407.0A patent/CN102848303B/zh active Active
- 2012-03-16 US US13/422,470 patent/US8790995B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1700424A (zh) * | 2004-05-20 | 2005-11-23 | 株式会社瑞萨科技 | 半导体器件的制造方法 |
TW200848214A (en) * | 2007-06-05 | 2008-12-16 | Asahi Diamond Ind | Cup-like grinding stone for grinding rear surface of semiconductor wafer and grinding method thereof |
CN101673679A (zh) * | 2008-09-08 | 2010-03-17 | 半导体元件工业有限责任公司 | 薄型半导体晶片和减薄半导体晶片的方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102848303A (zh) | 2013-01-02 |
US8790995B2 (en) | 2014-07-29 |
TWI498959B (zh) | 2015-09-01 |
TW201301376A (zh) | 2013-01-01 |
US20130001766A1 (en) | 2013-01-03 |
JP2013012690A (ja) | 2013-01-17 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170802 Address after: Tokyo, Japan Patentee after: TOSHIBA MEMORY Corp. Address before: Tokyo, Japan Patentee before: Toshiba Corp. |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Patentee after: Kaixia Co.,Ltd. Address before: Tokyo, Japan Patentee before: TOSHIBA MEMORY Corp. Address after: Tokyo, Japan Patentee after: TOSHIBA MEMORY Corp. Address before: Tokyo, Japan Patentee before: Japanese businessman Panjaya Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220113 Address after: Tokyo, Japan Patentee after: Japanese businessman Panjaya Co.,Ltd. Address before: Tokyo, Japan Patentee before: TOSHIBA MEMORY Corp. |