CN102794828B - 制备筒状石墨加热器用固定棒及加热器的制造方法 - Google Patents
制备筒状石墨加热器用固定棒及加热器的制造方法 Download PDFInfo
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CN102794828B true CN102794828B (zh) | 2016-03-02 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN201933199U (zh) * | 2010-12-31 | 2011-08-17 | 乐山凯亚达光电科技有限公司 | 石墨加热器 |
CN202241632U (zh) * | 2011-09-21 | 2012-05-30 | 烟台美尔森石墨有限公司 | 石墨制品加工用环形掏刀装置 |
CN202781475U (zh) * | 2012-08-27 | 2013-03-13 | 北京博宇半导体工艺器皿技术有限公司 | 制备筒状石墨加热器用固定棒 |
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JPS6428294A (en) * | 1987-07-23 | 1989-01-30 | Ibiden Co Ltd | Graphic crucible for pulling up silicon single crystal |
JP2005207474A (ja) * | 2004-01-21 | 2005-08-04 | Nichirin Co Ltd | ブッシュ |
DE202005005579U1 (de) * | 2005-04-07 | 2006-08-17 | Hettich-Heinze Gmbh & Co. Kg | Verbindungseinsatz |
TWI399354B (zh) * | 2007-06-07 | 2013-06-21 | Ibiden Co Ltd | 石墨材料及石墨材料之製造方法 |
ATE496227T1 (de) * | 2007-11-30 | 2011-02-15 | Dilo Kg Maschf Oskar | Hohlwalze mit walzenboden |
TWI420002B (zh) * | 2009-12-11 | 2013-12-21 | Japan Super Quartz Corp | 氧化矽玻璃坩堝 |
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CN201933199U (zh) * | 2010-12-31 | 2011-08-17 | 乐山凯亚达光电科技有限公司 | 石墨加热器 |
CN202241632U (zh) * | 2011-09-21 | 2012-05-30 | 烟台美尔森石墨有限公司 | 石墨制品加工用环形掏刀装置 |
CN202781475U (zh) * | 2012-08-27 | 2013-03-13 | 北京博宇半导体工艺器皿技术有限公司 | 制备筒状石墨加热器用固定棒 |
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Effective date of registration: 20190529 Address after: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Co-patentee after: Bo Yu (Chaoyang) semiconductor technology Co., Ltd. Patentee after: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. Co-patentee after: Bo Yu (Tianjin) semiconductor materials Co., Ltd. Address before: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Patentee before: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. |
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