CN102732835B - 一种用于真空镀膜设备的双气源充气系统及其充气方法 - Google Patents
一种用于真空镀膜设备的双气源充气系统及其充气方法 Download PDFInfo
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CN104846347B (zh) * | 2015-04-15 | 2017-03-22 | 沈阳拓荆科技有限公司 | 双层式负载腔室的回填及抽气结构 |
CN105109734A (zh) * | 2015-09-07 | 2015-12-02 | 无锡市麦杰机械工程有限公司 | 真空包装机的真空室泄压缓冲装置 |
CN105819702A (zh) * | 2016-04-27 | 2016-08-03 | 芜湖真空科技有限公司 | 放气系统 |
CN107841725A (zh) * | 2017-12-13 | 2018-03-27 | 中国建材国际工程集团有限公司 | 一种用于生产太阳能镀膜玻璃的抽真空系统及其作业方法 |
CN109355636A (zh) * | 2018-12-15 | 2019-02-19 | 湖南玉丰真空科学技术有限公司 | 一种连续镀膜生产线进出口室充气装置 |
CN114850001A (zh) * | 2022-03-17 | 2022-08-05 | 惠州市联建光电有限公司 | Led显示屏中led显示模块的镀膜方法 |
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CN201046985Y (zh) * | 2006-11-24 | 2008-04-16 | 株洲硬质合金集团有限公司 | 自动充气装置 |
CN201910396U (zh) * | 2010-12-27 | 2011-07-27 | 北京有色金属研究总院 | 辉光放电离子源装置用供气系统 |
CN102220565B (zh) * | 2011-06-13 | 2012-08-29 | 南开大学 | 一种用于硅薄膜电池陷光结构研究的化学气相沉积设备 |
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Application publication date: 20121017 Assignee: CNBM OPTOELECTRONIC EQUIPMENT (TAICANG) CO.,LTD. Assignor: China Triumph International Engineering Co.,Ltd. Contract record no.: 2015310000054 Denomination of invention: Dual-gas-supply inflation system applied to vacuum coating equipment and inflation method of system Granted publication date: 20130918 License type: Exclusive License Record date: 20150414 |
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Assignee: CNBM OPTOELECTRONIC EQUIPMENT (TAICANG) CO.,LTD. Assignor: China Triumph International Engineering Co.,Ltd. Contract record no.: 2015310000054 Date of cancellation: 20190219 |
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Application publication date: 20121017 Assignee: CTF Solar Co.,Ltd. Assignor: China Triumph International Engineering Co.,Ltd. Contract record no.: X2022990000660 Denomination of invention: A dual air source inflation system for vacuum coating equipment and its inflation method Granted publication date: 20130918 License type: Common License Record date: 20220926 |