CN102751158A - 处理装置 - Google Patents
处理装置 Download PDFInfo
- Publication number
- CN102751158A CN102751158A CN2012102078181A CN201210207818A CN102751158A CN 102751158 A CN102751158 A CN 102751158A CN 2012102078181 A CN2012102078181 A CN 2012102078181A CN 201210207818 A CN201210207818 A CN 201210207818A CN 102751158 A CN102751158 A CN 102751158A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- load locking
- locking room
- processing unit
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 title claims abstract description 170
- 238000000034 method Methods 0.000 claims description 166
- 230000008569 process Effects 0.000 claims description 150
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- 230000008676 import Effects 0.000 claims description 73
- 230000007246 mechanism Effects 0.000 claims description 14
- 238000009832 plasma treatment Methods 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 238000003672 processing method Methods 0.000 abstract description 10
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- 241000196324 Embryophyta Species 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Abstract
Description
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008078764A JP5330721B2 (ja) | 2007-10-23 | 2008-03-25 | 処理装置および処理方法 |
JP2008-078764 | 2008-03-25 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009801190528A Division CN102046840B (zh) | 2008-03-25 | 2009-03-24 | 处理装置及处理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102751158A true CN102751158A (zh) | 2012-10-24 |
CN102751158B CN102751158B (zh) | 2015-05-20 |
Family
ID=41114878
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009801190528A Expired - Fee Related CN102046840B (zh) | 2008-03-25 | 2009-03-24 | 处理装置及处理方法 |
CN201210207818.1A Expired - Fee Related CN102751158B (zh) | 2008-03-25 | 2009-03-24 | 处理装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009801190528A Expired - Fee Related CN102046840B (zh) | 2008-03-25 | 2009-03-24 | 处理装置及处理方法 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2261391B1 (zh) |
KR (1) | KR101669685B1 (zh) |
CN (2) | CN102046840B (zh) |
WO (1) | WO2009119580A1 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8672603B2 (en) | 2009-12-10 | 2014-03-18 | Orbotech LT Solar, LLC. | Auto-sequencing inline processing apparatus |
US8998552B2 (en) | 2007-10-23 | 2015-04-07 | Orbotech LT Solar, LLC. | Processing apparatus and processing method |
CN104555514A (zh) * | 2014-12-31 | 2015-04-29 | 东莞市科立电子设备有限公司 | 一种轨道可调式双工位多功能在线式分板机 |
US9462921B2 (en) | 2011-05-24 | 2016-10-11 | Orbotech LT Solar, LLC. | Broken wafer recovery system |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011155156A (ja) * | 2010-01-27 | 2011-08-11 | Muratec Automation Co Ltd | 物品搬送装置 |
JP5765815B2 (ja) * | 2012-01-12 | 2015-08-19 | 大成建設株式会社 | 搬送システム |
KR101853105B1 (ko) | 2012-09-10 | 2018-04-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 이송 디바이스 및 기판들을 이동시키는 방법 |
KR102076516B1 (ko) * | 2012-09-10 | 2020-02-12 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 프로세싱 시스템 및 기판들을 프로세싱하는 방법 |
JP7350029B2 (ja) * | 2021-06-15 | 2023-09-25 | キヤノントッキ株式会社 | 搬送装置及び成膜装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2938160B2 (ja) * | 1990-07-20 | 1999-08-23 | 東京エレクトロン株式会社 | 真空処理装置 |
US5795399A (en) * | 1994-06-30 | 1998-08-18 | Kabushiki Kaisha Toshiba | Semiconductor device manufacturing apparatus, method for removing reaction product, and method of suppressing deposition of reaction product |
JP3165348B2 (ja) * | 1995-05-18 | 2001-05-14 | ワイエイシイ株式会社 | プラズマ処理装置およびその運転方法 |
JP4204128B2 (ja) | 1999-01-18 | 2009-01-07 | 東京応化工業株式会社 | 基板搬送装置及び基板搬送方法 |
US6558509B2 (en) * | 1999-11-30 | 2003-05-06 | Applied Materials, Inc. | Dual wafer load lock |
JP2002203885A (ja) * | 2000-12-27 | 2002-07-19 | Anelva Corp | インターバック型基板処理装置 |
JP2002270880A (ja) | 2001-03-14 | 2002-09-20 | Shin Etsu Handotai Co Ltd | 太陽電池モジュール及びその製造方法 |
US20030003767A1 (en) * | 2001-06-29 | 2003-01-02 | Plasmion Corporation | High throughput hybrid deposition system and method using the same |
JP4517595B2 (ja) * | 2003-06-26 | 2010-08-04 | 東京エレクトロン株式会社 | 被処理体の搬送方法 |
JP2006100722A (ja) * | 2004-09-30 | 2006-04-13 | Tokyo Electron Ltd | 基板処理システム |
-
2009
- 2009-03-24 CN CN2009801190528A patent/CN102046840B/zh not_active Expired - Fee Related
- 2009-03-24 WO PCT/JP2009/055818 patent/WO2009119580A1/ja active Application Filing
- 2009-03-24 CN CN201210207818.1A patent/CN102751158B/zh not_active Expired - Fee Related
- 2009-03-24 EP EP09725876.8A patent/EP2261391B1/en not_active Not-in-force
- 2009-03-24 KR KR1020107023727A patent/KR101669685B1/ko active IP Right Grant
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8998552B2 (en) | 2007-10-23 | 2015-04-07 | Orbotech LT Solar, LLC. | Processing apparatus and processing method |
US8672603B2 (en) | 2009-12-10 | 2014-03-18 | Orbotech LT Solar, LLC. | Auto-sequencing inline processing apparatus |
US9287152B2 (en) | 2009-12-10 | 2016-03-15 | Orbotech LT Solar, LLC. | Auto-sequencing multi-directional inline processing method |
US9462921B2 (en) | 2011-05-24 | 2016-10-11 | Orbotech LT Solar, LLC. | Broken wafer recovery system |
CN104555514A (zh) * | 2014-12-31 | 2015-04-29 | 东莞市科立电子设备有限公司 | 一种轨道可调式双工位多功能在线式分板机 |
CN104555514B (zh) * | 2014-12-31 | 2018-05-15 | 东莞市科立电子设备有限公司 | 一种轨道可调式双工位多功能在线式分板机 |
Also Published As
Publication number | Publication date |
---|---|
CN102046840B (zh) | 2012-08-01 |
CN102046840A (zh) | 2011-05-04 |
CN102751158B (zh) | 2015-05-20 |
WO2009119580A1 (ja) | 2009-10-01 |
EP2261391B1 (en) | 2017-11-15 |
EP2261391A1 (en) | 2010-12-15 |
KR20100134062A (ko) | 2010-12-22 |
KR101669685B1 (ko) | 2016-10-27 |
EP2261391A4 (en) | 2013-01-23 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220629 Address after: Israel Masao City Patentee after: ORBOTECH Ltd. Address before: California, USA Patentee before: Orbotech LT Solar, LLC |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220913 Address after: California, USA Patentee after: KLA-TENCOR Corp. Address before: California, USA Patentee before: Orbotech LT Solar LLC Effective date of registration: 20220913 Address after: California, USA Patentee after: Orbotech LT Solar LLC Address before: Israel Masao City Patentee before: ORBOTECH Ltd. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 |
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CF01 | Termination of patent right due to non-payment of annual fee |