CN102777683B - 新型超高真空微调阀 - Google Patents

新型超高真空微调阀 Download PDF

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CN102777683B
CN102777683B CN 201210243774 CN201210243774A CN102777683B CN 102777683 B CN102777683 B CN 102777683B CN 201210243774 CN201210243774 CN 201210243774 CN 201210243774 A CN201210243774 A CN 201210243774A CN 102777683 B CN102777683 B CN 102777683B
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valve
screw rod
rod
fine adjustment
ultrahigh vacuum
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CN102777683A (zh
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葛明
罗进军
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Sichuan Wuhe Technology Co Ltd
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Abstract

一种新型超高真空微调阀，由螺杆微调机构及阀座、阀塞构成，螺杆微调机构用超高真空的密封方式安装在阀座上。阀针与无氧铜制成的锥孔密封，其螺杆微调机构由压紧螺母、小锥套、阀杆、差动螺杆、阀锥套、阀盖、波纹管、阀针、导向键组成，阀盖安装在阀座上，通过压紧无氧铜垫及不锈钢波纹管实现密封，旋转手柄固定于差动螺杆，阀杆与阀针连为一体，阀盖上设有内、外螺纹，螺纹处开有破口，通过压紧螺母6推动大锥套挤压阀盖的锥面达到消除与差动螺杆的螺纹间隙，旋转压紧螺母2即消除差动螺杆与阀杆的螺纹间隙。本发明设计合理，实用性强，采用了螺杆微调实现了超高真空密封。

Description

新型超高真空微调阀
技术领域本发明涉及超高真空调节设备，具体是一种新型超高真空微调阀。 
背景技术在超真空的应用领域，常需要精确的充入微量气体的微调设施，目前此类设施有两种阀，一是阀门内采用平面密封小孔，密封面材料用人造宝石，采用螺纹杠杆微调密封面的间隙精确控制气体流量。其缺点是，人工宝石成本高，加工难度大，且易碎；二是阀门内采用锥孔密封，用螺纹的升降调节锥针与锥孔的间隙，以达到控制气体流量的目的。其缺点是，螺纹传动有间隙影响调节的精度，更重要的是螺纹本身就决定了不易实现精确微调。 
发明内容
本发明的目的是解决上述难题，提供一种既能耐必要的烘烤又能实现精确微调流量且满足超高真空密封的新型超高真空微调阀。 
发明的技术方案是这样实现的： 
一种新型超高真空微调阀，其特征在于由螺杆微调机构及阀座、阀塞构成，螺杆微调机构用超高真空的密封方式安装在阀座上。阀针与无氧铜制成的锥孔密封，其螺杆微调机构由压紧螺母、小锥套、阀杆、差动螺杆、阀锥套、阀盖、波纹管、阀针、导向键组成，阀盖安装在阀座上，通过压紧无氧铜垫及不锈钢波纹管实现密封，旋转手柄固定于差动螺杆，阀杆与阀针连为一体，阀盖上设有内、外螺纹，螺纹处开有破口，通过压紧螺母6推动大锥套挤压阀盖的锥面达到消除与差动螺杆的螺纹间隙，旋转压紧螺母2即消除差动螺杆与阀杆的螺纹间隙。 
本发明设计合理，实用性强，采用了螺杆微调实现了超高真空密封。具体讲通过旋转压紧螺母6，推动大锥套挤压阀盖的锥面达到消除与差动螺杆的螺纹间隙，同理，旋转压紧螺母2亦消除差动螺杆与阀杆的螺纹间隙。 
附图说明图1是本发明的结构示意图。图中1旋转手柄；2压紧螺母；3小锥套；4阀杆；5差动螺杆；6压紧螺母；7大锥套；8阀盖；9波纹管；10阀针；11阀塞’12阀座；13导向键. 
具体实施方式
下面结合附图对本发明进一步说明。 
如图所示，新型超高真空微调阀，由螺杆微调机构及阀座12、阀塞11构成，螺杆微调机构用超高真空的密封方式安装在阀座12上。阀针10与无氧铜制成的锥孔密封，其螺杆微调机构由压紧螺母(2、6)、小锥套3、阀杆4、差动螺杆5、大锥套7、阀盖8、波纹管9、阀针10、导向键13组成，阀盖8安装在阀座12上，通过压紧无氧铜垫及不锈钢波纹管实现密封，旋转手柄固定于差动螺杆，阀杆4与 阀针10连为一体，阀盖8上设有内、外螺纹，螺纹处开有破口，通过压紧螺母6推动大锥套7挤压阀盖8的锥面达到消除与差动螺杆5的螺纹间隙，旋转压紧螺母2即消除差动螺杆5与阀杆4的螺纹间隙。 
实施例1根据实验证明旋动手柄1转动一圈，差动螺杆5也随之转动一圈，差动螺杆5与阀盖8相关的外螺纹螺距为1.5mm，差动螺杆5与阀杆4相关的内螺纹螺距为1.25mm，如果差动螺杆5朝开启方向旋转一圈，相对于阀盖8直线移动1.5mm，而阀杆4相对于差动螺杆5向相反方向移动1.25mm，那么1.5mm-1.25mm＝0.25mm，即旋转手柄1每转动一圈，阀针10移动0.25mm(旋转手柄1圆周刻25等分的线条，每转动一格就移动0.01mm，从而实现了精确微调)。 

Claims (1)

1.一种新型超高真空微调阀，其特征在于由螺杆微调机构及阀座(12)、阀塞(11)构成，螺杆微调机构用超高真空的密封方式安装在阀座(12)上，阀针(10)与无氧铜制成的锥孔密封，其螺杆微调机构由第一压紧螺母(2)和第二压紧螺母(6)、小锥套(3)、阀杆(4)、差动螺杆(5)、大锥套(7)、阀盖(8)、波纹管(9)、阀针(10)、导向键(13)组成，阀盖(8)安装在阀座(12)上，通过压紧无氧铜垫及不锈钢波纹管实现密封，旋转手柄固定于差动螺杆(5)，阀杆(4)与阀针(10)连为一体，阀盖(8)上设有内、外螺纹，螺纹处开有破口，通过第二压紧螺母(6)推动大锥套(7)挤压阀盖(8)的锥面达到消除与差动螺杆(5)的螺纹间隙，旋转第一压紧螺母(2)即消除差动螺杆(5)与阀杆(4)的螺纹间隙。 
CN 201210243774 2012-07-16 2012-07-16 新型超高真空微调阀 Active CN102777683B (zh)

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CN103574067A (zh) * 2013-11-12 2014-02-12 无锡康力电子有限公司 镀膜玻璃抽真空密封装置
CN105031845B (zh) * 2015-07-14 2017-12-15 山东金博环保科技有限公司 一种管式阀针针形瓶阀
CN106439044A (zh) * 2016-12-08 2017-02-22 杜汝镒 特种差动螺旋升降式全塑料阀门

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DE1824547U (de) * 1959-11-14 1961-01-05 Centre Nat Rech Scient Ventil fuer hochvakuumanlagen.
US3923252A (en) * 1974-12-09 1975-12-02 Automation Dev And Engineering Spraying apparatus
CN87203613U (zh) * 1987-03-12 1987-12-02 张立子 微调刀夹
CN2047359U (zh) * 1989-04-24 1989-11-08 付义培 多功能长度千分尺
CN201588952U (zh) * 2009-12-24 2010-09-22 川北真空科技(北京)有限公司 微调阀用阀芯组件
CN201677102U (zh) * 2010-08-18 2010-12-22 张一平 锚杆整形设备和整形板牙组件

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1824547U (de) * 1959-11-14 1961-01-05 Centre Nat Rech Scient Ventil fuer hochvakuumanlagen.
US3923252A (en) * 1974-12-09 1975-12-02 Automation Dev And Engineering Spraying apparatus
CN87203613U (zh) * 1987-03-12 1987-12-02 张立子 微调刀夹
CN2047359U (zh) * 1989-04-24 1989-11-08 付义培 多功能长度千分尺
CN201588952U (zh) * 2009-12-24 2010-09-22 川北真空科技(北京)有限公司 微调阀用阀芯组件
CN201677102U (zh) * 2010-08-18 2010-12-22 张一平 锚杆整形设备和整形板牙组件

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